Circulating water cooling system for expanding unit Czochralski single crystal manufacturing process

Abstract

The utility model discloses a circulating water cooling system for an expanded unit Czochralski single crystal manufacturing process, which relates to the technical field of single crystal silicon production and comprises a single crystal furnace area, a water inlet valve is arranged on the inlet side of the single crystal furnace area, and a water outlet valve is arranged on the outlet side of the single crystal furnace area; the circulating water pump groups are connected with the single crystal furnace areas in a one-to-one correspondence manner; the natural ventilation dry-cooling tower comprises a natural ventilation tower body and a plurality of dry-cooling sectors arranged along the periphery of the natural ventilation tower body; the mechanical ventilation wet cooling tower and all the dry cooling sectors are arranged in a tower combination mode or a tower separation mode; each water outlet valve is connected with the inlet end of the hot water main pipe, and the inlet end of each dry-wet combined cooling unit is connected with the outlet end of the hot water main pipe; and the outlet end of each dry-wet combined cooling unit is connected with the inlet end of the cold water main pipe, and each water inlet valve is connected with the outlet end of the cold water main pipe. According to the system, the compatibility of cooling loads of all furnace areas can be improved, and the configuration scale and investment of the cooling system are reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon production, and more specifically to a circulating water cooling system for a Czochralski single crystal process in an expanded unit system. Background Art

[0002] A large amount of heat is generated during the production process of single crystal silicon pulling, which needs to be removed by a circulating water cooling system. The existing circulating water cooling system uses mechanical ventilation cooling towers for cooling. There are many types of cooling towers, such as open water-cooled mechanical towers, closed evaporative cooling mechanical towers, and dry-wet combined mechanical towers. All of them are mechanically ventilated, and a large amount of fan power consumption and noise pollution are generated during the production process.

[0003] The existing closed-loop water cooling system for CZ single crystal pulling process is mostly a distributed system, with a circulating water cooling system equipped with a single furnace area as a unit, which is an independent unit system. The production of single crystal furnace pulling includes processes such as material mixing, crystal pulling and rod taking. The heat generated in each process is different. For a single furnace or more than 100 furnaces in a single area, it is a variable load process. The actual load will reach the maximum load, while the total load of thousands of furnaces in the whole plant is relatively stable at 60%-70% of the maximum load.

[0004] In the prior art, the cooling tower is a mechanical ventilation tower with a large installed power. When the whole plant loses power, the cooling tower loses power and cannot dissipate heat. Therefore, an open water pool with a certain amount of water retention is required in the circulating water cooling system. When the mechanical ventilation cooling tower loses power and cannot provide cooling when the whole plant loses power, the cold capacity of the water retained in the open water pool is used to cool the high-temperature furnace body to avoid high-temperature furnace explosion. However, the setting of the open water pool requires the circulating pump to not only overcome the system resistance, but also overcome the water head elevation of the cooling tower, which increases the circulating pump head and operating power consumption.

[0005] In summary, how to overcome the shortcomings of the closed-loop water cooling system of the traditional CZ single crystal process, improve the compatibility of the cooling loads of each furnace zone, and reduce the configuration scale and investment of the cooling system are issues that urgently need to be solved by technical personnel in this field. Utility Model Content

[0006] In view of this, the purpose of the utility model is to provide an expanded unit-based Czochralski single crystal process circulating water cooling system to overcome the shortcomings of the traditional Czochralski single crystal process closed circulating water cooling system, improve the compatibility of the cooling load of each furnace zone, and reduce the cooling system configuration scale and investment.

[0007] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0008] A circulating water cooling system for a Czochralski single crystal process of an expanded unit system, comprising:

[0009] The single crystal furnace area has a water inlet valve on the inlet side and a water outlet valve on the outlet side;

[0010] A circulating water pump group, which is connected to each of the single crystal furnace zones in a one-to-one correspondence;

[0011] A natural ventilation dry cooling tower comprises a natural ventilation tower body and a plurality of dry cooling sectors arranged along the peripheral area of ​​the natural ventilation tower body;

[0012] A mechanical ventilation wet cooling tower, which is arranged together with each of the dry cooling sectors or in separate towers;

[0013] A hot water main pipe, each of the water outlet valves is connected to the inlet end of the hot water main pipe, and the inlet end of each of the dry cooling sectors is connected to the outlet end of the hot water main pipe;

[0014] The outlet end of each mechanical ventilation wet cooling tower is connected to the inlet end of the cold water main pipe, and each water inlet valve is connected to the outlet end of the cold water main pipe.

