Field control valve box for photoresist industry

Abstract

The utility model relates to an on-site control valve box for photoresist industry, which is structurally characterized in that a PLC (programmable logic controller) cabinet is positioned in a non-explosion-proof area, an on-site electromagnetic valve control cabinet and an on-site control valve are positioned in an explosion-proof area, the PLC cabinet is connected with the on-site electromagnetic valve control cabinet through a cable, the electromagnetic valve control cabinet is externally connected with a 220V power supply and an instrument gas source, the on-site electromagnetic valve control cabinet is connected with the on-site control valve, and the on-site electromagnetic valve control cabinet is connected with the on-site control valve. The field electromagnetic valve control cabinet comprises an in-cabinet power supply, an electromagnetic valve and a knob switch, the electromagnetic valve is in signal connection with the field control valve, the knob switch is in signal connection with the electromagnetic valve, the knob switch, the electromagnetic valve and the field control valve are in one-to-one correspondence, and the knob switch comprises three switchable modes: in the first mode, the electromagnetic valve is electrically connected with the in-cabinet power supply; the second mode electromagnetic valve is not connected with a power supply in the cabinet, and the third mode electromagnetic valve is electrically connected with an intermediate electric relay of the PLC cabinet. The utility model has the advantage that the valve can be manually controlled to be opened and closed when a control system fails or even fails.

Description

Technical Field

[0001] The utility model relates to a field control valve box, in particular to a field control valve box used in the photoresist industry for controlling the manual and automatic operation of valves in a workshop. Background Art

[0002] In the photoresist industry, due to the instability of existing technology and process, fully automatic production cannot be fully realized. In the entire production process, human intervention is required continuously. If the existing technology control system fails, the valve will not be able to operate. Due to the expensive production raw materials, the production cost will increase and it cannot effectively meet the production needs. Utility Model Content

[0003] The utility model provides a field control valve box for the photoresist industry, which aims to overcome the above-mentioned shortcomings of the prior art, realize manual control of valve opening and closing even when the control system fails, and improve the flexibility of production control.

[0004] The technical solution of the utility model is as follows: a field control valve box for the photoresist industry, the structure of which includes a PLC cabinet, a field solenoid valve control cabinet and a field control valve, the PLC cabinet is located in a non-explosion-proof area, the field solenoid valve control cabinet and the field control valve are located in an explosion-proof area, the PLC cabinet is connected to the field solenoid valve control cabinet through a cable, the solenoid valve control cabinet is also externally connected to a 220V power supply and an instrument gas source, the field solenoid valve control cabinet is connected to the field control valve, the field solenoid valve control cabinet includes a power supply, a solenoid valve, and a knob switch in the cabinet, the solenoid valve is connected to the field control valve signal, the knob switch signal is connected to the solenoid valve, the knob switch, the solenoid valve and the field control valve correspond one to one, and the knob switch includes three switchable modes: in the first mode, the solenoid valve is electrically connected to the power supply in the cabinet, in the second mode, the solenoid valve is not connected to the power supply in the cabinet, and in the third mode, the solenoid valve is electrically connected to the PLC cabinet's electric relay. The above structure enables manual control of the valve opening and closing even when the control system fails.

[0005] Preferably, the cables are two 32-core communication cables, which can greatly reduce the workload of wiring and piping in the surface-mounted solenoid valve installation mode and save installation space.

[0006] Preferably, the on-site solenoid valve control cabinet is connected to the on-site control valve via a stainless steel hard gas pipe, which is used to ensure that the pipeline is sealed and reliable, and can meet the explosion-proof requirements of the workshop.

[0007] Advantages of the utility model: 1) Stable use, when the control system fails or even fails, the valve can be manually controlled to open and close;

[0008] 2) Easy to operate. Operators do not need to use a touch screen, and can directly control the switch of the on-site control valve through the manual knob switch on the on-site solenoid valve control cabinet;

[0009] 3) It is highly operable and can cope with changes in production processes, and can meet production requirements through manual operation on site;

[0010] 4) The structural design is reasonable, the wiring and piping can be beautiful and neat, and the overall design can comply with national explosion-proof standards. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 The utility model is a structural schematic diagram of a field control valve box used in the photoresist industry.

[0012] Figure 2 yes Figure 1 Electrical schematic diagram of the on-site solenoid valve control cabinet.

[0013] In the figure, 1 is the PLC cabinet, 2 is the cable, 3 is the on-site solenoid valve control cabinet, 31 is the 220V power supply, 32 is the instrument air source, 4 is the stainless steel hard air pipe, 5 is the on-site control valve (pneumatic valve), A is the non-explosion-proof area, and B is the explosion-proof area. DETAILED DESCRIPTION

[0014] The present invention is further described in detail below in conjunction with embodiments and specific implementation methods.

[0015] like Figure 1 As shown, a field control valve box for the photoresist industry includes a PLC cabinet 1, a field solenoid valve control cabinet 3 and a field control valve 5. The PLC cabinet 1 is located in a non-explosion-proof area A, and the field solenoid valve control cabinet 3 and the field control valve 5 are located in an explosion-proof area B. The PLC cabinet 1 is connected to the field solenoid valve control cabinet 3 through a cable 2. The solenoid valve control cabinet 3 is also externally connected to a 220V power supply 31 and an instrument air source 32. The field solenoid valve control cabinet 3 is connected to the field control valve 5 through a stainless steel hard air pipe 4.

