Monitoring device of heater
By designing a heater monitoring device in semiconductor manufacturing, using lasers and four-quadrant photocells to monitor the heater level in real time and alarm, the poor semiconductor uniformity caused by heater tilt or jitter is solved, and manufacturing quality is ensured.
Patent Information
- Application Number
- CN202420900094.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-28
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2034-04-28
AI Technical Summary
During semiconductor manufacturing, the status of the existing heaters is not monitored, causing the heaters to tilt or abnormal jitter, affecting the uniformity of the semiconductor, and even leading to the generation of defective products.
A heater monitoring device is designed, including a level monitoring module, a programmable logic controller and an alarm. The level of the heater is monitored in real time through lasers and four-quadrant photocells, and the alarm is activated when it is out of range to remind the operation. For personnel adjustment, the installation position of the heater can be equipped with a vibration sensor and a display screen.
Real-time monitoring of the level of the heater is achieved, and poor semiconductor uniformity or defective products are avoided due to the inclination or jitter of the heater, ensuring the stable quality of semiconductor manufacturing.
Smart Images
Figure CN222168345U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a monitoring device for a heater. Background Art
[0002] In the semiconductor manufacturing process, CVD (Chemical Vapor Deposition) equipment is usually required, such as Figure 1 As shown, the CVD equipment includes a chamber 1, a heater 2 (heater), a connector 3 and a guide rail 4; the gas for chemical reaction is input into the chamber 1 from the outside; the heater 2 is used to place and heat the wafer, and the upper end of the heater 2 is arranged in the chamber 1; the connector 3 includes a horizontal piece 31 and a vertical piece 32, and the horizontal piece 31 and the vertical piece 32 are connected by screws, the lower end of the heater 2 is connected to the horizontal piece 31, and the vertical piece 32 is connected to the sleeve in the guide rail 4; the lead screw in the guide rail 4 can drive the sleeve to move up and down, thereby making the wafer on the heater 2 move up and down in the chamber 1 to adjust the film thickness and film forming speed of the wafer.
[0003] However, if Figure 2 As shown, the current state of the heater 2 is not monitored. When the screws connecting the horizontal piece 31 and the vertical piece 32 are loosened, the heater 2 is tilted. After the wafer on the heater 2 is tilted, the uniformity of the semiconductor is poor, and even defective products appear. In addition, if the sleeve and the lead screw are severely worn, the connector 3 will vibrate abnormally, and the abnormal vibration of the connector 3 will cause the heater 2 and the wafer to vibrate abnormally, which will eventually lead to poor uniformity of the semiconductor and even defective products appear. Utility Model Content
[0004] The utility model provides a monitoring device for a heater, so as to solve the technical problem that the state of the heater cannot be monitored.
[0005] In order to solve the above technical problems, the utility model provides a monitoring device for a heater, wherein the upper end of the heater is arranged in a cavity, and the lower end of the heater is arranged outside the cavity and connected to a horizontal member; the device includes a level monitoring module, a programmable logic controller and an alarm, and the level monitoring module and the alarm are respectively communicated with the programmable logic controller; the level monitoring module includes a laser and a four-quadrant photocell, the laser and the four-quadrant photocell are arranged opposite to each other, and the laser emitted by the laser is facing the center of the four-quadrant photocell.
[0006] Optionally, the laser is mounted on the lower surface of the cavity, and the four-quadrant photocell is mounted on the horizontal member or on the lower end of the heater.
[0007] Optionally, the laser is mounted on the lower surface of the cavity by screws.
[0008] Optionally, the four-quadrant photocell is mounted on the horizontal member or on the lower end of the heater by screws.
[0009] Optionally, the laser is mounted on the horizontal member or on the lower end of the heater, and the four-quadrant photocell is mounted on the lower surface of the cavity.
[0010] Optionally, the laser is mounted on the horizontal member or on the lower end of the heater by screws.
[0011] Optionally, the four-quadrant photocell is mounted on the lower surface of the cavity by screws.
[0012] Optionally, the device further comprises a vibration sensor, which is communicatively connected to the programmable logic controller; the vibration sensor is mounted on the horizontal member or on the lower end of the heater.
[0013] Optionally, the device further comprises a display screen, and the display screen is communicatively connected to the programmable logic controller.