[0015] In one embodiment, each of the mechanical ventilation wet cooling towers is distributed around the periphery of each of the dry cooling sectors, and the dry cooling sectors and the mechanical ventilation wet cooling towers in the same zone constitute a dry-wet combined cooling unit, which includes a unit water inlet pipe, a unit water inlet valve arranged on the unit water inlet pipe, a unit water outlet pipe, a unit water outlet valve arranged on the unit water outlet pipe, and a unit bypass valve, wherein the unit bypass valve is arranged between the unit water inlet pipe and the unit water outlet pipe;

[0016] The inlet end of the unit water inlet pipe is connected to the outlet end of the hot water mother pipe, the outlet end of the unit water inlet pipe is connected to the inlet end of the dry cooling sector, the outlet end of the dry cooling sector is connected to the inlet end of the mechanical ventilation wet cooling tower, the outlet end of the mechanical ventilation wet cooling tower is connected to the inlet end of the unit water outlet pipe, and the outlet end of the unit water outlet pipe is connected to the inlet end of the cold water mother pipe.

[0017] In one embodiment, the resistance of the unit bypass valve matches the resistance of the dry-wet combined cooling unit, and the unit bypass valve is used to close when the dry-wet combined cooling unit is put into operation and open when the dry-wet combined cooling unit is stopped.

[0018] In one embodiment, each of the dry cooling sectors comprises a dry cooling sector water inlet pipe, a dry cooling sector water inlet valve disposed on the dry cooling sector water inlet pipe, a dry cooling sector water outlet pipe, a dry cooling sector water outlet valve disposed on the dry cooling sector water outlet pipe, and a dry cooling sector bypass valve, wherein the dry cooling sector bypass valve is disposed between the dry cooling sector water inlet pipe and the dry cooling sector water outlet pipe;

[0019] Each of the mechanical ventilation wet cooling towers comprises a wet cooling tower water inlet pipe, a wet cooling tower water inlet valve arranged on the wet cooling tower water inlet pipe, a wet cooling tower water outlet pipe, a wet cooling tower water outlet valve arranged on the wet cooling tower water outlet pipe, and a wet cooling tower bypass valve, wherein the wet cooling tower bypass valve is arranged between the wet cooling tower water inlet pipe and the wet cooling tower water outlet pipe;

[0020] The inlet end of the dry cooling sector water inlet pipe is connected to the outlet end of the hot water mother pipe, the outlet end of the dry cooling sector water inlet pipe is connected to the inlet end of the dry cooling sector, the outlet end of the dry cooling sector is connected to the inlet end of the dry cooling sector water outlet pipe, the outlet end of the dry cooling sector water outlet pipe is connected to the inlet end of the dry cooling tower water outlet mother pipe, the outlet end of the dry cooling tower water outlet mother pipe is connected to the inlet end of the wet cooling tower water inlet pipe, the outlet end of the wet cooling tower water inlet pipe is connected to the inlet end of the mechanical ventilation wet cooling tower, the outlet end of the mechanical ventilation wet cooling tower is connected to the inlet end of the wet cooling tower water outlet pipe, and the outlet end of the wet cooling tower water outlet pipe is connected to the inlet end of the cold water mother pipe.

[0021] In one embodiment, each of the dry cooling sectors includes a plurality of dry cooling radiators, and each of the dry cooling radiators is vertically arranged around the periphery of the lower portion of the natural ventilation tower body.

[0022] In one embodiment, the circulating water pump group is provided on the inlet side or the outlet side of the single crystal furnace zone.

[0023] In one embodiment, the plurality of circulating water pump groups include at least one circulating water pump group with uninterruptible power supply.

[0024] When using the expanded unit system CZ single crystal process circulating water cooling system provided by the utility model, if the mechanical ventilation wet cooling tower is arranged with each dry cooling sector, that is, each mechanical ventilation wet cooling tower is connected in series with each dry cooling sector in a one-to-one correspondence, the mechanical ventilation wet cooling tower and the dry cooling sector in the same partition form a dry-wet combined cooling unit, and each dry-wet combined cooling unit is connected in parallel between the hot water main pipe and the cold water main pipe. During the operation of the system, the circulating water flows out from the single crystal furnace area, and then, the circulating water can be driven by the circulating water pump group to cool through the dry cooling sector first, and then cooled through the mechanical ventilation wet cooling tower. When the circulating water reaches the required cooling temperature, it can flow back to the single crystal furnace area.

