Anti-cooling protection device

Abstract

The utility model relates to the technical field of photoetching, in particular to an anti-cooling protection device, which comprises a controller main body, the controller main body comprises an operating part and a control part, the operating part is connected with the input end of the control part, the control part is provided with a temperature signal output port, and the temperature signal output port is connected with the controller main body. The temperature signal output port is detachably connected with a temperature signal input port of a temperature control circuit board on an etching machine table control main board, and the control component can be driven by the operation component to send a temperature control signal to the temperature control circuit board. When the etching machine table breaks down suddenly and needs to be powered off to replace hardware, the controller main body can be used for temporarily replacing the control main board to send an instruction so as to enable an original heating system to work, and then power supply and heat preservation are carried out on the cavity, so that the temperature of the cavity is prevented from being sharply reduced in a short time, and the influence on the production efficiency is avoided. And after the hardware is replaced, the control main board is switched to control, so that the control signal of the whole machine is not influenced.

Description

Technical Field

[0001] The utility model relates to the technical field of photolithography, in particular to a temperature-reduction protection device. Background Art

[0002] During the etching process, the chamber temperature usually needs to be maintained at around 150°C. Due to process conditions, when the etching machine is powered off for more than 5 minutes, the chamber temperature will drop below 140°C. At this time, the chamber microenvironment will change, and additional cavity cleaning and maintenance will be required.

[0003] At present, the control signals of various systems of some etching machines (such as TEL etching machines) are all uniformly instructed by the cavity control main board. Therefore, when replacing any hardware, it is necessary to switch the cavity to an independent state at the control end and turn off the control power supply. At the same time, this operation will also turn off all heating systems, causing the cavity temperature to drop sharply in a short period of time, affecting production efficiency. Utility Model Content

[0004] The purpose of the utility model is to provide an anti-cooling protection device, which can temporarily replace the control main board to send instructions to make the original heating system work, and then supply power to the cavity to keep it warm, so as to prevent the cavity temperature from dropping sharply in a short time, so as not to affect the production efficiency.

[0005] In order to achieve the above-mentioned purpose, the utility model provides an anti-cooling protection device, including a controller body, the controller body including an operating component and a control component, the operating component is connected to the input end of the control component, the control component is provided with a temperature signal output port, the temperature signal output port is detachably connected to the temperature signal input port of a temperature control circuit board on an etching machine control main board, and the control component can be driven by the operating component to send a temperature control signal to the temperature control circuit board.

[0006] Optionally, the anti-temperature drop protection device also includes a power supply, and the power supply is used to supply power to the controller body.

[0007] Optionally, a switch button is provided on the operating component, and the switch button is used to control the start and stop of the power supply.

[0008] Optionally, a temperature adjustment button is further provided on the operating component, and the temperature adjustment button can drive the control component to send a temperature adjustment signal to the temperature control circuit board.

[0009] Optionally, a display screen is also provided on the operating component, and the display screen is used to display the controlled temperature.

[0010] Optionally, the controller body also includes a pressure signal output port, which is detachably connected to a pressure signal input port of a pressure control circuit board on the etching machine control main board, and the control component can be driven by the operating component to send a pressure control signal to the pressure control circuit board.

[0011] Optionally, a pressure regulating button is provided on the operating component, and the pressure regulating button can drive the control component to send a pressure regulating signal to the pressure control circuit board.

[0012] Optionally, the temperature signal output port is plug-connected to the temperature signal input port, and the pressure signal output port is plug-connected to the pressure signal input port.

[0013] Optionally, a human-computer interaction interface is provided on the operating component.

[0014] Optionally, the controller body further includes a box body, the operating component is arranged on an outer surface of the box body, and the control component is arranged inside the box body.

[0015] In the anti-cooling protection device provided by the utility model, when the etching machine suddenly fails and needs to be powered off to replace the hardware, the control end switches the cavity to an independent state, and after turning off the control power, the control main board can be disconnected from the temperature signal input port on the temperature control circuit board, and then the temperature signal output port can be connected to the temperature signal input port of the temperature control circuit board. At this time, the temperature control circuit board is switched to be controlled by the controller body, and then the control component is driven by the operating component to send a temperature control signal to the temperature control circuit board in time, so that the controller body can temporarily replace the control main board to send instructions to make the original heating system of the etching machine work, and then the cavity is powered and kept warm, so as to prevent the cavity temperature from dropping sharply in a short time, so as to avoid affecting the production efficiency. After the hardware replacement is completed, switch back to the control main board for control, so that the control signal of the whole machine is not affected. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Those skilled in the art should understand that the drawings provided are for a better understanding of the present invention and do not constitute any limitation on the scope of the present invention.

