Photomask box suite

Abstract

The utility model provides a photomask box suite which comprises a photomask box, the photomask box comprises a box body and a cover body, and the box body and the cover body are matched and assembled into a structure capable of being opened, closed and sealed; the interior of the accommodating cavity is used for accommodating inert gas; the transition cabin is configured to be capable of being communicated with the accommodating cavity and accommodating the photomask box, the first end of the transition cabin is communicated with the accommodating cavity, and the first end of the transition cabin and the second end of the transition cabin are respectively provided with a first cabin door and a second cabin door which are independently opened and closed; the first air pressure adjusting device is connected with the transition cabin and used for replacing air in the transition cabin and adjusting the air pressure in the transition cabin. The photomask box suite provided by the utility model can isolate the contact between the photomask and the water oxygen atmosphere in the transportation process of the photomask.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a photomask box kit. Background Art

[0002] With the rapid development of big data and artificial intelligence, the demand for computing power has become increasingly prominent, and the semiconductor integrated circuit industry has achieved exponential growth. In order to meet the needs of chip miniaturization and low energy consumption, it is necessary to make the circuit line width on the chip as fine as possible. To achieve this goal, it is necessary to further reduce the line width on the photomask used as the master in photolithography.

[0003] During the production of the mask, an extremely clean production environment needs to be maintained. Dust particles, gases, chemical solvents, etc. in the environment may adhere to the surface of the mask during the process or storage of the mask, causing crystallization and other damage to the mask surface. In general wafer processes, mask boxes are usually used to store and transport masks to keep them clean. In recent years, in order to produce more sophisticated chips, the cleanliness requirements for masks have gradually increased. During the production and transportation of masks, water and oxygen in the ambient atmosphere will also have an adverse effect on the mask process, causing distortion of the pattern and reducing the chip yield. Therefore, during the transportation and storage of the mask, a mask box that can isolate the adverse external atmosphere is needed.

[0004] The currently commonly used mask boxes can only isolate external dust but are not airtight. They have no regulating effect on the water and oxygen atmosphere during the mask transportation process, which can easily cause the mask surface interface to react with the external atmosphere, which is not conducive to the stability of the process.

[0005] Therefore, a photomask box kit is needed to isolate the photomask from contact with water and oxygen atmosphere during the photomask transportation process. Utility Model Content

[0006] The purpose of the present application is to provide a photomask box kit to isolate the photomask from contact with water and oxygen atmosphere during the photomask transportation process.

[0007] An embodiment of the present application provides a photomask box kit, comprising: a photomask box, the photomask box comprising a box body and a cover body, the box body and the cover body are adapted and assembled into a structure that can be opened, closed and sealed; a accommodating chamber, the accommodating chamber is used to accommodate an inert gas; a transition chamber, the transition chamber is configured to be able to communicate with the accommodating chamber and to accommodate the photomask box, the first end of the transition chamber is connected to the accommodating chamber, and the first end of the transition chamber and the second end of the transition chamber are respectively provided with a first cabin door and a second cabin door with independent switches; and a first air pressure regulating device, connected to the transition chamber, for replacing the gas in the transition chamber and regulating the air pressure in the transition chamber.

[0008] In some embodiments, a first sealing ring is provided on the end surface of the box body facing the cover body, and the first sealing ring is provided with a groove; and a second sealing ring is provided on the end surface of the cover body facing the box body, and the second sealing ring is provided with a protrusion matching the groove.

[0009] In some embodiments, the width of the groove notch is smaller than the width of the groove bottom; and the width of the protrusion top is larger than the width of the protrusion bottom.

[0010] In some embodiments, the material of the first sealing ring includes rubber; and the material of the second sealing ring includes rubber.

[0011] In some embodiments, the transition chamber further includes: a first air inlet, disposed on the peripheral wall of the transition chamber, the first air inlet being used to connect to an inert gas source; and a first air outlet, disposed on the peripheral wall of the transition chamber, the first air outlet being used to connect to a vacuum pump.

[0012] In some embodiments, the first air pressure regulating device includes: a first pressure gauge connected to the transition cabin, for measuring and displaying the air pressure inside the transition cabin; a first air inlet pipeline, a first end of the first air inlet pipeline is connected to the first air inlet port, a second end of the first air inlet pipeline is connected to the inert gas source, and the first air inlet pipeline is provided with a first valve body; a first exhaust pipeline, a first end of the first exhaust pipeline is connected to the first air outlet, a second end of the first exhaust pipeline is connected to the vacuum pump, and the first exhaust pipeline is provided with a second valve body; and a first controller, the first controller is electrically connected to the first valve body and the second valve body, and is used to control the switching of the first valve body and the second valve body.

