Automatic rotary deposition system

Abstract

The utility model provides an automatic rotary deposition system which comprises a deposition base rotating disc, a photoelectric switch, a substrate mounting seat and a program interface module, a transmission rod is arranged at the outer end of the deposition base rotating disc, a large gear and multiple sets of photoelectric sensing columns are arranged at the outer end of the transmission rod, and a small gear and a stepping motor are arranged at the outer end of the large gear; a plurality of groups of coating openings and a plurality of groups of deposition openings are formed in the deposition base turntable, a preheating module is arranged in the deposition base turntable, an error allowance limiting module is arranged at the outer end of the substrate mounting seat, and the error allowance limiting module comprises a mounting position module and a photoelectric positioning module. According to parameters set by the system, the initial value and the set maximum swing distance are automatically positioned through the positioning value module in the initial state without regulation and control, the rotation direction of the stepping motor can be rapidly changed through the photoelectric start-stop module when the stepping motor rotates to the endpoint value, and the stability and uniformity of rotary deposition coating of the system are guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of deposition and coating, in particular to an automated rotary deposition system. Background Art

[0002] In the field of modern industrial manufacturing, coating technology is increasingly used. It is not only used to improve the appearance of products, but also to enhance the corrosion resistance and wear resistance of materials and improve optical properties. This system ensures that the coating material can be evenly deposited on the surface of the substrate by precisely controlling the rotation speed and angle of the substrate in a vacuum environment, forming a highly consistent thin film layer.

[0003] The automated rotary deposition system usually includes a high-precision turntable that can rotate in multiple axes under the control of a computer program. During the deposition process, the substrate material is fixed on the turntable. As the turntable rotates, the coating material is ejected from the evaporation source. Due to the centrifugal force and precise speed control, the coating material can be evenly distributed on the entire substrate surface.

[0004] In the prior art, during the use of a rotary deposition system for coating technology, if it is not necessary to coat each substrate mount in the chamber, there will be waste in the coating as a whole and the uniformity of the coating cannot be well controlled; therefore, we have made improvements to this and proposed an automated rotary deposition system. Utility Model Content

[0005] The utility model aims to solve the problems of waste and uneven coating in the whole coating process when using a rotary deposition system of coating technology and when not every substrate mounting seat in the chamber needs to be coated.

[0006] In order to achieve the above-mentioned utility model purpose, the utility model provides the following technical solutions:

[0007] An automated rotary deposition system is provided to improve the above problems.

[0008] The specific application is as follows:

[0009] An automated rotary deposition system comprises a deposition base turntable, a photoelectric switch, a substrate mounting seat and a program interface module, a transmission rod is arranged at the outer end of the deposition base turntable, a large gear and a plurality of groups of photoelectric sensing columns are arranged at the outer end of the transmission rod, a small gear and a stepping motor are arranged at the outer end of the large gear, a plurality of groups of coating ports and a plurality of groups of deposition ports are arranged in the deposition base turntable, a preheating module is arranged in the deposition base turntable, an error margin limiting module is arranged at the outer end of the substrate mounting seat, the error margin limiting module comprises an installation position module and a photoelectric positioning module, and a single-chip coating module and a full-disc coating module are arranged at the outer end of the stepping motor.

[0010] As the preferred technical solution of the present application, the program interface module includes a parameter setting module, a motor position display module, a positioning value module, a clockwise and counterclockwise determination module and a photoelectric start and stop module.

[0011] As the preferred technical solution of the present application, the parameter setting module is used to set the parameters of the pitch, running speed and running distance of the stepper motor, and the motor position display module is used to follow and display the real-time position of the stepper motor, and control the clockwise and counterclockwise rotation of the stepper motor.

[0012] As the preferred technical solution of the present application, the positioning value module is used to determine the positions of the deposition base turntable and the photoelectric switch corresponding to different deposition ports. The clockwise and counterclockwise judgment module is used to determine the clockwise and counterclockwise direction of rotation and the distance. Based on the positioning value N, the positions of N+a and Na are located.

[0013] As the preferred technical solution of the present application, the photoelectric start-stop module is used to control whether to stop the stepper motor rotation when reaching the positioning value. The switch of whether to stop after reaching the positioning value will stop the turntable when it reaches the positioning value when it is turned on.