[0017] Figure 1 A schematic structural diagram of a temperature drop protection device provided in one embodiment of the utility model.

[0018] in:

[0019] 1- Temperature signal output port; 2- Power supply; 3- Switch button; 4- Temperature increase button; 5- Temperature decrease button; 6- Display screen; 7- Box body. DETAILED DESCRIPTION

[0020] In order to make the purpose, advantages and features of the utility model clearer, the utility model is further described in detail in combination with the accompanying drawings and specific embodiments. It should be noted that the accompanying drawings are in a very simplified form and use non-precise proportions. They are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model, and are not used to limit the limiting conditions for the implementation of the utility model. Therefore, they have no technical substantive significance. Any structural modification, change in proportional relationship or adjustment of size should still fall within the scope of the technical content disclosed by the utility model without affecting the effects and purposes that can be achieved by the utility model.

[0021] It should also be understood that, unless otherwise specified or indicated, the terms "first", "second", "third", etc. in the specification are only used to distinguish between the various components, elements, steps, etc. in the specification, rather than to represent the logical relationship or sequential relationship between the various components, elements, steps, etc. Moreover, the terms "comprise", "include", or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article, or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article, or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the presence of other identical elements in the process, method, article, or device including the element.

[0022] Please refer to Figure 1 This embodiment provides an anti-cooling protection device, including a controller body, the controller body including an operating component and a control component, the operating component is connected to the input end of the control component, the control component is provided with a temperature signal output port 1, the temperature signal output port 1 is detachably connected to a temperature signal input port of a temperature control circuit board on an etching machine control main board, and the operating component can be used to drive the control component to send a temperature control signal to the temperature control circuit board.

[0023] When the etching machine suddenly fails and needs to be powered off to replace the hardware, the control end switches the cavity to an independent state and turns off the control power. The control main board can be disconnected from the temperature signal input port on the temperature control circuit board, and then the temperature signal output port 1 can be connected to the temperature signal input port of the temperature control circuit board. At this time, the temperature control circuit board is switched to be controlled by the controller body, and then the control component is driven by the operating component to send a temperature control signal to the temperature control circuit board in time, so that the controller body can temporarily replace the control main board to send instructions to make the original heating system of the etching machine work, and then power the cavity to keep it warm, so as to prevent the cavity temperature from dropping sharply in a short time, so as to avoid affecting production efficiency. After the hardware replacement is completed, switch back to the control main board for control, so that the control signal of the whole machine is not affected.

[0024] Preferably, the anti-cooling protection device also includes a power supply 2, and the power supply 2 is used to supply power to the controller body when the controller body is required to send instructions instead of the main control board, so as to ensure the normal use of the controller body.

[0025] In this embodiment, a switch button 3 is provided on the operating component, and the switch button 3 is used to control the start and stop of the power supply 2. When the controller body is required to send instructions instead of the control main board, the power supply 2 supplies power to the controller body by clicking or pressing the switch button 3 to ensure the normal use of the controller body. After the hardware replacement is completed, the power supply 2 can be turned off by clicking the switch button 3 again.

[0026] Preferably, the operating component is also provided with a temperature adjustment button, through which the control component can be driven to send a temperature adjustment signal to the temperature control circuit board. When the controller body is required to send an instruction instead of the control main board, the temperature adjustment button is clicked or pressed to make the control component send a temperature adjustment signal to the temperature control circuit board, thereby controlling the heating temperature of the heating system. In this embodiment, the temperature adjustment button includes a temperature increase button 4 and a temperature decrease button 5, which are respectively used to increase or decrease the heating temperature of the heating system.

[0027] In this embodiment, the heating system has four heaters, so four temperature increase buttons 4 and four temperature decrease buttons 5 are respectively provided to control the temperature adjustment of the four heaters respectively.

[0028] Furthermore, a display screen 6 is provided on the operating component, and the display screen 6 is used to display the controlled temperature, so that the operator can intuitively obtain the current controlled temperature.

[0029] Preferably, the controller body also includes a pressure signal output port, which is detachably connected to a pressure signal input port of a pressure control circuit board on the etching machine control main board, and the control component can be driven by the operating component to send a pressure control signal to the pressure control circuit board.

[0030] When the etching machine needs to be powered off to replace the hardware due to a sudden failure, the cavity is switched to an independent state at the control end, and after the control power is turned off, the control main board can be disconnected from the pressure signal input port on the pressure control circuit board, and then the pressure signal output port can be connected to the pressure signal input port of the pressure control circuit board. At this time, the pressure control circuit board is switched to be controlled by the controller body, and then the control component is driven by the operating component to send a pressure control signal to the pressure control circuit board in time, that is, the controller body temporarily replaces the control main board to send instructions to make the original vacuum system of the etching machine work, and the cavity is powered and pressurized, thereby preventing the cavity pressure from dropping sharply in a short time to avoid affecting production efficiency. After the hardware replacement is completed, switch back to the control main board for control so that the control signal of the whole machine is not affected.