[0014] This embodiment also provides another monitoring device for a heater, wherein the upper end of the heater is arranged in a cavity, and the lower end of the heater is arranged outside the cavity and connected to a horizontal member; the device includes a levelness monitoring module, a programmable logic controller and an alarm, and the levelness monitoring module and the alarm are respectively communicated with the programmable logic controller; the levelness monitoring module includes an inclination sensor; the inclination sensor is installed on the horizontal member or on the lower end of the heater.
[0015] The utility model provides a monitoring device for a heater, including a level monitoring module, a programmable logic controller and an alarm. The level monitoring module can obtain a level signal of the heater in real time. The level monitoring module sends the monitored level signal to the programmable logic controller. The programmable logic controller compares the received level signal with a pre-stored level value range. If the received level signal is within the pre-stored level value range, it is determined that the level of the heater is within the range, and the alarm is not activated at this time; if the received level signal is not within the pre-stored level value range, it is determined that the level of the heater is out of range, and the alarm is activated at this time, thereby reminding the operator to adjust the level of the heater in time. The unexpected effect of the device is that it can monitor the level of the heater in real time, avoiding poor uniformity of the semiconductor or defective products due to the tilt of the heater. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 It is a schematic diagram of the partial structure of a CVD device in the prior art.
[0017] Figure 2 yes Figure 1 Schematic diagram of the structure after the heater and horizontal parts are tilted.
[0018] Figure 3 It is a module schematic diagram of a heater monitoring device provided in one embodiment of the utility model.
[0019] Figure 4 This is a partial physical picture of a heater monitoring device provided by an embodiment of the utility model when in use.
[0020] Figure 5 yes Figure 4 Schematic diagram of a top view of a four-quadrant photovoltaic cell.
[0021] [Description of reference numerals is as follows]:
[0022] Cavity-1, heater-2, connector-3, guide rail-4;
[0023] Horizontal piece-31, vertical piece-32;
[0024] Levelness monitoring module-11, programmable logic controller-12, alarm-13, vibration sensor-14;
[0025] Laser-111, four-quadrant photocell-112. DETAILED DESCRIPTION
[0026] In order to make the purpose, advantages and features of the utility model clearer, the following is a further detailed description of a heater monitoring device proposed by the utility model in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are all in a very simplified form and are not in precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model.
[0027] In the description of the present invention, the terms "first", "second", etc. are added for the convenience of description and reference, and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined by the terms "first", "second", etc. may explicitly or implicitly include one or more of the features.
[0028] like Figure 3 to Figure 5As shown, this embodiment provides a monitoring device for a heater 2, wherein the upper end of the heater 2 is arranged in a cavity 1, and the lower end of the heater 2 is arranged outside the cavity 1 and connected to a horizontal member 31; the device comprises a levelness monitoring module 11, a programmable logic controller 12 and an alarm 13, wherein the levelness monitoring module 11 and the alarm 13 are respectively communicated with the programmable logic controller 12; the levelness monitoring module 11 comprises a laser 111 and a four-quadrant photocell 112, wherein the laser 111 and the four-quadrant photocell 112 are arranged opposite to each other, and the laser emitted by the laser 111 is directly facing the center of the four-quadrant photocell 112.
[0029] The level monitoring module 11 is used to obtain the level signal of the heater 2 and send it to the programmable logic controller 12; the programmable logic controller 12 determines whether the level of the heater 2 exceeds the range according to the received level signal and the pre-stored level value range. If the received level signal is within the pre-stored level value range, it is determined that the level of the heater 2 is within the range, and the alarm 13 is not activated at this time; if the received level signal is not within the pre-stored level value range, it is determined that the level of the heater 2 exceeds the range, and the alarm 13 is activated at this time. Specifically, the level monitoring module 11 includes a laser 111 and a four-quadrant photocell 112. The four-quadrant photocell 112 can receive the light signal emitted by the laser 111 and determine the coordinate position of the light signal projection, and then send the coordinate position to the programmable logic controller 12. The programmable logic controller 12 determines whether the horizontal member 31 is tilted according to the coordinate position and the pre-stored coordinate range. If the coordinate position is within the pre-stored coordinate range, it means that the horizontal piece 31 is horizontal or only slightly tilted, and the programmable logic controller 12 determines that the horizontal piece 31 is in a horizontal state; if the coordinate position is not within the pre-stored coordinate range, it means that the horizontal piece 31 is tilted, and the programmable logic controller 12 determines that the horizontal piece 31 is in a tilted state.
