Intra-cavity cooling plasma processing cavity structure

Abstract

The utility model relates to an intra-cavity cooling plasma processing cavity structure which comprises a plasma processing cavity arranged on a plasma processing machine body. The cooling cavity is located between the outer wall of the plasma processing cavity and the plasma processing cavity machine body and used for circulation of a cooling medium, so that the cooling medium and the plasma processing cavity form a heat exchange effect; the cooling assembly comprises injection equipment and storage equipment; wherein the injection equipment is mounted in the machine body on the top side of the plasma treatment cavity, is communicated with the cooling cavity and is used for injecting a cooling medium; and the storage equipment is mounted in the machine body on the bottom side of the plasma treatment cavity and is communicated with the interior of the cooling cavity through an arranged circulation connecting piece. According to the structure, the cooling cavity for the cooling medium to circulate is formed between the plasma processing cavity and the machine body, the cooling medium circulates on the outer surface of the plasma processing cavity, heat of the cavity is transferred in a heat exchange mode, and therefore rapid cooling of the cavity is effectively achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of plasma processing equipment, in particular to an intra-cavity cooling plasma processing chamber structure. Background Art

[0002] Plasma cleaning machine is also called plasma cleaning machine, or plasma surface treatment machine. For some metal accessories that have grease, oil, organic matter, oxide layer and other pollutants on the surface after the processing process, they can be cleaned by plasma cleaning machine. At the same time, this machine is also suitable for cleaning glass and ceramic materials.

[0003] When the plasma cleaning machine cleans the accessories, it is necessary to place the cleaned accessories in the plasma processing chamber. The radio frequency power supply is ignited under a certain pressure to generate high-energy disordered plasma, and the plasma bombards the surface of the cleaned product to achieve the cleaning effect. During the process, due to the high temperature of the plasma, the plasma processing chamber will generate a high temperature. After the accessories are processed once, the cavity is at a high temperature. Since this cavity is a built-in cavity, it is difficult for the hot air inside to be quickly discharged through the cavity opening. The cavity is in a high temperature state for a long time, which also causes aging of the metal cavity wall.

[0004] In view of this, the present utility model is proposed. Utility Model Content

[0005] The technical problem to be solved by the utility model is to overcome the shortcomings of the prior art and provide a plasma processing chamber structure with intra-cavity cooling. A cooling chamber for circulating a cooling medium is arranged between the plasma processing chamber and the machine body. After the plasma processing machine is cleaned, the cooling medium is circulated on the outer surface of the plasma processing chamber, and the heat of the cavity is transferred in the form of heat exchange, thereby effectively realizing rapid cooling of the cavity.

[0006] In order to solve the above technical problems, the basic concept of the technical solution adopted by the utility model is:

[0007] A plasma processing chamber structure with in-chamber cooling includes a plasma processing chamber, which is arranged on a plasma processing body; a cooling chamber, which is located between the outer wall of the plasma processing chamber and the plasma processing chamber body and is used for the circulation of a cooling medium, so that the cooling medium and the plasma processing chamber form a heat exchange effect;

[0008] The cooling assembly includes an injection device and a storage device; wherein the injection device is installed in the body on the top side of the plasma processing chamber and is connected to the cooling chamber for injecting cooling medium; the storage device is installed in the body on the bottom side of the plasma processing chamber and is connected to the inside of the cooling chamber through a set flow connection piece for storing the cooled medium; a transmission device for circulating the medium is set between the injection device and the storage device.

[0009] In a preferred embodiment of any of the above schemes, the cooling chamber and the plasma processing chamber have a consistent structural match, a thermal insulation layer is provided at the connection between the cooling chamber and the machine body, and a rock wool board is provided in the thermal insulation layer.

[0010] In a preferred embodiment of any of the above schemes, a plurality of flow channels for medium circulation are arranged horizontally on the outer wall of the plasma processing chamber, the plurality of flow channels are independent structures, and extend from the top side of the outer wall of the plasma processing chamber along both sides to the bottom side of the outer wall of the plasma processing chamber, the plurality of flow channels and the plasma processing chamber are both made of metal and are an integrated structure.

[0011] In a preferred embodiment of any of the above schemes, the injection device includes a strip seat, and a plurality of spray ends connected to the diversion pipes arranged inside the strip seat are laterally distributed at the end surface of the strip seat connected to the cooling chamber, and the spray end is a diffusion type spray head.

[0012] In a preferred embodiment of any of the above schemes, the transmission equipment includes a liquid pump and a flow pipe connected to the liquid inlet and outlet of the liquid pump for circulating the medium, and the flow pipe connected to the liquid outlet of the liquid pump is connected to the strip seat and is connected to the multiple diversion pipes inside the strip seat.