[0025] Among them, a dry-wet combined cooling unit can cool down one or more single crystal furnace areas. When the single crystal furnace area that the dry-wet combined cooling unit is responsible for needs to be cooled, it indicates that the dry-wet combined cooling unit needs to operate normally. At this time, the circulating water can be cooled by the dry cooling sector first, and then cooled by the mechanical ventilation wet cooling tower. In addition, if the dry-wet combined cooling unit fails, the circulating water can be cooled by other dry-wet combined cooling units, hot water main pipes and cold water main pipes, and the cooled circulating water can be transported back to the single crystal furnace area.

[0026] If the mechanical ventilation wet cooling tower and each dry cooling sector are arranged in a tower, that is, each mechanical ventilation wet cooling tower and each dry cooling sector are arranged separately and connected in series through pipelines, each mechanical ventilation wet cooling tower and each dry cooling sector can operate separately or together. During the operation of the system, the circulating water flows out from the single crystal furnace area, and then, driven by the circulating water pump group, the circulating water can only enter the mechanical ventilation wet cooling tower for cooling, or only enter the dry cooling sector for cooling, or cool through the dry cooling sector and then through the mechanical ventilation wet cooling tower. When the circulating water reaches the required cooling temperature, it can flow back to the single crystal furnace area. Therefore, even if one of the natural ventilation dry cooling tower or the mechanical ventilation wet cooling tower is damaged, the circulating water can continue to be cooled through the other component.

[0027] When configuring the circulating water cooling system for each single crystal furnace area, this system must be configured according to the maximum load to meet the actual cooling needs. If all single crystal furnace areas share the same circulating water cooling system, the loads of each single crystal furnace area can be compatible and complementary, and the configuration scale of the cooling system (natural ventilation dry cooling tower and mechanical ventilation wet cooling tower) can be reduced and still meet the production needs. That is, this system overcomes the shortcomings of the closed-loop circulating water cooling system of the traditional CZ single crystal process, improves the compatibility of the cooling loads of each single crystal furnace area, and reduces the configuration scale and investment of the cooling system. Moreover, the natural ventilation dry cooling tower solves the safety problem of continuous cooling in the event of a power outage in the entire plant. At the same time, it saves a lot of power consumption of the fan and circulating water pump group of the mechanical ventilation wet cooling tower, achieving the purpose of energy saving.

[0028] In summary, the expanded unit-based Czochralski single crystal process circulating water cooling system provided by the utility model overcomes the shortcomings of the traditional Czochralski single crystal process closed circulating water cooling system, improves the compatibility of the cooling load of each furnace zone, and reduces the configuration scale and investment of the cooling system. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0030] Figure 1 This is a schematic structural diagram of the circulating water cooling system for the CZ single crystal process of the enlarged unit system provided by the utility model;

[0031] Figure 2 Another structural schematic diagram of the circulating water cooling system for the expanded unit-based Czochralski single crystal process provided by the utility model.

[0032] Figure 1-Figure 2 middle:

[0033] 1 is the single crystal furnace area, 1-1 is the water inlet valve, 1-2 is the water outlet valve, 2 is the circulating water pump group, 3 is the natural ventilation dry cooling tower, 3-1 is the dry cooling sector, 3-1-1 is the dry cooling sector water inlet pipe, 3-1-2 is the dry cooling sector water inlet valve, 3-1-3 is the dry cooling sector water outlet pipe, 3-1-4 is the dry cooling sector water outlet valve, 3-1-5 is the dry cooling sector bypass valve, 3-1-6 is the dry cooling radiator, 3-2 is the natural ventilation tower body, 4 is the mechanical ventilation Rheumatoid cooling tower, 4-1 is the wet cooling tower water inlet pipe, 4-2 is the wet cooling tower water inlet valve, 4-3 is the wet cooling tower water outlet pipe, 4-4 is the wet cooling tower water outlet valve, 4-5 is the wet cooling tower bypass valve, 5 is the hot water main pipe, 6 is the cold water main pipe, 7 is the dry-wet combined cooling unit, 7-1 is the unit water inlet pipe, 7-2 is the unit water inlet valve, 7-3 is the unit water outlet pipe, 7-4 is the unit water outlet valve, 7-5 is the unit bypass valve, and 8 is the dry cooling tower water outlet main pipe. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] The core of the utility model is to provide an expanded unit-based Czochralski single crystal process circulating water cooling system, overcome the shortcomings of the traditional Czochralski single crystal process closed circulating water cooling system, improve the compatibility of the cooling load of each furnace area, and reduce the configuration scale and investment of the cooling system.