[0030] The present embodiment provides a monitoring device for a heater 2, comprising a level monitoring module 11, a programmable logic controller 12 and an alarm 13. The level monitoring module 11 can obtain a level signal of the heater 2 in real time. The level monitoring module 11 sends the monitored level signal to the programmable logic controller 12. The programmable logic controller 12 compares the received level signal with a pre-stored level value range. If the received level signal is within the pre-stored level value range, it is determined that the level of the heater 2 is within the range, and the alarm 13 is not activated at this time; if the received level signal is not within the pre-stored level value range, it is determined that the level of the heater 2 is out of the range, and the alarm 13 is activated at this time, thereby reminding the operator to adjust the level of the heater 2 in time. The unexpected effect of the present device is that it can monitor the level of the heater 2 in real time, avoiding poor uniformity of the semiconductor or defective products due to the tilt of the heater 2.
[0031] Optional, reference Figure 4 As shown, the laser 111 is installed on the lower surface of the cavity 1, and the four-quadrant photocell 112 is installed on the horizontal piece 31 or on the lower end of the heater 2. This makes it convenient to install the laser 111 and the four-quadrant photocell 112, and enables the laser emitted by the laser 111 to be directly facing the center of the four-quadrant photocell 112.
[0032] Optional, reference Figure 4 As shown, the laser 111 is mounted on the lower surface of the cavity 1 by screws, which makes it easy to install the laser 111 and adjust the position of the laser 111 so that the laser emitted by the laser 111 is directly facing the center of the four-quadrant photocell 112.
[0033] Optional, reference Figure 4 As shown, the four-quadrant photocell 112 is mounted on the horizontal member 31 or the lower end of the heater 2 by screws, which makes it convenient to install the four-quadrant photocell 112 and adjust the position of the four-quadrant photocell 112 so that the laser emitted by the laser 111 is directly facing the center of the four-quadrant photocell 112.
[0034] Optional, reference Figure 4 As shown, the laser 111 is mounted on the horizontal member 31 or the lower end of the heater 2, and the four-quadrant photocell 112 is mounted on the lower surface of the cavity 1, so that it is convenient to install the laser 111 and the four-quadrant photocell 112, and the laser emitted by the laser 111 can be directed to the center of the four-quadrant photocell 112. The principle of this embodiment is the same as that of the previous embodiment, except that the installation positions of the laser 111 and the four-quadrant photocell 112 are interchanged.
[0035] Optional, reference Figure 4 As shown, the laser 111 is mounted on the horizontal member 31 or the lower end of the heater 2 by screws, which makes it convenient to install the laser 111 and adjust the position of the laser 111 so that the laser emitted by the laser 111 is directly facing the center of the four-quadrant photocell 112.
[0036] Optional, reference Figure 4 As shown, the four-quadrant photocell 112 is mounted on the lower surface of the cavity 1 by screws, which makes it convenient to install the four-quadrant photocell 112 and adjust the position of the four-quadrant photocell 112 so that the laser emitted by the laser 111 is directly facing the center of the four-quadrant photocell 112.
[0037] Optional, reference Figure 4 As shown, the device further includes a vibration sensor 14, which is in communication connection with the programmable logic controller 12; the vibration sensor 14 is mounted on the horizontal member 31 or on the lower end of the heater 2. The vibration sensor 14 can be directly or indirectly mounted on the heater 2, and the vibration sensor 14 is used to obtain the vibration signal of the heater 2, and send the obtained vibration signal to the programmable logic controller 12, and the programmable logic controller 12 determines whether the vibration amplitude of the heater 2 exceeds the range according to the received vibration signal and the pre-stored vibration value range. If the received vibration signal is within the pre-stored vibration value range, it is determined that the vibration amplitude of the heater 2 does not exceed the range, and the alarm 13 is not activated at this time; if the received vibration signal is not within the pre-stored vibration value range, it is determined that the vibration amplitude of the heater 2 exceeds the range, and the alarm 13 is activated at this time.
[0038] Optional, reference Figure 4 As shown, the device further includes a display screen, which is in communication with the programmable logic controller 12. The programmable logic controller 12 can send the judgment result and the received signal to the display screen for display, and the operator can timely understand the information such as the tilt degree and vibration degree of the heater 2 according to the content displayed on the display screen.
