Lamination co-firing device for preparing aluminum nitride ceramic heater

Abstract

The utility model relates to the technical field of lamination co-firing equipment, in particular to a lamination co-firing device for preparing an aluminum nitride ceramic heater. According to the technical scheme, the furnace comprises a base and an outer furnace body installed at the top of the base, and further comprises an inner furnace body which is installed in the outer furnace body and used for being taken and placed through hoisting equipment, and an electrostatic chuck is arranged in the inner furnace body. According to the utility model, the U-shaped hole, the hoisting frame, the electrostatic chuck, the hoisting mechanism, the transmission mechanism and other structures are matched, and hoisting equipment of the lamination co-firing device is integrally designed and is used for taking and placing materials in the sintering process. By means of the design, it can be guaranteed that the hoisting equipment and the sintering furnace are matched more tightly, operation is more convenient, and the matching problem between the equipment is reduced. Meanwhile, hoisting equipment of the sintering furnace is generally compact in design and relatively small in occupied space, and cross interference between the equipment and potential safety hazards of operators are reduced, so that the operators are prevented from suffering more collision and accident risks, and the working safety is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of laminated co-firing equipment, in particular to a laminated co-firing device for preparing an aluminum nitride ceramic heater. Background Art

[0002] Aluminum nitride ceramic heater is a heat source device for high-temperature heating, which is usually used in industrial production and laboratory research. Its preparation involves the use of aluminum nitride ceramic materials to manufacture heating elements, which have the characteristics of high temperature resistance, corrosion resistance and good mechanical properties. This heater usually has a high heating rate, low energy consumption and good stability, and can be used in various high-temperature heating applications, such as sintering, annealing, heat treatment, etc. In order to prepare aluminum nitride ceramic heaters with higher performance and more complex shapes, a stacking co-firing device is usually required. This device can realize the simultaneous sintering of multiple layers of aluminum nitride ceramic sheets, thereby improving production efficiency to a certain extent, and can realize the design of heaters with more complex shapes. An electrostatic chuck is provided in the stacking co-firing device to clamp and fix the aluminum nitride ceramic sheets so that they can be evenly heated in the heater and maintain the correct position and posture. Usually, when placing aluminum nitride ceramic sheets in a co-firing device for high-temperature sintering, it is necessary to manually place the aluminum nitride ceramic sheets on a lifting device, and then use the lifting device to place them in the co-firing device.

[0003] However, independent lifting equipment usually needs to be arranged separately, which requires additional space to accommodate the lifting equipment and its operating range, thus occupying more production site space. Limited production site space will lead to cross-interference between equipment and increased safety hazards for operators, which in turn will expose operators to more collision and accident risks, reducing work safety. Utility Model Content

[0004] The utility model aims to solve the problems existing in the background technology and proposes a laminated co-firing device for preparing an aluminum nitride ceramic heater.

[0005] The technical solution of the utility model is as follows: a stacked co-firing device for preparing an aluminum nitride ceramic heater comprises a base and an outer furnace body installed on the top of the base, and also comprises: an inner furnace body installed in the outer furnace body for being taken in and placed by a lifting device, an electrostatic chuck being provided inside the inner furnace body; a U-shaped hole is provided at the bottom of the base, a lifting mechanism is provided inside the U-shaped hole which is used to take the inner furnace body out of the outer furnace body after being unfolded.

[0006] Optionally, the lifting mechanism includes a mounting base plate fixedly connected to the inside of the U-shaped hole, a pair of slide grooves are opened on the mounting base plate, a lifting frame is provided on the mounting base plate, a transverse support plate is fixedly connected to the bottom of the lifting frame, a cylinder is fixedly connected to the upper surface of the transverse support plate, an insert plate is provided on the lifting frame, the lower surface of the insert plate is fixedly connected to the piston rod of the cylinder, a plurality of pairs of pulley support blocks sliding in the slide grooves are provided at the bottom of the lifting frame, one pair of the pulley support blocks are fixedly connected to limiting protrusions, and a transmission mechanism for allowing the lifting mechanism to escape from or be stored in the U-shaped hole is provided on the mounting base plate.

[0007] Optionally, a pair of limiting support rods are fixedly connected to the plug plate and movably penetrate the transverse support plate and are suspended from the ground.

