Extracting device for dust-free clothes detection sample

Abstract

The utility model provides an extraction device for a dust-free clothes detection sample. The extraction device comprises a sampling chamber, cutting equipment, a cutting fixing disc, a sample disc, a sampling bottle, a weight sensor, a water outlet pipeline, a control valve and a control platform, the sampling chamber is provided with a cavity and a door capable of being opened and closed; the cutting equipment, the cutting fixing disc, the sample disc, the sampling bottle, the weight sensor and the water outlet pipeline are all arranged in the cavity, and the control platform is arranged outside the cavity; the cutting equipment, the weight sensor and the control valve are respectively connected with the control platform; the sampling bottle is placed on the sample disc; the weight sensor is mounted at the bottom of the sample disc; the control valve is installed on the water outlet pipeline. According to the device, pollution is not easily introduced in the tailoring process of the dust-free clothing detection sample, the size of the sample is more uniform, and the sample extraction efficiency is obviously improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a device for extracting samples from dust-free clothing inspections. Background Art

[0002] Wafer factory (Fabrication, FAB) workers need to wear clean clothes when working. If the cleanliness of the clean clothes is not enough, it will directly affect the cleanliness of the factory environment and the yield of the product, so the cleanliness of the clean clothes should be tested regularly. With the rapid development of integrated circuit process technology and the miniaturization of components, the requirements for product quality and yield are getting higher and higher. Therefore, it is very important to control the cleanliness of the clean clothes.

[0003] At present, the method for detecting the cleanliness of cleanroom clothing generally includes the following steps: (1) preparing clean cutting tools in a cutting room; (2) placing the cleanroom clothing on a table; (3) in order to reduce the analysis error, with the cooperation of multiple staff members, three pieces of cloth of fixed size are cut from three different parts of a cleanroom clothing as parallel samples; (4) a small piece of cloth is cut from each of the three pieces of cloth and subjected to GC-MS (Gas Chromatography-Mass Spectrometry) detection; (5) the remaining three pieces of cloth are placed in clean bottles, ultrapure water (UPW) is added, and after soaking for a period of time, the water sample is filtered and subjected to IC&ICP-MS (ion chromatography tandem mass spectrometry&Inductively coupled plasma mass spectrometry) detection.

[0004] However, in the process of extracting cleanroom clothing test samples, there are the following problems:

[0005] First, the sample cutting process is prone to contamination. Because the cutting process is carried out in the sampling room, other personnel may enter the sampling room during the cutting process and introduce contamination; in addition, if the staff has contaminants on their bodies, contamination will also be introduced.

[0006] Second, the size of the sample may be different. Since the sample is cut manually, the size of the sample is prone to deviation, which will lead to inaccurate test results.

[0007] Third, it wastes manpower and material resources. The cutting process requires multiple workers and multiple sets of cutting tools, which is time-consuming and labor-intensive. Utility Model Content

[0008] The utility model provides a device for extracting a sample of a cleanroom clothing test, so as to solve the above-mentioned problems existing in the process of extracting the sample of the cleanroom clothing test.

[0009] In order to solve the above technical problems, the utility model provides a device for extracting samples of cleanroom clothing inspection, comprising a sampling chamber, a cutting device, a cutting fixing plate, a sample plate, a sampling bottle, a weight sensor, a water outlet pipeline, a control valve and a control platform;

[0010] The sampling chamber has a cavity, and the sampling chamber is provided with an openable and closable door;

[0011] The cutting device, the cutting fixing plate, the sample plate, the sampling bottle, the weight sensor and the water outlet pipeline are all arranged in the cavity, and the control platform is arranged outside the cavity;

[0012] The cutting device, the weight sensor and the control valve are respectively connected to the control platform;

[0013] The sampling bottle is placed on the sample tray; the weight sensor is installed at the bottom of the sample tray;

[0014] The control valve is installed on the water outlet pipeline.

[0015] Optionally, the device further comprises an air inlet pipe and an exhaust pipe connected to the cavity, and valves are provided on both the air inlet pipe and the exhaust pipe.

[0016] Optionally, the air inlet pipe is connected to the bottom of the cavity, and the air outlet pipe is connected to the top of the cavity.

[0017] Optionally, there are multiple intake pipes and multiple exhaust pipes.

[0018] Optionally, the valve is an automatic valve, and the valve is connected to the control platform.

[0019] Optionally, the openable and closable door includes a feed door and a sample outlet door that are spaced apart.

[0020] Optionally, a sensing platform is provided on the outer side of the feed door, and a sensing module is provided on the sensing platform; an electric control lock is provided on the inner side of the feed door; and both the sensing module and the electric control lock are connected to the control platform.

[0021] Optionally, the sensing module is a weight sensor.