[0013] In some embodiments, the accommodating chamber is provided with a second air inlet, and the second air inlet is used to be connected to an inert gas source; and the accommodating chamber is also provided with a second air outlet, and the second air outlet is used to be connected to a vacuum pump.

[0014] In some embodiments, the photomask box kit also includes a second air pressure regulating device for regulating the air pressure in the accommodating chamber and replacing the gas in the accommodating chamber, the second air pressure regulating device including: a second pressure gauge connected to the accommodating chamber, for measuring and displaying the air pressure inside the accommodating chamber; a second air inlet pipe, a first end of the second air inlet pipe is connected to the second air inlet port, a second end of the second air inlet pipe is connected to the inert gas source, and the second air inlet pipe is provided with a third valve body; a second exhaust pipe, a first end of the second exhaust pipe is connected to the first air outlet, a second end of the second exhaust pipe is connected to the vacuum pump, and the second exhaust pipe is provided with a fourth valve body; and a second controller, the second controller is electrically connected to the third valve body and the fourth valve body, and is used to control the switching of the third valve body and the fourth valve body.

[0015] In some embodiments, a plurality of first supporting members and a plurality of second supporting members are respectively connected to the interior of the box body and the interior of the cover body, and the first supporting members match with the plurality of second supporting members to clamp the photomask.

[0016] In some embodiments, the first support member is integrally connected to the box body; and the second support member is integrally connected to the cover body.

[0017] The beneficial effects of the reticle box kit provided by the present application include but are not limited to the following:

[0018] The photomask box kit provided by the present application can evacuate the air in the open photomask box and fill it with inert gas through a transition chamber, and transfer the photomask box to a containing chamber filled with inert gas and close it. The box body and the cover body of the photomask box can be sealed and connected, so as to prevent the water and oxygen atmosphere from entering the photomask box during the transfer process of the photomask box. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The following figures describe in detail the exemplary embodiments disclosed in this application. The same reference numerals represent similar structures in several views of the drawings. Those skilled in the art will understand that these embodiments are non-limiting, exemplary embodiments, and the drawings are only for the purpose of illustration and description, and are not intended to limit the scope of this application. Other embodiments may also accomplish the inventive intent in this application. It should be understood that the drawings are not drawn to scale.

[0020] in:

[0021] Figure 1 is a schematic structural diagram of a reticle box kit according to some embodiments of the present application;

[0022] Figure 2 is a schematic structural diagram of a reticle box according to some embodiments of the present application;

[0023] Figure 3 is a cross-sectional view of a first sealing ring according to some embodiments of the present application; and

[0024] Figure 4 is a cross-sectional view of a second sealing ring according to some embodiments of the present application. DETAILED DESCRIPTION

[0025] The following description provides specific application scenarios and requirements of the present application, with the purpose of enabling those skilled in the art to make and use the content in the present application. It will be apparent to those skilled in the art that various local modifications to the disclosed embodiments are apparent, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the present application. Therefore, the present application is not limited to the embodiments shown, but to the widest scope consistent with the claims.

[0026] The present application provides a photomask box kit, comprising: a photomask box, the photomask box comprising a box body and a cover body, the box body and the cover body are adapted and assembled into a structure that can be opened, closed and sealed; a containing chamber, the containing chamber is used to contain an inert gas; a transition chamber, the transition chamber is configured to be able to communicate with the containing chamber and to accommodate the photomask box, the first end of the transition chamber is connected to the containing chamber, and the first end of the transition chamber and the second end of the transition chamber are respectively provided with a first cabin door and a second cabin door with independent switches; and a first air pressure regulating device, connected to the transition chamber, for regulating the air pressure in the transition chamber.

[0027] The photomask box kit provided by the present application can evacuate the air in the open photomask box and fill it with inert gas through a transition chamber, and transfer the photomask box to a containing chamber filled with inert gas and close it. The box body and the cover body of the photomask box can be sealed and connected, so as to prevent the water and oxygen atmosphere from entering the photomask box during the transfer process of the photomask box.

[0028] The reticle box kit provided by the present application will be described in detail below in conjunction with the embodiments and drawings.