[0036] Please refer to Figure 1 and Figure 2 , Figure 1 This is a schematic structural diagram of the circulating water cooling system for the CZ single crystal process of the enlarged unit system provided by the utility model; Figure 2 Another structural schematic diagram of the circulating water cooling system for the expanded unit-based Czochralski single crystal process provided by the utility model.

[0037] This specific embodiment provides a circulating water cooling system for a Czochralski single crystal process for an expanded unit system, characterized by comprising:

[0038] The single crystal furnace area 1 has a water inlet valve 1-1 on its inlet side and a water outlet valve 1-2 on its outlet side;

[0039] A circulating water pump group 2, which is connected to each single crystal furnace zone 1 in a one-to-one correspondence;

[0040] The natural ventilation dry cooling tower 3 comprises a natural ventilation tower body 3-2 and a plurality of dry cooling sectors 3-1 arranged along the peripheral area of ​​the natural ventilation tower body 3-2;

[0041] A mechanical ventilation wet cooling tower 4, which is arranged together with each dry cooling sector 3-1 or separately;

[0042] The hot water main pipe 5, each water outlet valve 1-2 is connected to the inlet end of the hot water main pipe 5, and the inlet end of each dry cooling sector 3-1 is connected to the outlet end of the hot water main pipe 5;

[0043] The outlet end of each mechanical ventilation wet cooling tower 4 is connected to the inlet end of the cold water main pipe 6 , and each water inlet valve 1 - 1 is connected to the outlet end of the cold water main pipe 6 .

[0044] During actual use, the shape, structure, type, number, etc. of the single crystal furnace area 1, the circulating water pump group 2, the natural ventilation dry cooling tower 3, the mechanical ventilation wet cooling tower 4, the hot water main pipe 5 and the cold water main pipe 6 can be determined according to actual conditions and actual needs.

[0045] When using the expanded unit system CZ single crystal process circulating water cooling system provided by the utility model, if the mechanical ventilation wet cooling tower 4 is arranged with each dry cooling sector 3-1, that is, each mechanical ventilation wet cooling tower 4 is connected in series with each dry cooling sector 3-1 in a one-to-one correspondence, the mechanical ventilation wet cooling tower 4 and the dry cooling sector 3-1 in the same partition are combined to form a dry-wet combined cooling unit 7, and each dry-wet combined cooling unit 7 is connected in parallel between the hot water main pipe 5 and the cold water main pipe 6. During the operation of the system, the circulating water flows out from the single crystal furnace area 1, and then, the circulating water can be driven by the circulating water pump group 2 to cool through the dry cooling sector 3-1 first, and then cooled through the mechanical ventilation wet cooling tower 4, and when the circulating water reaches the required cooling temperature, it can flow back into the single crystal furnace area 1.

[0046] Among them, a dry-wet combined cooling unit 7 can cool down one or more single crystal furnace areas 1. When the single crystal furnace area 1 that the dry-wet combined cooling unit 7 is responsible for needs to be cooled, it indicates that the dry-wet combined cooling unit 7 needs to operate normally. At this time, the circulating water can be cooled through the dry cooling sector 3-1 first, and then cooled through the mechanical ventilation wet cooling tower 4. In addition, if the dry-wet combined cooling unit 7 fails, the circulating water can be cooled by other dry-wet combined cooling units 7, the hot water main pipe 5 and the cold water main pipe 6, and the cooled circulating water can be transported back to the single crystal furnace area 1.

[0047] If the mechanical ventilation wet cooling tower 4 and each dry cooling sector 3-1 are arranged as separate towers, that is, each mechanical ventilation wet cooling tower 4 and each dry cooling sector 3-1 are arranged separately and connected in series through pipelines, each mechanical ventilation wet cooling tower 4 and each dry cooling sector 3-1 can be operated separately or together. During the operation of the system, the circulating water flows out from the single crystal furnace area 1, and then, the circulating water can enter the mechanical ventilation wet cooling tower 4 only for cooling under the driving action of the circulating water pump group 2, or only enter the dry cooling sector 3-1 for cooling, or cool through the dry cooling sector 3-1 and then cool through the mechanical ventilation wet cooling tower 4. When the circulating water reaches the required cooling temperature, it can flow back into the single crystal furnace area 1. Therefore, even if one of the natural ventilation dry cooling tower 3 or the mechanical ventilation wet cooling tower 4 is damaged, the circulating water can continue to be cooled by the other component.

