Crucible and electron beam evaporation coating system

Abstract

The utility model discloses a crucible and an electron beam evaporation coating system. The crucible comprises a crucible body and an outer turnup, the outer turnup is fixedly connected with the top end of the side wall of the crucible body, the outer turnup is arranged in the circumferential direction of the crucible body, and the crucible body and the outer turnup are electric conductors; the anti-climbing crucible cover comprises an annular cover, an inner hole of the annular cover corresponds to the opening of the crucible body, the crucible cover is located at the top of the outer flange, and the crucible cover and the outer flange are in sealing fit and are relatively fixed. The coating material gradually climbs upwards along the side wall of the crucible body and finally climbs to the crucible cover above the outer turnup edge, due to the fact that the crucible cover has the anti-climbing performance, the wettability of the coating material on the surface of the crucible cover is poor or the coating material is not wetted, the coating material does not climb along the surface of the crucible cover or the coating material climbs along the crucible cover very slowly, and the coating material is not prone to falling off. Therefore, the crucible climbing path of the coating material is cut off or blocked, and the coating material is prevented from overflowing out of the crucible before the electron beam evaporation process is completed.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating, in particular to a crucible and an electron beam evaporation film coating system. Background Art

[0002] Electron beam evaporation is a type of physical vapor deposition. Electron beam evaporation uses accelerated electrons to bombard the coating material. The kinetic energy of the electrons is converted into heat energy to heat and evaporate the coating material. After evaporation, the coating material adheres to the surface of the workpiece to form a film.

[0003] During the electron beam evaporation process, the coating material is generally placed in a crucible, which needs to have conductive and heat-resistant properties. However, some coating materials (such as metal aluminum) evaporate quickly in a conductive crucible and have good wettability, making it easy for the coating material to "climb the crucible", that is, the coating material climbs up along the crucible wall from a low level and eventually overflows the crucible. Utility Model Content

[0004] The utility model aims to provide a crucible and an electron beam evaporation coating system, which can ensure the conductive performance of the crucible body and prevent the coating material from climbing to the outside of the crucible.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A crucible, comprising:

[0007] The crucible body and the outer flange are fixedly connected to the top of the side wall of the crucible body, and the outer flange is arranged around the circumference of the crucible body, and the crucible body and the outer flange are conductors;

[0008] The anti-climbing crucible cover comprises an annular cover, and the inner hole of the annular cover corresponds to the opening of the crucible body. The crucible cover is located at the top of the outer flange, and the crucible cover and the outer flange are sealed and relatively fixed.

[0009] When the crucible provided by the utility model is used, the coating material is placed inside the crucible body. Since the crucible body is a conductor, the current can be transmitted through the crucible body to avoid charge accumulation. When the coating material "climbs the crucible", the coating material gradually climbs upward along the inner side wall of the crucible body and finally climbs onto the crucible cover above the outer flange. Since the crucible cover has an anti-climbing performance, the coating material has poor wettability or does not wet the surface of the crucible cover. The coating material does not climb the crucible along the surface of the crucible cover or the coating material crawls very slowly along the crucible cover, thereby cutting off or blocking the coating material's climbing path, preventing the coating material from overflowing the crucible before the electron beam evaporation process is completed.

[0010] In addition, an outward flange is provided on the top of the crucible body. After the coating material crawls to the top of the side wall of the crucible body, it will continue to crawl to the outward flange or the crucible cover. The provision of the outward flange and the crucible cover increases the distance the coating material climbs out of the crucible, thereby extending the service life of the crucible; and, the temperature of the outward flange and the crucible cover is lower than the internal temperature of the crucible body. The low temperature has a certain alleviating and improving effect on the crucible climbing phenomenon. After the coating material crawls to the outward flange or the crucible cover, as the temperature decreases, the crawling is slow, which further extends the crucible climbing time and prevents the coating material from overflowing the crucible.

[0011] In one implementation, the outer flange and the side wall of the crucible body are an integral structure, which is convenient for processing and manufacturing; or, the outer flange and the side wall of the crucible body are fixed by bonding, interference fit, clamping and / or threaded connection. The outer flange and the side wall of the crucible body can be respectively provided with grooves and protrusions, and the protrusions are located in the grooves, so that the outer flange and the side wall of the crucible body can be clamped, interference fit or bonded, which is more convenient for connection.

