Vertical lifting groove body water injection spraying mechanism

Abstract

The utility model provides a vertical lifting groove body water injection spraying mechanism, which relates to the technical field of semiconductor equipment, and comprises a lifting mechanism arranged in a pre-divided groove body water injection area, and a water injection spraying mechanism is arranged on the lifting mechanism; the water injection spraying mechanism comprises a water injection pipe and a spraying pipe, and the water injection water inlet end of the water injection pipe and the spraying water inlet end of the spraying pipe are connected with a water source through water supply pipelines; when the detection sensor detects that the water injection area of the tank body is placed into the tank body, the lifting mechanism drives the water injection and spraying mechanism to move downwards in the vertical direction so as to enable the water injection and spraying mechanism to stretch into the tank body to be cleaned, and water injection or spraying cleaning is conducted on the tank body through the water injection and spraying mechanism. After water injection or cleaning is completed, the water injection spraying mechanism is driven to move upwards in the vertical direction so that the water injection spraying mechanism can be moved out of the tank body. The device has the beneficial effects that a spraying cleaning function is added while a water injection function is provided, the cleaning effect is improved, the repeated cleaning frequency is reduced, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a vertically lifting tank water injection and spraying mechanism. Background Art

[0002] In the field of semiconductor equipment technology, especially tank water injection mechanism, it is widely used in semiconductor manufacturing equipment. In wafer processing equipment, the tank water injection mechanism is one of the busiest motion mechanisms; it is necessary to clean the tank or the wafer in the tank to ensure that the wafer processing process can run completely.

[0003] The tank water injection mechanism can supply water through the water supply end to clean the wafers in the tank and transfer the tank or wafers to subsequent process equipment.

[0004] At present, the tank water injection mechanism mainly relies on the liquid entering from the water supply end through manual or automatic valves and then injected into the tank. When a certain liquid level is reached, the water supply is stopped, and then the tank or wafers are transferred to subsequent process equipment. However, the current tank water injection mechanism only cleans the wafers in the tank by injecting water, and the cleaning effect on the inner wall of the tank is not good. Additional equipment is required to further clean or repeatedly clean the inner wall of the tank, which reduces the efficiency of the overall production process. Utility Model Content

[0005] In view of the problems existing in the prior art, the utility model provides a vertically lifting water injection and spraying mechanism, comprising:

[0006] A lifting mechanism is arranged in a pre-divided tank water injection area, and a water injection spraying mechanism is installed on the lifting mechanism;

[0007] The water injection and spraying mechanism comprises a water injection pipe and a spraying pipe, and the water injection water inlet end of the water injection pipe and the spraying water inlet end of the spraying pipe are both connected to a water source through a water supply pipe;

[0008] The detection sensor is connected to the lifting mechanism. When the detection sensor detects that the water injection area of ​​the tank body is placed in the tank body, the lifting mechanism drives the water injection and spraying mechanism to move downward in the vertical direction to extend the water injection and spraying mechanism into the tank body to be cleaned, and the tank body is injected with water or sprayed for cleaning by the water injection and spraying mechanism. After the water injection or cleaning is completed, the water injection and spraying mechanism is driven to move upward in the vertical direction to move the water injection and spraying mechanism out of the tank body.

[0009] Preferably, the water supply pipeline comprises:

[0010] A water supply main pipeline, the water supply end of which is connected to the water source, and the water supply main pipeline is respectively connected to the water injection branch pipeline and the spray branch pipeline through a tee pipe;

[0011] The water injection branch pipe is connected to the water injection inlet end, and the spray branch pipe is connected to the spray inlet end;

[0012] The water supply main pipeline is provided with a flow meter and a manual valve.

[0013] Preferably, a water injection pneumatic valve is provided on the water injection branch pipeline, and a spray pneumatic valve is provided on the spray branch pipeline.

[0014] Preferably, the spray pipe sleeve is arranged outside the water injection pipe.

[0015] Preferably, multiple layers of spray heads are evenly distributed on the spray pipe.