[0048] When configuring the circulating water cooling system for each single crystal furnace area 1, the system must be configured according to the maximum load to meet the actual cooling needs. If all single crystal furnace areas 1 share the same circulating water cooling system, each single crystal furnace area 1 can form load compatibility and complementarity, and the configuration scale of the cooling system (natural ventilation dry cooling tower 3 and mechanical ventilation wet cooling tower 4) can be reduced and still meet production needs. That is, the system overcomes the shortcomings of the closed-loop circulating water cooling system of the traditional direct-pull single crystal process, improves the compatibility of the cooling load of each single crystal furnace area 1, and reduces the configuration scale and investment of the cooling system. Moreover, the natural ventilation dry cooling tower 3 solves the safety problem of continuous cooling in the event of a power outage in the entire plant, and at the same time, it saves a lot of power consumption of the fan and circulating water pump group 2 of the mechanical ventilation wet cooling tower 4, thereby achieving the purpose of energy saving.

[0049] In summary, the expanded unit-based Czochralski single crystal process circulating water cooling system provided by the utility model overcomes the shortcomings of the traditional Czochralski single crystal process closed circulating water cooling system, improves the compatibility of the cooling load of each furnace zone, and reduces the configuration scale and investment of the cooling system.

[0050] In one embodiment, each mechanical ventilation wet cooling tower 4 is distributed around the periphery of each dry cooling sector 3-1, and the dry cooling sector 3-1 and the mechanical ventilation wet cooling tower 4 in the same partition constitute a dry-wet combined cooling unit 7, which includes a unit water inlet pipe 7-1, a unit water inlet valve 7-2 arranged on the unit water inlet pipe 7-1, a unit water outlet pipe 7-3, a unit water outlet valve 7-4 arranged on the unit water outlet pipe 7-3, and a unit bypass valve 7-5, and the unit bypass valve 7-5 is arranged between the unit water inlet pipe 7-1 and the unit water outlet pipe 7-3;

[0051] The inlet end of the unit water inlet pipe 7-1 is connected to the outlet end of the hot water mother pipe 5, the outlet end of the unit water inlet pipe 7-1 is connected to the inlet end of the dry cooling sector 3-1, the outlet end of the dry cooling sector 3-1 is connected to the inlet end of the mechanical ventilation wet cooling tower 4, the outlet end of the mechanical ventilation wet cooling tower 4 is connected to the inlet end of the unit water outlet pipe 7-3, and the outlet end of the unit water outlet pipe 7-3 is connected to the inlet end of the cold water mother pipe 6.

[0052] It should be noted that the mechanical ventilation wet cooling tower 4 surrounds the dry cooling sector 3-1 of the natural ventilation dry cooling tower 3 and is arranged together with the natural ventilation dry cooling tower 3, and the dry cooling sector 3-1 and the mechanical ventilation wet cooling tower 4 in the same partition correspond to each other to form a dry-wet combined cooling unit 7. During use, the dry cooling sector 3-1 and the mechanical ventilation wet cooling tower 4 in the dry-wet combined cooling unit 7 are connected in series, and the structure is as follows: Figure 1 shown.

[0053] When a dry-wet combined cooling unit 7 is required to operate, the unit water inlet valve 7-2 and the unit water outlet valve 7-4 of the dry-wet combined cooling unit 7 can be controlled to open, so that the circulating water is first cooled by the dry cooling sector 3-1 in the dry-wet combined cooling unit 7, and then cooled by the mechanical ventilation wet cooling tower 4 in the same zone. When the dry-wet combined cooling unit 7 is not required to operate, the unit water inlet valve 7-2 and the unit water outlet valve 7-4 of the partition can be closed, and the unit bypass valve 7-5 can be opened.

[0054] In one embodiment, the resistance of the unit bypass valve 7-5 is matched with the resistance of the dry-wet combined cooling unit 7. The unit bypass valve 7-5 is used to close when the dry-wet combined cooling unit 7 is put into operation and open when the dry-wet combined cooling unit 7 is stopped to ensure the pressure stability of the single crystal furnace area 1.

