Boat pushing mechanism applied to photovoltaic equipment
By setting counterweights on the pushing components to move symmetrically with the graphite boat, the problem of uneven force imbalance in the PECVD equipment is solved, and the stability and production quality of the boat pushing mechanism are improved, avoiding the need for The occurrence of abnormal situations such as screw breakage.
Patent Information
- Application Number
- CN202421106068.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-21
- Publication Date
- 2024-12-31
- Estimated Expiration
- 2034-05-21
AI Technical Summary
In PECVD equipment, as the diameter and length of the vacuum reaction tube increase, the length and load of the boat pushing mechanism also increase, resulting in the negative force of the boat pushing mechanism in the X-axis direction being much greater than the positive direction, resulting in uneven bearing The force increases the occurrence of losses and abnormal situations, such as screw breakage and increase lifting torque, affecting production stability and quality.
Set the counterweight block on the pushing assembly to move symmetrically with the graphite boat to achieve force balance. By setting the counterweight block on the pushing assembly, the counterweight block moves symmetrically with the graphite boat when the pushing mechanism moves horizontally. Balancing the stress to improve the stability and production quality of the boat pushing mechanism.
Through the symmetrical reverse movement of the counterweight block, the force balance of the boat pushing mechanism is achieved, the screw breakage and abnormal deformation are avoided, the stability and quality of the production process are improved, and the occurrence of abnormal situations is reduced.
Smart Images
Figure CN222274685U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of graphite boat production and application, in particular to a boat pushing mechanism applied to photovoltaic equipment. Background Art
[0002] PECVD (Plasma Enhanced Chemical Vapor Deposition) is a process that uses low-temperature plasma as an energy source under vacuum conditions. A silicon wafer is placed on a cathode of a glow discharge under low pressure. The glow discharge (or an additional heating element) is used to heat the silicon wafer to a predetermined temperature. An appropriate amount of reaction gas is then introduced, and the gas undergoes a series of chemical reactions and plasma reactions to form a solid film on the silicon wafer.
[0003] With the development of PECVD equipment technology, the requirements for cost reduction and high production capacity are getting higher and higher. The production capacity of a single tube is also increasing. The corresponding vacuum reaction tube diameter and length are also increasing. The graphite boat is also increasing. The length and load of the boat push mechanism are also increasing accordingly. The force on the boat push mechanism in the negative direction of the X-axis is much greater than that in the positive direction. When the graphite boat moves from the positive direction to the negative direction of the X-axis, or from the negative direction to the positive direction, its force is also unbalanced, which increases the loss of the boat push mechanism and the occurrence of abnormal conditions, such as screw breakage, increased lifting torque, abnormal deformation of the screw, etc.
[0004] How to improve the stability of the boat pusher mechanism during production and improve production quality is a technical problem that needs to be solved urgently at this stage.
[0005] The information disclosed in this background technology section is only intended to deepen the understanding of the overall background technology of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to those skilled in the art. Utility Model Content
[0006] In order to solve the above technical problems, the utility model proposes a boat pushing mechanism applied to photovoltaic equipment, so as to achieve the purpose of improving the stability of the boat pushing mechanism during the production process and improving the production quality.
[0007] In order to achieve the above object, the technical solution of the utility model is as follows:
[0008] A boat pushing mechanism applied to photovoltaic equipment comprises a pushing rod for pushing a graphite boat to realize movement of the graphite boat, a pushing assembly for driving the pushing rod and a counterweight block arranged on the pushing assembly, wherein the counterweight block and the pushing rod are arranged on both sides of the pushing assembly, and the counterweight block and the pushing rod move symmetrically in opposite directions.
[0009] The utility model arranges a counterweight block on the pushing component, and utilizes the counterweight block and the graphite boat to move symmetrically and oppositely when the boat pushing mechanism moves horizontally, so as to achieve force balance, thereby achieving the purpose of improving the stability of the boat pushing mechanism during production and improving production quality.
