Corrosion cage locking and autorotation device for acid corrosion machine

Abstract

The utility model discloses a corrosion cage locking and rotating device for an acid corrosion machine, which comprises a U-shaped support frame body, and a driving rotating mechanism and a driven rotating mechanism are respectively arranged on two sides of the U-shaped support frame body. A transmission locking bearing mechanism and a driven locking bearing mechanism which are used for fixing the corrosion cage are arranged on the driving rotating mechanism and the driven rotating mechanism correspondingly, and a kinetic energy output mechanism and a kinetic energy transmission mechanism matched with the kinetic energy output mechanism are further installed in the U-shaped supporting frame body; the kinetic energy output mechanism drives the driving rotating mechanism to rotate through the kinetic energy transmission mechanism. According to the design, the structure is simple, the corrosion cage is convenient to load and disassemble, the corrosion cage can be integrated with the locking and overturning assembly after being installed, the corrosion cage is precisely matched with each part in the locking and overturning assembly, the structural strength is high, and the heavy load of the corrosion cage filled with 100 wafers can be borne.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor silicon wafer etching and cleaning, in particular to a corrosion cage locking and self-rotating device used for an acid etching machine. Background Art

[0002] In the semiconductor silicon wafer process, chemical etching is required to eliminate the damaged layer caused by mechanical processing such as slicing and grinding. The Chinese semiconductor market has a huge demand, but the labor cost continues to rise, forcing semiconductor silicon wafer manufacturers to improve the degree of automation equipment, maximize the number of products that can be etched at one time to expand production capacity, and improve the process to improve the yield rate of wafers.

[0003] The existing technology has the following problems:

[0004] (1) Since many wafers are etched at one time, the etching cage after loading is too heavy and large in size, and is not easy to clamp on the etching cleaning machine; (2) The rotating shaft of the etching cage is circular. When the etching cage is filled with 100 wafers, it rotates at high speed under heavy load. In addition, the circular slots at the clamping point will have gaps due to wear, and when it stops suddenly, the rotating shaft of the etching cage and the clamping point will rotate relative to each other; (3) Etching the wafers in a static state will lead to uneven surface corrosion of the surface wafers, which will reduce the yield rate of the wafers. Therefore, it is necessary to rotate the etching cage at a uniform speed under a controllable state during the etching process;

[0005] Therefore, there is a need for a locking structure that can conveniently install the corrosion cage at the clamping point, prevent the rotation axis of the corrosion cage from rotating relative to the clamping point, and enable the corrosion cage to rotate at a constant speed under a controllable state during the corrosion process. Utility Model Content

[0006] The technical problem to be solved by the utility model is to overcome the above technical defects and provide a corrosion cage locking and self-rotating device for an acid corrosion machine.

[0007] In order to solve the above technical problems, the technical solution provided by the utility model is a corrosion cage locking and rotation device for an acid corrosion machine, comprising a U-shaped support frame, an active rotation mechanism and a driven rotation mechanism are respectively provided on both sides of the U-shaped support frame, and a transmission locking bearing mechanism and a driven locking bearing mechanism for fixing the corrosion cage are respectively provided on the active rotation mechanism and the driven rotation mechanism, and a kinetic energy output mechanism and a kinetic energy transmission mechanism cooperating with the kinetic energy output mechanism are also installed in the U-shaped support frame, and the kinetic energy output mechanism drives the rotation of the active rotation mechanism through the kinetic energy transmission mechanism.

[0008] Preferably, the active rotating mechanism comprises an active stop sleeve, an active bearing and an active spacer sleeve are arranged inside the active stop sleeve, an active locking stop sleeve and a limit shaft stop are arranged on both sides of the active bearing, a transmission gear is arranged at the outer end of the limit shaft stop, and an active limit plate is arranged at the outer end of the transmission gear;

[0009] The driven rotating mechanism comprises a driven stop sleeve, a driven bearing and a driven spacer sleeve are arranged inside the driven stop sleeve, and a driven limit stop sleeve and a driven locking stop sleeve are respectively arranged on both sides of the driven stop sleeve.

[0010] Preferably, the transmission locking bearing mechanism comprises a driving shaft, one end of which is a round shaft with a gear keyway and the round shaft end passes through the active rotating mechanism and is connected to the inner hole of the transmission gear, and the other end of the driving shaft is a half shaft end with an active limit slot, and the upper opening of the active limit slot is provided with an active slot chamfer;

[0011] The driven locking bearing mechanism includes a driven shaft, one end of the driven shaft is a driven circular shaft and the other end is a semi-shaft end with a driven limit slot, the upper opening of the driven limit slot is provided with a driven slot entry chamfer, the circular shaft end of the driven shaft extends into the interior of the driven rotating mechanism and can rotate freely, and the square shafts at both ends of the corrosion cage are respectively clamped in the active limit slot and the driven limit slot.