[0008] Optionally, one end of the limit protrusion installed on the pulley support block is fixedly connected to a limit clamping plate, and the mounting base plate is provided with a pair of protruding plates for resisting the limit clamping plate to prevent the lifting frame from falling out of the U-shaped hole.

[0009] Optionally, the transmission mechanism includes an L-shaped support plate connected to the mounting base plate, the upper surface of the L-shaped support plate is fixedly connected to a motor, the output shaft of the motor is fixedly connected to a screw rod, the upper surface of the mounting base plate is fixedly connected to a vertical support plate for supporting the rotation of the screw rod and connected to the rotation of the screw rod, and the lifting frame is fixedly connected to a spiral connecting frame spirally connected to the screw rod.

[0010] Optionally, a handle is fixedly connected to the lifting frame.

[0011] Optionally, rollers are provided at the bottom of the pulley support blocks.

[0012] Compared with the prior art, the utility model has the following beneficial technical effects:

[0013] The utility model utilizes the coordination of structures such as U-shaped holes, lifting frames, electrostatic chucks, lifting mechanisms and transmission mechanisms, and the lifting equipment of the stacking co-firing device is designed as an integrated unit for taking and placing materials during the sintering process. This design not only ensures that the lifting equipment and the sintering furnace are more closely coordinated, the operation is more convenient, and the coordination problems between the equipment are reduced. At the same time, the lifting equipment of the sintering furnace is usually compact in design and occupies relatively little space, thereby reducing cross-interference between the equipment and the safety hazards of the operator, thereby preventing the operator from being subjected to more collisions and accidental risks, and improving the safety of work. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 A schematic diagram of the first state structure of a stacked co-firing device for preparing an aluminum nitride ceramic heater according to the utility model is given;

[0015] Figure 2A schematic diagram of the second state structure of the laminated co-firing device prepared for the aluminum nitride ceramic heater of the utility model;

[0016] Figure 3 for Figure 2 The enlarged schematic diagram of point A in the middle;

[0017] Figure 4 A schematic diagram of the structure of the third state of the stacked co-firing device prepared for the aluminum nitride ceramic heater of the utility model;

[0018] Figure 5 for Figure 4 A magnified schematic diagram of point B in the middle.

[0019] Figure numerals: 1. base; 11. U-shaped hole; 2. mounting base plate; 21. slide groove; 22. L-shaped support plate; 23. motor; 24. screw rod; 25. vertical support plate; 26. convex plate; 3. lifting frame; 31. horizontal support plate; 32. cylinder; 33. plug plate; 34. limit support rod; 35. pulley support block; 36. limit convex block; 37. limit clamping plate; 38. spiral connecting frame; 4. handle; 5. inner furnace body; 6. electrostatic chuck; 7. outer furnace body. DETAILED DESCRIPTION

[0020] The technical solution of the present utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present utility model, rather than all of the embodiments.

[0021] The components of the embodiments of the present invention generally described and shown in the drawings herein can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention.

[0022] Based on the embodiments of the present utility model, all other embodiments obtained by ordinary technicians in the field without making any creative work shall fall within the scope of protection of the present utility model.

[0023] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0024] It should be noted that the terms "include", "comprises" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0025] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] Example

[0027] like Figure 1-5 As shown, the laminated co-firing device for preparing the aluminum nitride ceramic heater proposed in the utility model includes a base 1 and an outer furnace body 7 installed on the top of the base 1, and also includes: an inner furnace body 5 installed in the outer furnace body 7 for taking and placing by a lifting device, and an electrostatic chuck 6 is arranged inside the inner furnace body 5. The structure of the electrostatic chuck 6 includes an insulating layer, a heater and an aluminum base stacked in sequence from top to bottom. In addition, a heat insulation layer is also arranged between the heater and the aluminum base. Among them, the insulating layer is made of ceramic materials such as AlN, and a DC electrode layer is arranged in the insulating layer. After the DC electrode layer is electrically connected to a DC power supply, an electrostatic attraction is generated between the DC electrode layer and the wafer, thereby fixing the wafer and other processed workpieces on the top of the insulating layer; secondly, the heater is used to heat the wafer and other processed workpieces; further, the aluminum base is connected to an RF power supply to generate an RF bias on the wafer and other processed workpieces. Furthermore, the heat insulating layer is made of a material with good heat insulating properties such as silicone rubber to prevent the heat generated by the heater from being conducted to the aluminum base, thereby reducing the heat loss of the heater and improving the heating efficiency of the electrostatic chuck 6. In addition, a sealant is provided between the heat insulating layer and the heater and between the heat insulating layer and the aluminum base, respectively, and the gap between the heat insulating layer and the heater and the gap between the heat insulating layer and the aluminum base are sealed by the sealant, respectively, so as to prevent air from entering the vacuum environment where the wafer is located through the gap; a U-shaped hole 11 is provided at the bottom of the base 1, and a lifting mechanism is provided inside the U-shaped hole 11 for taking the inner furnace body 5 from the outer furnace body 7 after it is unfolded.