[0055] In one embodiment, each dry cooling sector 3-1 includes a dry cooling sector water inlet pipe 3-1-1, a dry cooling sector water inlet valve 3-1-2 arranged on the dry cooling sector water inlet pipe 3-1-1, a dry cooling sector water outlet pipe 3-1-3, a dry cooling sector water outlet valve 3-1-4 arranged on the dry cooling sector water outlet pipe 3-1-3, and a dry cooling sector bypass valve 3-1-5, and the dry cooling sector bypass valve 3-1-5 is arranged between the dry cooling sector water inlet pipe 3-1-1 and the dry cooling sector water outlet pipe 3-1-3;

[0056] Each mechanical ventilation wet cooling tower 4 comprises a wet cooling tower water inlet pipe 4-1, a wet cooling tower water inlet valve 4-2 arranged on the wet cooling tower water inlet pipe 4-1, a wet cooling tower water outlet pipe 4-3, a wet cooling tower water outlet valve 4-4 arranged on the wet cooling tower water outlet pipe 4-3, and a wet cooling tower bypass valve 4.5, wherein the wet cooling tower bypass valve 4-5 is arranged between the wet cooling tower water inlet pipe 4-1 and the wet cooling tower water outlet pipe 4-3;

[0057] The inlet end of the dry cooling sector water inlet pipe 3-1-1 is connected to the outlet end of the hot water mother pipe 5, the outlet end of the dry cooling sector water inlet pipe 3-1-1 is connected to the inlet end of the dry cooling sector 3-1, the outlet end of the dry cooling sector 3-1 is connected to the inlet end of the dry cooling sector water outlet pipe 3-1-3, the outlet end of the dry cooling sector water outlet pipe 3-1-3 is connected to the inlet end of the dry cooling tower water outlet mother pipe 8, the outlet end of the dry cooling tower water outlet mother pipe 8 is connected to the inlet end of the wet cooling tower water inlet pipe 4-1, the outlet end of the wet cooling tower water inlet pipe 4-1 is connected to the inlet end of the mechanical ventilation wet cooling tower 4, the outlet end of the mechanical ventilation wet cooling tower 4 is connected to the inlet end of the wet cooling tower water outlet pipe 4-3, the outlet end of the wet cooling tower water outlet pipe 4-3 is connected to the inlet end of the cold water mother pipe 6, and the structure is as follows Figure 2 shown.

[0058] It should be noted that the above structure is a case where the mechanically ventilated wet cooling tower 4 and the naturally ventilated dry cooling tower 3 are arranged separately. During use, each mechanically ventilated wet cooling tower 4 and each dry cooling sector 3-1 can be operated separately or together. For example, during the operation of the system, the circulating water flows out from the single crystal furnace area 1, and then, driven by the circulating water pump group 2, the circulating water can only enter the mechanically ventilated wet cooling tower 4 for cooling (at this time, the dry cooling sector water inlet valve 3-1-2 and the dry cooling sector water outlet valve 3-1-4 can be closed, the dry cooling sector bypass valve 3-1-5 can be opened, and the wet cooling tower water inlet valve 4-2 and the wet cooling tower water outlet valve 4-4 can be opened, and the wet cooling tower bypass valve 4-5 can be closed), or only enter the dry cooling sector 3-1 for cooling (at this time, the wet cooling tower water inlet valve 4-2 and the wet cooling tower water outlet valve 4-4 can be closed, and the wet cooling tower water outlet valve 4-4 can be opened. The circulating water can be cooled by the dry cooling tower 3-1 and then cooled by the mechanical ventilation wet cooling tower 4 (the wet cooling tower bypass valve 4-5 and the dry cooling sector bypass valve 3-1-5 can be closed at this time, and the wet cooling tower inlet valve 4-2 and the wet cooling tower outlet valve 4-4 and the dry cooling sector inlet valve 3-1-2 and the dry cooling sector outlet valve 3-1-4 can be opened). When the circulating water reaches the required cooling temperature, it can flow back to the single crystal furnace area 1. Therefore, even if one of the natural ventilation dry cooling tower 3 or the mechanical ventilation wet cooling tower 4 is damaged, the circulating water can continue to be cooled by the other component.

