Gallium arsenide polycrystal synthesis device

Abstract

The utility model relates to the technical field of gallium arsenide synthesis, and discloses a gallium arsenide polycrystal synthesis device. Comprising a reaction piece, a sealing piece, a first boat body, a second boat body, a third boat body and vacuum equipment, the reaction piece comprises a first reaction part, and the first reaction part is provided with a first cavity; the synthetic furnace is provided with a heating cavity, and the first reaction part is arranged in the heating cavity; the first boat body is arranged in the first cavity; the second boat body is arranged in the first cavity and located above the first boat body, the second boat body is used for bearing crops, and a plurality of filtering holes are formed in the second boat body; according to the utility model, the second boat body with the filter holes is arranged above the first boat body, so that gallium oxide in the gallium material can be filtered, and the gallium oxide in the gallium material is reduced, thereby being beneficial to improving the synthesis quality of gallium arsenide polycrystals.

Description

Technical Field

[0001] The utility model relates to the technical field of gallium arsenide synthesis, in particular to a gallium arsenide polycrystalline synthesis device. Background Art

[0002] At present, the most widely used method in industry is to synthesize gallium arsenide polycrystals by horizontal directional solidification. Since the equipment required by the horizontal directional solidification method is simple, during the synthesis process, the arsenic and gallium sealed in the quartz tube are not affected by the external environment. Therefore, after the synthesis, the polycrystals are purified by directional solidification to obtain gallium arsenide polycrystals. However, in the process of synthesizing gallium arsenide polycrystals by horizontal directional solidification, it is difficult to avoid that some gallium materials are oxidized to form gallium oxide during the production, cleaning, baking and other processes, and these gallium oxides will adhere to the gallium materials. Since the melting point of gallium oxide is 1900°C, and the synthesis temperature of gallium arsenide polycrystals is about 1200°C, after the gallium arsenide polycrystals are synthesized, the gallium oxide does not melt and basically does not react with arsenic, resulting in a large number of arsenic particles attached to the gallium oxide and mixed in the interior of the gallium arsenide crystal rod, thereby forming arsenic points, which seriously affect the synthesis quality of gallium arsenide polycrystals. Therefore, it is necessary to design a new gallium arsenide polycrystal synthesis device to solve the above technical problems. Utility Model Content

[0003] Aiming to solve at least one of the technical problems existing in the prior art, the utility model provides a gallium arsenide polycrystal synthesis device, which can reduce gallium oxide in the material and is beneficial to improving the synthesis quality of gallium arsenide polycrystal.

[0004] In order to achieve the above-mentioned purpose, the utility model provides a gallium arsenide polycrystal synthesis device, which has a height direction, a length direction and a width direction, and includes a reaction piece, a synthesis furnace, a first boat body and a second boat body; the reaction piece includes a first reaction part, and a first cavity is opened inside the first reaction part; the synthesis furnace is provided with a heating cavity, and the first reaction part is arranged in the heating cavity; the first boat body is arranged in the first cavity; the second boat body is arranged in the first cavity and is located above the first boat body, the second boat body is used to carry gallium materials, and the second boat body is provided with a plurality of filtering holes that penetrate the first boat body along the height direction.

[0005] In some embodiments, the invention further comprises a support member disposed in the first cavity and used for supporting the second boat body, wherein the support member is connected to the top of the first boat body or the inner wall of the first cavity.

[0006] In some embodiments, there are multiple support members, and the multiple support members are arranged in sequence along the length direction.

[0007] In some embodiments, along the height direction, the support member does not overlap with any of the filtering holes.

[0008] In some embodiments, the filter hole has a circular structure, and the diameter of the filter hole is a, satisfying: 3mm≤a≤5mm.

[0009] In some embodiments, along the height direction, the projection of the first boat body at least covers the projection of the second boat body.

[0010] In some embodiments, a third boat body is further included; the reaction piece further includes a second reaction part and a sealing member, the second reaction part is connected to one end of the first reaction part, a second cavity connected to the first cavity is opened inside the second reaction part, an opening connected to the second cavity is opened at one end of the second reaction part away from the first reaction part, the sealing member covers the opening and is detachably connected to the second reaction part; the third boat body is arranged in the second cavity, and the third boat body is used to carry arsenic material.

[0011] In some embodiments, a vacuum device is further included, wherein the vacuum device is connected to the sealing member and communicates with the second cavity.

[0012] In some embodiments, the sealing member is detachably connected to the second reaction portion.