[0029] refer to Figure 1 The present application provides a reticle box kit, comprising a reticle box 100, a containing cavity 200, a transition chamber 300, and a first air pressure regulating device. The reticle box 100 can enter the containing cavity 200 through the transition chamber 300, and the first air pressure regulating device is used to replace the gas in the transition chamber 300 and regulate the air pressure in the transition chamber 300.

[0030] In some embodiments, reference Figure 2The photomask box 100 includes a box body 101 and a cover body 102, and the box body 101 and the cover body 102 are adapted and assembled into a structure that can be opened, closed and sealed. When it is necessary to replace the gas in the photomask box 100 with an inert gas, the box body 101 and the cover body 102 are closed to enter the transition chamber 300 in an open state. After the gas replacement is completed in the transition chamber 300, the photomask box 100 is transferred to the accommodating chamber 200, so the box body 101 and the cover body 102 are closed, and then the accommodating chamber 200 is moved out through the transition chamber 300.

[0031] In some embodiments, a first sealing ring 101 a is disposed on the end surface of the box body 101 facing the cover body 102 to ensure the airtightness of the reticle box 100 after the box body 101 and the cover body 102 are connected.

[0032] In some embodiments, reference Figure 3 The first sealing ring 101a is provided with a groove 101b.

[0033] In some embodiments, the width of the notch of the groove 101b is smaller than the width of the bottom of the groove 101b.

[0034] In some embodiments, the material of the first sealing ring 101a includes rubber.

[0035] In some embodiments, a plurality of first supporting members 101 c are disposed inside the box body 101 for supporting the photomask 11 .

[0036] In some embodiments, there are four first support members 101c, which are respectively engaged with four sides of the mask 11. In some embodiments, the cross section of the first support member 101c is rectangular, circular or irregular. Optionally, the cross section of the first support member 101c is rectangular.

[0037] In some embodiments, the first support member 101c is integrally connected to the box body 101.

[0038] In some embodiments, the end surface of the cover 102 facing the box body 101 is provided with a second sealing ring 102a. Figure 4 The second sealing ring 102a is provided with a protrusion 102b matching the groove 101b.

[0039] In some embodiments, the width of the top of the protrusion 102b is greater than the width of the bottom of the protrusion 102b to match the groove 101b. In some embodiments, the protrusion 102b and the groove 101b are interference fit to ensure the sealing when the first sealing ring 101a and the second sealing ring 102a are connected.

[0040] In some embodiments, the material of the second sealing ring 102a includes rubber.

[0041] In some embodiments, a plurality of second support members 102c corresponding to the positions of the first support member 101c are connected to the interior of the cover body 102, and the first support member 101c matches the plurality of second support members 102c to clamp the light shield 11. The gap between any pair of corresponding second support members 102c and the first support member 101c enables the light shield 11 to be fixed between the second support member 102c and the first support member 101c.

[0042] In some embodiments, there are four second support members 102c, which are respectively engaged with four sides of the mask 11. In some embodiments, the cross section of the second support member 102c is rectangular, circular or irregular. Optionally, the cross section of the second support member 102c is rectangular.

[0043] In some embodiments, the second support member 102c is integrally connected to the cover body 102.

[0044] In some embodiments, the accommodating chamber 200 is used to accommodate an inert gas, and the accommodating chamber 200 is provided with a second gas inlet 201, and the second gas inlet 201 is used to connect to the inert gas source 600; and the accommodating chamber 200 is also provided with a second gas outlet 202, and the second gas outlet 202 is used to connect to the vacuum pump 700. The inert gas enters the accommodating chamber 200 through the second gas inlet 201 to fill the accommodating chamber 200 with the inert gas. When the gas pressure in the accommodating chamber 200 needs to be replaced or adjusted, the gas in the accommodating chamber 200 is discharged from the accommodating chamber 200 through the second gas outlet 202.

[0045] In some embodiments, a robot arm (not shown) is disposed in the accommodating chamber 200 for closing the reticle box 100 .

[0046] In some embodiments, the accommodating cavity 200 is provided with a rubber glove (not shown) that can be extended from outside the accommodating cavity 200 into the accommodating cavity 200 , so that an operator can close the reticle box 100 located inside the accommodating cavity 200 through the rubber glove.

[0047] In some embodiments, the accommodating cavity 200 is provided with a through hole 203 penetrating the side wall of the accommodating cavity 200 to connect the accommodating cavity 200 with the transition chamber 300 , so that the light mask located in the transition chamber 300 can be transferred to the interior of the accommodating cavity 200 through the through hole 203 .