[0014] As the preferred technical solution of the present application, the single-chip coating module is used for the incomplete rotation of the stepper motor, and the single-chip coating module is interconnected with the error margin limitation module and the program interface module, and the single-chip coating module performs a pendulum-type reciprocating cycle.

[0015] As a preferred technical solution of the present application, the full-disk coating module is used for the complete rotation of the stepper motor, and the full-disk coating module is signal-connected to the parameter setting module.

[0016] Compared with the prior art, the utility model has the following beneficial effects:

[0017] In the scheme of this application:

[0018] Through the parameters set by the system, without adjusting the initial state, the initial value and the set maximum swing distance are automatically positioned through the positioning value module, and the photoelectric start and stop module can quickly change the rotation direction of the stepper motor when it rotates to the endpoint value, ensuring the stability and uniformity of the system's rotational deposition coating. The photoelectric start and stop module can determine the end face and start and stop conditions of the swing during rotation, ensuring that the rotation amplitude is twice the deposition width, thereby ensuring the uniformity of the coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 The overall operation flow chart of the automated rotary deposition system provided for this application;

[0020] Figure 2 A front-end interface diagram of the program interface module of the automated rotary deposition system provided in this application;

[0021] Figure 3 The overall control structure diagram of the automated rotary deposition system provided in this application. DETAILED DESCRIPTION

[0022] To make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be described clearly and completely in conjunction with the accompanying drawings. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments.

[0023] Therefore, the following detailed description of the embodiments of the present invention is not intended to limit the scope of the present invention to be protected, but only represents some embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention. It should be noted that the embodiments of the present invention and the features and technical solutions in the embodiments can be combined with each other without conflict.

[0024] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0025] like Figure 1-3 As shown, this embodiment proposes an automated rotating deposition system, including a deposition base turntable, a photoelectric switch, a substrate mounting seat and a program interface module, a transmission rod is provided at the outer end of the deposition base turntable, a large gear and multiple groups of photoelectric sensing columns are provided at the outer end of the transmission rod, a small gear and a stepper motor are provided at the outer end of the large gear, multiple groups of coating ports and multiple groups of deposition ports are provided in the deposition base turntable, a preheating module is provided in the deposition base turntable, an error margin limiting module is provided at the outer end of the substrate mounting seat, the error margin limiting module includes an installation position module and a photoelectric positioning module, and a single-piece coating module and a full-disc coating module are provided at the outer end of the stepper motor.

[0026] Use photoelectric sensing columns to evenly divide the entire deposition base turntable into 60 equal parts. Each photoelectric sensing column corresponds to a different position. For example, the heating point position is position 20 in the photoelectric positioning system. There are 18 substrate mounting seats on the deposition base turntable. The relationship between the substrate mounting seat and the photoelectric position needs to be determined first. (Fix the relationship between the mounting position and the photoelectric positioning. For example, the photoelectric positioning values ​​of the first substrate mounting seat and the third substrate mounting seat when corresponding to deposition port 1 are different. No. 1 corresponds to photoelectric position 20, and No. 3 corresponds to the deposition port photoelectric position of about 23. There is an error margin, which needs to be set in advance).

[0027] The program interface module includes a parameter setting module, a motor position display module, a positioning value module, a clockwise and counterclockwise determination module and a photoelectric start and stop module.

[0028] The parameter setting module is used to set the parameters of the stepper motor's pitch, running speed and running distance. The motor position display module is used to follow and display the real-time position of the stepper motor and control the stepper motor's clockwise and counterclockwise rotation.

[0029] The positioning value module is used to determine the positions of the deposition base turntable and the photoelectric switch corresponding to different deposition ports. The clockwise and counterclockwise judgment module is used to determine the clockwise and counterclockwise direction of rotation and the distance. Based on the positioning value N, the positions of N+a and Na are located. The positions of N+a and Na are the maximum swing distances of the single-chip coating module.

[0030] The photoelectric start-stop module is used to control whether to stop the stepper motor rotation when reaching the positioning value. It is a switch to stop after reaching the positioning value. When it is turned on, the turntable will stop after reaching the positioning value.

[0031] The single-chip coating module is used for the incomplete rotation of the stepping motor, and the single-chip coating module is connected with the error margin limiting module and the program interface module, and the single-chip coating module performs pendulum-type reciprocating circulation activities.