[0013] Compared with the prior art, the beneficial effect of the embodiment of the utility model is that: since the melting point of the feed is 29.76°, and the melting point of gallium oxide is 1900°, the utility model can extract the air in the first cavity and the second cavity through the vacuum equipment to complete the vacuuming of the inside of the reaction piece, and then heat the first cavity to 30° through the synthesis furnace to melt the feed in the second boat body, and the melted liquid feed will fall onto the first boat body through the filter hole, while the solid gallium oxide that cannot be melted and cannot pass through the filter hole will be intercepted on the second boat body, and then the feed on the first boat body and the arsenic material on the third boat body can be synthesized and solidified into gallium arsenide polycrystals by horizontal directional solidification method; in summary, the utility model can filter the gallium oxide in the feed by providing the second boat body with the filter hole and providing the second boat body above the first boat body to reduce the gallium oxide in the feed, which is beneficial to improving the synthesis quality of gallium arsenide polycrystals. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a front view of a gallium arsenide polycrystal synthesis device provided by an embodiment of the utility model;

[0015] Figure 2 It is a top view of a gallium arsenide polycrystal synthesis device provided by an embodiment of the utility model;

[0016] Figure 3 is a top view of a first boat body provided by an embodiment of the utility model;

[0017] Figure 4 It is a top view of the second boat body provided by the embodiment of the utility model.

[0018] In the figure, 1, reaction element; 11, first reaction part; 12, second reaction part; 111, first cavity; 121, second cavity;

[0019] 2. Synthesis furnace; 21. Heating chamber;

[0020] 3. The first boat body;

[0021] 4. second boat body; 41. filtering hole;

[0022] 5. Support parts;

[0023] 6. The third hull;

[0024] 7. Vacuum equipment;

[0025] 8. Seals;

[0026] X, length direction; Y, width direction; Z, height direction. DETAILED DESCRIPTION

[0027] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0028] In the description of the present invention, it should be understood that the terms "center", "length", "width", "height", "up", "down", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0029] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features.

[0030] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0032] In the description of the embodiments of the present utility model, the term "and / or" is only a description of the association relationship of the associated objects, indicating that there may be three relationships, for example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0033] like Figure 1-4 As shown, a preferred gallium arsenide polycrystal synthesis device of an embodiment of the utility model has a height direction Z, a length direction X and a width direction Y, and includes a reaction piece 1, a sealing piece 8, a synthesis furnace 2, a first boat body 3, a second boat body 4, a third boat body 6 and a vacuum device 7.

[0034] The reaction piece 1 includes a first reaction part 11 and a second reaction part 12. A first cavity 111 is opened inside the first reaction part 11. The second reaction part 12 is connected to one end of the first reaction part 11. A second cavity 121 connected to the first cavity 111 is opened inside the second reaction part 12. An opening connected to the second cavity 121 is opened at one end of the second reaction part 12 away from the first reaction part 11; a sealing member 8 covers the opening and is connected to the second reaction part 12.

[0035] The synthesis furnace 2 is provided with a heating chamber 21 , and the first reaction part 11 is disposed in the heating chamber 21 .

[0036] The first boat body 3 is disposed in the first cavity 111 .

[0037] The second boat body 4 is disposed in the first cavity 111 and is located above the first boat body 3 . The second boat body 4 is used to carry crops. The second boat body 4 is provided with a plurality of filtering holes 41 penetrating the first boat body 3 along the height direction Y.

[0038] The third boat 6 is disposed in the second cavity 121 , and the third boat 6 is used for carrying arsenic material.

[0039] The vacuum device 7 is connected to the sealing member 8 and communicates with the second cavity 121 .

[0040] Based on this technical solution, the air in the first cavity 111 and the second cavity 121 can be evacuated through the vacuum device 7 to complete the vacuuming inside the reaction piece 1, and then the first cavity 111 is heated to 30° through the synthesis furnace 2 to melt the material in the second boat body 4, and the melted liquid material will fall onto the first boat body 3 through the filter hole 41, while the solid gallium oxide that cannot be melted and cannot pass through the filter hole 41 will be intercepted on the second boat body 4, and then the material on the first boat body 3 and the arsenic material on the third boat body 6 can be synthesized and solidified into gallium arsenide polycrystals through the horizontal directional solidification method; therefore, the utility model can filter the gallium oxide in the material by providing the second boat body 4 with the filter hole 41 and providing the second boat body 4 above the first boat body 3 to reduce the gallium oxide in the material, which is beneficial to improve the synthesis quality of gallium arsenide polycrystals.

[0041] The material of the first boat 3 can be any material that can be used to carry gallium materials during the synthesis of gallium arsenide polycrystals, such as quartz material and boron nitride material.

[0042] The material of the second boat 4 can be any material that can be used to carry gallium materials during the synthesis of gallium arsenide polycrystals, such as quartz material and boron nitride material.

[0043] The sealing member 8 may be made of any material such as quartz or quartz wool that can seal the tube opening and be detachably connected to the second reaction unit 12 .

[0044] In this embodiment, the reaction element 1 is made of quartz material, and the first reaction part 11 and the second reaction part 12 are integrally formed. Specifically, the reaction element 1 is a quartz tube.