[0039] refer to Figure 3 and Figure 4As shown, based on the same technical concept as the above-mentioned monitoring device for a heater 2, this embodiment provides another monitoring device for a heater 2, wherein the upper end of the heater 2 is arranged in the cavity 1, and the lower end of the heater 2 is arranged outside the cavity 1 and connected to the horizontal member 31; the device comprises a levelness monitoring module 11, a programmable logic controller 12 and an alarm 13, wherein the levelness monitoring module 11 and the alarm 13 are respectively connected to the programmable logic controller 12 in communication; the levelness monitoring module 11 comprises an inclination sensor; the inclination sensor is installed on the horizontal member 31 or the lower end of the heater 2. The inclination sensor can obtain the inclination angle of the horizontal member 31 or the heater 2 and send it to the programmable logic controller 12, and the programmable logic controller 12 can judge the horizontal degree of the heater 2 according to the inclination angle; if the horizontal degree of the heater 2 is within the range, the programmable logic controller 12 does not activate the alarm 13; if the horizontal degree of the heater 2 is not within the range, the programmable logic controller 12 activates the alarm 13.
[0040] In summary, the utility model provides a monitoring device for a heater 2, including a level monitoring module 11, a programmable logic controller 12 and an alarm 13. The level monitoring module 11 can obtain a level signal of the heater 2 in real time. The level monitoring module 11 sends the monitored level signal to the programmable logic controller 12. The programmable logic controller 12 compares the received level signal with the pre-stored level value range. If the received level signal is within the pre-stored level value range, it is determined that the level of the heater 2 is within the range, and the alarm 13 is not activated at this time; if the received level signal is not within the pre-stored level value range, it is determined that the level of the heater 2 is out of range, and the alarm 13 is activated at this time, thereby reminding the operator to adjust the level of the heater 2 in time. The unexpected effect of the device is that it can monitor the level of the heater 2 in real time, avoiding poor uniformity of the semiconductor or defective products due to the tilt of the heater 2.
[0041] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation to the scope of the utility model. Any changes and modifications made by ordinary technicians in this field based on the above disclosure are within the protection scope of the utility model.
Claims
1. A monitoring device for a heater, wherein the upper end of the heater is arranged in a cavity, and the lower end of the heater is arranged outside the cavity and connected to a horizontal member; It is characterized in that The device includes a level monitoring module, a programmable logic controller and an alarm, wherein the level monitoring module and the alarm are respectively communicated with the programmable logic controller; the level monitoring module includes a laser and a four-quadrant photocell, wherein the laser and the four-quadrant photocell are arranged opposite to each other, and the laser emitted by the laser is facing the center of the four-quadrant photocell.
2. A heater monitoring device as claimed in claim 1, It is characterized in that The laser is mounted on the lower surface of the cavity, and the four-quadrant photocell is mounted on the horizontal member or on the lower end of the heater.
3. A heater monitoring device as claimed in claim 2, It is characterized in that The laser is mounted on the lower surface of the cavity by screws.
4. A heater monitoring device as claimed in claim 2, It is characterized in that The four-quadrant photocell is mounted on the horizontal member or the lower end of the heater by screws.
5. A heater monitoring device as claimed in claim 1, It is characterized in that The laser is mounted on the horizontal member or on the lower end of the heater, and the four-quadrant photocell is mounted on the lower surface of the cavity.
6. A heater monitoring device as claimed in claim 5, It is characterized in that The laser is mounted on the horizontal member or the lower end of the heater by screws.
7. A heater monitoring device as claimed in claim 5, It is characterized in that The four-quadrant photocell is mounted on the lower surface of the cavity by screws.
8. A heater monitoring device as claimed in claim 1, It is characterized in that The device further comprises a vibration sensor which is in communication connection with the programmable logic controller; the vibration sensor is mounted on the horizontal member or on the lower end of the heater.
9. A heater monitoring device as claimed in claim 1, It is characterized in that The device also includes a display screen, which is communicatively connected to the programmable logic controller.
10. A monitoring device for a heater, wherein the upper end of the heater is disposed in a cavity, and the lower end of the heater is disposed outside the cavity and connected to a horizontal member; It is characterized in that The device includes a level monitoring module, a programmable logic controller and an alarm, wherein the level monitoring module and the alarm are respectively connected to the programmable logic controller for communication; the level monitoring module includes an inclination sensor; and the inclination sensor is installed on the horizontal member or on the lower end of the heater.