[0012] In one implementation, the outer flange is perpendicular to the side wall of the crucible body. During the assembly process, after the crucible cover is placed on the outer flange, the crucible cover can be prevented from shifting or misaligning, and the fixed connection between the crucible cover and the outer flange is more convenient; and / or, the width of the outer flange is not less than one-quarter of the outer diameter of the crucible body and not more than one-half of the height of the crucible body, so as to extend the crucible climbing distance while saving installation space as much as possible.

[0013] In one implementation, a sintering agent is provided between the crucible cover and the outer flange, and the crucible cover, the sintering agent and the outer flange are fixed and sealed by sintering. After sintering, the sealing between the crucible cover and the outer flange is ensured, and the crucible cover and the outer flange are relatively fixed, which is more convenient for processing and manufacturing;

[0014] The sintering agent includes alumina, silicate and / or phosphate. The above materials have a certain barrier / isolation effect on the infiltration of the coating material and are suitable for processing crucibles for electron beam evaporation coating process.

[0015] In one implementation, the crucible cover and the outer flange are bonded by an adhesive, which has low cost and simplifies the processing technology;

[0016] Adhesives include inorganic adhesives;

[0017] Inorganic adhesives include phosphate coatings, silicate adhesives and / or alumina cement. Inorganic adhesives have the advantages of good heat resistance, low cost, not easy to age, simple structure, high adhesion, etc., and are suitable for processing crucibles for electron beam evaporation coating processes.

[0018] In one implementation, the annular cover is an annular plate structure, and the annular cover at least covers the top of the outer flange, and the bottom wall of the annular cover can be at least partially overlapped with the top wall of the outer flange, so that the bottom wall of the annular cover can be sealed with the top wall of the outer flange by bonding or sintering, and the contact area between the bottom wall of the annular cover and the top wall of the outer flange is larger, thereby ensuring that the connection between the outer flange and the crucible cover is more firm and easy to assemble.

[0019] In one implementation, the crucible cover further includes an outer baffle, which is connected to the annular cover and extends toward the bottom of the crucible body, and is located on the side of the outer flange away from the inner cavity of the crucible body; in this way, after the coating material climbs to the top of the side wall of the crucible body, it can continue to crawl along the top wall of the annular cover and the outer side wall of the outer baffle, and the annular cover and the outer baffle have anti-climbing performance, further extending the coating material's climbing path, and further preventing the coating material from overflowing the crucible before the electron beam evaporation process is completed. In addition, the outer baffle is outside the crucible body, and the temperature is relatively low, which can further prevent the coating material from overflowing.

[0020] The outer baffle plate is vertically arranged to the bottom wall of the crucible cover, and the crucible cover has a regular shape, which is convenient for processing and manufacturing.

[0021] In one implementation, the crucible cover also includes an inner baffle plate, which is connected to the annular cover and extends toward the bottom of the crucible body, and the inner baffle plate overlaps and is sealed with the inner side wall of the crucible body. With such an arrangement, after the coating material climbs to the lower end of the inner baffle plate, when crawling along the inner side wall of the inner baffle plate, due to the anti-climbing property of the inner baffle plate, the coating material does not climb out of the crucible along the surface of the inner baffle plate or the coating material crawls very slowly along the surface of the inner baffle plate, further extending the crucible climbing time and preventing the coating material from overflowing the crucible before the electron beam evaporation process is completed.

[0022] In one implementation, a receiving groove is provided on the inner side wall of the crucible body, an inner baffle is arranged in the receiving groove, and the inner baffle and the groove wall of the receiving groove are sealed, so that the inner baffle is prevented from blocking the opening of the crucible body, and the receiving groove can be used to position the inner baffle; and / or,

[0023] The inner baffle plate is vertically arranged with the bottom wall of the crucible cover.

[0024] In one implementation, the inner wall of the crucible cover is flush with the inner wall of the crucible body, and the inner wall of the crucible cover does not completely block the opening of the crucible body, which is convenient for holding the coating material; or, the inner wall of the crucible cover protrudes from the inner wall of the crucible body, which can ensure the thickness of the side wall near the opening of the crucible body and ensure good mechanical strength of the crucible body.

