Lifting single crystal furnace equipment

Abstract

The utility model belongs to the technical field of single crystal furnaces, and particularly relates to single crystal furnace lifting equipment which comprises a support base, a vacuum furnace body is fixedly mounted on the upper side of the support base, a lifting structure is fixedly mounted on the upper side of the vacuum furnace body, and a weighing rotating structure is fixedly mounted on the front side of the lifting structure. The vacuum furnace body comprises a furnace chamber, a furnace door, a crucible, a high-frequency coil and a rotating shaft rod, the lifting structure comprises a mounting seat, a stand column, a top plate, a first motor, a lead screw, a sliding seat and a linear guide rail, and the weighing rotating structure comprises a scale chamber shell, a weighing sensor, a motor mounting seat, a second motor, a lifting rotating rod, a corrugated sleeve, an upper flange ring, a lower flange ring and a seed crystal. The problems that the rotating speed of a lifting rotating rod of an existing device is not changed, and in the seeding process, seeding cannot be conducted easily due to too high rotating speed; in the seeding process of an existing device, the part exposed on the upper side of a vacuum furnace body is easily contaminated by dust, and the quality of growing crystals is affected.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a single crystal pulling furnace device. Background Art

[0002] Single crystal materials have rapidly developed into a new material with increasingly wide applications due to their excellent acoustic, optical, electrical, and magnetic properties. The research and development breakthroughs in high-performance single crystal materials have greatly promoted the development of modern industry and have played an irreplaceable role in many fields such as high-tech industries and scientific research. The production of single crystal materials requires the use of a single crystal furnace, which is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and grows single crystals without dislocations using the Czochralski method.

[0003] During the single crystal growth process, as the weight of the crystal grown on the seed crystal increases, the rotation speed of the lifting rod also needs to change accordingly. However, the rotation speed of the lifting rod of the existing device remains unchanged. During the crystal seeding process, it is easy to fail to seed the crystal due to the excessive rotation speed. In addition, during the single crystal growth process, the lifting rod of the existing device moves up and down and rotates, and the part exposed to the upper side of the vacuum furnace body is easily contaminated with dust, resulting in the lifting rod protruding into the vacuum furnace body and bringing dust into it, affecting the quality of the grown crystal. Utility Model Content

[0004] The purpose of the utility model is to provide a single crystal pulling furnace device to solve the problems mentioned in the above background technology that the rotation speed of the pulling rod of the existing device remains unchanged, and during the crystal seeding process, it is easy to fail to seed the crystal due to too fast a rotation speed; during the crystal seeding process of the existing device, the part exposed to the upper side of the vacuum furnace body is easily contaminated with dust, which affects the quality of the grown crystal.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a single crystal pulling furnace equipment, including a support base, a vacuum furnace body is fixedly installed on the upper side of the support base, a pulling structure is fixedly installed on the upper side of the vacuum furnace body, a weighing rotating structure is fixedly installed on the front side of the pulling structure, the vacuum furnace body includes a furnace chamber, a furnace door, a crucible, a high-frequency coil, and a rotating shaft rod, the pulling structure includes a mounting seat, a column, a top plate, a first motor, a screw, a sliding seat, and a linear guide rail, the weighing rotating structure includes a scale chamber housing, a weighing sensor, a motor mounting seat, a second motor, a pulling rotating rod, a corrugated sleeve, an upper flange ring, a lower flange ring, and a seed crystal.

[0006] Preferably, a bottom plate is fixedly provided between the left and right legs of the bracket base, an electric push rod is fixedly installed on the upper side of the bottom plate, a third motor is fixedly connected to the upper side of the electric push rod, and the output end of the third motor is fixedly connected to the lower end of the rotating shaft rod.

[0007] Preferably, the furnace chamber is located on the upper side of the support base, the crucible is movably arranged on the inner side of the furnace chamber, the high-frequency coil is evenly arranged on the opposite sides of the crucible and the furnace chamber, the rotating shaft rod passes through the support base and the furnace chamber and is fixedly connected to the lower side of the crucible, the furnace door is hinged on the front side of the furnace chamber, and a quartz observation window is embedded on the front side of the furnace door.

[0008] Preferably, the mounting seat is fixedly installed on the upper side of the furnace chamber, the column is installed and connected to the upper side of the mounting seat, the top plate is fixedly connected to the upper side of the column, the first motor is fixedly installed on the upper side of the top plate, the screw rod is rotatably connected to the opposite side of the top plate and the mounting seat, the upper end of the screw rod is fixedly connected to the output end of the first motor, the sliding seat is movably screwed on the outside of the screw rod, the linear guide rail is opened on the front side of the column, and the sliding seat is slidably connected to the linear guide rail.