[0031] It should be understood that the temperature signal output port 1 and the pressure signal output port can be set on the same controller body to simultaneously realize temporary regulation of the cavity temperature and the cavity pressure. The temperature signal output port 1 and the pressure signal output port can also be set on different controller bodies respectively. The present invention does not impose any restrictions on this.

[0032] Furthermore, the operating component is provided with a pressure regulating button, through which the control component can be driven to send a pressure regulating signal to the pressure control circuit board. When the controller body is required to send an instruction instead of the main control board, the pressure regulating button is clicked or pressed to make the control component send a pressure regulating signal to the pressure control circuit board, thereby controlling the pressure in the cavity.

[0033] In this embodiment, the temperature signal output port 1 is plug-connected with the temperature signal input port, and the pressure signal output port is plug-connected with the pressure signal input port.

[0034] Preferably, a human-machine interface is provided on the operating component. It is understandable that the operating component can be provided with various function buttons to achieve different functional requirements, or can be directly designed as a human-machine interface to achieve different functional requirements by directly clicking the screen, and the utility model does not limit this.

[0035] In this embodiment, the controller body further includes a box body 7, the operating component is arranged on the outer surface of the box body 7, and the control component is arranged inside the box body 7. By integrating the operating component and the control component on the same box body 7, it is convenient to carry and use.

[0036] In summary, the embodiment of the utility model provides a temperature drop protection device. When the etching machine suddenly fails and needs to be powered off to replace the hardware, the temperature control circuit board is switched to be controlled by the controller body, and then the control component is driven by the operating component to send a temperature control signal to the temperature control circuit board in time, so that the controller body can temporarily replace the control main board to send instructions to make the original heating system of the etching machine work, and then supply power to the cavity to keep it warm, so as to prevent the cavity temperature from dropping sharply in a short time, so as to avoid affecting the production efficiency. After the hardware replacement is completed, switch back to the control main board for control, so that the control signal of the whole machine is not affected.

[0037] In addition, it should be recognized that although the present invention has been disclosed as a preferred embodiment, the above embodiment is not intended to limit the present invention. For any technician familiar with the art, without departing from the scope of the technical solution of the present invention, the above disclosed technical content can be used to make many possible changes and modifications to the technical solution of the present invention, or modified into equivalent embodiments of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiment based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still falls within the scope of protection of the technical solution of the present invention.

Claims

1. A temperature-reduction protection device, characterized in that: It includes a controller body, which includes an operating component and a control component. The operating component is connected to the input end of the control component. The control component is provided with a temperature signal output port. The temperature signal output port is detachably connected to a temperature signal input port of a temperature control circuit board on an etching machine control main board. The operating component can be used to drive the control component to send a temperature control signal to the temperature control circuit board.

2. The temperature drop protection device according to claim 1, characterized in that: The anti-cooling protection device also includes a power supply, and the power supply is used to supply power to the controller body.

3. The temperature drop protection device according to claim 2, characterized in that: The operating component is provided with a switch button, and the switch button is used to control the start and stop of the power supply.

4. The temperature drop protection device according to claim 3, characterized in that: The operating component is also provided with a temperature adjustment button, through which the control component can be driven to send a temperature adjustment signal to the temperature control circuit board.

5. The temperature drop protection device according to claim 4, characterized in that: The operating component is also provided with a display screen, and the display screen is used to display the controlled temperature.

6. The temperature drop protection device according to claim 1, characterized in that: The controller body also includes a pressure signal output port, which is detachably connected to a pressure signal input port of a pressure control circuit board on the etching machine control main board. The operating component can drive the control component to send a pressure control signal to the pressure control circuit board.

7. The temperature drop protection device according to claim 6, characterized in that: The operating component is provided with a pressure regulating button, through which the control component can be driven to send a pressure regulating signal to the pressure control circuit board.

8. The temperature drop protection device according to claim 6, characterized in that: The temperature signal output port is plug-connected with the temperature signal input port, and the pressure signal output port is plug-connected with the pressure signal input port.

9. The temperature drop protection device according to claim 1, characterized in that: A human-machine interaction interface is arranged on the operating component.

10. The temperature drop protection device according to claim 1, characterized in that: The controller body further includes a box body, the operating component is arranged on the outer surface of the box body, and the control component is arranged inside the box body.

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