[0059] In one embodiment, each dry cooling sector 3-1 includes a plurality of dry cooling radiators 3-1-6, and each dry cooling radiator 3-1-6 is vertically arranged around the outer periphery of the lower part of the natural ventilation tower body 3-2 to achieve cooling and heat dissipation operations of the dry cooling sector 3-1 through the plurality of dry cooling radiators 3-1-6.

[0060] In one embodiment, a circulating water pump group 2 is provided at the inlet side or outlet side of the single crystal furnace area 1. Preferably, the circulating water pump group 2 can be arranged at the outlet side of the single crystal furnace area 1 to reduce the furnace body pressure of the single crystal furnace area 1.

[0061] In one embodiment, the plurality of circulating water pump groups 2 include at least one circulating water pump group 2 with uninterruptible power supply. The circulating water pump group 2 with uninterruptible power supply can ensure that when the whole plant loses power, the circulating water system can still operate at the minimum circulation flow rate, and take away the furnace body heat of the single crystal furnace area 1 through the natural ventilation dry cooling tower 3 to avoid high-temperature furnace explosion.

[0062] In addition, it should be noted that the system uses the circulating water pump groups 2 distributed in each single crystal furnace area 1 to transport the circulating water that has absorbed the production heat in each single crystal furnace area 1 to the natural ventilation dry cooling tower 3 and the mechanical ventilation wet cooling tower 4 through the hot water main pipe 5 for cooling, and then returns to each single crystal furnace area 1 through the cold water main pipe 6 for circulating cooling.

[0063] This system adopts the expansion unit system, natural ventilation cooling and fully closed system, which overcomes the shortcomings of the closed circulating water cooling system of the traditional direct-pull single crystal process, improves the compatibility of the cooling load of each single crystal furnace area 1, and reduces the configuration scale and investment of the cooling system (natural ventilation dry cooling tower 3 and mechanical ventilation wet cooling tower 4); and the natural ventilation dry cooling tower 3 solves the safety problem of continuous cooling in the event of power outage in the whole plant, and saves a lot of power consumption of the fan and circulating water pump group 2 of the mechanical ventilation wet cooling tower 4, achieving the benefit of energy saving.

[0064] In addition, it should be noted that the orientation or positional relationship indicated by "in and out" etc. in the present invention is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of simplifying the description and facilitating understanding, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0065] Each embodiment in this specification is described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the embodiments can be referenced to each other. Any combination of all embodiments provided by the utility model is within the protection scope of this utility model and will not be described in detail here.

[0066] The above is a detailed introduction to the circulating water cooling system for the expanded unit-based CZ single crystal process provided by the present invention. This article uses specific examples to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method and core idea of ​​the present invention. It should be pointed out that for ordinary technicians in this technical field, without departing from the principles of the present invention, the present invention can also be improved and modified in a number of ways, and these improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A circulating water cooling system for a Czochralski single crystal process in an expanded unit system, characterized in that: include: A single crystal furnace area (1) is provided with a water inlet valve (1-1) on its inlet side and a water outlet valve (1-2) on its outlet side; A circulating water pump group (2), which is connected to each of the single crystal furnace zones (1) in a one-to-one correspondence; A natural ventilation dry cooling tower (3), comprising a natural ventilation tower body (3-2) and a plurality of dry cooling sectors (3-1) arranged along the periphery of the natural ventilation tower body (3-2); A mechanical ventilation wet cooling tower (4) which is arranged together with each of the dry cooling sectors (3-1) or in separate towers; A hot water main pipe (5), each of the water outlet valves (1-2) is connected to the inlet end of the hot water main pipe (5), and the inlet end of each of the dry cooling sectors (3-1) is connected to the outlet end of the hot water main pipe (5); The outlet end of each mechanical ventilation wet cooling tower (4) is connected to the inlet end of the cold water main pipe (6), and each water inlet valve (1-1) is connected to the outlet end of the cold water main pipe (6).

