Crystalline silicon ingot furnace with heater moving device

Abstract

The utility model discloses a crystalline silicon ingot furnace with a heater moving device, which belongs to the technical field of polycrystalline silicon ingot production and comprises a furnace body, a crucible body is arranged in an inner cavity of the furnace body, a top cover is mounted at the top of the furnace body, a moving device is arranged on the upper surface of the top cover and comprises a lifting toothed plate, and the bottom of the lifting toothed plate is connected with a moving round sleeve. Heaters are installed on the inner walls of the two sides of the movable round sleeve, a gear motor is arranged at the bottom end of the outer wall of the right side of the furnace body, a driving gear is installed at the output end of the gear motor and communicates with an inner cavity of the furnace body, and a rotating fluted disc is connected to one side of the driving gear in a meshed mode and located at the bottom of the crucible body; the moving device drives the heater to move up and down on the outer side of the crucible, rotation of the rotating fluted disc drives the crucible to rotate, rotation is matched with up-and-down movement, so that the crucible is heated more uniformly by the heater, and the quality and efficiency of crystal silicon ingot casting are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of polycrystalline silicon ingot production, in particular to a crystalline silicon ingot casting furnace with a heater moving device. Background Art

[0002] The crystalline silicon ingot furnace is a melting equipment used to produce silicon single crystals. It has the characteristics of high efficiency, stability and high degree of automation, and is widely used in the silicon wafer manufacturing process in the semiconductor industry. The silicon single crystals produced by the crystalline silicon ingot furnace have high purity and excellent electrical properties, and are an important part of modern electronic products.

[0003] Publication No. CN206692777U proposes a polysilicon ingot furnace. The polysilicon ingot furnace provided by the embodiment of the utility model is equipped with a heater moving device for the side heater, thereby having the side heater moving function that all current ingot furnaces do not have. By moving the side heater up and down, coordinating the opening of the side insulation layer, and combining the power ratio adjustment of the dual power supply, the isothermal distribution in the ingot furnace can be more flexibly improved, the quality and efficiency of polysilicon ingots can be improved, and energy consumption can be reduced.

[0004] When the above patent uses the side heater to heat the crucible, the side heater can only move up and down on the outside of the crucible. Since the distribution of the material in the crucible will not always be close to one side of the side heater, the crucible is not heated evenly only by moving the side heater up and down, and the quality and efficiency of the crystalline silicon ingot are average. For this reason, we propose a crystalline silicon ingot furnace with a heater moving device. Utility Model Content

[0005] The utility model aims to provide a crystalline silicon ingot casting furnace with a heater moving device to solve the problems raised in the above background technology.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A crystalline silicon ingot casting furnace with a heater moving device comprises a furnace body, an inner cavity of the furnace body is provided with a crucible body, a top cover is installed on the top of the furnace body, and a moving device is provided on the upper surface of the top cover, the moving device comprises a lifting gear plate, the bottom of the lifting gear plate is connected with a moving circular sleeve, the moving circular sleeve is located on the outside of the crucible body, and heaters are installed on the inner walls of both sides of the moving circular sleeve, a reduction motor is provided at the bottom end of the right outer wall of the furnace body, and a driving gear is installed at the output end of the reduction motor, the driving gear is connected to the inner cavity of the furnace body, and one side of the driving gear is meshingly connected with a rotating gear disc, and the rotating gear disc is located at the bottom of the crucible body.

[0008] Furthermore: the moving device also includes a stepper motor, the output end of the stepper motor is connected to a worm, a mounting plate is provided on one side of the upper surface of the top cover, and the bottom end of the worm is rotatably connected to the outer wall of the mounting plate through a bearing.

[0009] Furthermore: a fixing plate is also installed on the upper surface of the top cover, a rotating rod is provided on the outer wall of the fixing plate, and a large gear is connected to the bottom of the rotating rod, the side wall of the large gear is meshed with the lifting gear plate, a small gear is installed on the rear end face of the large gear through a connecting rod, and the small gear is meshed with the worm.

[0010] Furthermore: the middle part of the lower surface of the rotating toothed disc is rotatably connected to the inner wall of the furnace body through a bearing.

