Purifying and filtering device for chemicals

Abstract

The utility model provides a purifying and filtering device for chemicals. The purifying and filtering device comprises a feeder, a resin tank and a filter which are sequentially connected through a pipeline, the feeder is a non-contact feeding tank and comprises a tank body and a cover body which are detachably connected, a lining bag is arranged in the tank body, a first containing cavity is formed between the lining bag and the tank body, and a second containing cavity is formed between the lining bag and the cover body; a communicating hole is formed in the cover body and used for communicating the interior of the lining bag with the resin tank. By means of the design between the lining bag and the tank body, internal chemical materials can be completely isolated from the external environment, the feeding function is achieved through the non-contact type feeding tank, a diaphragm pump is not needed, and the pollutant source from the pump body is effectively avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field of electronic chemical purification, and in particular relates to a purification and filtering device for chemicals. Background Art

[0002] The cleanliness of the wafer surface will have a certain degree of impact on the semiconductor process and product qualification rate. The most common major pollution includes the residues of metal, organic matter and granular particles. Ordinary industrial-grade chemicals have excessive metal impurity content and dust impurities. In the application of the semiconductor chip industry, metal ions will cause leakage current in the PN structure, which will lead to oxide breakdown and voltage reduction. The pollution of particulate impurities will cause blocking or shielding effects in processes such as etching and photolithography. Therefore, ordinary industrial-grade chemicals need to be purified and filtered to high-purity chemicals to meet the needs of chip manufacturing technology.

[0003] However, in actual application, impurity contamination is everywhere. The sources of introduction can be the chemicals themselves, or the insufficient purity of the materials of the purification and filtration device itself, which leads to the precipitation of metal ions and particulate impurities, which can cause chemical contamination. In addition, it can also come from containers that hold material solutions, pipeline pumps that transmit materials, etc., especially the pump body. Because the pump body is inconvenient to disassemble and assemble, and it is inconvenient to clean the inside, there is a high probability that there will be dead corners in the pump body that cannot be cleaned. At this time, if the material is conducted through a diaphragm pump, there will be a high probability that the flowing material will be contaminated.

[0004] For example, a diaphragm pump conducts liquid through the contraction of the diaphragm. After a long period of use, the internal diaphragm is prone to damage and leakage. In addition, for manufacturers who need to use high-purity chemicals, ordinary diaphragm pumps, even if the material is PTFE and compatible with chemicals, will still have metal ions and impurities precipitated due to insufficient material purity, causing certain pollution. Some models of pumps can meet the needs, but the delivery time is long and the price is expensive.

[0005] Based on the above problems, the present application discloses a purification and filtering device for chemicals. Utility Model Content

[0006] In order to solve all or part of the problems in the prior art, the utility model provides a purification and filtering device for chemicals to solve the problem of chemicals being contaminated by the conventional method of conducting materials through a diaphragm pump.

[0007] In order to achieve the above-mentioned purpose, the utility model provides the following technical solutions: a purification and filtration device for chemicals, comprising a feeder, a resin tank and a filter connected in sequence through pipelines; the feeder is a contactless feeding tank, comprising a detachably connected tank body and a cover body, an inner liner bag is provided in the tank body, a first accommodating cavity is formed between the inner liner bag and the tank body, and a second accommodating cavity is formed between the inner liner bag and the cover body; a connecting hole is provided on the cover body, which is used for the interior of the inner liner bag to communicate with the resin tank. Through the design between the inner liner bag and the tank body, the chemical materials inside can be completely isolated from the external environment, and the feeding function is realized through the contactless feeding tank, without the need for a diaphragm pump, effectively avoiding the source of pollutants from the pump body itself.

[0008] A material guide tube is arranged in the second accommodating cavity, and the material guide tube is communicated with the communicating hole on the cover body. When the liner bag is squeezed by external air pressure, the internal material can be squeezed outward from the guide tube.

[0009] The pipeline between the feeder and the resin tank is a first connecting pipe, and the first connecting pipe extends into the second accommodating cavity through the connecting hole on the cover body. Through the connecting hole on the cover body, the first connecting pipe can easily enter the second accommodating cavity, ensuring that the material is smoothly transported from the feeder to the resin tank.

[0010] The opening of the inner liner bag is detachably sealed and connected to the bottom of the cover body; the cover body is also provided with a screwing handle, which is convenient for manually screwing the cover body and facilitating the assembly and disassembly of the cover body.

[0011] The invention also includes an air guide tube, on which a regulating valve is provided, one end of which is connected to the first accommodation chamber, and the other end of which is connected to a gas source. Gas is transported to the first accommodation chamber through the air guide tube, and a driving force is generated by the gas pressure to squeeze the material in the liner bag outward through the material guide tube.