2. The circulating water cooling system for the Czochralski single crystal process according to claim 1 is characterized in that: Each of the mechanical ventilation wet cooling towers (4) is distributed around the periphery of each of the dry cooling sectors (3-1); the dry cooling sectors (3-1) and the mechanical ventilation wet cooling towers (4) in the same sector constitute a dry-wet combined cooling unit (7), which comprises a unit water inlet pipe (7-1), a unit water inlet valve (7-2) arranged on the unit water inlet pipe (7-1), a unit water outlet pipe (7-3), a unit water outlet valve (7-4) arranged on the unit water outlet pipe (7-3), and a unit bypass valve (7-5); the unit bypass valve (7-5) is arranged between the unit water inlet pipe (7-1) and the unit water outlet pipe (7-3); The inlet end of the unit water inlet pipe (7-1) is connected to the outlet end of the hot water mother pipe (5), the outlet end of the unit water inlet pipe (7-1) is connected to the inlet end of the dry cooling sector (3-1), the outlet end of the dry cooling sector (3-1) is connected to the inlet end of the mechanical ventilation wet cooling tower (4), the outlet end of the mechanical ventilation wet cooling tower (4) is connected to the inlet end of the unit water outlet pipe (7-3), and the outlet end of the unit water outlet pipe (7-3) is connected to the inlet end of the cold water mother pipe (6).

3. The circulating water cooling system for the Czochralski single crystal process according to claim 2 is characterized in that: The resistance of the unit bypass valve (7-5) is matched with the resistance of the dry-wet combined cooling unit (7), and the unit bypass valve (7-5) is used to close when the dry-wet combined cooling unit (7) is put into operation, and to open when the dry-wet combined cooling unit (7) is stopped from operation.

4. The circulating water cooling system for the Czochralski single crystal process of the enlarged unit system according to claim 1 is characterized in that: Each of the dry cooling sectors (3-1) comprises a dry cooling sector water inlet pipe (3-1-1), a dry cooling sector water inlet valve (3-1-2) arranged on the dry cooling sector water inlet pipe (3-1-1), a dry cooling sector water outlet pipe (3-1-3), a dry cooling sector water outlet valve (3-1-4) arranged on the dry cooling sector water outlet pipe (3-1-3), and a dry cooling sector bypass valve (3-1-5), wherein the dry cooling sector bypass valve (3-1-5) is arranged between the dry cooling sector water inlet pipe (3-1-1) and the dry cooling sector water outlet pipe (3-1-3); Each of the mechanical ventilation wet cooling towers (4) comprises a wet cooling tower water inlet pipe (4-1), a wet cooling tower water inlet valve (4-2) arranged on the wet cooling tower water inlet pipe (4-1), a wet cooling tower water outlet pipe (4-3), a wet cooling tower water outlet valve (4-4) arranged on the wet cooling tower water outlet pipe (4-3), and a wet cooling tower bypass valve (4-5), wherein the wet cooling tower bypass valve (4-5) is arranged between the wet cooling tower water inlet pipe (4-1) and the wet cooling tower water outlet pipe (4-3); The inlet end of the dry cooling sector water inlet pipe (3-1-1) is connected to the outlet end of the hot water main pipe (5), the outlet end of the dry cooling sector water inlet pipe (3-1-1) is connected to the inlet end of the dry cooling sector (3-1), the outlet end of the dry cooling sector (3-1) is connected to the inlet end of the dry cooling sector water outlet pipe (3-1-3), the outlet end of the dry cooling sector water outlet pipe (3-1-3) is connected to the inlet end of the dry cooling tower water outlet main pipe (8). The ends are connected, the outlet end of the dry cooling tower water outlet mother pipe (8) is connected to the inlet end of the wet cooling tower water inlet pipe (4-1), the outlet end of the wet cooling tower water inlet pipe (4-1) is connected to the inlet end of the mechanical ventilation wet cooling tower (4), the outlet end of the mechanical ventilation wet cooling tower (4) is connected to the inlet end of the wet cooling tower water outlet pipe (4-3), and the outlet end of the wet cooling tower water outlet pipe (4-3) is connected to the inlet end of the cold water mother pipe (6).

5. The circulating water cooling system for the Czochralski single crystal process according to any one of claims 1 to 4, characterized in that: Each of the dry cooling sectors (3-1) comprises a plurality of dry cooling radiators (3-1-6), and each of the dry cooling radiators (3-1-6) is vertically arranged around the periphery of the lower part of the natural ventilation tower body (3-2).

6. The circulating water cooling system for the Czochralski single crystal process according to any one of claims 1 to 4, characterized in that: The circulating water pump group (2) is provided on the inlet side or the outlet side of the single crystal furnace area (1).

7. The circulating water cooling system for the Czochralski single crystal process according to any one of claims 1 to 4, characterized in that: The plurality of circulating water pump groups (2) include at least one circulating water pump group (2) that provides uninterrupted power supply.

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