[0022] Optionally, the cutting equipment includes a robotic arm clamp and a robotic arm shear, and the robotic arm clamp and the robotic arm shear are respectively connected to the control platform.

[0023] Optionally, the device further comprises a cutting completion plate, wherein the cutting completion plate is arranged between the cutting fixing plate and the sample plate.

[0024] The utility model provides a device for extracting samples for cleaning clothes inspection, including a sampling chamber, a cutting device, a cutting fixed plate, a sample plate, a sampling bottle, a weight sensor, a water outlet pipeline, a control valve and a control platform. The sampling chamber provides a relatively independent space for sample cutting to prevent pollutants from contaminating the sample; the cutting device is used to automatically cut the clean clothes, and multiple operators are not required to cut manually; the weight sensor and the control platform are used to determine whether the sample needs to be added with ultrapure water to meet the subsequent cleanliness inspection requirements of the clean clothes. The unexpected effect is that it is not easy to introduce contamination during the cutting process of the clean clothes inspection sample, the size of the sample is more uniform, and the efficiency of extracting the sample is significantly improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a structural schematic diagram of a device for extracting samples from cleanroom clothing inspection provided by one embodiment of the utility model.

[0026] Figure 2 It is a structural schematic diagram of a dust-free garment to be cut being fixed on a cutting fixing plate provided by an embodiment of the utility model.

[0027] [Description of reference numerals is as follows]:

[0028] Sampling room-1, cutting equipment-2, cutting fixed plate-3, sample plate-4, sampling bottle-5, weight sensor-6, water outlet pipe-7, control valve-8, control platform-9, air inlet pipe-10, exhaust pipe-11, valve-12, cutting completion plate-13, clean clothes to be cut-14, sample-15;

[0029] Openable door-101;

[0030] Feeding door-1011, sample discharging door-1012, induction platform-1013

[0031] Mechanical arm clamp-201, mechanical arm shears-202;

[0032] Fixing mechanism-301. DETAILED DESCRIPTION

[0033] In order to make the purpose, advantages and features of the present invention clearer, the following is a further detailed description of a dust-free clothing detection sample extraction device proposed by the present invention in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are all in a very simplified form and use non-precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.

[0034] In the description of the present invention, the terms "first", "second", etc. are added for the convenience of description and reference, and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined by the terms "first", "second", etc. may explicitly or implicitly include one or more of the features.

[0035] like Figure 1 and Figure 2 As shown, this embodiment provides a device for extracting dust-free clothing inspection samples, including a sampling chamber 1, a cutting device 2, a cutting fixing plate 3, a sample plate 4, a sampling bottle 5, a weight sensor 6, a water outlet pipe 7, a control valve 8 and a control platform 9; the sampling chamber 1 has a cavity, and the sampling chamber 1 is provided with an openable and closable door 101; the cutting device 2, the cutting fixing plate 3, the sample plate 4, the sampling bottle 5, the weight sensor 6 and the water outlet pipe 7 are all arranged in the cavity, and the control platform 9 is arranged outside the cavity; the cutting device 2, the weight sensor 6 and the control valve 8 are respectively connected to the control platform 9; the sampling bottle 5 is placed on the sample plate 4; the weight sensor 6 is installed at the bottom of the sample plate 4; the control valve 8 is installed on the water outlet pipe 7.

[0036] The cutting device 2 may be an existing automatic cutting device or may be improved on the basis of a fully automatic wafer surface treatment device, for example, the cutting device 2 may be improved on the basis of a VPD (Vapor Phase decomposition) device of model WSPS3. The VPD device includes the control platform 9 and a manipulator. The control platform 9 may control the manipulator to operate according to a set action. The cutting device 2 may be obtained by replacing the manipulator with a cutting tool. The control valve 8 may be an automatic control valve, and the control platform 9 may control the automatic control valve to open or close through a driving signal. Transparent glass may be provided on the side wall of the sampling chamber 1 so as to observe the internal situation of the sampling chamber 1 from the outside.

[0037] The method for using the device for extracting samples of clean clothes inspection provided in the present embodiment is as follows: the clean clothes 14 to be cut are sent into the sampling chamber 1 through the openable and closable door 101 of the sampling chamber 1, the cutting device 2 lays the clean clothes 14 to be cut flat on the cutting fixing plate 3, the fixing mechanism 301 provided on the cutting fixing plate 3 fixes the clean clothes 14 to be cut, the cutting device 2 cuts the clean clothes 14 to be cut according to the cutting position and cutting size set in the control platform 9 to obtain the sample 15, the sample 15 usually includes three small samples and three large samples, the cutting device 2 can first cut out the three small samples, and then cut out the three large samples at the position of the small samples, the cutting device During the cutting process, the samples 15 are placed into the sampling bottle 5 one by one, and the weight sensor 6 sends the total weight of the sampling bottle 5 and the sample 15 to the control platform 9. If the total weight is small, the weight sensor 6 does not send a pulse signal to the control platform 9, and the control platform 9 does not start the control valve 8. At this time, the sample can be taken out from the position of the openable and closable door 101; if the total weight is large, the weight sensor 6 sends a pulse signal to the control platform 9, and the control platform 9 sends a high-level signal to the control valve 8 after receiving the pulse signal, and the control valve 8 changes from a closed state to an open state, and ultrapure water is added to the sample through the water outlet pipeline 7. After waiting for a preset time, the sample can be taken out from the position of the openable and closable door 101.