[0025] In one implementation, the outer side wall and / or the inner side wall of the crucible cover is an inclined wall;

[0026] The outer side wall and / or inner side wall of the crucible cover gradually inclines from the bottom to the top of the crucible body toward the inner cavity of the crucible body; or, the outer side wall and / or inner side wall of the crucible cover gradually inclines from the bottom to the top of the crucible body toward the inner cavity of the crucible body. Both inclination modes of the outer side wall and / or inner side wall of the crucible cover can extend the length of the outer side wall of the crucible cover, thereby extending the crucible climbing path and crucible climbing time.

[0027] In one implementation, the cross section of the annular cover is triangular, trapezoidal and / or square, and the regular shape is convenient for processing and manufacturing, and also convenient for the bottom wall of the annular cover to be stacked and fixedly connected with the top wall of the outer flange; and / or,

[0028] The height of the annular cover is not less than one fifth of the height of the crucible body, and the coating material needs to crawl along the thickness direction of the annular cover, which can also extend the path and the crucible crawling time.

[0029] In one implementation, the surface of the crucible cover is insulated; or, the crucible cover is an insulator; or, an insulating layer is provided on the surface of the crucible cover;

[0030] The materials of the insulator or insulating layer include silicon nitride, silicon carbide, titanium carbide, aluminum oxide, aluminum nitride and / or titanium oxide. The above materials have poor wettability or no wettability with the coating material and are suitable for producing crucible covers.

[0031] An electron beam evaporation coating system comprises any of the above crucibles. Compared with the prior art, the electron beam evaporation coating system provided by the utility model embodiment has the same beneficial effects as the above crucibles, which will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0033] Figure 1 A cross-sectional view of a crucible provided in a first embodiment of the utility model;

[0034] Figure 2 A cross-sectional view of a crucible provided in a second embodiment of the utility model;

[0035] Figure 3 A cross-sectional view of a crucible provided in a third embodiment of the present invention.

[0036] Reference numerals:

[0037] 1-crucible body, 1a-outer flange, 2-crucible cover, 2a-outer baffle, 2b-inner baffle, 3-sintering agent. DETAILED DESCRIPTION

[0038] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0039] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0040] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined. The meaning of "several" is one or more, unless otherwise clearly and specifically defined.

[0041] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0042] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0043] At present, in the process of electron beam evaporation, the coating material is generally placed in a crucible, and the crucible needs to have conductive and heat-resistant properties. However, the conductive crucible material generally has good wettability with the coating material, and the liquid coating material easily climbs up from the bottom of the crucible, resulting in a "climbing crucible" phenomenon. If you want to avoid the "climbing crucible" phenomenon, you need to choose a material that is both conductive and has poor wettability with the coating material to prepare the crucible. At the same time, the crucible material also needs to have heat resistance, which limits the choice of crucible materials, and places higher requirements on the crucible preparation process and higher costs.

[0044] In view of the above situation, the utility model provides a crucible, which includes a crucible body 1, an outer flange 1a and a crucible cover 2. Figure 1-Figure 3 As shown, the top of the crucible body 1 is provided with an outer flange 1a, which is fixedly connected to the side wall of the crucible body 1, that is, the outer flange 1a is fixedly connected to the top of the side wall of the crucible body 1, and the outer flange 1a is a ring plate as a whole, and the outer flange 1a extends from the top of the side wall of the crucible body 1 to the direction away from the inner cavity of the crucible body 1. The outer flange 1a is arranged around the circumference of the crucible body 1, that is, the outer flange 1a is arranged along the circumference of the crucible body 1. The crucible body 1 and the outer flange 1a are conductors to ensure that the current can be transmitted through the crucible body during the electron beam evaporation process to avoid charge accumulation.

[0045] The crucible cover 2 includes an annular cover, and the inner hole of the annular cover corresponds to the opening of the crucible body 1. Specifically, the inner hole of the annular cover is opposite to the opening of the crucible body 1, and the center line of the inner hole of the annular cover coincides with the center line of the opening of the crucible body 1. Preferably, the inner hole of the annular cover is greater than or equal to the opening of the crucible body 1, ensuring that the annular cover does not block the opening of the crucible body 1. The crucible cover 2 is located at the top of the outer flange 1a, that is, the bottom wall of the crucible cover 2 and the top wall of the outer flange 1a are at least partially overlapped, and the crucible cover 2 covers all or part of the top wall of the outer flange 1a. The crucible cover 2 is sealed and relatively fixed with the outer flange 1a to prevent the coating material from overflowing from the gap between the crucible cover 2 and the outer flange 1a. The contact area between the outer flange 1a and the crucible cover 2 is large, which can ensure that the combination between the outer flange 1a and the crucible cover 2 is more firm and easy to assemble.