[0045] In this embodiment, the sealing member 8 is a plate-shaped structure.

[0046] The material of the third boat 6 can be any material that can be used to carry gallium materials during the synthesis of gallium arsenide polycrystals, such as quartz material and boron nitride material.

[0047] In this embodiment, the seal 8 is detachably connected to the second reaction part 12. The detachable connection allows the first boat 3, the second boat 4 and the third shaft 6 to be introduced into or taken out of the reaction part 1 through the opening by removing the seal 8, which is convenient for operation.

[0048] The vacuum device may be any device such as a vacuum valve, a vacuum generator, a vacuum extractor, etc. that can extract the air in the first cavity 111 and the second cavity 121 , and is not limited here.

[0049] The gallium arsenide synthesis device provided by the present invention further includes a support member disposed in the first cavity 111 and used to support the second boat 4 . The support member 5 is connected to the first boat 3 or the inner wall of the first cavity 111 .

[0050] In this embodiment, the support member 5 is connected to the top of the first boat body 3. Specifically, the support member is detachably connected to the top of the first boat body 3.

[0051] In some other embodiments, the support member 5 may also be connected to the inner wall of the first cavity 111 .

[0052] In this embodiment, the support member 5 is made of quartz.

[0053] There are multiple support members 5 , and the multiple support members 5 are arranged in sequence along the length direction X.

[0054] In this embodiment, the number of the supporting members 5 is two, and the two supporting members 5 are symmetrically arranged about the center line of the first boat body 3 in the length direction thereof.

[0055] In some other embodiments, the number of the support members 5 can be any number such as three, four, five, six, etc., which is not limited here.

[0056] In this embodiment, the support member 5 is a plate-shaped structure.

[0057] The support member 5 does not overlap with any filter hole 41 along the height direction Z. The non-overlapping arrangement of the support member 5 and the filter hole 41 can prevent the support member 5 from blocking the filter hole 41, thereby ensuring that the food in the second boat body 4 can flow to the first boat body 3 through the filter hole 41 to the maximum extent.

[0058] The filter hole 41 is circular in structure, and the diameter of the filter hole 41 is a, which satisfies: 3mm≤a≤5mm. The filter hole 41 of 3mm≤a≤5mm can allow the melted liquid material to pass smoothly, and can intercept most of the solid gallium oxide in the material, and the filtering effect is good.

[0059] Along the height direction Z, the projection of the first hull 3 at least covers the projection of the second hull 4. This arrangement is adopted to ensure that the first hull 3 can receive all the food flowing down from the second hull 4 to prevent the food from flowing to the outside of the first hull 3.

[0060] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A gallium arsenide polycrystalline synthesis device having a height direction, a length direction and a width direction, characterized in that: include: A reaction piece, the reaction piece comprising a first reaction part and a second reaction part, the first reaction part has a first cavity formed inside, the second reaction part is connected to one end of the first reaction part, the second reaction part has a second cavity formed inside, and the second reaction part has an opening formed at one end away from the first reaction part and connected to the second cavity; A sealing member, the sealing member covers the opening and is connected to the second reaction part; A synthesis furnace, wherein the synthesis furnace is provided with a heating chamber, and the first reaction part is arranged in the heating chamber; a first boat body, wherein the first boat body is disposed in the first cavity; a second boat body, the second boat body being arranged in the first cavity and above the first boat body, the second boat body being used to carry the crop, and the second boat body being provided with a plurality of filtering holes penetrating the first boat body along the height direction; a third boat body, the third boat body being disposed in the second cavity and being used for carrying arsenic material; A vacuum device is connected to the sealing member and communicated with the second cavity.

2. The gallium arsenide polycrystal synthesis device according to claim 1, characterized in that: The filter hole has a circular structure, and the diameter of the filter hole is a, satisfying: 3mm≤a≤5mm.

3. The gallium arsenide polycrystal synthesis device according to claim 1, characterized in that: It also includes a support member disposed in the first cavity and used for supporting the second boat body, wherein the support member is connected to the top of the first boat body or the inner wall of the first cavity.

4. The gallium arsenide polycrystal synthesis device according to claim 3, characterized in that: There are multiple support members, and the multiple support members are arranged in sequence along the length direction.

5. The gallium arsenide polycrystal synthesis device according to claim 3 or claim 4, characterized in that: Along the height direction, the support member does not overlap with any of the filter holes.

6. The gallium arsenide polycrystal synthesis device according to any one of claims 1 to 4, characterized in that: Along the height direction, the projection of the first boat body at least covers the projection of the second boat body.

7. The gallium arsenide polycrystal synthesis device according to any one of claims 1 to 4, characterized in that: The reaction piece is made of quartz.

8. The gallium arsenide polycrystal synthesis device according to any one of claims 1 to 4, characterized in that: The sealing member is detachably connected to the second reaction part.

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