[0016] The non-explosion-proof area A is an ordinary area without explosion-proof requirements, generally referring to the cabinet room. The PLC cabinet 1 is used to control the field control valve 5 through the field solenoid valve control cabinet 3 in an automatic state.

[0017] The explosion-proof zone B generally refers to a workshop, and the on-site solenoid valve control cabinet 3 is used to control the opening and closing of the on-site control valve 5 automatically or manually.

[0018] The on-site solenoid valve control cabinet 3 is the core equipment of this device. Figure 2The electrical schematic diagram of an embodiment of the field solenoid valve control cabinet 3 is shown in FIG. The field solenoid valve control cabinet 3 includes a power supply, a solenoid valve, and a knob switch in the cabinet. The field solenoid valve control cabinet 3 can be divided into two parts, the lower part includes solenoid valves and other supporting electrical components respectively connected to the signals of each field control valve, which itself meets the explosion-proof requirements, and the upper part includes a number of knob switches, which should meet the explosion-proof design requirements. Each knob switch signal is connected to a solenoid valve, and the knob switch, the solenoid valve and the field control valve 5 correspond one to one.

[0019] The knob switch includes three switchable modes: in the first mode, the solenoid valve is electrically connected to the power supply in the cabinet, that is, the manual opening mode, and the corresponding field control valve is controlled to open; in the second mode, the solenoid valve is not connected to the power supply in the cabinet, that is, the manual stop mode, and the corresponding field control valve is controlled to close; in the third mode, the solenoid valve is electrically connected to the power relay of the PLC cabinet 1, that is, the automatic mode, and the PLC cabinet 1 automatically controls the opening and closing of the corresponding field control valve.

[0020] In actual use, the operator can individually operate the switch of the corresponding on-site control valve through the manual opening and manual stopping knob switch positions. This operation has nothing to do with PLC cabinet 1. Only when the knob switch position is turned to automatic mode will PLC cabinet 1 intervene to realize the automation of the control process.

[0021] The principle is that there is an internal power supply, which includes a circuit breaker and a power switch connected in sequence to an external 220V power supply 31. The manual opening mode and the manual stopping mode control the on-off of the solenoid valve power supply to control the switch of the corresponding field control valve. In the automatic mode, the on-off of the solenoid valve power supply circuit is controlled by the intermediate relay of the PLC cabinet 1, thereby realizing remote automatic control of the corresponding field control valve.

[0022] The cable 2 is specifically two 32-core communication cables, which can greatly reduce the workload of wiring and piping in the surface-mounted solenoid valve installation method and save installation space.

[0023] The 220V power supply 31 and instrument air source 32 connected to the solenoid valve control cabinet 3 are used to ensure that the cabinet is powered and ventilated, and to meet the power supply requirements of the solenoid valves in the cabinet. The instrument air source 32 is specifically a 5-7 Bar instrument air source.

[0024] The stainless steel hard gas pipe 4 between the on-site solenoid valve control cabinet 3 and the on-site control valve 5 is used to ensure that the pipeline is sealed and reliable, which can meet the explosion-proof requirements of the workshop.

[0025] The on-site control valve 5 switches the gas supply mode by the on-site solenoid valve control cabinet 3.

[0026] All the components mentioned above are prior art, and those skilled in the art can use any model and existing design that can achieve their corresponding functions.

[0027] The above is only a preferred embodiment of the present invention. It should be pointed out that a person skilled in the art can make several modifications and improvements without departing from the inventive concept of the present invention, and these modifications and improvements all fall within the protection scope of the present invention.

Claims

1. A field control valve box for the photoresist industry, characterized in that: The invention comprises a PLC cabinet (1), an on-site solenoid valve control cabinet (3) and an on-site control valve (5), wherein the PLC cabinet (1) is located in a non-explosion-proof area (A), the on-site solenoid valve control cabinet (3) and the on-site control valve (5) are located in an explosion-proof area (B), the PLC cabinet (1) is connected to the on-site solenoid valve control cabinet (3) via a cable (2), the solenoid valve control cabinet (3) is also externally connected to a 220V power supply (31) and an instrument air source (32), the on-site solenoid valve control cabinet (3) is connected to the on-site control valve (5), the on-site solenoid valve control cabinet (3) comprises an in-cabinet power supply, a solenoid valve, and a knob switch, the solenoid valve is connected to a signal of the on-site control valve, the knob switch signal is connected to the solenoid valve, the knob switch, the solenoid valve and the on-site control valve (5) correspond to each other, and the knob switch comprises three switchable modes: in the first mode, the solenoid valve is electrically connected to the in-cabinet power supply, in the second mode, the solenoid valve is not connected to the in-cabinet power supply, and in the third mode, the solenoid valve is electrically connected to the electric relay of the PLC cabinet (1).

2. A field control valve box for the photoresist industry as claimed in claim 1, characterized in that: The cables (2) are two 32-core communication cables.

3. A field control valve box for photoresist industry as claimed in claim 1 or 2, characterized in that: The on-site solenoid valve control cabinet (3) is connected to the on-site control valve (5) via a stainless steel hard air pipe (4).

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