[0046] When the crucible provided by the utility model is used, the coating material is placed inside the crucible body 1. Since the crucible body 1 is a conductor, the current can be transmitted through the crucible body 1 to avoid charge accumulation. When the coating material "climbs the crucible", the coating material gradually climbs upward along the inner wall of the crucible body 1, and finally climbs onto the crucible cover 2 above the outer flange 1a. Since the crucible cover 2 has an anti-climbing performance, the coating material has poor wettability or does not wet the surface of the crucible cover 2, and the coating material does not climb the crucible along the surface of the crucible cover 2 or the coating material crawls very slowly along the crucible cover 2, thereby cutting off or blocking the coating material's climbing path, preventing the coating material from overflowing the crucible before the electron beam evaporation process is completed.

[0047] In addition, an outer flange 1a is provided on the top of the crucible body 1. After the coating material crawls to the top of the side wall of the crucible body 1, it will continue to crawl to the outer flange 1a or the crucible cover 2. The provision of the outer flange 1a and the crucible cover 2 increases the distance the coating material climbs out of the crucible, thereby extending the service life of the crucible; and, the temperature of the outer flange 1a and the crucible cover 2 is lower than the internal temperature of the crucible body 1. The low temperature has a certain alleviating and improving effect on the crucible climbing phenomenon. After the coating material crawls to the outer flange 1a or the crucible cover 2, as the temperature decreases, the crawling is slow, which further extends the crucible climbing time and prevents the coating material from overflowing the crucible.

[0048] In a specific embodiment, the outer flange 1a and the side wall of the crucible body 1 are an integral structure, that is, the outer flange 1a and the crucible body 1 can be integrally formed, which is convenient for processing and manufacturing. In addition, the outer flange 1a and the side wall of the crucible body 1 can also be fixed by bonding, interference fit, clamping and / or screw connection. Specifically, the outer flange 1a and the side wall of the crucible body 1 can be respectively provided with a groove and a protrusion, and the protrusion is located in the groove, so that the outer flange 1a and the side wall of the crucible body 1 are clamped, interference fit or bonded, which is more convenient for connection.

[0049] like Figure 1-Figure 3 As shown, the outer flange 1a can be perpendicular to the side wall of the crucible body 1, so that during the assembly process, after the crucible cover 2 is placed on the outer flange 1a, the crucible cover 2 can be prevented from shifting and misaligning, and the crucible cover 2 is more convenient to be fixedly connected to the outer flange 1a. Of course, the angle between the outer flange 1a and the side wall of the crucible body 1 can also be an acute angle or an obtuse angle, that is, the technical solution of the outer flange 1a tilting upward or downward relative to the crucible body 1 is also within the protection scope of the present utility model.

[0050] The width of the outer flange 1a is not less than one-fourth of the outer diameter of the crucible body 1, so as to further extend the distance that the coating material climbs into the crucible, and ensure that the coating material will not crawl to the outer wall of the crucible body 1 before the electronic evaporation process is completed, thereby extending the service life of the crucible. In addition, the wider the width of the outer flange 1a, the lower the temperature of the outer edge of the outer flange 1a away from the inner cavity of the crucible body 1, further extending the time of climbing into the crucible. Specifically, the width of the outer flange 1a is one-fourth, one-third or one-half of the outer diameter of the crucible body 1.

[0051] However, if the width of the outer flange 1a is too wide, the overall volume of the crucible will be too large, and the installation space will be larger. Therefore, the width of the outer flange 1a is not greater than half of the height of the crucible body 1, so as to extend the crucible climbing distance and save installation space as much as possible. Specifically, the width of the outer flange 1a is half, one third or one quarter of the height of the crucible body 1.

