Two-section type rectangular valve

Abstract

The utility model relates to the technical field of vacuum valves, in particular to a two-section type rectangular valve which comprises a valve body, a valve plate is arranged on the valve body, a first driving assembly used for driving the valve plate to move is arranged on the valve body, and a second driving piece used for driving the valve plate to move is further arranged on the valve body. The first driving assembly and the second driving piece drive the valve plate to move in the direction perpendicular to each other, and a control assembly used for controlling whether the second driving piece can conduct driving or not is arranged on the valve body. The present application has an effect of reducing the generation of dust particles when forming a vacuum partition.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum valves, and in particular to a two-stage rectangular valve. Background Art

[0002] Vacuum coating is a method of evaporating or sputtering metals, alloys or compounds in a vacuum, causing them to solidify and deposit on the object to be coated. Because it uses evaporation and deposition as the main processing and manufacturing methods, vacuum coating can often produce thinner surface coatings than electroplating and chemical electroplating, and can also obtain more precise crystal structures.

[0003] Vacuum coating requires the creation of a vacuum environment to isolate the vacuum from the atmosphere. During the vacuum coating process, if there are a lot of pollutants such as water vapor and dust in the environment, the vacuum degree will not meet the original standard when the equipment is evacuated. This is because these pollutants in the environment will react chemically with the vacuum oil to produce substances that can corrode metals, which will have an adverse effect on the operation and equipment of vacuum coating. The traditional vacuum partition uses a vacuum valve, but the sealing action of the traditional vacuum valve is usually achieved by rotating the rocker or sliding it sideways. During the valve sealing process, due to the rotational motion component, this action will cause friction on the sealing ring of the sealing surface, and the friction of the sealing ring will produce dust particles, which will affect the creation of the vacuum environment, reduce the vacuum degree, and cause quality problems of the coated products. Utility Model Content

[0004] In order to reduce the generation of dust particles when forming a vacuum partition, the present application provides a two-stage rectangular valve.

[0005] The present application provides a two-stage rectangular valve, which adopts the following technical solution:

[0006] A two-stage rectangular valve comprises a valve body, a valve plate is arranged on the valve body, a first driving component for driving the valve plate to move is arranged on the valve body, a second driving member for driving the valve plate to move is also arranged on the valve body, the directions in which the first driving component and the second driving member drive the valve plate to move are perpendicular to each other, and a control component for controlling whether the second driving member can be driven is arranged on the valve body.

[0007] By adopting the above technical solution, through the arrangement of the first drive component and the second drive component, the movement of the valve plate is converted into linear motion at both ends, so that the valve plate moves in an L-shaped trajectory, and the second drive component is controlled by the control component, so that after the first drive component drives the valve plate to move, the second drive component can drive the valve plate to move, thereby ensuring the L-shaped movement trajectory of the valve plate, effectively reducing the friction during the valve plate sealing, and reducing the generation of dust particles when forming a vacuum partition.

[0008] Preferably, the first drive assembly includes a first cylinder fixedly connected to the valve body, a second cylinder fixedly connected to the valve body, and a connecting block arranged on the piston rod of the first cylinder, a first connecting member is connected to the piston rod of the first cylinder, a second connecting member is connected to the piston rod of the second cylinder, one end of the first connecting member away from the piston rod of the first cylinder is connected to the connecting block, one end of the second connecting member away from the piston rod of the second cylinder is connected to the connecting block, and the valve plate is fixedly connected to the connecting block.

[0009] By adopting the above technical solution, the first cylinder and the second cylinder are started, and the piston rods of the first cylinder and the second cylinder are extended, driving the first connecting member and the second connecting member to move, thereby causing the connecting block to move, and the movement of the connecting block drives the valve plate to move, thereby realizing the first stage of movement of the valve plate.

[0010] Preferably, the first connecting member is a first connecting thin plate, and the second connecting member is a second connecting thin plate.

[0011] By adopting the above technical solution and arranging the first connecting thin plate and the second connecting thin plate, the thin plate member has a certain toughness, which can alleviate the radial force transmitted to the cylinder due to movement in different directions.

[0012] Preferably, a guide rod is provided on the valve body, and the guide rod is passed through the connecting block.

[0013] By adopting the above technical solution and setting the guide rod, the guide rod guides the movement of the connecting block, so that the movement of the connecting block is more stable.

[0014] Preferably, the second driving member is a third cylinder fixedly connected to the valve body, and a piston rod of the third cylinder is fixedly connected to the guide rod.

[0015] By adopting the above technical solution, the third cylinder is started, and the piston rod of the third cylinder extends, driving the guide rod to move, thereby causing the guide rod to move, and the movement of the guide rod will drive the connecting block to move, and the movement of the connecting block will drive the valve plate to move, thereby realizing the second stage of movement of the valve plate.