[0013] In a preferred embodiment of any of the above schemes, the storage device includes a storage box, and the storage box is provided with a cooling hood for cooling the coolant after heat exchange and a storage tank for collecting the coolant after cooling;

[0014] The cooling cover is embedded in the storage tank by the top, and a reserved gap for the cooling medium to flow is provided between the bottom of the cooling cover and the storage tank;

[0015] The storage tank is communicated with the flow pipe connected to the liquid inlet end of the liquid pump.

[0016] In a preferred embodiment of any of the above schemes, the cooling hood is in a conical structure as a whole, a solenoid valve for controlling the discharge of the cooling medium is arranged at the bottom, and a temperature sensor for monitoring the temperature of the cooling medium is arranged on the inner wall of the cooling hood.

[0017] In a preferred embodiment of any of the above schemes, the flow connector includes a flow seat, which has an overall strip-shaped conical structure and has flow openings corresponding to the positions of the multiple flow channels distributed laterally on the top, and the conical end at the bottom of the flow seat is connected to the cooling hood.

[0018] After adopting the above technical scheme, the utility model has the following beneficial effects compared with the prior art.

[0019] A cooling chamber for circulating cooling medium is provided between the plasma processing chamber and the machine body. After the plasma processing machine is cleaned, the cooling medium is circulated on the outer surface of the plasma processing chamber, and the heat of the chamber is transferred in the form of heat exchange, thereby effectively realizing rapid cooling of the chamber. This cooling method, on the one hand, does not need to install heat dissipation equipment in the chamber, affecting the occupied area of ​​the chamber, and on the other hand, forms an integrated device with the plasma processing machine, which is convenient to control and operate. At the same time, a tank body for cooling the medium after heat exchange and a tank body for storing the medium after cooling are provided in the storage box of the cooling device. The flow between the two tanks is controlled by temperature monitoring, realizing automatic cooling treatment of the medium, and providing convenience for the recycling of the cooling medium.

[0020] The specific implementation of the utility model is further described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. Some specific embodiments of the present application will be described in detail in an illustrative and non-restrictive manner with reference to the drawings. The same reference numerals in the drawings indicate the same or similar components or parts. It should be understood by those skilled in the art that these drawings are not necessarily drawn to scale. In the drawings:

[0022] Figure 1 This is the overall structure diagram of the plasma processing chamber in the utility model.

[0023] Figure 2 It is a connection diagram between the cooling mechanism and the plasma processing chamber in the utility model.

[0024] Figure 3 It is a partial structural diagram of the plasma processing chamber in the utility model.

[0025] Figure 4 It is a structural diagram of the injection equipment in the utility model.

[0026] Figure 5 It is a structural diagram of the flow connection piece in the utility model.

[0027] Figure 6It is an overall structural diagram of the storage device in the utility model.

[0028] In the figure: 1, plasma treatment chamber; 101, flow channel; 2, cooling chamber; 3, strip seat; 301, spray end; 4, storage box; 401, cooling cover; 402, storage tank; 403, solenoid valve; 404, temperature sensor; 5, flow seat; 501, flow port; 6, liquid pump.

[0029] It should be noted that these drawings and text descriptions are not intended to limit the conceptual scope of the present invention in any way, but rather to illustrate the concept of the present invention for those skilled in the art by referring to specific embodiments. The elements in the drawings are schematic and not drawn to scale. DETAILED DESCRIPTION

[0030] In order to enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work should fall within the scope of protection of the present application.

[0031] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0032] In the description of the present application, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0033] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0034] The following embodiment of the present application takes an intra-cavity cooling plasma processing chamber structure as an example to explain the solution of the present application in detail, but this embodiment cannot limit the protection scope of the present application.

[0035] like Figures 1 to 6 As shown, the utility model provides a camera fixing device, comprising:

[0036] A plasma processing chamber 1 is arranged on a plasma processing body;

[0037] The cooling chamber 2 is located between the outer wall of the plasma processing chamber 1 and the body of the plasma processing chamber 1, and is used for the circulation of the cooling medium, so that the cooling medium and the plasma processing chamber 1 form a heat exchange effect. The cooling chamber 2 provides a circulation space for the cooling medium. During installation, it is reserved for the plasma processing chamber 1. After installation, the independent sealing between the cooling chamber 2 and the plasma processing chamber 1 is ensured;

[0038] The cooling assembly includes an injection device and a storage device. The cooling assembly is two independent devices, providing cooling medium injection and storage of the medium after cooling;

[0039] The injection device is installed in the body on the top side of the plasma processing chamber 1 and is connected to the cooling chamber 2 for injecting the cooling medium; the storage device is installed in the body on the bottom side of the plasma processing chamber 1 and is connected to the inside of the cooling chamber 2 through a flow connection piece, for storing the cooled medium; a transmission device for medium circulation is provided between the injection device and the storage device, wherein the transmission device includes a liquid pump 6 and a flow pipe connected to the liquid inlet and liquid outlet of the liquid pump 6 for circulating the medium;