[0052] In order to ensure the sealing between the outer flange 1a and the crucible cover 2 and prevent the coating material from overflowing from the gap between the crucible cover 2 and the outer flange 1a, a sintering agent 3 can be provided between the crucible cover 2 and the outer flange 1a, and the crucible cover 2, the sintering agent 3 and the outer flange 1a are fixed and sealed by sintering. In this way, after sintering, the sealing between the crucible cover 2 and the outer flange 1a is ensured, and the crucible cover 2 and the outer flange 1a are relatively fixed, which is more convenient for processing and manufacturing.

[0053] In the above embodiment, the sintering agent 3 may include alumina, silicate and / or phosphate. The above materials have a certain blocking / isolating effect on the infiltration of the coating material and are suitable for processing crucibles for electron beam evaporation coating process.

[0054] In another preferred embodiment, the crucible cover 2 and the outer flange 1a can also be bonded by an adhesive, that is, after the adhesive is applied to the surface of the outer flange 1a, the crucible cover 2 is placed on the top of the outer flange 1a to bond the crucible cover 2 and the outer flange 1a. Using an adhesive to bond the crucible cover 2 and the outer flange 1a is low in cost and simplifies the processing technology.

[0055] In the above embodiment, since the crucible has a high temperature during use, the adhesive should be a high temperature resistant adhesive. Preferably, the adhesive includes an inorganic adhesive. The inorganic adhesive has the advantages of good heat resistance, low cost, not easy to age, simple structure, high adhesion, etc., and is suitable for processing the crucible of the electron beam evaporation coating process. Specifically, the inorganic adhesive includes phosphate coating, silicate adhesive and / or alumina cement. The above materials have a certain blocking / isolating effect on the infiltration of the coating material, and are suitable for processing the crucible of the electron beam evaporation coating process.

[0056] In another preferred embodiment, the annular cover is an annular plate structure, which has a simple structure and is easy to process, and the bottom wall of the annular cover can be at least partially overlapped with the top wall of the outer flange 1a, so that the bottom wall of the annular cover can be sealed with the top wall of the outer flange 1a by bonding or sintering, and the contact area between the bottom wall of the annular cover and the top wall of the outer flange 1a is larger, thereby ensuring that the connection between the outer flange 1a and the crucible cover 2 is more firm and easy to assemble.

[0057] The annular cover at least covers the top of the outer flange 1a, that is, the annular cover can completely cover the top wall of the outer flange 1a, so that after the coating material climbs to the top of the side wall of the crucible body 1, it can only continue to crawl along the annular cover, and the annular cover has poor wettability or no wettability, thereby cutting off or blocking the coating material's climbing path, preventing the coating material from overflowing the crucible. Of course, the annular cover can also only cover a portion of the top wall of the outer flange 1a.

[0058] In the above embodiment, Figure 1As shown, the crucible cover 2 also includes an outer baffle 2a, which is connected to the annular cover. Specifically, the outer baffle 2a is fixedly connected to the edge of the annular cover away from the inner cavity of the crucible body 1. In addition, the outer baffle 2a extends in the direction close to the bottom of the crucible body 1, and the outer baffle 2a is located on the side of the outer flange 1a away from the inner cavity of the crucible body 1. The top of the outer baffle is fixedly connected to the edge of the annular cover away from the inner cavity of the crucible body 1, and the lower end of the outer baffle 2a can be arranged flush with the bottom wall of the outer flange 1a. In this way, after the coating material climbs to the top of the side wall of the crucible body 1, it can continue to crawl along the top wall of the annular cover and the outer side wall of the outer baffle 2a. The annular cover and the outer baffle 2a have anti-climbing performance, which further extends the coating material's climbing path, and further avoids the coating material from overflowing the crucible before the electron beam evaporation process is completed. In addition, the outer baffle 2a is outside the crucible body 1, and the temperature is relatively low, which can further prevent the coating material from overflowing.

[0059] In the above embodiment, the outer baffle plate 2a and the bottom wall of the crucible cover 2 can be arranged vertically, so that the shape of the crucible cover 2 is regular and easy to manufacture. Alternatively, the angle between the outer baffle plate 2a and the bottom wall of the crucible cover 2 can also be an acute angle or an obtuse angle, that is, the outer baffle plate 2a can also be inclined relative to the bottom wall of the crucible cover 2 in a direction close to the inner cavity of the crucible body 1 or in a direction away from the inner cavity of the crucible body 1.