[0012] Preferably, the active limit slot and the driven limit slot are both provided with a clamping cover plate, and the clamping cover plate includes a square cover plate, the square cover plate is provided with a mounting hole for bolts to pass through, and a wedge-shaped stopper is provided under the square cover plate.

[0013] Preferably, the kinetic energy output mechanism includes an output motor, the output shaft of the output motor is provided with a driving gear, and the kinetic energy transmission mechanism includes a plurality of driven gears meshing with each other, the upper driven gear meshes with the driving gear, and the lower driven gear meshes with the transmission gear.

[0014] The advantages of the utility model compared with the prior art are:

[0015] 1) The design of the application is simple in structure, which is convenient for loading and disassembling the corrosion cage. After the corrosion cage is installed, it can be locked and integrated into the flip assembly, and each component in the locking and flip assembly is precisely matched. The structural strength is high and can withstand the heavy load of the corrosion cage filled with 100 wafers;

[0016] 2) The rotating square shaft structure of the corrosion cage can be closely matched with the square limit slots on the driven locking bearing mechanism and the transmission locking bearing mechanism. In addition, the pressing limit of the clamping cover plate can make the corrosion cage and the locking flip assembly connection closely matched, which can ensure that the corrosion cage stops suddenly under heavy load and high-speed rotation, and prevent the relative rotation and sliding of the corrosion cage shaft and the transmission locking bearing mechanism;

[0017] 3) The kinetic energy output mechanism can precisely control the rotation speed, rotation time, and positive and negative rotation direction according to the process requirements, and can strictly control the corrosion accuracy and uniformity. It has a high degree of automation and high corrosion efficiency, and does not require manual participation, which improves the cleanliness of the product and improves the quality of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the application as a whole;

[0019] Figure 2 It is a schematic diagram of the overall front view of the application;

[0020] Figure 3 It is a schematic diagram of direction A;

[0021] Figure 4 It is the right schematic diagram of BB;

[0022] Figure 5 It is a CC schematic diagram;

[0023] Figure 6 Schematic diagram of driven locking bearing mechanism;

[0024] Figure 7 It is a schematic diagram of the transmission locking bearing mechanism;

[0025] Figure 8 It is a schematic diagram of the clamping cover;

[0026] Fig. 9 Schematic diagram of driven rotating mechanism;

[0027] Fig.10 Schematic diagram of active rotating mechanism;

[0028] As shown in the figure: 1. U-shaped support frame, 2. Driven locking bearing mechanism, 2-1. Driven limit slot, 2-2. Driven slot chamfer, 3. Transmission locking bearing mechanism, 3-1. Active limit slot, 3-2. Active slot chamfer, 3-3. Gear keyway, 4. Clamping cover, 4-1. Square cover, 4-2. Wedge block, 5. Driven rotating mechanism, 5-1. Driven bearing, 5-2. Driven limit stopper sleeve, 5-3. Driven Stop sleeve, 5-4, driven spacer sleeve, 5-5, driven locking stop sleeve, 6, active rotating mechanism, 6-1, active bearing, 6-2, active locking stop sleeve, 6-3, active stop sleeve, 6-4, active spacer sleeve, 6-5, limit shaft stop, 6-6, transmission gear, 6-7, active limit plate, 7, kinetic energy transmission mechanism, 7-1, driven gear, 8, kinetic energy output mechanism, 8-1, output motor, 8-2, driving gear, 9, corrosion cage. DETAILED DESCRIPTION

[0029] The utility model is further described in detail below in conjunction with the accompanying drawings.

[0030] The specific implementation of the utility model is further described below in conjunction with the accompanying drawings, wherein the same parts are represented by the same reference numerals.

[0031] It should be noted that the words "front", "rear", "left", "right", "up" and "down" used in the following description refer to directions in the drawings, and the words "inside" and "outside" refer to directions toward or away from the geometric center of a specific component, respectively.

[0032] In order to make the contents of the present invention more clearly understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention.

[0033] Combined with Figure 1 -Attached Fig.10 A corrosion cage locking and self-rotating device for an acid corrosion machine, comprising a U-shaped support frame 1, a U-shaped support frame 1 为耐腐蚀板材焊接而成 ， 作为整个机构的支撑架体及罩壳 ， 其它 All parts are installed on this part; an active rotating mechanism 6 and a driven rotating mechanism 5 are respectively provided on both sides of the U-shaped support frame 1, and a transmission locking bearing mechanism 3 and a driven locking bearing mechanism 2 for fixing the corrosion cage 9 are respectively provided on the active rotating mechanism 6 and the driven rotating mechanism 5. A kinetic energy output mechanism 8 and a kinetic energy transfer mechanism 7 cooperating with the kinetic energy output mechanism 8 are also installed in the U-shaped support frame 1, and the kinetic energy output mechanism 8 drives the rotation of the active rotating mechanism 6 through the kinetic energy transfer mechanism 7.