[0028] Further, the lifting mechanism includes a mounting base plate 2 fixedly connected to the inside of the U-shaped hole 11, and a pair of slide grooves 21 are provided on the mounting base plate 2. The function of the slide grooves 21 is to limit the sliding direction of the lifting frame 3 in the U-shaped hole 11 by sliding the pulley support block 35 and the limiting protrusion 36 at the bottom of the lifting frame 3. A lifting frame 3 is provided on the mounting base plate 2, and a handle 4 is fixedly connected to the lifting frame 3. The function of the handle 4 is to provide an additional gripping point for the porter when the porter is carrying the aluminum nitride ceramic sheet, thereby increasing the stability and safety of the operation and reducing the risk of accidental injury. A transverse support plate 31 is fixedly connected to the bottom of the lifting frame 3, and a cylinder 32 is fixedly connected to the upper surface of the transverse support plate 31. A plug plate 33 is provided on the lifting frame 3, and a pair of limiting support rods 34 that are movable through the transverse support plate 31 and suspended from the ground are fixedly connected to the plug plate 33. The function of the limiting support rod 34 is to limit the upward movement direction of the plug plate 33 and share the force of the plug plate 33 holding the material. The lower surface of the plug plate 33 is fixedly connected to the piston rod of the cylinder 32. The bottom of the lifting frame 3 is provided with a plurality of pairs of pulley blocks 35 sliding in the slide groove 21. The bottom of the pulley blocks 35 is provided with rollers, and the function of the rollers is to make the lifting frame 3 slide more smoothly in the U-shaped hole 11. A limited position protrusion 36 is fixedly connected to one pair of pulley blocks 35, and a transmission mechanism for making the lifting mechanism escape from or be stored in the U-shaped hole 11 is provided on the mounting base plate 2.

[0029] Among them, one end of the pulley support block 35 is fixedly connected to the limiting clamping plate 37, and a pair of convex plates 26 are provided on the mounting base 2 for resisting the limiting clamping plate 37 to prevent the lifting frame 3 from slipping out of the U-shaped hole 11. The function of the convex plate 26 is to clamp the limiting clamping plate 37 on the pulley support block 35, thereby limiting the distance that the lifting frame 3 moves toward the U-shaped hole 11.

[0030] Furthermore, the transmission mechanism includes an L-shaped support plate 22 connected to the mounting base plate 2, the upper surface of the L-shaped support plate 22 is fixedly connected to a motor 23, the output shaft of the motor 23 is fixedly connected to a screw rod 24, the upper surface of the mounting base plate 2 is fixedly connected to a vertical support plate 25 for supporting the rotation of the screw rod 24 and rotationally connected to the screw rod 24, and the lifting frame 3 is fixedly connected to a spiral connecting frame 38 spirally connected to the screw rod 24.