[0010] Further preferably, the pushing assembly comprises a rectangular installation frame, a conveyor belt arranged on the outer side wall of the installation frame and a rotating shaft arranged at the head end of the installation frame, the rotating shafts are arranged at the four corners of the installation frame, and the conveyor belt is sleeved on the outer side wall of the installation frame and the rotating shaft;
[0011] The counterweight block is installed on the conveyor belt through a mounting block;
[0012] The push rod is also mounted on the conveyor belt through a mounting bracket.
[0013] Further preferably, a guide rail is provided on the outer wall of the installation frame on one side of the counterweight block, and a slider matching with the guide rail is provided on the side wall of the counterweight block close to the guide rail, and the counterweight block can move along the guide rail through the slider.
[0014] Further preferably, mounting plate assemblies for mounting the rotating shaft are provided at both ends of the mounting frame, and the mounting plate assemblies include mounting plates located at upper and lower sides of the rotating shaft, and the mounting plates are fixedly connected to the mounting frame.
[0015] Further preferably, the total mass of the pushing rod and the pushing assembly is consistent with the mass of the counterweight block.
[0016] Further preferably, the head end of the push rod is provided with a "convex" shaped sleeve, the top end of the sleeve is fixedly connected to the head end of the push rod, and a through hole is provided below the sleeve for a guide rail for carrying and moving the graphite boat to pass through, the push rod is parallel to the guide rail, and the push rod pushes the sleeve to move along the guide rail.
[0017] The utility model has the following advantages:
[0018] 1. The utility model arranges a counterweight on the pushing assembly, and utilizes the counterweight and the graphite boat to move symmetrically in opposite directions when the boat pushing mechanism moves horizontally, so as to achieve force balance, thereby achieving the purpose of improving the stability of the boat pushing mechanism during production and improving production quality. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art are briefly introduced below.
[0020] Figure 1This is a structural schematic diagram of a boat pushing mechanism applied to a photovoltaic device disclosed in an embodiment of the utility model;
[0021] Figure 2 A side view schematic diagram of a boat pushing mechanism applied to a photovoltaic device disclosed in an embodiment of the utility model;
[0022] The numbers and letters in the figure represent the corresponding component names:
[0023] 1. Push rod 2. Push assembly 21. Mounting frame 22. Conveyor belt 23. Rotating shaft 24. Mounting block
[0024] 25. Mounting bracket 26. Guide rail 27. Mounting plate 28. Bushing 3. Counterweight. DETAILED DESCRIPTION
[0025] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.
[0026] The utility model provides a boat push mechanism applied to photovoltaic equipment, the working principle of which is to arrange a counterweight block on the pushing component, utilize the counterweight block and the graphite boat to move symmetrically in opposite directions when the boat push mechanism moves horizontally, so as to achieve force balance, thereby achieving the purpose of improving the stability of the boat push mechanism during production and improving production quality.
[0027] The present invention is further described in detail below in conjunction with embodiments and specific implementation methods.
[0028] like Figure 1 and Figure 2 As shown, a boat pushing mechanism applied to photovoltaic equipment includes a pushing rod 1 for pushing a graphite boat to realize the movement of the graphite boat, a pushing component 2 for driving the pushing rod and a counterweight block 3 arranged on the pushing component, wherein the counterweight block and the pushing rod are arranged on both sides of the pushing component, and the counterweight block and the pushing rod move symmetrically in opposite directions.
[0029] The pushing assembly includes a rectangular mounting frame 21, a conveyor belt 22 arranged on the outer wall of the mounting frame and a rotating shaft 23 arranged at the head end of the mounting frame. The rotating shafts are arranged at the four corners of the mounting frame, and the conveyor belt is sleeved on the outer wall of the mounting frame and the rotating shaft; the counterweight block is installed on the conveyor belt through the mounting block 24; the total mass of the pushing rod and the pushing assembly is consistent with the mass of the counterweight block.
[0030] The push rod is also mounted on the conveyor belt via a mounting bracket 25 .