[0012] The tank body is provided with a control seat on the outside, and a foot switch for controlling the opening and closing of the regulating valve is provided on the control seat. The gas entry is controlled by the foot switch, and the operator does not need to bend over or use both hands, but only needs to step on the foot lightly to complete the operation, thus saving time and energy.

[0013] The resin tanks are anion and cation resin tanks connected in sequence, and the filters are a plurality of particle filters connected in sequence. The resin tanks can effectively remove metal impurities in the material, and the particle filters can effectively intercept particulate matter in the material.

[0014] The resin tank has a liquid inlet at the top and a liquid outlet at the bottom; it also includes a first mounting plate, a second mounting plate, and a plurality of support rods mounted therebetween, the resin tank being mounted on the first mounting plate, and the bottom of the resin tank being located between the first mounting plate and the second mounting plate. By separating the bottom of the resin tank from the tank support structural component, it is convenient to connect the delivery pipeline at the liquid outlet.

[0015] The first connecting pipe is provided with a front valve for controlling chemical feed to control material delivery; the end of the filter is connected to a discharge pipe, and the discharge pipe is provided with a rear valve for controlling chemical discharge to control the discharge of purified chemicals.

[0016] The front valve and the rear valve are both PFA valves; the first connecting pipe and the discharge pipe are both PFA pipes. The cleanliness of the flow pipeline is ensured by selecting low-precipitation PFA pipe valves.

[0017] Compared with the prior art, the utility model has at least the following beneficial effects:

[0018] (1) Chemical materials are stored in a contactless feeding tank with a special liner bag inside. This design completely isolates the chemical materials from the external environment, effectively preventing the possibility of external contamination. The liner bag can be squeezed by inflating the tank, causing the liner bag to shrink and push the chemical materials smoothly to the purification and filtration structure. The process does not involve a traditional diaphragm pump, thus avoiding the possible pollution source caused by the traditional pump body itself and ensuring the cleanliness of the purification process.

[0019] (2) The contactless feeding tank is also equipped with a foot switch on the control seat. By simply stepping on it, the operator can easily control the entry of gas and realize the inflation and squeezing of the liner bag, thereby achieving the smooth transportation of chemical materials. Compared with the traditional operation method, this design greatly simplifies the operation process and improves the convenience and efficiency of operation.

[0020] (3) The container and pipeline adopt a closed connection design, so that the chemical materials do not come into contact with the outside air, thereby avoiding pollution from the external environment and ensuring the purity of the purification process. After being processed by the purification and filtration device, ordinary industrial-grade chemicals can be purified to meet the electronic-grade requirements for chip technology, and the content of metal ions and particulate matter is significantly reduced, meeting the standards for the use of electronic-grade chips, thus having a high application value. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the specific embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 The utility model is a schematic structural diagram of an embodiment of a purification and filtering device for chemicals.

[0023] Figure 2 The embodiment of the utility model provides Figure 1 First schematic diagram of the internal structure of the feeder.

[0024] Figure 3 The embodiment of the utility model provides Figure 1 First schematic diagram of the internal structure of the feeder.

[0025] Figure 4 The embodiment of the utility model provides Figure 1 Schematic diagram of the structure of the resin tank.

[0026] Figure 5 The embodiment of the utility model provides Figure 1 Schematic diagram of the filter structure.

[0027] Figure markings: 1-feeder; 101-tank body; 102-liner bag; 103-cover body; 104-screwing handle; 105-material guide pipe; 106-control seat; 107-foot switch; 108-air guide pipe; 2-resin tank; 3-filter; 4-tank body bracket; 401-first mounting plate; 402-second mounting plate; 403-support rod; 5-filter bracket; 6-first connecting pipe; 7-front valve; 8-second connecting pipe; 9-rear valve. DETAILED DESCRIPTION

[0028] The technical solutions in the specific embodiments of the utility model are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] The implementation of the present utility model is described in detail below in conjunction with specific embodiments.

[0030] Reference Figure 1-Figure 5As shown, a preferred embodiment of the utility model is provided. A purification and filtration device for chemicals comprises a feeder 1, a resin tank 2 and a filter 3 which are connected in sequence through pipelines. The feeder 1 is specifically a contactless feeding tank, which adopts contactless technology to provide power to convey materials, ensuring that the materials are not subject to secondary contamination or damage during the conveying process. The resin tank 2 is a negative and positive resin tank connected in sequence, which effectively removes metal ions from the material through the adsorption effect of the resin. The filter 3 is a multi-stage precision particle filter connected in sequence, which is used to intercept tiny particles in the material and further improve the purity and cleanliness of the material. In this embodiment, the filter 3 specifically adopts a perfluoro PFA material filter, and the filter element material is also PFA material, and adopts multi-stage precision stepped filtration. The material is pre-loaded into the contactless feeding tank. When the purification and filtration is performed, the contactless feeding tank sends out the material, which passes through the resin tank 2 and several particle filters in turn and is discharged and filled into the clean barrel, so that the chemical material can be effectively purified. The purification and filtration has no contact with the outside, and does not require the use of a diaphragm pump to drive the material, which effectively avoids the source of pollutants from the pump body itself. The container and pipeline are tightly connected and do not come into contact with the outside air to avoid environmental impact. Through filtration, ordinary industrial-grade chemicals can be purified to meet the electronic-grade requirements for chip technology use, and metal ions and particulate matter are significantly reduced to meet the standards for the use of electronic-grade chips, which has high application value.