[0038] The present embodiment provides a device for extracting samples for dust-free clothing inspection, comprising a sampling chamber 1, a cutting device 2, a cutting fixing plate 3, a sample plate 4, a sampling bottle 5, a weight sensor 6, a water outlet pipe 7, a control valve 8 and a control platform 9. The sampling chamber 1 provides a relatively independent space for sample cutting to prevent pollutants from contaminating the sample; the cutting device 2 is used to automatically cut the dust-free clothing, and multiple operators are not required to cut it manually; the weight sensor 6 and the control platform 9 are used to determine whether the sample needs to be added with ultrapure water to meet the subsequent cleanliness inspection requirements of the dust-free clothing. The unexpected effect is that it is not easy to introduce contamination during the cutting process of the dust-free clothing inspection sample, and the size of the sample is more uniform, which significantly improves the efficiency of extracting the sample.

[0039] Optional, such as Figure 1 As shown, the device also includes an air inlet pipe 10 and an exhaust pipe 11 connected to the cavity, and valves 12 are provided on the air inlet pipe 10 and the exhaust pipe 11. Clean nitrogen or inert gas can be transported into the cavity through the air inlet pipe 10, and the cavity can be cleaned by clean nitrogen or inert gas to prevent pollutants in the cavity. The valves 12 on the air inlet pipe 10 and the exhaust pipe 11 need to be opened or closed at the same time to keep the air pressure in the cavity stable. The valves 12 on the air inlet pipe 10 and the exhaust pipe 11 are opened only when cutting, and the valves 12 on the air inlet pipe 10 and the exhaust pipe 11 are closed after cutting to save gas. The air inlet pipe 10 can be connected to the air supply pipe at the factory end, and the exhaust pipe 11 can be connected to the exhaust pipe at the factory end.

[0040] Optional, such as Figure 1 As shown, the air inlet pipe 10 is connected to the bottom of the cavity, and the exhaust pipe 11 is connected to the top of the cavity. The air inlet pipe 10 and the exhaust pipe 11 are arranged opposite to each other, which can increase the flow distance of the gas used to clean the cavity and improve the cleaning effect.

[0041] Optional, such as Figure 1 As shown, the number of the air inlet pipe 10 and the number of the exhaust pipe 11 are both multiple, which can further improve the cleaning effect of the cavity.

[0042] Optional, such as Figure 1 As shown, the valve 12 is an automatic valve, and the valve 12 is connected to the control platform 9. The valve 12 can be controlled to open or close automatically by the control platform 9, reducing the amount of manual work. For example, the control platform 9 controls the valve 12 to open through a high level and controls the valve 12 to close through a low level. In other embodiments, the valve 12 can be a manual valve.

[0043] Optional, such as Figure 1 As shown, the openable and closable door 101 includes a feed door 1011 and a sample outlet door 1012 arranged at intervals. The feed door 1011 is used to feed the dust-free clothes 14 to be cut, and the sample outlet door 1012 is used to send out the cut test samples. The feed door 1011 and the sample outlet door 1012 are arranged separately, which can facilitate the layout of various equipment and components in the sampling chamber 1. For example, the left space in the sampling chamber 1 can be set as a cutting area, and the right space can be set as a sampling area. In other embodiments, the openable and closable door 101 can be a door.

[0044] Optional, such as Figure 1 As shown, a sensing platform 1013 is provided on the outside of the feed door 1011, and a sensing module is provided on the sensing platform 1013; an electric control lock is provided on the inside of the feed door 1011; the sensing module and the electric control lock are both connected to the control platform 9. The sensing module can be a weight sensor, a counting sensor or other types of sensors. When the sensing module senses that a dust-free garment 14 to be cut is placed on the sensing platform 1013, the sensing module sends a pulse signal to the control platform 9. After receiving the pulse signal, the control platform 9 sends a high-level signal to the electric control lock, and the electric control lock opens, and the cutting device 2 takes away the dust-free garment 14 to be cut; after the control platform 9 stops sending a high-level signal to the electric control, the electric control lock becomes locked. When the sensing module does not sense that a dust-free garment 14 to be cut is placed on the platform 1013, the sensing module does not send a pulse signal to the control platform 9, and the electric control lock remains locked. The feed door 1011 can be controlled to open and close automatically through the sensing module, the electric lock and the control platform 9, and manual operation of the feed door 1011 is no longer required.