[0016] Preferably, the control assembly includes an air distribution block fixedly mounted on the valve body, a one-way valve fixedly mounted on the air distribution block, a push rod slidably connected to the one-way valve, and a pressure plate fixedly connected to the piston rod of the first cylinder, the push rod is used to control whether the one-way valve is unidirectional, and the air distribution block is used to supply air to the first cylinder, the second cylinder, and the third cylinder.

[0017] By adopting the above technical scheme, the air distribution block is connected with the external air pipeline. When the external air pipeline supplies air to the air distribution block, the air distribution block will first supply air to the first cylinder and the second cylinder under the action of the one-way valve, and the first cylinder and the second cylinder will be started, so that the valve plate will first move in the first stage. When the first cylinder moves to the maximum stroke, the pressure plate will be pressed on the push rod, and the push rod will make the one-way valve invalid. The one-way valve can now ventilate in both directions. At this time, the air supply from the external air pipeline will supply air to the third cylinder through the air distribution block, so that the third cylinder will be started, so that the valve plate completes the second stage of movement, and the segmented movement of the valve plate is realized.

[0018] Preferably, a pressure regulating valve is further provided on the valve body, and the pressure regulating valve is used to adjust the air pressure supplied by the air distribution block to the third cylinder.

[0019] By adopting the above technical solution and setting the pressure regulating valve, the air pressure supplied to the third cylinder can be adjusted, thereby adjusting the force output by the third cylinder.

[0020] Preferably, a sealing ring is installed on the valve plate.

[0021] By adopting the above technical solution and providing the sealing ring, the valve plate can stably seal the valve body.

[0022] In summary, the present application includes at least one of the following beneficial technical effects:

[0023] 1. Through the arrangement of the first drive assembly, the second drive member, and the control assembly, the movement of the valve plate is changed to firstly perform the first section movement under the action of the first drive assembly, and then perform the second section movement under the action of the second drive member, so that the L-shaped movement of the valve plate is divided into two sections of linear movement, and after the driving movement of the first drive assembly is completed, the control assembly controls the valve plate, and then starts the second drive member to drive the valve plate to move, so that the two sections of movement are completely separated, thereby effectively reducing the rotational motion component of the valve plate during sealing, and reducing the generation of dust particles when forming a vacuum partition;

[0024] 2. Through the arrangement of the first connecting thin plate and the second connecting thin plate, the thin plate has a certain toughness, which can alleviate the radial force transmitted to the cylinder due to movement in different directions;

[0025] 3. The distributed air intake process of the first cylinder, the second cylinder and the third cylinder is realized by setting the air distribution block, the one-way valve, the push rod and the pressure plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is an axonometric diagram mainly showing the overall structure in the embodiment of the present application;

[0027] Figure 2is an axonometric diagram mainly showing the structure of the first drive assembly in the embodiment of the present application;

[0028] Figure 3 It is an axonometric diagram mainly showing the structure of the control assembly in the embodiment of the present application;

[0029] Figure 4 It is an axonometric schematic diagram mainly showing the one-way valve structure in the embodiment of the present application.

[0030] Figure numerals: 1. valve body; 2. valve plate; 3. first drive assembly; 31. first cylinder; 32. second cylinder; 33. connecting block; 4. control assembly; 41. gas distribution block; 42. one-way valve; 43. push rod; 44. pressure plate; 5. first connecting thin plate; 6. second connecting thin plate; 7. guide rod; 8. third cylinder; 9. pressure regulating valve; 10. sealing ring. DETAILED DESCRIPTION

[0031] The following is combined with Figure 1 -Attached Figure 4 This application is described in further detail.

[0032] The embodiment of the present application discloses a two-section rectangular valve.

[0033] like Figure 1 and 2 As shown, a two-stage rectangular valve includes a valve body 1. In this embodiment, the valve body 1 is placed on a horizontal plane as a reference position, a valve plate 2 is arranged on the valve body 1, a sealing ring 10 is installed on the valve plate 2, and a first driving assembly 3 for driving the valve plate 2 is arranged on the valve body 1. The first driving assembly 3 includes a first cylinder 31, a second cylinder 32, and a connecting block 33, wherein the first cylinder 31 and the second cylinder 32 are both installed on the valve body 1 by bolts, and the first cylinder 31 and the second cylinder 32 are respectively installed at both ends of the valve body 1, the first cylinder 31 and the second cylinder 32 are arranged parallel to each other, and the piston rods of the first cylinder 31 and the second cylinder 32 have the same extension direction, both of which are vertical. direction, the connecting block 33 is arranged at a position between the first cylinder 31 and the second cylinder 32, the first cylinder 31 is provided with a first connecting member, the first connecting member is a first connecting thin plate 5, one end of the first connecting thin plate 5 is installed on the first cylinder 31 by bolts, and the other end is installed on the connecting block 33 by bolts, the second cylinder 32 is provided with a second connecting member, the second connecting member is a second connecting thin plate 6, one end of the second connecting thin plate 6 is installed on the second cylinder 32 by bolts, and the other end is installed on the connecting block 33 by bolts, and the connecting block 33 is clamped and fixed on the valve plate 2, so that the first cylinder 31 and the second cylinder 32 can drive the valve plate 2 to move in the vertical direction.