[0031] The contactless feeding tank includes a detachably connected tank body 101 and a cover body 103, and a liner bag 102 is arranged in the tank body 101. The liner bag 102 is made of PTFE (PTFE is polytetrafluoroethylene), and the opening is detachably sealed and connected to the bottom of the cover body 103. This design allows the liner bag 102 to be easily disassembled, installed and replaced, which is conducive to loading the material to be purified. During the loading process, the liner bag 102 needs to be placed in the tank body 101 first, and then the material to be purified is filled into the liner bag 102; after the material is loaded into the liner bag 102, the guide tube 105 is placed in the liner bag 102 and connected to the bottom interface of the cover body 103; finally, the cover body 103 is screwed onto the tank body 101 to complete the loading process. A first accommodating chamber is formed between the liner bag 102 and the tank body 101 for accommodating gas, and a second accommodating chamber is formed between the liner bag 102 and the cover body 103 for holding materials. Such a design allows the internal materials to be effectively isolated and ensures their purity. A screwing handle 104 is also fixedly provided on the upper surface of the cover body 103, and such a design facilitates the operator to manually screw the cover body 103, thereby facilitating its loading and unloading.

[0032] A connecting hole is provided on the cover body 103, and a material guide pipe 105 is provided in the second accommodating chamber, and the material guide pipe 105 is connected to the connecting hole on the cover body 103. This design enables the inner material of the liner bag 102 to be squeezed by the external air pressure, so as to squeeze out the internal material from the material guide pipe 105 to the outside, thereby realizing contactless liquid material transportation. The pipeline between the feeder 1 and the resin tank 2 is the first connecting pipe 6, and the first connecting pipe 6 is passed through the cover body 103, and one end of the bottom thereof is connected to the material guide pipe 105. In this way, the material transported through the first connecting pipe 6 can smoothly reach the resin tank 2, completing the contactless feeding process of the liquid material without the aid of traditional equipment such as a diaphragm pump. In other specific embodiments, the design of the first connecting pipe 6 can also be adjusted so that it directly passes through the connecting hole on the cover body 103 and enters the second accommodating chamber, thereby realizing the liquid material transportation function.

[0033] The tank body 101 of the contactless feeding tank is also provided with an air guide tube 108, one end of which is connected to the first accommodating chamber of the tank body 101, and the other end is connected to a high-purity nitrogen gas source to increase the air pressure inside the tank body 101. The air guide tube 108 has a built-in regulating valve, which can control the entry and stop of nitrogen, thereby realizing precise regulation of the internal air pressure. This design makes the material in the liner bag 102 inside the tank body 101 subject to the effect of air pressure, so that the internal material can be squeezed out smoothly. In a preferred embodiment, the outside of the tank body 101 is also equipped with a control seat 106, which is equipped with a foot switch 107, which is specifically used to control the opening and closing of the regulating valve. Through simple stepping operation, the operator can easily control the flow of nitrogen without excessive hand movements, realizing convenient and efficient operation. In addition, in order to further improve the humanized design of the operation, the position and height of the control seat 106 are adjustable to accommodate operators of different heights. In this embodiment, the control base 106 is placed on the ground, so that the operator can easily use the foot switch 107 without additional bending or using auxiliary tools. This design takes into account the comfort and convenience of the operator, ensuring that they can easily complete the operation in a standing posture.

[0034] The resin tank 2 includes a negative and positive resin tank connected in sequence, which are firmly placed on the ground through a tank support 4. Each resin tank 2 is provided with a liquid inlet on the top and a liquid outlet on the bottom to facilitate the entry and discharge of materials. The tank support 4 includes a first mounting plate 401, a second mounting plate 402 and a plurality of support rods 403 installed therebetween, and these supporting structures jointly ensure the stability and safety of the resin tank 2. The resin tank 2 is mounted on the first mounting plate 401, and its bottom is located between the first mounting plate 401 and the second mounting plate 402. This design separates the bottom of the resin tank 2 from the structural components of the tank support 4, and provides convenience for connecting the liquid outlet of the resin tank 2 to the pipeline. In addition, the spacing between the first mounting plate 401 and the second mounting plate 402 can also be adjusted as needed to accommodate resin tanks 2 of different sizes.