[0031] In this embodiment, when the laminated co-fired device prepared by the aluminum nitride ceramic heater is needed, the motor 23 on the L-shaped support plate 22 is first started, and the output shaft of the motor 23 drives the screw rod 24 to rotate through the support of the vertical support plate 25. Since the screw rod 24 is spirally connected to the spiral connecting frame 38, the spiral connecting frame 38 drives the lifting frame 3 to slide along the slide groove 21 through the pulley support block 35 at the bottom of the lifting frame 3 until the lifting frame 3 drives the lifting mechanism to move to the position as shown in FIG. Figure 3As shown, the aluminum nitride ceramic sheet to be sintered is placed on the plug plate 33. Then the cylinder 32 on the horizontal support plate 31 is started, and the piston rod of the cylinder 32 pushes the plug plate 33 to move vertically upward through a pair of limiting support rods 34 until the plug plate 33 moves to the specified position. Then the motor 23 is started again, so that the lifting frame 3 moves into the U-shaped hole 11, and at the same time, the lifting frame 3 drives the plug plate 33 to move toward the electrostatic chuck 6 on the inner furnace body 5 in the outer furnace body 7, until the limiting support rod 34 on the plug plate 33 abuts against the outer furnace body 7. At this time, the cylinder 32 is started again, so that the piston rod of the cylinder 32 pushes the plug plate 33 to move vertically downward until the plug plate 33 abuts against the inner bottom wall of the inner furnace body 5. Then the aluminum nitride ceramic sheet on the plug plate 33 can be placed just above the electrostatic chuck 6, and the motor 23 can be started to remove the plug plate 33 from the inner furnace body 5. When the aluminum nitride ceramic sheet needs to be taken out from the inner furnace body 5, it is only necessary to reverse the above operation, which will not be described in detail here.

[0032] The preferred embodiments of the utility model of the above utility model are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to only specific implementation methods. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A laminated co-firing device for preparing an aluminum nitride ceramic heater, comprising a base (1) and an outer furnace body (7) mounted on the top of the base (1), characterized in that: Also includes: An inner furnace body (5) installed in the outer furnace body (7) for being taken in and placed by a lifting device, wherein an electrostatic chuck (6) is provided inside the inner furnace body (5); A U-shaped hole (11) is provided at the bottom of the base (1), and a lifting mechanism is provided inside the U-shaped hole (11) for taking the inner furnace body (5) from the outer furnace body (7) after it is unfolded.

2. The laminated co-firing device for preparing the aluminum nitride ceramic heater according to claim 1, characterized in that: The lifting mechanism comprises a mounting base plate (2) fixedly connected to the inside of the U-shaped hole (11), a pair of slide grooves (21) are provided on the mounting base plate (2), a lifting frame (3) is provided on the mounting base plate (2), a transverse support plate (31) is fixedly connected to the bottom of the lifting frame (3), a cylinder (32) is fixedly connected to the upper surface of the transverse support plate (31), a plug plate (33) is provided on the lifting frame (3), the lower surface of the plug plate (33) is fixedly connected to the piston rod of the cylinder (32), a plurality of pairs of pulley support blocks (35) sliding in the slide grooves (21) are provided at the bottom of the lifting frame (3), a pair of the pulley support blocks (35) are fixedly connected to limiting protrusions (36), and a transmission mechanism for allowing the lifting mechanism to escape from or be stored in the U-shaped hole (11) is provided on the mounting base plate (2).

3. The laminated co-firing device for preparing the aluminum nitride ceramic heater according to claim 2, characterized in that: The plug plate (33) is fixedly connected with a pair of limit support rods (34) which movably penetrate the transverse support plate (31) and are suspended from the ground.

4. The laminated co-firing device for preparing the aluminum nitride ceramic heater according to claim 2, characterized in that: One end of the pulley support block (35) on which the limiting protrusion (36) is installed is fixedly connected to the limiting clamping plate (37), and a pair of protruding plates (26) are provided on the installation base plate (2) for resisting the limiting clamping plate (37) to prevent the lifting frame (3) from falling out of the U-shaped hole (11).

5. The laminated co-firing device for preparing the aluminum nitride ceramic heater according to claim 2, characterized in that: The transmission mechanism comprises an L-shaped support plate (22) connected to the mounting base plate (2), the upper surface of the L-shaped support plate (22) is fixedly connected to a motor (23), the output shaft of the motor (23) is fixedly connected to a screw rod (24), the upper surface of the mounting base plate (2) is fixedly connected to a vertical support plate (25) for supporting the rotation of the screw rod (24) and being rotationally connected to the screw rod (24), and the lifting frame (3) is fixedly connected to a spiral connection frame (38) spirally connected to the screw rod (24).

6. The laminated co-firing device for preparing the aluminum nitride ceramic heater according to claim 2, characterized in that: A handle (4) is fixedly connected to the lifting frame (3).

7. The laminated co-firing device for preparing the aluminum nitride ceramic heater according to claim 2, characterized in that: The bottom of the pulley support block (35) is provided with a roller.

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