[0011] Furthermore: a sealing layer is provided on one side of the top cover close to the furnace body.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] The crystalline silicon ingot casting furnace of the utility model is provided with a heater moving device, which drives the worm to rotate through the operation of the stepping motor, and since the worm is meshedly connected with the small gear, the rotation of the small gear drives the rotation of the large gear, and the lifting gear plate meshedly connected with the large gear drives the heater on the inner wall of the movable circular sleeve to move up and down on the outside of the crucible, and the operation of the reduction motor drives the driving gear to rotate, and since the driving gear is meshedly connected with the rotating toothed disk, the crucible is driven to rotate, and the rotation and the up and down movement make the heater heat the crucible more evenly, thereby improving the quality and efficiency of the crystalline silicon ingot casting. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the structure of the utility model;

[0015] Figure 2 This is a schematic diagram of the installation structure of the top cover and the moving device of the utility model;

[0016] Figure 3 It is a schematic diagram of the structure of the movable circular sleeve and the heater in a top view of the present utility model.

[0017] In the figure: 1. furnace body; 2. crucible body; 3. top cover; 4. moving device; 40. mounting plate; 41. stepping motor; 42. worm; 43. small gear; 44. fixing plate; 45. large gear; 5. lifting gear plate; 6. moving circular sleeve; 7. heater; 8. reduction motor; 9. driving gear; 10. rotating gear disc. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0019] Embodiment 1:

[0020] See also Figure 1-3 The utility model provides a technical solution: a crystalline silicon ingot furnace with a heater moving device. The crystalline silicon ingot furnace is a smelting equipment for producing silicon single crystals and is widely used in the silicon wafer manufacturing process in the semiconductor industry. However, the positions of the heaters in most existing crystalline silicon ingot furnaces are mostly fixed, and the heaters in the fixed positions are not heated evenly enough, and the quality and efficiency of the crystalline silicon ingots are average; it includes a furnace body 1, a crucible body 2 is provided in the inner cavity of the furnace body 1, a top cover 3 is installed on the top of the furnace body 1, and a moving device 4 is provided on the upper surface of the top cover 3. The moving device 4 includes a lifting gear plate 5, a moving circular sleeve 6 is connected to the bottom of the lifting gear plate 5, the moving circular sleeve 6 is located on the outside of the crucible body 2, and heaters 7 are installed on the inner walls of both sides of the moving circular sleeve 6, a reduction motor 8 is provided at the bottom end of the right outer wall of the furnace body 1, and a driving gear 9 is installed at the output end of the reduction motor 8, the driving gear 9 is connected to the inner cavity of the furnace body 1, and one side of the driving gear 9 is meshed and connected with a rotating toothed disc 10, and the rotating toothed disc 10 is located at the bottom of the crucible body 2.

[0021] The inner wall of the furnace body 1 of the present application is also provided with a top insulation layer, a bottom insulation layer and a side insulation layer. The publication number CN206692777U proposes a polysilicon ingot furnace, in which the top insulation layer, the bottom insulation layer and the side insulation layer are mentioned. This is an existing structure and will not be elaborated here. Before use, the electrical ends of each electrical device are electrically connected to the electrical ends of the external power supply and the controller, wherein the forward and reverse frequencies of the stepper motor 41 are set according to the programming program, so that the movable circular sleeve 6 will not move out of the range of the crucible body 2 during the up and down movement. The crystalline silicon ingot furnace is provided with a heater moving device. The moving device 4 operates to make the lifting tooth plate 5 move up and down. The up and down movement of the lifting tooth plate 5 drives the heater 7 on the inner wall of the moving circular sleeve 6 to move up and down outside the crucible body 2. The operation of the reduction motor 8 drives the driving gear 9 to rotate. Since the driving gear 9 is meshed and connected with the rotating toothed disc 10, the crucible body 2 is driven to rotate. The rotation and the up and down movement make the heater 7 heat the crucible body 2 more evenly, thereby improving the quality and efficiency of the crystalline silicon ingot.