[0040] In summary, the processing chamber structure of the plasma processing equipment is mainly achieved by opening an independent cooling chamber 2 and exchanging heat with the working plasma processing chamber 1 through a cooling medium, which is specifically manifested as follows:

[0041] The liquid pump 6 is started by the controller of the machine body. The liquid pump 6 transfers the cooling medium in the storage tank 402 inside the storage box 4 to the strip seat 3 on the top side of the machine body, and is transferred to the multiple spray heads 301 by using the multi-group manifold. The spray head 301 distributes the cooling medium in the multiple flow channels 101 on the outer wall of the plasma processing chamber 1. The flow channels 101 flow the cooling medium along the two sides of the outer wall of the plasma processing chamber 1 into the bottom. During the flow, the cooling medium exchanges heat with the metal plasma processing chamber 1, thereby cooling the chamber. The cooled medium will flow into the cooling cover 401 of the storage box 4 through the circulation seat 5 for natural cooling. The cooling cover 401 can be made of copper. The temperature sensor 404 will monitor the temperature of the medium in real time. After the temperature reaches the standard parameter value, the control device of the machine body will open the solenoid valve 403 at the bottom of the cooling cover 401 to discharge the cooled medium into the storage tank 402 for standby.

[0042] In order to achieve the correspondence and matching of the cavity structure, such as Figure 1 and Figure 2 As shown, the cooling chamber 2 is structurally matched with the plasma processing chamber 1, and a thermal insulation layer is provided at the connection between the cooling chamber 2 and the machine body, and a rock wool board is provided in the thermal insulation layer;

[0043] Specifically, the cooling chamber 2 acts on the plasma processing chamber 1, ensuring that the cooling medium flows according to the structure of the plasma processing chamber 1, so that the cooling medium can cover the entire plasma processing chamber 1 to achieve the best heat exchange effect. At the same time, in order to achieve the independence of the cooling chamber 2, by setting a thermal insulation layer with a rock wool board, the heat transfer effect of the cooling medium on the body after heat exchange can be effectively blocked;

[0044] In order to achieve the best heat exchange performance of the cooling medium to the plasma processing chamber 1, as Figure 3 As shown, a plurality of flow channels 101 for medium circulation are arranged transversely on the outer wall of the plasma processing chamber 1. The plurality of flow channels 101 are independent structures and extend from the top side of the outer wall of the plasma processing chamber 1 along both sides to the bottom side of the outer wall of the plasma processing chamber 1. The plurality of flow channels 101 and the plasma processing chamber 1 are both made of metal and are integrated structures.

[0045] According to the above, the multiple flow channels 101 ensure the uniformity of the cooling medium circulation, and the cooling medium circulates according to the flow channels 101 on both sides of the plasma processing chamber 1, so that the cooling medium can contact different positions of the plasma processing chamber 1, ensuring the comprehensiveness of heat exchange;

[0046] Based on the cooling assembly consisting of two parts, the injection device includes a strip seat 3, and a plurality of spray heads 301 connected to the shunt pipes arranged inside the strip seat 3 are horizontally distributed at the end surface where the strip seat 3 is connected to the cooling chamber 2, and the spray head 301 is a diffusion type spray head;

[0047] The flow pipe connected to the liquid outlet of the liquid pump 6 is connected to the strip seat 3 and communicates with a plurality of shunt pipes inside the strip seat 3;

[0048] like Figure 3 , Figure 4 As shown, the injection device mainly realizes the injection of the cooling medium into the cooling cavity 2. According to the number of the spray heads 301, a corresponding number of shunt pipes connected to the spray heads 301 are arranged in the strip seat 3 to achieve independent circulation of multiple spray heads 301. The range of the diffusion spray head 301 spraying at one time satisfies the circulation of the cooling medium in multiple flow channels 101.

[0049] like Figure 6 As shown, the storage device includes a storage box 4, in which a cooling cover 401 for cooling the cooling liquid after heat exchange and a storage tank 402 for collecting the cooling liquid after cooling are arranged;

[0050] The storage equipment has two functions and effects. First, it provides cooling retention for the cooling medium after cooling and heat exchange. Second, it provides unified storage for the cooled medium to provide backup for subsequent cooling.

[0051] The cooling cover 401 is embedded in the storage tank 402 at the top thereof, and a reserved gap for the circulation of the cooling medium is provided between the bottom of the cooling cover 401 and the storage tank 402. The cooling cover 401 and the storage tank 402 are different in shape, but have the same volume. After the cooling medium in the storage tank 402 cools the plasma processing chamber 1 once, its volume needs to achieve a thorough cooling effect. The cooling cover 401 is in a cone structure as a whole, which is mainly convenient for unloading the cooled medium.