[0060] In order to facilitate processing and manufacturing, the outer baffle plate 2a and the annular cover can be an integral structure, or the outer baffle plate 2a and the annular cover can also be fixed by bonding, interference fit, clamping, etc. A sintering agent 3 or adhesive can also be provided between the outer baffle plate 2a and the end of the outer flange 1a away from the inner cavity of the crucible body 1 to make the assembly of the crucible cover 2 more secure.

[0061] like Figure 2 and Figure 3 As shown, in another preferred embodiment, the crucible cover 2 further includes an inner baffle 2b, which is connected to the annular cover. Specifically, the inner baffle 2b is fixedly connected to the edge of the annular cover near the inner cavity of the crucible body 1. In addition, the inner baffle 2b extends in a direction close to the bottom of the crucible body 1, the top of the inner baffle 2b is fixedly connected to the annular cover, the lower end of the inner baffle 2b is located in the inner cavity of the crucible body 1, and the inner baffle 2b extends from the top to the bottom in a direction close to the bottom of the crucible body 1. The inner baffle 2b overlaps and seals the inner side wall of the crucible body 1. In this way, after the coating material climbs to the lower end of the inner baffle 2b, when it crawls along the inner side wall of the inner baffle 2b, due to the anti-climbing performance of the inner baffle 2b, the coating material does not climb along the surface of the inner baffle 2b or the coating material crawls very slowly along the surface of the inner baffle 2b, further prolonging the crucible climbing time, and preventing the coating material from overflowing the crucible before the electron beam evaporation process is completed.

[0062] In the above embodiment, Figure 2 and Figure 3As shown, the inner side wall of the crucible body 1 is provided with a receiving groove, and the inner baffle plate 2b is arranged in the receiving groove, and the bottom end of the inner baffle plate 2b can be supported by the bottom wall of the receiving groove, so as to position the crucible cover 2. The inner baffle plate 2b is sealed with the groove wall of the receiving groove to prevent the coating material from overflowing from the gap between the inner baffle plate 2b and the groove wall of the receiving groove. In this way, the inner baffle plate 2b can be prevented from blocking the opening of the crucible body 1, and the inner baffle plate 2b can be positioned by using the receiving groove.

[0063] In the above embodiment, the inner baffle plate 2b can be arranged perpendicularly to the bottom wall of the crucible cover 2, so that the shape of the crucible cover 2 is regular and easy to manufacture. Alternatively, the angle between the inner baffle plate 2b and the bottom wall of the crucible cover 2 can also be an acute angle or an obtuse angle, that is, the inner baffle plate 2b can also be inclined relative to the bottom wall of the crucible cover 2 in a direction close to the inner cavity of the crucible body 1 or in a direction away from the inner cavity of the crucible body 1.

[0064] In order to facilitate processing and manufacturing, the inner baffle plate 2b and the annular cover can be an integral structure, or the inner baffle plate 2b and the annular cover can also be fixed by bonding, interference fit, clamping, etc. A sintering agent 3 or adhesive can also be provided between the inner baffle plate 2b and the end of the outer flange 1a close to the inner cavity of the crucible body 1 to make the assembly of the crucible cover 2 more secure.

[0065] like Figure 1 and Figure 2 As shown, the inner side wall of the crucible cover 2 is flush with the inner side wall of the crucible body 1, that is, the inner side wall of the crucible cover 2 is aligned with the inner side wall of the crucible body 1 along the vertical direction. When the crucible body 1 is annular, the inner side wall of the crucible cover 2 and the inner side wall of the crucible body 1 are located on the same cylindrical surface. In this way, the inner side wall of the crucible cover 2 does not completely block the opening of the crucible body 1, which is convenient for containing the coating material.

[0066] Or, if Figure 3 As shown, the inner wall of the crucible cover 2 can also be arranged to protrude from the inner wall of the crucible body 1, that is, the inner wall of the crucible cover 2 and the inner wall of the crucible body 1 are not aligned in the vertical direction, and the inner wall of the crucible cover 2 is closer to the center line of the crucible body 1 than the inner wall of the crucible body 1. In this way, the thickness of the side wall near the opening of the crucible body 1 can be guaranteed, and the good mechanical strength of the crucible body 1 can be guaranteed.