[0032] In the process of the single-chip coating module operation: start the software, in the initial state, set the speed of the stepper motor rotation (the deposition amount is proportional to the swing amplitude and time, and has nothing to do with the speed) and time (the default value does not need to be changed) through the parameter setting module. First, return to the set preheating position in the preheating module, and control the stepper motor to rotate clockwise through the positioning value module until the photoelectric sensor switch reaches the specified position. Set the swing amplitude of the rotation, that is, the clockwise and counterclockwise judgment value, and start the rotation. The photoelectric start and stop module controls the photoelectric synchronous recording of the position scanned by the photoelectric switch. For example, when the positioning value is set to N, it reaches the N+1 position 3s after the start, and reaches the N+2 position after 6s... Record the rotation amplitude. When the clockwise rotation amplitude setting value is reached, it immediately starts counterclockwise rotation (the stepper motor is almost not affected by inertia). The photoelectric switch synchronously records the rotation amplitude. After reaching the counterclockwise rotation setting value, it starts clockwise again until the positioning value, and repeats the cycle (for the uniformity of the coating, the rotation amplitude value is twice the deposition width). The rotation can be stopped after the deposition waiting time is reached.

[0033] The full disk coating module is used for the full rotation of the stepper motor, and the full disk coating module is connected with the parameter setting module signal.

[0034] In the operation process of the full-disk coating module: all substrate mounts are installed on the base to be deposited, and only the speed and time need to be set, and the uniform rotation in one direction is required. In addition to setting the step operation settings, no other settings and judgments are required.

[0035] When the present application is in use: through the parameters set by the system, without the need to adjust the initial state, the initial value and the set maximum swing distance are automatically positioned through the positioning value module, and the photoelectric start and stop module can quickly change the rotation direction of the stepper motor when it rotates to the endpoint value, thereby ensuring the stability and uniformity of the system's rotating deposition coating, and through the photoelectric start and stop module, the end face and start and end conditions of the swing can be determined during rotation, ensuring that the rotation amplitude value is twice the deposition width, thereby ensuring the uniformity of the coating.

[0036] The above embodiments are only used to illustrate the present invention and are not intended to limit the technical solutions described in the present invention. Although the present invention has been described in detail with reference to the above embodiments, the present invention is not limited to the above specific implementation methods. Therefore, any modification or equivalent replacement of the present invention; and all technical solutions and improvements thereof that do not depart from the spirit and scope of the present invention are included in the scope of the claims of the present invention.

Claims

1. An automated rotary deposition system, comprising a deposition base turntable, a photoelectric switch, a substrate mounting seat and a program interface module, characterized in that: A transmission rod is provided at the outer end of the deposition base turntable, a large gear and multiple groups of photoelectric sensing columns are provided at the outer end of the transmission rod, a small gear and a stepper motor are provided at the outer end of the large gear, multiple groups of coating ports and multiple groups of deposition ports are provided in the deposition base turntable, a preheating module is provided in the deposition base turntable, an error margin limiting module is provided at the outer end of the substrate mounting seat, the error margin limiting module includes an installation position module and a photoelectric positioning module, and a single-piece coating module and a full-disc coating module are provided at the outer end of the stepper motor.

2. The automated rotary deposition system according to claim 1, characterized in that: The program interface module includes a parameter setting module, a motor position display module, a positioning value module, a clockwise and counterclockwise determination module, and a photoelectric start and stop module.

3. An automated rotary deposition system according to claim 2, characterized in that: The parameter setting module is used for parameter setting of the pitch, running speed and running distance of the stepper motor, and the motor position display module is used for following and displaying the real-time position of the stepper motor.

4. The automated rotary deposition system according to claim 3, characterized in that: The positioning value module is used for the positions of the deposition base turntable and the photoelectric switch corresponding to different deposition ports, and the clockwise and counterclockwise determination module is used for determining the clockwise and counterclockwise direction of rotation and the distance.

5. The automated rotary deposition system according to claim 4, characterized in that: The photoelectric start-stop module is used to control whether to stop the rotation of the stepper motor when the positioning value is reached.

6. The automated rotary deposition system according to claim 5, characterized in that: The single-chip coating module is used for the incomplete rotation of the stepping motor, and the single-chip coating module is interconnected with the error margin limiting module and the program interface module.

7. An automated rotary deposition system according to claim 6, characterized in that: The full-disk coating module is used for the complete rotation of the stepping motor, and the full-disk coating module is connected to the parameter setting module by signal.

Images