[0016] Preferably, the water injection and spraying mechanism further includes a liquid level meter, which is arranged on one side of the water outlet of the water injection pipe.

[0017] Preferably, the lifting mechanism comprises:

[0018] A lifting cylinder, wherein the lifting cylinder is fixed to one side of the water injection area of ​​the tank body through a lifting cylinder fixing plate;

[0019] A lifting platform is connected to the lifting cylinder, the water injection and spraying mechanism is installed on the lifting platform, an opening is provided at one end of the lifting platform, and the water injection pipe and the spraying pipe extend downward from the opening.

[0020] Preferably, a limit block is provided on the spray pipe, and the limit block abuts against the upper surface of the lifting platform around the opening.

[0021] The above technical solution has the following advantages or beneficial effects: it improves the singleness of water injection of the existing tank water injection mechanism, adds a spray mechanism, provides water injection function while adding a spray cleaning function, and more effectively cleans the wafers in the tank and on the inner wall. The water injection and spray mechanism is extended into the tank to be cleaned through the cylinder lifting mechanism to inject water and spray clean the inner wall, thereby improving the cleaning effect, reducing the number of repeated cleaning times, and improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a structural schematic diagram of a vertically lifting tank water injection and spraying mechanism in a preferred embodiment of the utility model;

[0023] Figure 2 This is a structural schematic diagram of a lifting mechanism and a water injection and spraying mechanism in a preferred embodiment of the utility model;

[0024] Figure 3 This is a schematic diagram of the structure of a water supply pipeline in a preferred embodiment of the utility model;

[0025] Figure 4This is a schematic structural diagram of a water injection pipe and a spray pipe in a preferred embodiment of the utility model. DETAILED DESCRIPTION

[0026] The present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. The present invention is not limited to the implementation mode, and other implementation modes may also fall within the scope of the present invention as long as they meet the purpose of the present invention.

[0027] In a preferred embodiment of the utility model, based on the above problems existing in the prior art, a vertically lifting water injection and spraying mechanism is provided. Figure 1 , Figure 2 and Figure 3 As shown, including:

[0028] The lifting mechanism 1 is arranged in the pre-divided tank water injection area, and the lifting mechanism 1 is equipped with a water injection spraying mechanism 2;

[0029] The water injection and spraying mechanism 2 includes a water injection pipe 21 and a spraying pipe 22. The water injection water inlet end 211 of the water injection pipe 21 and the spraying water inlet end 221 of the spraying pipe 22 are both connected to a water source through a water supply pipe 3.

[0030] The detection sensor is connected to the lifting mechanism 1. When the detection sensor detects that the tank body 4 is placed in the water injection area of ​​the tank body, the lifting mechanism 1 drives the water injection and spraying mechanism 2 to move downward in the vertical direction to extend the water injection and spraying mechanism 2 into the tank body 4 to be cleaned, and the tank body 4 is injected with water or sprayed for cleaning through the water injection and spraying mechanism 2. After the water injection or cleaning is completed, the water injection and spraying mechanism 2 is driven to move upward in the vertical direction to move the water injection and spraying mechanism 2 out of the tank body 4.

[0031] Specifically, in this embodiment, in order to more effectively clean the wafers in the tank body 4, the singleness of the water injection of the existing tank body water injection mechanism is improved, and a spray pipe 22 is added to the original water injection pipe 21 to obtain a water injection spray mechanism 2. Before water injection, the tank body 4 is sprayed and cleaned through the spray pipe 22, so that the wafers in the tank body 4 are more effectively cleaned;

[0032] In order to meet the needs of the existing production process, a lifting mechanism 1 is added on the basis of the water injection and spraying mechanism 2. In the initial state, the lifting mechanism 1 lifts the water injection and spraying mechanism 2 to the top. When the detection sensor detects that the tank body 4 to be cleaned is placed under the water injection and spraying mechanism 2, the water injection and spraying mechanism 2 is lowered to a preset position, and the tank body 4 is then cleaned and injected with water through the water injection and spraying mechanism 2. After cleaning and water injection, the water injection and spraying mechanism 2 is lifted, and the cleaned tank body 4 is taken for use in subsequent production links, waiting to be placed under the water injection and spraying mechanism 2 again for comprehensive spray cleaning, thereby improving production efficiency.