[0048] The reticle box 100 kit provided in the embodiment of the present application further includes a second air pressure regulating device for regulating the air pressure in the accommodating cavity 200 and replacing the gas in the accommodating cavity 200 .

[0049] In some embodiments, the second air pressure regulating device includes a second pressure gauge 501 , a second air intake pipeline 502 , a second air exhaust pipeline 503 , and a second controller 504 .

[0050] In some embodiments, the second pressure gauge 501 is connected to the accommodating chamber 200, and is used to measure and display the gas pressure inside the accommodating chamber 200. In some embodiments, the second pressure gauge 501 is an industrial gas pressure gauge.

[0051] In some embodiments, the first end of the second air inlet pipeline 502 is connected to the second air inlet port 201, the second end of the second air inlet pipeline 502 is connected to the inert gas source 600, and the second air inlet pipeline 502 is provided with a third valve body 502a. When the inert gas needs to be charged into the accommodating chamber 200, the third valve body 502a is opened; when the inert gas is charged, the third valve body 502a is closed.

[0052] In some embodiments, the first end of the second exhaust pipeline 503 is connected to the first gas outlet 304, the second end of the second exhaust pipeline 503 is connected to the vacuum pump 700, and the second exhaust pipeline 503 is provided with a fourth valve body 503a. When the inert gas needs to be discharged from the accommodating chamber 200, the fourth valve body 503a is opened; when the inert gas is discharged, the fourth valve body 503a is closed.

[0053] In some embodiments, the second controller 504 is electrically connected to the third valve body 502a and the fourth valve body 503a, and is used to control the opening and closing of the third valve body 502a and the fourth valve body 503a. When the accommodating chamber 200 is working, the third valve body 502a and the fourth valve body 503a are in a normally closed state. When the inert gas needs to be filled into the accommodating chamber 200, the second controller 504 controls the third valve body 502a to open; when the inert gas is filled, the second controller 504 controls the third valve body 502a to close; when the inert gas needs to be discharged from the accommodating chamber 200, the second controller 504 controls the fourth valve body 503a to open; when the inert gas is discharged, the second controller 504 controls the fourth valve body 503a to close.

[0054] In some embodiments, the containing chamber 200 is also connected to a water and oxygen monitoring device 204 for monitoring the water and oxygen content in the containing chamber 200. When the water and oxygen content in the containing chamber 200 exceeds a preset value, the water and oxygen monitoring device 204 will sound an alarm to remind the operator to ventilate the containing chamber 200.

[0055] In some embodiments, the transition chamber 300 is configured to be in communication with the accommodating cavity 200 and to accommodate the reticle box 100 .

[0056] In some embodiments, the first end of the transition cabin 300 is communicated with the accommodating chamber 200, and the first end of the transition cabin 300 and the second end of the transition cabin 300 are respectively provided with a first cabin door 301 and a second cabin door 302 that can be opened and closed independently. The first hatch 301 and the second hatch 302 are in a normally closed state. When the gas in the mask box 100 needs to be replaced with an inert gas, the second hatch 302 is opened, and after the mask box 100 in the open state is placed in the transition chamber 300, the second hatch 302 is closed; when the gas in the mask box 100 is replaced with an inert gas, the first hatch 301 is opened, the mask box 100 is transferred to the accommodating chamber 200, and the first hatch 301 is closed; when the mask box 100 is closed in the accommodating chamber 200, the first hatch 301 is opened, the mask box 100 is transferred to the transition chamber 300, and the first hatch 301 is closed; then the second hatch 302 is opened, the mask box 100 is moved out of the transition chamber 300, and the second hatch 302 is closed.

[0057] In some embodiments, the transition cabin 300 further includes a first air inlet 303 and a first air outlet 304 .

[0058] In some embodiments, the first air inlet 303 is disposed on the peripheral wall of the transition chamber 300 for connecting to the inert gas source 600. In some embodiments, the first air outlet 304 is disposed on the peripheral wall of the transition chamber 300 for connecting to the vacuum pump 700.

[0059] In some embodiments, a first air pressure regulating device is connected to the transition cabin 300 for regulating the air pressure in the transition cabin 300 .

[0060] In some embodiments, the first air pressure regulating device includes a first pressure gauge 401 , a first air intake pipeline 402 , a first air exhaust pipeline 403 , and a first controller 404 .