[0067] In addition, the outer wall and / or inner wall of the crucible cover 2 are inclined walls, that is, the outer wall of the crucible cover 2 is inclined relative to the side wall of the crucible body 1, and / or the outer wall of the crucible cover 2 is inclined relative to the side wall of the crucible body 1, so that the length of the outer wall and / or inner wall of the crucible cover 2 can be appropriately extended, further extending the crucible climbing path and crucible climbing time.

[0068] Specifically, Figure 3As shown, the outer wall of the crucible cover 2 gradually tilts toward the inner cavity of the crucible body 1 from the bottom to the top of the crucible body 1. That is, the bottom end of the outer wall of the crucible cover 2 is farther away from the inner cavity of the crucible body 1 than the top end, and the outer wall of the crucible cover 2 gradually tilts toward the inner cavity of the crucible body 1 from the bottom to the top. Or, as Figure 2 As shown, the outer wall of the crucible cover 2 gradually tilts away from the inner cavity of the crucible body 1 along the direction from the bottom to the top of the crucible body 1, that is, the bottom end of the outer wall of the crucible cover 2 is closer to the inner cavity of the crucible body 1 than the top end, and the outer wall of the crucible cover 2 gradually tilts away from the inner cavity of the crucible body 1 from the bottom to the top end. The two tilting modes of the outer wall of the crucible cover 2 can both extend the length of the outer wall of the crucible cover 2, thereby extending the crucible climbing path and the crucible climbing time.

[0069] The inner side wall of the crucible cover 2 gradually tilts toward the inner cavity of the crucible body 1 from the bottom to the top of the crucible body 1. That is, the bottom end of the inner side wall of the crucible cover 2 is farther away from the inner cavity of the crucible body 1 than the top end, and gradually tilts toward the inner cavity of the crucible body 1 from the bottom end to the top end of the inner side wall of the crucible cover 2. Alternatively, the inner side wall of the crucible cover 2 gradually tilts away from the inner cavity of the crucible body 1 from the bottom to the top of the crucible body 1, that is, the bottom end of the inner side wall of the crucible cover 2 is closer to the inner cavity of the crucible body 1 than the top end, and gradually tilts away from the inner cavity of the crucible body 1 from the bottom end to the top end of the inner side wall of the crucible cover 2. The above two tilting modes of the inner side wall of the crucible cover 2 can both extend the length of the inner side wall of the crucible cover 2, thereby extending the crucible climbing path and crucible climbing time.

[0070] Preferably, the cross-section of the annular cover may be triangular, trapezoidal and / or square, and the regular shape is convenient for processing and manufacturing, and also facilitates the stacking and fixed connection of the bottom wall of the annular cover and the top wall of the outer flange 1a.

[0071] The height of the annular cover is not less than one fifth of the height of the crucible body 1, so that the coating material needs to crawl along the thickness direction of the annular cover, which can also extend the path and the time of crawling. Specifically, the height of the annular cover is one fifth, one quarter or one third of the height of the crucible body 1.

[0072] In another preferred embodiment, the surface of the crucible cover 2 is insulated. Specifically, the crucible cover 2 can be an insulator, that is, the crucible cover 2 is an insulator as a whole, and the material of the crucible cover 2 is an insulating material. Alternatively, an insulating layer is provided on the surface of the crucible cover 2, and the insulating layer can be provided on the surface of the crucible cover 2 by coating, spraying, etc., to ensure the surface insulation of the crucible cover 2. The insulating material has poor or no wettability with the coating material, and is suitable for the production of the crucible cover 2, especially for metal coating materials, such as aluminum. Specifically, the surfaces of the annular cover, the outer baffle 2a and the inner baffle 2b are all insulated, so that the annular cover, the outer baffle 2a and the inner baffle 2b can be used to cut off or hinder the crucible climbing path.

[0073] Among them, the material of the insulator or the insulating layer includes silicon nitride, silicon carbide, titanium carbide, aluminum oxide, aluminum nitride and / or titanium oxide. The above materials have poor wettability or no wettability with the coating material and are suitable for producing the crucible cover 2.