[0009] Preferably, the scale chamber housing is fixedly mounted on the front side of the sliding seat, the weighing sensor is fixedly connected to the rear side wall inside the scale chamber housing, the motor mounting seat is fixedly connected to the front side of the weighing sensor, the second motor is fixedly mounted on the lower side of the motor mounting seat, the lifting rotating rod is arranged on the lower side of the scale chamber housing, the lifting rotating rod is fixedly connected to the output end of the second motor, and the end of the lifting rotating rod away from the second motor passes through the upper side of the furnace chamber and is fixedly connected to the seed crystal.

[0010] Preferably, the upper flange ring is fixedly connected to the lower side of the scale chamber shell, the lower flange ring is fixedly connected to the upper side of the furnace chamber, the corrugated sleeve is fixedly connected to the opposite sides of the upper flange ring and the lower flange ring, and the corrugated sleeve, the upper flange ring and the lower flange ring are all sleeved on the outside of the lifting and rotating rod.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] 1) When the device is in use, the raw material is introduced into the crucible, and the controller controls the third motor to start and rotate the crucible so that the crucible is heated evenly. When about 20% of the raw material remains unmelted, the temperature is gradually lowered, the crucible position is raised, and the thermal inertia of the thermal system is used to melt the remaining material. After all the material is melted, it is just reduced to the seeding temperature. At this time, the crucible is also in the seeding position, and the second motor is started to rotate the lifting rod to start seeding. After the seeding starts, the first motor is started to drive the screw rod to rotate, so that the sliding seat moves up, so that the seed crystal starts to seed. As the seeding process begins, the seed crystal continues to adhere to the outside of the seed crystal, and the weight increases. The weighing sensor transmits the weight change signal to the control center, and the control center converts it into an electrical signal to control the speed of the second motor to slowly decrease, so that the difficulty of single crystal attachment is reduced, the success rate is increased, and the seeding effect is good.

[0013] 2) The device is provided with a corrugated sleeve. When the device is in use, the lifting and rotating rod is inserted into the inner side of the vacuum furnace body. At this time, the upper flange ring and the lower flange ring squeeze the corrugated sleeve, and after the lifting and rotating rod rises, the corrugated sleeve is reset. This design ensures that the lifting and rotating rod is always on the inner side of the corrugated sleeve and protects the lifting and rotating rod from external dust and other pollution. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the main structure of the utility model;

[0015] Figure 2 It is a left view structural diagram of the lifting structure and the weighing and rotating structure;

[0016] Figure 3 It is a schematic diagram of the cross-sectional structure of the scale chamber shell from the left side;

[0017] Figure 4 This is a schematic diagram of the main cross-sectional structure of the furnace chamber.

[0018] In the figure: 1. bracket base, 2. vacuum furnace body, 3. lifting structure, 4. weighing rotating structure, 5. furnace chamber, 6. furnace door, 7. crucible, 8. high-frequency coil, 9. shaft rod, 10. mounting seat, 11. column, 12. top plate, 13. first motor, 14. lead screw, 15. sliding seat, 16. linear guide rail, 17. scale chamber shell, 18. weighing sensor, 19. motor mounting seat, 20. second motor, 21. lifting rotating rod, 22. corrugated sleeve, 23. upper flange ring, 24. lower flange ring, 25. seed crystal, 26. bottom plate, 27. electric push rod, 28. third motor, 29. quartz observation window. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0021] Example:

[0022] See also Figure 1-4 The utility model provides a technical solution: a single crystal pulling furnace device, including a support base 1, a vacuum furnace body 2 is fixedly installed on the upper side of the support base 1, a pulling structure 3 is fixedly installed on the upper side of the vacuum furnace body 2, a weighing rotating structure 4 is fixedly installed on the front side of the pulling structure 3, the vacuum furnace body 2 includes a furnace chamber 5, a furnace door 6, a crucible 7, a high-frequency coil 8, and a rotating shaft rod 9, the pulling structure 3 includes a mounting seat 10, a column 11, a top plate 12, a first motor 13, a screw 14, a sliding seat 15, and a linear guide 16, and the weighing rotating structure 4 includes a scale chamber shell 17, a weighing sensor 18, a motor mounting seat 19, a second motor 20, a pulling rotating rod 21, a corrugated sleeve 22, an upper flange ring 23, a lower flange ring 24, and a seed crystal 25.