[0034] In one embodiment, the active rotating mechanism 6 includes an active stopper sleeve 6-3, an active bearing 6-1 and an active spacer sleeve 6-4 are arranged inside the active stopper sleeve 6-3, active locking stopper sleeves 6-2 and limit shaft stoppers 6-5 are arranged on both sides of the active bearing 6-1, a transmission gear 6-6 is arranged at the outer end of the limit shaft stopper 6-5, and an active limit plate 6-7 is arranged at the outer end of the transmission gear 6-6;

[0035] The driven rotating mechanism 5 comprises a driven stop sleeve 5-3, inside of which a driven bearing 5-1 and a driven spacer sleeve 5-4 are arranged, and on both sides of the driven stop sleeve 5-3 there are respectively provided a driven limit stop sleeve 5-2 and a driven locking stop sleeve 5-5.

[0036] In one embodiment, the transmission locking bearing mechanism 3 includes a driving shaft, one end of which is a round shaft with a gear keyway 3-3, and the round shaft end passes through the active rotating mechanism 6 and is connected to the inner hole of the transmission gear 6-6, and the transmission gear 6-6 is fixed relatively to it by the gear keyway 3-3, so as to transmit the rotational torque to the corrosion cage 9; the other end of the driving shaft is a half-shaft end with an active limiting slot 3-1, and the half-shaft end is connected to the square shaft of the corrosion cage 9, so as to carry and limit the square shaft of the corrosion cage 9, and the upper opening of the active limiting slot 3-1 is provided with an active slot chamfer 3-2, so as to facilitate the installation of the square shaft of the corrosion cage 9;

[0037] The driven locking bearing mechanism 2 includes a driven shaft, one end of which is a driven circular shaft and the other end is a semi-shaft end with a driven limiting slot 2-1, the semi-shaft end is connected to the square shaft of the corrosion cage 9, and is used to bear and limit the square shaft of the corrosion cage 9; the upper opening of the driven limiting slot 2-1 is provided with a driven slot chamfer 2-2, which is convenient for the square shaft of the corrosion cage 9 to be installed, the circular shaft end of the driven shaft extends into the interior of the driven rotating mechanism 5 and can rotate freely, and the square shafts at both ends of the corrosion cage 9 are respectively clamped in the active limiting slot 3-1 and the driven limiting slot 2-1.

[0038] In one embodiment, a clamping cover plate 4 is provided on both the active limit slot 3-1 and the driven limit slot 2-1. The clamping cover plate 4 includes a square cover plate 4-1. The square cover plate 4-1 is provided with a mounting hole for bolts to pass through. A wedge-shaped stopper 4-2 is provided under the square cover plate 4-1, which can be used to press the side of the square rotating shaft of the corrosion cage 9 and limit the square shaft end of the corrosion cage 9 at the same time.

[0039] In one embodiment, the kinetic energy output mechanism 8 includes an output motor 8-1, the output shaft of which is provided with a driving gear 8-2 for providing power for the rotation action, and is placed in an independent chamber at the top of the U-shaped support frame 1, and can perform forward and reverse rotation, and the rotation speed is precisely adjustable;

[0040] The kinetic energy transmission mechanism 7 includes a plurality of driven gears 7 - 1 meshing with each other, the upper driven gear 7 - 1 meshes with the driving gear 8 - 2 , and the lower driven gear 7 - 1 meshes with the transmission gear 6 - 6 .

[0041] 1) Specific working principle: As shown in the figure, after the locking and flipping assembly is assembled on the corrosion machine, the clamping cover plate 4 is removed, and then the notches of the driven locking bearing mechanism 2 and the transmission locking bearing mechanism 3 are facing upward;

[0042] 2) Loading the etching cage 9 filled with wafers into the active limit slot 3-1 and the driven limit slot 2-1 on the driven locking bearing mechanism 2 and the transmission locking bearing mechanism 3, wherein the driven slot chamfer 2-2 and the active slot chamfer 3-2 can make the square shaft of the etching cage 9 easy to load;

[0043] 3) The square shafts at both ends of the corrosion cage 9 are tightly attached to the side walls of the active limit slot 3-1 and the driven limit slot 2-1 to limit the left, right and bottom directions, and then two clamping cover plates 4 are pressed into the upper parts of the active limit slot 3-1 and the driven limit slot 2-1 respectively and tightened with bolts to limit the ends of the square shaft and the upper part of the square shaft;