[0074] In addition, the embodiment of the utility model further provides an electron beam evaporation coating system, which includes the crucible provided by any of the above embodiments. Compared with the prior art, the beneficial effects of the electron beam evaporation coating system provided by the embodiment of the utility model are the same as the beneficial effects of the above crucible, which will not be described in detail here.

[0075] In the description of the above embodiments, specific features, structures, materials or characteristics may be combined in a suitable manner in any one or more embodiments or examples.

[0076] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A crucible, characterized in that: include: A crucible body and an outer flange, wherein the outer flange is fixedly connected to the top of the side wall of the crucible body and the outer flange is arranged around the circumference of the crucible body, and the crucible body and the outer flange are conductors; The invention discloses an anti-climbing crucible cover, wherein the crucible cover comprises an annular cover, and the inner hole of the annular cover corresponds to the opening of the crucible body, the crucible cover is located on the top of the outer flange, and the crucible cover is sealed and matched with the outer flange and relatively fixed.

2. The crucible according to claim 1, characterized in that The outer flange and the side wall of the crucible body are an integral structure; or, the outer flange and the side wall of the crucible body are fixed by bonding, interference fit, clamping and / or threaded connection.

3. The crucible according to claim 1, characterized in that The outer flange is perpendicular to the side wall of the crucible body; and / or the width of the outer flange is not less than one quarter of the outer diameter of the crucible body and not greater than one half of the height of the crucible body.

4. The crucible according to claim 1, characterized in that A sintering agent is arranged between the crucible cover and the outer flange, and the crucible cover, the sintering agent and the outer flange are fixed and sealed by sintering; the sintering agent includes alumina, silicate and / or phosphate.

5. The crucible according to claim 1, characterized in that The crucible cover and the outer flange are bonded by an adhesive; the adhesive includes an inorganic adhesive; the inorganic adhesive includes phosphate coating, silicate adhesive and / or alumina cement.

6. The crucible according to any one of claims 1 to 5, characterized in that: The annular cover is an annular plate structure, and the annular cover at least covers the top of the outer flange.

7. The crucible according to claim 6, characterized in that The crucible cover further comprises an outer baffle, which is connected to the annular cover and extends toward the bottom of the crucible body, and is located on a side of the outer flange facing away from the inner cavity of the crucible body; The outer baffle is arranged perpendicularly to the bottom wall of the crucible cover.

8. The crucible according to claim 6, characterized in that The crucible cover also includes an inner baffle plate, which is connected to the annular cover and extends toward the bottom of the crucible body, and the inner baffle plate overlaps and seals with the inner side wall of the crucible body.

9. The crucible according to claim 8, characterized in that The inner side wall of the crucible body is provided with a receiving groove, the inner baffle is arranged in the receiving groove, and the inner baffle and the groove wall of the receiving groove are sealed; and / or, The inner baffle is arranged perpendicularly to the bottom wall of the crucible cover.

10. The crucible according to any one of claims 1 to 5 and 7 to 9, characterized in that: The inner side wall of the crucible cover is flush with the inner side wall of the crucible body; or, the inner side wall of the crucible cover protrudes from the inner side wall of the crucible body.

11. The crucible according to any one of claims 1 to 5 and 7 to 9, characterized in that: The outer side wall and / or the inner side wall of the crucible cover are inclined walls; The outer wall and / or inner wall of the crucible cover gradually inclines toward the inner cavity of the crucible body from the bottom to the top of the crucible body; or, the outer wall and / or inner wall of the crucible cover gradually inclines toward the inner cavity of the crucible body from the bottom to the top of the crucible body.

12. The crucible according to any one of claims 1 to 5 and 7 to 9, characterized in that: The cross section of the annular cover is triangular, trapezoidal and / or square; and / or, The height of the annular cover is not less than one fifth of the height of the crucible body.

13. The crucible according to any one of claims 1 to 5 and 7 to 9, characterized in that: The surface of the crucible cover is insulated; or, the crucible cover is an insulator; or, an insulating layer is provided on the surface of the crucible cover; The material of the insulator or the insulating layer includes silicon nitride, silicon carbide, titanium carbide, aluminum oxide, aluminum nitride and / or titanium oxide.

14. An electron beam evaporation coating system, characterized in that: Comprising the crucible according to any one of claims 1-13.

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