[0023] Among them, a bottom plate 26 is fixedly arranged between the left and right legs of the support base 1, and an electric push rod 27 is fixedly installed on the upper side of the bottom plate 26, which is used to raise the position of the crucible 7, and use the thermal inertia of the thermal system to melt the remaining materials. After all the materials are melted, they are just reduced to the seeding temperature. At this time, the crucible 7 is also in the seeding position, and a third motor 28 is fixedly connected to the upper side of the electric push rod 27. The output end of the third motor 28 is fixedly connected to the lower end of the rotating shaft rod 9. The third motor 28 turns on and rotates the crucible 7 to make the crucible 7 heated evenly. The furnace chamber 5 is located on the upper side of the support base 1, and the crucible 7 is movably arranged on the inner side of the furnace chamber 5. The high-frequency coil 8 is evenly arranged between the crucible 7 and the furnace chamber 5. On the opposite side, the temperature of the raw materials in the crucible 7 can be evenly heated. The rotating shaft rod 9 passes through the support base 1 and the furnace chamber 5 and is fixedly connected to the lower side of the crucible 7. The furnace door 6 is hinged on the front side of the furnace chamber 5. A quartz observation window 29 is embedded on the front side of the furnace door 6 to facilitate observation of the crystal seeding progress. The mounting seat 10 is fixedly installed on the upper side of the furnace chamber 5. The column 11 is installed and connected to the upper side of the mounting seat 10. The top plate 12 is fixedly connected to the upper side of the column 11. The first motor 13 is fixedly installed on the upper side of the top plate 12. The screw rod 14 is rotatably connected to the opposite side of the top plate 12 and the mounting seat 10. The upper end of the screw rod 14 is fixedly connected to the output end of the first motor 13. The sliding seat 15 is movably screwed on On the outside of the screw rod 14, a linear guide rail 16 is opened on the front side of the column 11, and the sliding seat 15 is slidably connected to the linear guide rail 16, which is convenient for the sliding seat 15 to slide up and down and has a guiding function. The scale chamber housing 17 is fixedly installed on the front side of the sliding seat 15, and the weighing sensor 18 is fixedly connected to the rear side wall inside the scale chamber housing 17. The motor mounting seat 19 is fixedly connected to the front side of the weighing sensor 18, and the weight change signal can be transmitted to the control center. The control center converts it into an electrical signal to control the speed of the second motor 20 to slowly decrease, so that the difficulty of single crystal attachment is reduced and the success rate is increased. The second motor 20 is fixedly installed on the lower side of the motor mounting seat 19, and the lifting The rotating rod 21 is arranged on the lower side of the scale chamber shell 17, and the lifting rotating rod 21 is fixedly connected to the output end of the second motor 20. The end of the lifting rotating rod 21 away from the second motor 20 passes through the upper side of the furnace chamber 5 and is fixedly connected to the seed crystal 25. The upper flange ring 23 is fixedly connected to the lower side of the scale chamber shell 17, and the lower flange ring 24 is fixedly connected to the upper side of the furnace chamber 5. The corrugated sleeve 22 is fixedly connected to the opposite sides of the upper flange ring 23 and the lower flange ring 24. The corrugated sleeve 22, the upper flange ring 23 and the lower flange ring 24 are all sleeved on the outside of the lifting rotating rod 21, so that the lifting rotating rod 21 is always on the inner side of the corrugated sleeve 22 and protects the lifting rotating rod 21 from external dust and other pollution.

[0024] Working principle: When the device is in use, the raw material is introduced into the crucible 7, and the controller controls the third motor 28 to start and rotate the crucible 7 so that the crucible 7 is heated evenly. When about 20% of the raw material has not yet melted, the temperature gradually decreases, and the electric push rod 27 raises the position of the crucible 7, and the thermal inertia of the thermal system is used to melt the remaining material. After all the materials are melted, the temperature just drops to the seeding temperature. At this time, the crucible 7 is also in the seeding position, and the second motor 20 starts, rotating the lifting rod 21 to start seeding. After the seeding starts, the first motor 13 starts, driving the screw rod 14 to rotate, so that the sliding seat 15 moves up, so that the seed crystal 25 starts to seed, and as the seeding starts At the beginning of the process, the seed crystal continues to attach to the outside of the seed crystal 25, and the weight increases. The weighing sensor 18 transmits the weight change signal to the control center, which converts it into an electrical signal to control the speed of the second motor 20 to slowly decrease, thereby reducing the difficulty of single crystal attachment, increasing the success rate, and achieving a good seed crystal effect. When the device is in use, the lifting rod 21 is inserted into the inner side of the vacuum furnace body 2. At this time, the upper flange ring 23 and the lower flange ring 24 squeeze the corrugated sleeve 22, and after the lifting rod 21 rises, the corrugated sleeve 22 is reset. This design ensures that the lifting rod 21 is always on the inner side of the corrugated sleeve 22 and protects the lifting rod 21 from external dust and other pollution.