[0052] The storage tank 402 is connected to the flow pipe connected to the liquid inlet end of the liquid pump 6, and provides storage for the cooled medium, which is extracted by the liquid pump 6 for recycling;

[0053] Based on the above-mentioned cooling cover 401 having a cone structure as a whole, a solenoid valve 403 for controlling the discharge of the cooling medium is arranged at the bottom, and a temperature sensor 404 for monitoring the temperature of the cooling medium is arranged on the inner wall of the cooling cover 401;

[0054] It should be noted that the solenoid valve 403 and the temperature sensor 404 are both connected to the control device of the machine body for unified control. The opening and closing of the solenoid valve 403 is based on the information fed back by the temperature sensor 404 to the control device. When the temperature value is lower than the standard temperature parameter value, discharge can be achieved.

[0055] In order to achieve uniform circulation of the cooling medium after cooling, such as Figure 5As shown, the flow connection piece includes a flow seat 5, which has a strip-shaped conical structure as a whole, and has flow openings 501 corresponding to the positions of multiple flow channels 101 distributed laterally on the top. The conical end at the bottom of the flow seat 5 is connected to the cooling cover 401, and the corresponding flow openings 501 are used to realize independent circulation of the medium, which is collected at the bottom.

[0056] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A plasma processing chamber structure with intracavity cooling, characterized in that: include: A plasma processing chamber (1) is arranged on a plasma processing body; A cooling chamber (2) is located between the outer wall of the plasma processing chamber (1) and the body of the plasma processing chamber (1) and is used for the circulation of a cooling medium so that the cooling medium and the plasma processing chamber (1) form a heat exchange effect; Cooling components, including injection equipment and storage equipment; The injection device is installed in a body on the top side of the plasma processing chamber (1) and is connected to the cooling chamber (2) for injecting cooling medium; The storage device is installed in a body at the bottom side of the plasma processing chamber (1), and is connected to the interior of the cooling chamber (2) via a flow connection piece, and is used to store the cooled medium; A transmission device for medium circulation is arranged between the injection device and the storage device.

2. The intra-cavity cooling plasma processing chamber structure according to claim 1, characterized in that: The cooling chamber (2) and the plasma processing chamber (1) are structurally matched, a thermal insulation layer is provided at the connection between the cooling chamber (2) and the machine body, and a rock wool board is provided in the thermal insulation layer.

3. The intracavity cooling plasma processing chamber structure according to claim 1, characterized in that: A plurality of flow channels (101) for medium circulation are arranged transversely on the outer wall of the plasma processing chamber (1); the plurality of flow channels (101) are independent structures and extend from the top side of the outer wall of the plasma processing chamber (1) along both sides to the bottom side of the outer wall of the plasma processing chamber (1); the plurality of flow channels (101) and the plasma processing chamber (1) are both made of metal and are integrated into a structure.

4. The intra-cavity cooling plasma processing chamber structure according to claim 1, characterized in that: The injection device comprises a strip seat (3), wherein a plurality of spray heads (301) connected to a flow divider provided inside the strip seat (3) are distributed laterally at an end surface of the strip seat (3) connected to the cooling chamber (2), wherein the spray heads (301) are diffusion-type spray heads.

5. The intra-cavity cooling plasma processing chamber structure according to claim 4, characterized in that: The transmission device comprises a liquid pump (6) and a flow pipe connected to the liquid inlet and outlet of the liquid pump (6) for circulating the medium. The flow pipe connected to the liquid outlet of the liquid pump (6) is connected to the strip seat (3) and communicates with the plurality of diversion pipes inside the strip seat (3).

6. The intra-cavity cooling plasma processing chamber structure according to claim 5, characterized in that: The storage device comprises a storage box (4), wherein the storage box (4) is provided with a cooling hood (401) for cooling the cooling liquid after heat exchange, and a storage tank (402) for collecting the cooling liquid after cooling; The cooling cover (401) is embedded in the storage tank (402) from the top thereof, and a reserved gap for the circulation of cooling medium is provided between the bottom of the cooling cover (401) and the storage tank (402); The storage tank (402) is in communication with a flow pipe connected to the liquid inlet end of the liquid pump (6).

7. The intra-cavity cooling plasma processing chamber structure according to claim 6, characterized in that: The cooling cover (401) is in a conical structure as a whole, and a solenoid valve (403) for controlling the discharge of cooling medium is arranged at the bottom, and a temperature sensor (404) for monitoring the temperature of cooling medium is arranged on the inner wall of the cooling cover (401).

8. The intra-cavity cooling plasma processing chamber structure according to claim 6, characterized in that: The flow connection piece comprises a flow seat (5), the flow seat (5) being in an overall strip-shaped conical structure, with flow openings (501) corresponding to the positions of the plurality of flow channels (101) distributed laterally on the top, and the conical end at the bottom of the flow seat (5) being in communication with the cooling hood (401).

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