[0044] 4) The kinetic energy output mechanism 8 performs a positive rotation action, applies the rotation torque to the two-stage kinetic energy transmission mechanism, and finally applies the rotation torque to the active rotation mechanism 6, and then the transmission locking bearing mechanism 3 rotates, so that the corrosion cage 9 rotates synchronously, the rotation speed is adjustable, the continuous rotation time is adjustable, and the rotation action is stable, so as to achieve the purpose of making the wafer rotate during corrosion, so as to improve the corrosion uniformity;

[0045] 5) Reverse the same as above;

[0046] 6) After the corrosion is completed, the kinetic energy output mechanism 8 controls the active limit slot 3-1 and the driven limit slot 2-1 on the transmission locking bearing mechanism 3 and the driven locking bearing mechanism 2 to face upward, remove the clamping cover plate 4, take out the corrosion cage 9, and the self-circulating rotation corrosion process is completed.

[0047] The above description of the utility model and its implementation methods is not restrictive. The drawings show only one implementation method of the utility model, and the actual structure is not limited thereto. In short, if ordinary technicians in this field are inspired by it and design structural methods and embodiments similar to the technical solution without creativity without departing from the purpose of the invention of the utility model, they should all fall within the protection scope of the utility model.

Claims

1. A corrosion cage locking and rotation device for an acid etching machine, characterized in that: The invention comprises a U-shaped support frame (1), wherein an active rotating mechanism (6) and a driven rotating mechanism (5) are respectively provided on both sides of the U-shaped support frame (1), wherein the active rotating mechanism (6) and the driven rotating mechanism (5) are respectively provided with a transmission locking bearing mechanism (3) and a driven locking bearing mechanism (2) for fixing a corrosion cage (9), and a kinetic energy output mechanism (8) and a kinetic energy transmission mechanism (7) cooperating with the kinetic energy output mechanism (8) are also installed in the U-shaped support frame (1), and the kinetic energy output mechanism (8) drives the active rotating mechanism (6) to rotate through the kinetic energy transmission mechanism (7).

2. The corrosion cage locking and rotation device for an acid etching machine according to claim 1, characterized in that: The active rotating mechanism (6) comprises an active stop sleeve (6-3), an active bearing (6-1) and an active spacer sleeve (6-4) are arranged inside the active stop sleeve (6-3), an active locking stop sleeve (6-2) and a limit shaft stop (6-5) are arranged on both sides of the active bearing (6-1), a transmission gear (6-6) is arranged at the outer end of the limit shaft stop (6-5), and an active limit plate (6-7) is arranged at the outer end of the transmission gear (6-6); The driven rotating mechanism (5) comprises a driven stop sleeve (5-3), a driven bearing (5-1) and a driven spacer sleeve (5-4) are arranged inside the driven stop sleeve (5-3), and a driven limit stop sleeve (5-2) and a driven locking stop sleeve (5-5) are respectively arranged on both sides of the driven stop sleeve (5-3).

3. The corrosion cage locking and self-rotating device for an acid etching machine according to claim 2, characterized in that: The transmission locking bearing mechanism (3) comprises a driving shaft, one end of which is a round shaft with a gear keyway (3-3), and the round shaft end passes through the active rotating mechanism (6) and is connected to the inner hole of the transmission gear (6-6), and the other end of the driving shaft is a half shaft end with an active limit slot (3-1), and the upper opening of the active limit slot (3-1) is provided with an active slot chamfer (3-2); The driven locking bearing mechanism (2) comprises a driven shaft, one end of which is a driven circular shaft and the other end of which is a semi-shaft end with a driven limit slot (2-1), the upper opening of the driven limit slot (2-1) being provided with a driven slot entry chamfer (2-2), the circular shaft end of the driven shaft extending into the interior of the driven rotating mechanism (5) and being able to rotate freely, and the square shafts at both ends of the corrosion cage (9) being respectively clamped in the active limit slot (3-1) and the driven limit slot (2-1).

4. The corrosion cage locking and self-rotating device for an acid etching machine according to claim 3, characterized in that: The active limit slot (3-1) and the driven limit slot (2-1) are both provided with a clamping cover plate (4), the clamping cover plate (4) comprising a square cover plate (4-1), the square cover plate (4-1) being provided with a mounting hole for bolts to pass through, and a wedge-shaped stopper (4-2) being provided below the square cover plate (4-1).

5. The corrosion cage locking and self-rotating device for an acid etching machine according to claim 2, characterized in that: The kinetic energy output mechanism (8) comprises an output motor (8-1), the output shaft of the output motor (8-1) is provided with a driving gear (8-2), and the kinetic energy transmission mechanism (7) comprises a plurality of mutually meshing driven gears (7-1), the upper end of the driven gear (7-1) meshes with the driving gear (8-2), and the lower end of the driven gear (7-1) meshes with the transmission gear (6-6).

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