[0045] Optional, such as Figure 1 As shown, the sensing module is a weight sensor. The weight sensor can be used to determine whether the clean clothes 14 to be cut are placed on the sensing platform 1013. In other embodiments, a counting sensor can be used as the sensing module.

[0046] Optional, such as Figure 1 As shown, the cutting device 2 includes a robot arm clamp 201 and a robot arm shear 202, and the robot arm clamp 201 and the robot arm shear 202 are respectively connected to the control platform 9. The clean clothes 14 to be cut and the cut samples can be moved by the robot arm clamp 201, and the clean clothes 14 to be cut can be scanned and positioned. The clean clothes 14 to be cut can be cut by the robot arm shear 202. In other embodiments, two robot arm clamps 201 can be provided, and the clean clothes 14 to be cut and the cut samples can be moved using one robot arm clamp 201 respectively.

[0047] Optional, such as Figure 1 As shown, the device further comprises a cutting completion tray 13, and the cutting completion tray 13 is arranged between the cutting fixing tray 3 and the sample tray 4. The cutting completion tray 13 can be used for transferring and storing samples 15.

[0048] In summary, the utility model provides a device for extracting samples for dust-free clothing inspection, including a sampling chamber 1, a cutting device 2, a cutting fixing plate 3, a sample plate 4, a sampling bottle 5, a weight sensor 6, a water outlet pipe 7, a control valve 8 and a control platform 9. The sampling chamber 1 provides a relatively independent space for sample cutting to prevent pollutants from contaminating the sample; the cutting device 2 is used to automatically cut the dust-free clothing, and multiple operators are not required to cut manually; the weight sensor 6 and the control platform 9 are used to determine whether the sample needs to be added with ultrapure water to meet the subsequent cleanliness inspection requirements of the dust-free clothing. The unexpected effect is that it is not easy to introduce contamination during the cutting process of the dust-free clothing inspection sample, the size of the sample is more uniform, and the efficiency of extracting the sample is significantly improved.

[0049] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation to the scope of the utility model. Any changes and modifications made by ordinary technicians in this field based on the above disclosure are within the protection scope of the utility model.

Claims

1. A device for extracting samples from cleanroom clothing, characterized in that: It includes a sampling room, cutting equipment, cutting fixing plate, sample plate, sampling bottle, weight sensor, water outlet pipeline, control valve and control platform; The sampling chamber has a cavity, and the sampling chamber is provided with an openable and closable door; The cutting device, the cutting fixing plate, the sample plate, the sampling bottle, the weight sensor and the water outlet pipeline are all arranged in the cavity, and the control platform is arranged outside the cavity; The cutting device, the weight sensor and the control valve are respectively connected to the control platform; The sampling bottle is placed on the sample tray; the weight sensor is installed at the bottom of the sample tray; The control valve is installed on the water outlet pipeline.

2. The device for extracting cleanroom clothing test samples as claimed in claim 1, characterized in that: The device also includes an air inlet pipe and an air outlet pipe communicated with the cavity, and valves are arranged on the air inlet pipe and the air outlet pipe.

3. The device for extracting cleanroom clothing test samples as claimed in claim 2, characterized in that: The air inlet pipe is communicated with the bottom of the cavity, and the air outlet pipe is communicated with the top of the cavity.

4. The device for extracting cleanroom clothing test samples as claimed in claim 2, characterized in that: The number of the intake pipe and the number of the exhaust pipe are both plural.

5. The device for extracting cleanroom clothing test samples as claimed in claim 2, characterized in that: The valve is an automatic valve, and the valve is connected to the control platform.

6. The device for extracting cleanroom clothing test samples as claimed in claim 1, characterized in that: The openable and closable doors include a feed door and a sample outlet door which are arranged at intervals.

7. The device for extracting cleanroom clothing test samples as claimed in claim 6, characterized in that: An induction platform is arranged on the outer side of the feed door, and an induction module is arranged on the induction platform; an electric control lock is arranged on the inner side of the feed door; and both the induction module and the electric control lock are connected to the control platform.

8. The device for extracting cleanroom clothing test samples as claimed in claim 7, characterized in that: The sensing module is a weight sensor.

9. The device for extracting cleanroom clothing test samples as claimed in claim 1, characterized in that: The cutting equipment comprises a mechanical arm clamp and a mechanical arm shear, and the mechanical arm clamp and the mechanical arm shear are respectively connected to the control platform.

10. The device for extracting cleanroom clothing test samples according to claim 1, characterized in that: The device further comprises a cutting completion plate, which is arranged between the cutting fixing plate and the sample plate.

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