[0033] The detection sensor is arranged in the water injection area of ​​the tank body, such as a pressure sensor arranged at the bottom of the water injection area of ​​the tank body, a visual sensor arranged above the water injection area of ​​the tank body, an infrared sensor arranged on the side of the water injection area of ​​the tank body, and a radar, etc., which can detect that a tank body 4 is placed in the water injection area of ​​the tank body.

[0034] In a preferred embodiment of the present invention, Figure 3 As shown, the water supply pipeline 3 includes:

[0035] A water supply main pipeline 31, a water supply end 311 of the water supply main pipeline 31 is connected to a water source, and the water supply main pipeline 31 is respectively connected to a water injection branch pipeline 33 and a spray branch pipeline 34 through a tee pipe 32;

[0036] The water injection branch pipe 33 is connected to the water injection inlet end, and the spray branch pipe 35 is connected to the spray inlet end;

[0037] The water supply main pipe 31 is provided with a flow meter 35 and a manual valve 36 .

[0038] In a preferred embodiment of the present invention, Figure 3 As shown, a water injection pneumatic valve 331 is provided on the water injection branch pipeline 33 , and a spray pneumatic valve 341 is provided on the spray branch pipeline 34 .

[0039] Specifically, in this embodiment, when the water injection and spraying mechanism 2 is needed, the manual valve 36 on the water supply main pipe 31 is opened, and the external water source flows from the water supply main pipe 31 into the water injection branch pipe 33 and the spray branch pipe 34, respectively, and then injects or sprays water to the tank body 4 through the water injection pipe 21 and the spray pipe 22;

[0040] The water injection pneumatic valve 331 is turned on to supply water to the water injection pipe 21 , and the spray pneumatic valve 341 is turned on to supply water to the spray pipe 22 , and the water inflow flow is monitored by the flow meter 35 .

[0041] In a preferred embodiment of the present invention, Figure 4 As shown, the spray pipe 22 is sleeved on the outside of the water injection pipe 21.

[0042] In a preferred embodiment of the present invention, Figure 2 and 4 As shown, multiple layers of spray heads 222 are evenly distributed on the spray pipe 22 .

[0043] Specifically, in this embodiment, the structure of the water injection pipe 21 is vertically downward as shown in the figure, and a spray pipe 22 is provided on the outside of the water injection pipe 21. The spray pipe 22 is provided with multiple layers of spray heads 222 from top to bottom. Such a structure can achieve multi-directional spray cleaning and water injection of the trough body 4 while reducing the volume, and is suitable for more different trough bodies 4.

[0044] In a preferred embodiment of the present invention, Figure 2 As shown, the water injection spray mechanism 2 also includes a liquid level meter 23, which is arranged on one side of the water outlet of the water injection pipe 21.

[0045] Specifically, in this embodiment, the liquid level meter 23 is disposed on one side of the water outlet of the water injection pipe 21, and the water injection is stopped when the liquid level meter 23 determines that the injected water volume reaches the required water volume.

[0046] In a preferred embodiment of the present invention, Figure 1 As shown, the lifting mechanism 1 comprises:

[0047] A lifting cylinder 11, the lifting cylinder 11 is fixed to one side of the tank body in the water injection area through a lifting cylinder fixing plate 12;

[0048] The lifting platform 13 is connected to the lifting cylinder 11, and the water injection and spraying mechanism 2 is installed on the lifting platform 13. An opening is provided at one end of the lifting platform 13, and a water injection pipe 21 and a spraying pipe 22 extend downward from the opening.