[0031] A guide rail 26 is provided on the outer side wall of the installation frame at one side of the counterweight block, and a slider matching with the guide rail is provided on the side wall of the counterweight block close to the guide rail. The counterweight block can move along the guide rail through the slider.
[0032] Both ends of the installation frame are provided with installation plate assemblies for installing the rotating shaft, and the installation plate assemblies include installation plates 27 located at the upper and lower sides of the rotating shaft, and the installation plates are fixedly connected to the installation frame;
[0033] The head end of the push rod is provided with a "convex"-shaped sleeve 28, the top end of the sleeve is fixedly connected to the head end of the push rod, and a through hole is provided below the sleeve for the guide rail for the graphite boat to carry and move through. The push rod is parallel to the guide rail, and the push rod pushes the sleeve to move along the guide rail.
[0034] The specific use steps of the utility model are as follows: Figure 1 and Figure 2 As shown, in actual use, when the graphite boat moves toward the furnace body along the preset track under the action of the pushing component 2 and the pushing rod 1, the counterweight block 3 moves in the opposite direction under the action of the conveyor belt 22 of the pushing component to achieve force balance, thereby achieving stability during the movement of the pushing mechanism, avoiding accidents such as screw rod breakage and bending, and effectively preventing the graphite boat from colliding with the electrode rod, thereby ensuring production quality.
[0035] Through the above method, the utility model provides a boat push mechanism applied to photovoltaic equipment, by setting a counterweight block on the pushing component, and utilizing the symmetrical opposite movement of the counterweight block and the graphite boat when the boat push mechanism moves horizontally, to achieve force balance, thereby achieving the purpose of improving the stability of the boat push mechanism during production and improving production quality.
[0036] The above is only a preferred implementation of a boat pusher mechanism for photovoltaic equipment disclosed in the present utility model. It should be pointed out that a person skilled in the art can make several modifications and improvements without departing from the inventive concept of the present utility model, and these all fall within the protection scope of the present utility model.
Claims
1. A boat pushing mechanism applied to photovoltaic equipment, characterized in that: It includes a pushing rod for pushing the graphite boat to move the graphite boat, a pushing component for driving the pushing rod and a counterweight block arranged on the pushing component. The counterweight block and the pushing rod are arranged on both sides of the pushing component, and the counterweight block and the pushing rod move symmetrically in opposite directions.
2. A boat pushing mechanism for photovoltaic equipment according to claim 1, characterized in that: The pushing assembly includes a rectangular installation frame, a conveyor belt arranged on the outer side wall of the installation frame, and a rotating shaft arranged at the head end of the installation frame, the rotating shafts are arranged at the four corners of the installation frame, and the conveyor belt is sleeved on the outer side wall of the installation frame and the rotating shaft; The counterweight block is installed on the conveyor belt through a mounting block; The push rod is also mounted on the conveyor belt through a mounting bracket.
3. A boat pushing mechanism for photovoltaic equipment according to claim 2, characterized in that: A guide rail is provided on the outer side wall of the installation frame at one side of the counterweight block, and a slider matched with the guide rail is provided on the side wall of the counterweight block close to the guide rail. The counterweight block can move along the guide rail through the slider.
4. The boat pushing mechanism applied to photovoltaic equipment according to claim 2, characterized in that: Both ends of the installation frame are provided with installation plate components for installing the rotating shaft, and the installation plate components include installation plates located at the upper and lower sides of the rotating shaft, and the installation plates are fixedly connected to the installation frame.
5. The boat pushing mechanism used in photovoltaic equipment according to claim 1, characterized in that: The total mass of the push rod and the push assembly is consistent with the mass of the counterweight block.
6. The boat pushing mechanism used in photovoltaic equipment according to claim 1, characterized in that: The head end of the push rod is provided with a "convex"-shaped sleeve, the top end of the sleeve is fixedly connected to the head end of the push rod, and a through hole is provided below the sleeve for a guide rail for the graphite boat to carry and move through. The push rod is parallel to the guide rail, and the push rod pushes the sleeve to move along the guide rail.