[0022] Among them, preferably, the moving device 4 also includes a stepper motor 41, the output end of the stepper motor 41 is connected to a worm 42, a mounting plate 40 is provided on one side of the upper surface of the top cover 3, and the bottom end of the worm 42 is rotatably connected to the outer wall of the mounting plate 40 through a bearing; the operation of the stepper motor 41 drives the worm 42 to rotate forward or reverse.

[0023] Preferably, a fixing plate 44 is also installed on the upper surface of the top cover 3, and a rotating rod is provided on the outer wall of the fixing plate 44, and a large gear 45 is connected to the bottom of the rotating rod, and the side wall of the large gear 45 is meshedly connected with the lifting gear plate 5, and a small gear 43 is installed on the rear end surface of the large gear 45 through a connecting rod, and the small gear 43 is meshedly connected with the worm 42; the fixing plate 44 is connected to the large gear 45 through the rotating rod, and the operation of the stepping motor 41 drives the worm 42 to rotate. Since the worm 42 is meshedly connected with the small gear 43, the small gear 43 can rotate forward or reverse. Since the small gear 43 is connected to the large gear 45 through the connecting rod, the large gear 45 can also rotate forward or reverse. Since the large gear 45 is meshedly connected with the lifting gear plate 5, the lifting gear plate 5 can move up and down.

[0024] Preferably, the middle portion of the lower surface of the rotating toothed disc 10 is rotatably connected to the inner wall of the furnace body 1 via a bearing.

[0025] Embodiment 2:

[0026] Reference Figure 1 This embodiment is different from the first embodiment in that a sealing layer is provided on a side of the top cover 3 close to the furnace body 1, and the sealing layer plays a sealing role to prevent heat loss inside the furnace body 1 and save energy.

[0027] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A crystalline silicon ingot casting furnace with a heater moving device, comprising a furnace body (1), wherein a crucible body (2) is provided in the inner cavity of the furnace body (1), characterized in that: A top cover (3) is installed on the top of the furnace body (1), and a moving device (4) is provided on the upper surface of the top cover (3). The moving device (4) includes a lifting tooth plate (5), and the bottom of the lifting tooth plate (5) is connected to a moving circular sleeve (6), and the moving circular sleeve (6) is located outside the crucible body (2), and heaters (7) are installed on the inner walls of both sides of the moving circular sleeve (6). A reduction motor (8) is provided at the bottom end of the right outer wall of the furnace body (1), and a driving gear (9) is installed at the output end of the reduction motor (8), and the driving gear (9) is connected to the inner cavity of the furnace body (1), and one side of the driving gear (9) is meshed with a rotating toothed disc (10), and the rotating toothed disc (10) is located at the bottom of the crucible body (2).

2. The crystalline silicon ingot casting furnace with a heater moving device according to claim 1, characterized in that: The moving device (4) also includes a stepping motor (41), the output end of the stepping motor (41) is connected to a worm (42), a mounting plate (40) is provided on one side of the upper surface of the top cover (3), and the bottom end of the worm (42) is rotatably connected to the outer wall of the mounting plate (40) via a bearing.

3. The crystalline silicon ingot casting furnace with a heater moving device according to claim 1, characterized in that: A fixing plate (44) is also installed on the upper surface of the top cover (3), a rotating rod is provided on the outer wall of the fixing plate (44), and a large gear (45) is connected to the bottom of the rotating rod, and the side wall of the large gear (45) is meshedly connected with the lifting gear plate (5).

4. The crystalline silicon ingot casting furnace with a heater moving device according to claim 3, characterized in that: A pinion gear (43) is mounted on the rear end surface of the large gear (45) via a connecting rod, and the pinion gear (43) is meshingly connected with the worm gear (42).

5. The crystalline silicon ingot casting furnace with a heater moving device according to claim 1, characterized in that: The middle portion of the lower surface of the rotating toothed disc (10) is rotatably connected to the inner wall of the furnace body (1) via a bearing.

6. The crystalline silicon ingot casting furnace with a heater moving device according to claim 1, characterized in that: A sealing layer is provided on a side of the top cover (3) close to the furnace body (1).

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