[0025] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments, and the utility model can be implemented in other specific forms without departing from the spirit or basic features of the utility model; therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is limited by the attached claims rather than the above description. Therefore, it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the utility model, and any figure marks in the claims should not be regarded as limiting the claims involved.

[0026] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A single crystal pulling furnace device, comprising a support base (1), characterized in that: A vacuum furnace body (2) is fixedly mounted on the upper side of the support base (1); a lifting structure (3) is fixedly mounted on the upper side of the vacuum furnace body (2); a weighing rotating structure (4) is fixedly mounted on the front side of the lifting structure (3); the vacuum furnace body (2) comprises a furnace chamber (5), a furnace door (6), a crucible (7), a high-frequency coil (8), and a rotating shaft (9); the lifting structure (3) comprises a mounting seat (10), a column (11), a top plate (12), a first motor (13), a screw rod (14), a sliding seat (15), and a linear guide rail (16); the weighing rotating structure (4) comprises a weighing chamber housing (17), a weighing sensor (18), a motor mounting seat (19), a second motor (20), a lifting rotating rod (21), a corrugated sleeve (22), an upper flange ring (23), a lower flange ring (24), and a seed crystal (25).

2. The single crystal pulling furnace equipment according to claim 1, characterized in that: A bottom plate (26) is fixedly arranged between the left and right legs of the support base (1); an electric push rod (27) is fixedly installed on the upper side of the bottom plate (26); a third motor (28) is fixedly connected to the upper side of the electric push rod (27); and an output end of the third motor (28) is fixedly connected to the lower end of the rotating shaft rod (9).

3. The single crystal pulling furnace equipment according to claim 1, characterized in that: The furnace chamber (5) is located on the upper side of the support base (1), the crucible (7) is movably arranged on the inner side of the furnace chamber (5), the high-frequency coil (8) is evenly arranged on the opposite sides of the crucible (7) and the furnace chamber (5), the rotating shaft rod (9) passes through the support base (1) and the furnace chamber (5) and is fixedly connected to the lower side of the crucible (7), the furnace door (6) is hinged on the front side of the furnace chamber (5), and a quartz observation window (29) is embedded on the front side of the furnace door (6).

4. The single crystal pulling furnace equipment according to claim 1, characterized in that: The mounting seat (10) is fixedly mounted on the upper side of the furnace chamber (5); the column (11) is mounted and connected to the upper side of the mounting seat (10); the top plate (12) is fixedly connected to the upper side of the column (11); the first motor (13) is fixedly mounted on the upper side of the top plate (12); the screw rod (14) is rotatably connected to the opposite side of the top plate (12) and the mounting seat (10); the upper end of the screw rod (14) is fixedly connected to the output end of the first motor (13); the sliding seat (15) is movably screwed to the outer side of the screw rod (14); the linear guide rail (16) is opened on the front side of the column (11); and the sliding seat (15) is slidably connected to the linear guide rail (16).

5. The single crystal pulling furnace equipment according to claim 1, characterized in that: The weighing chamber housing (17) is fixedly mounted on the front side of the sliding seat (15), the weighing sensor (18) is fixedly connected to the rear side wall inside the weighing chamber housing (17), the motor mounting seat (19) is fixedly connected to the front side of the weighing sensor (18), the second motor (20) is fixedly mounted on the lower side of the motor mounting seat (19), the lifting rotating rod (21) is arranged on the lower side of the weighing chamber housing (17), the lifting rotating rod (21) is fixedly connected to the output end of the second motor (20), and the end of the lifting rotating rod (21) away from the second motor (20) passes through the upper side of the furnace chamber (5) and is fixedly connected to the seed crystal (25).

6. The single crystal pulling furnace equipment according to claim 1, characterized in that: The upper flange ring (23) is fixedly connected to the lower side of the scale chamber housing (17), the lower flange ring (24) is fixedly connected to the upper side of the furnace chamber (5), the corrugated sleeve (22) is fixedly connected to the opposite sides of the upper flange ring (23) and the lower flange ring (24), and the corrugated sleeve (22), the upper flange ring (23) and the lower flange ring (24) are all sleeved on the outer side of the lifting and rotating rod (21).

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