[0061] In some embodiments, the first pressure gauge 401 is connected to the transition chamber 300, and is used to measure and display the air pressure inside the transition chamber 300. In some embodiments, the first pressure gauge 401 is an industrial gas pressure gauge.

[0062] In some embodiments, the first end of the first air inlet pipeline 402 is connected to the first air inlet port 303, the second end of the first air inlet pipeline 402 is connected to the inert gas source 600, and the first air inlet pipeline 402 is provided with a first valve body 402a. The first valve body 402a is in a normally closed state, and when the transition cabin 300 needs to be charged with inert gas, the first valve body 402a is opened; when the inert gas charging is completed, the first valve body 402a is closed.

[0063] In some embodiments, the first end of the first exhaust pipeline 403 is connected to the first gas outlet 304, the second end of the first exhaust pipeline 403 is connected to the vacuum pump 700, and the first exhaust pipeline 403 is provided with a second valve body 403a. The second valve body 403a is in a normally closed state, and when the gas in the transition cabin 300 needs to be extracted, the second valve body 403a is opened; when the gas extraction is completed, the second valve body 403a is closed.

[0064] In some embodiments, the first controller 404 is electrically connected to the first valve body 402a and the second valve body 403a, and is used to control the opening and closing of the first valve body 402a and the second valve body 403a. When it is necessary to extract the gas in the transition chamber 300, the first controller 404 controls the second valve body 403a to open; when the gas extraction is completed, the first controller 404 controls the second valve body 403a to close.

[0065] In some embodiments, the process of replacing the gas in the reticle box 100 using the reticle box 100 kit is as follows:

[0066] Open the second hatch 302, place the open mask box 100 into the transition chamber 300, and then close the second hatch 302; open the second valve body 403a to extract the gas in the transition chamber 300, and when the first pressure display shows that the air pressure in the transition chamber 300 is negative, close the second valve body 403a to stop the extraction, open the first valve body 402a, and fill the transition chamber 300 with inert gas, and when the second pressure display shows that the air pressure in the transition chamber 300 reaches the atmospheric pressure, close the second valve body 403a to stop the inflation, and repeat the above-mentioned extraction and inflation three times. The process is to ensure that the gas in the photomask, that is, the gas in the transition chamber 300 is completely replaced with inert gas; open the first hatch 301, transfer the photomask box 100 to the accommodating chamber 200, close the first hatch 301, close the photomask box 100, open the first hatch 301, transfer the photomask box 100 to the transition chamber 300, close the first hatch 301, open the second hatch 302, take out the photomask box 100, close the second hatch 302, and perform a vacuuming and inflation process on the transition chamber 300 to fill the transition chamber 300 with inert gas again. As needed, the photomask box 100 can be transferred to the relevant process equipment and then opened in the process equipment, and the photomask 11 can be further transferred after being placed in the photomask box 100.

[0067] The beneficial effects of the reticle box kit provided by the present application include but are not limited to the following:

[0068] The photomask box kit provided by the present application can evacuate the air in the open photomask box and fill it with inert gas through a transition chamber, and transfer the photomask box to a containing chamber filled with inert gas and close it. The box body and the cover body of the photomask box can be sealed and connected, so as to prevent the water and oxygen atmosphere from entering the photomask box during the transfer process of the photomask box.

[0069] It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other beneficial effects that may be obtained.

[0070] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements and corrections to this application. Such modifications, improvements and corrections are suggested in this specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of this application.

[0071] It should be noted that in the description of this application, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", and "fix" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a rotating connection or a sliding connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood in combination with specific circumstances.

[0072] In addition, when terms such as "first", "second", and "third" are used in the specification of this application to describe various features, these terms are only used to distinguish these features and cannot be understood as indicating or implying the relationship between the features, the relative importance, or implicitly indicating the number of features indicated.

[0073] In addition, the present specification describes exemplary embodiments by reference to idealized exemplary cross-sectional views and / or plan views and / or stereograms. Therefore, differences from the illustrated shapes due to, for example, manufacturing techniques and / or tolerances are foreseeable. Therefore, the exemplary embodiments should not be interpreted as being limited to the shapes of the regions shown herein, but should include deviations in shapes caused by, for example, manufacturing. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to illustrate the actual shapes of the regions of the device nor to limit the scope of the exemplary embodiments.

[0074] At the same time, the present application uses specific words to describe the embodiments of this specification. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in the present application does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.