[0049] In a preferred embodiment of the present invention, Figure 4 As shown, a limit block 223 is provided on the spray pipe 22, and the limit block 223 abuts against the upper surface of the lifting platform 13 around the opening.

[0050] Specifically, in this embodiment, the water injection spraying mechanism 2 is raised and lowered by setting a lifting mechanism 1. Specifically, the structure of the lifting mechanism 1 is as follows: Figure 2 As shown, it includes a vertically placed lifting cylinder 11 connected to a lifting platform 13, and the lifting cylinder 11 drives the lifting platform 13 to move back and forth in the vertical direction;

[0051] The water injection and spraying mechanism 2 is placed on a lifting platform 13. One end of the lifting platform 13 is provided with an opening to extend the water injection pipe 1 and the spraying pipe 22 downward. Figure 4 As shown, when the lifting platform 13 descends until the lower surface of the lifting platform 13 abuts against the tank cover 41 of the tank 4, the water injection pipe 21 and the spray pipe 22 enter the tank 4 to spray and inject water.

[0052] The above are only preferred embodiments of the present invention, and are not intended to limit the implementation methods and protection scope of the present invention. Those skilled in the art should be aware that all solutions obtained by equivalent substitutions and obvious changes made using the contents of this specification and illustrations should be included in the protection scope of the present invention.

Claims

1. A vertically lifting tank water injection and spraying mechanism, characterized in that: include: A lifting mechanism is arranged in a pre-divided tank water injection area, and a water injection spraying mechanism is installed on the lifting mechanism; The water injection and spraying mechanism comprises a water injection pipe and a spraying pipe, and the water injection water inlet end of the water injection pipe and the spraying water inlet end of the spraying pipe are both connected to a water source through a water supply pipe; The detection sensor is connected to the lifting mechanism. When the detection sensor detects that the water injection area of ​​the tank body is placed in the tank body, the lifting mechanism drives the water injection and spraying mechanism to move downward in the vertical direction to extend the water injection and spraying mechanism into the tank body to be cleaned, and the tank body is injected with water or sprayed for cleaning by the water injection and spraying mechanism. After the water injection or cleaning is completed, the water injection and spraying mechanism is driven to move upward in the vertical direction to move the water injection and spraying mechanism out of the tank body.

2. The tank water injection and spraying mechanism according to claim 1, characterized in that: The water supply pipeline comprises: A water supply main pipeline, the water supply end of which is connected to the water source, and the water supply main pipeline is respectively connected to the water injection branch pipeline and the spray branch pipeline through a tee pipe; The water injection branch pipe is connected to the water injection inlet end, and the spray branch pipe is connected to the spray inlet end; The water supply main pipeline is provided with a flow meter and a manual valve.

3. The tank water injection and spraying mechanism according to claim 2, characterized in that: The water injection branch pipeline is provided with a water injection pneumatic valve, and the spray branch pipeline is provided with a spray pneumatic valve.

4. The tank water injection and spraying mechanism according to claim 1, characterized in that: The spray pipe sleeve is arranged outside the water injection pipe.

5. The tank water injection and spraying mechanism according to claim 1, characterized in that: The spray pipe is evenly distributed with multiple layers of spray heads.

6. The tank water injection and spraying mechanism according to claim 1, characterized in that: The water injection and spraying mechanism also includes a liquid level meter, which is arranged on one side of the water outlet of the water injection pipe.

7. The tank water injection and spraying mechanism according to claim 1, characterized in that: The lifting mechanism comprises: A lifting cylinder, wherein the lifting cylinder is fixed to one side of the water injection area of ​​the tank body through a lifting cylinder fixing plate; A lifting platform is connected to the lifting cylinder, the water injection and spraying mechanism is installed on the lifting platform, an opening is provided at one end of the lifting platform, and the water injection pipe and the spraying pipe extend downward from the opening.

8. The tank water injection and spraying mechanism according to claim 7, characterized in that: A limit block is provided on the spray pipe, and the limit block abuts against the upper surface of the lifting platform around the opening.

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