[0035] The pipeline between the resin tank 2 and the filter 3 is the second connecting pipe 8. The filter 3 includes several multi-level precision particle filters, and each precision particle filter is connected in sequence and firmly placed on the ground through the filter bracket 5. The end of the filter 3 is connected to a discharge pipe. In the pipeline, a front valve 7 is provided on the first connecting pipe 6 to control the feed flow rate of the chemical; a rear valve 9 is provided on the discharge pipe to control the discharge flow rate of the chemical. Both valves are made of PFA material to ensure their corrosion resistance and stability, and are suitable for chemical processing environments. In addition, in order to ensure the stability and corrosion resistance of the pipeline, the first connecting pipe 6, the second connecting pipe 8 and the discharge pipe are all made of PFA pipe material (PFA is soluble polytetrafluoroethylene). The cleanliness of the flow pipeline is ensured by selecting a low-precipitation PFA material pipe valve.

[0036] The purification and filtration device for the above chemicals was used to perform purification and filtration experiments on organic amine samples and organic acid aqueous solutions. The following are the experimental data and description:

[0037]

[0038] According to the above experimental data, by using the purification and filtration device to purify and filter chemical materials, the metal ion and particulate matter content in Sample 1 and Sample 2 was successfully reduced significantly to a level that meets the standards for electronic-grade chips. This process not only ensures the quality and purity of the samples, but also provides a reliable basis for their application in the electronics industry.

[0039] It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made to the utility model without departing from the principle of the utility model, and these improvements and modifications also fall within the scope of protection of the claims of the utility model.

Claims

1. A purification and filtration device for chemicals, characterized in that: The invention comprises a feeder (1), a resin tank (2) and a filter (3) which are connected in sequence through a pipeline; the feeder (1) is a contactless feeding tank, comprising a tank body (101) and a cover body (103) which are detachably connected; an inner liner bag (102) is provided in the tank body (101); a first accommodating cavity is formed between the inner liner bag (102) and the tank body (101), and a second accommodating cavity is formed between the inner liner bag (102) and the cover body (103); a connecting hole is provided on the cover body (103) for connecting the interior of the inner liner bag (102) with the resin tank (2).

2. The purification and filtration device for chemicals according to claim 1, characterized in that: A material guiding pipe (105) is provided in the second accommodating cavity, and the material guiding pipe (105) is connected to the connecting hole on the cover body (103).

3. The purification and filtration device for chemicals according to claim 1, characterized in that: The pipeline between the feeder (1) and the resin tank (2) is a first connecting pipe (6), and the first connecting pipe (6) extends into the second accommodating cavity through a connecting hole on the cover body (103).

4. The purification and filtration device for chemicals according to claim 1, characterized in that: The opening of the liner bag (102) is detachably sealed to the bottom of the cover body (103); a screwing handle (104) is also provided on the cover body (103).

5. The purification and filtration device for chemicals according to claim 1, characterized in that: It also comprises an air guide tube (108), on which a regulating valve is provided, one end of the air guide tube (108) is connected to the first accommodating cavity, and the other end of the air guide tube (108) is connected to an air source.

6. The purification and filtration device for chemicals according to claim 5, characterized in that: A control seat (106) is installed outside the tank body (101), and a foot switch (107) for controlling the opening and closing of the regulating valve is arranged on the control seat (106).

7. The purification and filtration device for chemicals according to claim 1, characterized in that: The resin tank (2) is a series of anion and cation resin tanks connected in sequence, and the filter (3) is a series of particle filters connected in sequence.

8. The purification and filtration device for chemicals according to claim 7, characterized in that: The resin tank (2) is provided with a liquid inlet at the top and a liquid outlet at the bottom; it also comprises a first mounting plate (401), a second mounting plate (402) and a plurality of support rods (403) mounted therebetween; the resin tank (2) is mounted on the first mounting plate (401), and the bottom of the resin tank (2) is located between the first mounting plate (401) and the second mounting plate (402).

9. The purification and filtration device for chemicals according to claim 3, characterized in that: The first connecting pipe (6) is provided with a front valve (7) for controlling the feeding of chemicals; the end of the filter (3) is connected to a discharge pipe, and the discharge pipe is provided with a rear valve (9) for controlling the discharge of chemicals.

10. The purification and filtration device for chemicals according to claim 9, characterized in that: The front valve (7) and the rear valve (9) are both PFA valves; the first connecting pipe (6) and the discharge pipe are both PFA pipes.

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