[0075] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus help understand one or more embodiments of the invention, in the above description of the embodiments of this application, multiple features are sometimes combined into one embodiment, figure or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims. In fact, the features of the embodiments are less than all the features of the single embodiment disclosed above.

[0076] Finally, it should be understood that the embodiments described in this application are only used to illustrate the principles of the embodiments of the present application. Other variations may also fall within the scope of the present application. Therefore, as an example and not a limitation, the alternative configurations of the embodiments of the present application may be considered to be consistent with the teachings of the present application. Accordingly, the embodiments of the present application are not limited to the embodiments explicitly introduced and described in the present application.

Claims

1. A photomask box kit, characterized in that: include: A mask box, the mask box comprising a box body and a cover body, the box body and the cover body are adapted and assembled into a structure that can be opened, closed and sealed; A containing chamber, wherein the containing chamber is used to contain an inert gas; A transition chamber, the transition chamber being configured to be in communication with the accommodating chamber and to accommodate the reticle box, the first end of the transition chamber being in communication with the accommodating chamber, and the first end of the transition chamber and the second end of the transition chamber being respectively provided with a first door and a second door with independent switches; and The first air pressure regulating device is connected to the transition cabin and is used to replace the gas in the transition cabin and regulate the air pressure in the transition cabin.

2. The reticle box kit according to claim 1, characterized in that: The end surface of the box body facing the cover body is provided with a first sealing ring, and the first sealing ring is provided with a groove; and the end surface of the cover body facing the box body is provided with a second sealing ring, and the second sealing ring is provided with a protrusion matching the groove.

3. The reticle box kit according to claim 2, characterized in that: The width of the groove notch is smaller than the width of the groove bottom; and the width of the protrusion top is larger than the width of the protrusion bottom.

4. The reticle box kit according to claim 3, characterized in that: The material of the first sealing ring includes rubber; and the material of the second sealing ring includes rubber.

5. The reticle box kit according to claim 1, characterized in that: The transition cabin also includes: a first air inlet, disposed on a peripheral wall of the transition cabin, the first air inlet being used to connect to an inert gas source; and The first air outlet is arranged on the peripheral wall of the transition cabin, and the first air outlet is used to be connected to the vacuum pump.

6. The reticle box kit according to claim 5, characterized in that: The first air pressure regulating device comprises: A first pressure gauge, connected to the transition cabin, for measuring and displaying the air pressure inside the transition cabin; a first air inlet pipeline, wherein a first end of the first air inlet pipeline is connected to the first air inlet port, a second end of the first air inlet pipeline is connected to the inert gas source, and the first air inlet pipeline is provided with a first valve body; a first exhaust pipeline, wherein a first end of the first exhaust pipeline is connected to the first air outlet, a second end of the first exhaust pipeline is connected to the vacuum pump, and the first exhaust pipeline is provided with a second valve body; and A first controller is electrically connected to the first valve body and the second valve body, and is used to control the opening and closing of the first valve body and the second valve body.

7. The reticle box kit according to claim 6, characterized in that: The accommodating chamber is provided with a second air inlet, which is used to be connected to an inert gas source; and the accommodating chamber is also provided with a second air outlet, which is used to be connected to a vacuum pump.

8. The reticle box kit according to claim 7, characterized in that: It also includes a second air pressure regulating device, which is used to regulate the air pressure in the accommodating chamber and replace the gas in the accommodating chamber, and the second air pressure regulating device includes: a second pressure gauge connected to the accommodating chamber and used to measure and display the air pressure inside the accommodating chamber; a second air inlet pipeline, wherein a first end of the second air inlet pipeline is connected to the second air inlet port, a second end of the second air inlet pipeline is connected to the inert gas source, and the second air inlet pipeline is provided with a third valve body; a second exhaust pipeline, wherein a first end of the second exhaust pipeline is connected to the first air outlet, a second end of the second exhaust pipeline is connected to the vacuum pump, and the second exhaust pipeline is provided with a fourth valve body; and A second controller, wherein the second controller is electrically connected to the third valve body and the fourth valve body, and is used for controlling the switching of the third valve body and the fourth valve body.

9. The reticle box kit according to claim 1, characterized in that: A plurality of first supporting members and a plurality of second supporting members are respectively connected to the interior of the box body and the interior of the cover body, and the first supporting members match the plurality of second supporting members to clamp the photomask.

10. The reticle box kit according to claim 9, characterized in that: The first support member is integrally connected to the box body; and the second support member is integrally connected to the cover body.

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