[0034] like Figure 1 and 2As shown, the valve body 1 is also provided with a second driving member for driving the valve plate 2 to move. The second driving member is a third cylinder 8 installed on the valve body 1. A guide rod 7 is fixedly connected to the piston rod of the third cylinder 8. The guide rod 7 is passed through the connecting block 33. The guide rod 7 is arranged in a vertical direction. The piston rod of the third cylinder 8 is arranged in a horizontal direction. In this embodiment, two third cylinders 8 are provided, and two guide rods 7 are also provided. The two guide rods 7 are respectively passed through the two sides of the connecting block 33, so that the third cylinder 8 can drive the valve plate 2 to move in the horizontal direction.

[0035] like Figure 2 , Figure 3 , Figure 4 As shown, the valve body 1 is provided with a control assembly 4 for controlling whether the second driving member can be driven, and the control assembly 4 includes a gas distribution block 41, a one-way valve 42, a push rod 43, and a pressure plate 44. The gas distribution block 41 is fixedly installed on the valve body 1, and the gas path connection of the gas distribution block 41 is provided with a sealing ring to ensure the sealing of the gas supply process. The pressure plate 44 is fixedly connected to the piston rod of the first cylinder 31 by bolts. The gas distribution block 41 is connected with the external gas pipeline, and the gas is delivered to the first cylinder 31, the second cylinder 32, and the third cylinder 31 through the gas distribution block 41. The three cylinders 8 are supplied with air, and the one-way valve 42 is installed inside the air distribution block 41 to isolate the air path from the air distribution block 41 to the third cylinder 8. The push rod 43 is slidably connected to the one-way valve 42, and the push rod 43 extends out of the air distribution block 41. The working state of the one-way valve 42 can be switched by the push rod 43, so that the one-way conduction function of the one-way valve 42 becomes invalid and becomes two-way conduction. A reset spring for automatically resetting the push rod 43 is also provided in the one-way valve 42 to ensure that the one-way valve 42 can maintain the one-way conduction function when not affected by external force. During use, in the initial state, the gas distribution block 41 receives gas from the external gas pipeline. Due to the presence of the one-way valve 42, the gas cannot be supplied to the third cylinder 8, and can only be supplied to the first cylinder 31 and the second cylinder 32. The piston rods of the first cylinder 31 and the second cylinder 32 will be driven to move first, so that the valve plate 2 will move vertically first, so that the valve plate 2 will move to the position that needs to be closed first. At this time, the pressure plate 44 will move with the movement of the piston rod of the first cylinder 31. When the piston rod of the first cylinder 31 moves to the maximum stroke, the pressure plate 44 will press the push rod 43 to move, so that the one-way function of the one-way valve 42 becomes invalid and becomes two-way conductive. At this time, the third cylinder 8 can be supplied with gas, so that the piston rod of the third cylinder 8 moves, pushing the valve plate 2 to move horizontally, so that the valve is closed.

[0036] like Figure 2As shown, a pressure regulating valve 9 is also installed on the valve body 1. The pressure regulating valve 9 is used to adjust the air pressure supplied by the gas distribution block 41 to the third cylinder 8, so that the moving force of the third cylinder 8 is different. In actual use, the process of delivering the valve disc requires a fast moving speed, and the output force required when moving to the end is not large, so the first cylinder 31 and the second cylinder 32 can choose cylinders with smaller diameters, and the output force required for closing the valve is large, so the third cylinder 8 uses a cylinder with larger diameter, and a pressure regulating valve 9 is set at the same time for pressure regulation.

[0037] The implementation principle of the embodiment of the present application is as follows: when put into actual use, the user only needs to supply air to the air distribution block 41, so that the valve plate 2 can move in the vertical and horizontal directions in sequence, forming an L-shaped movement to close the valve. The use is convenient and quick, and the process effectively reduces the wear of the sealing ring 10 of the valve plate 2, effectively reduces the generation of dust, reduces the accumulation of dust in the vacuum chamber, and ensures a clean environment in the vacuum chamber.

[0038] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A two-stage rectangular valve, characterized in that: The invention comprises a valve body (1), wherein a valve plate (2) is arranged on the valve body (1), wherein a first driving component (3) for driving the valve plate (2) to move is arranged on the valve body (1), and a second driving member for driving the valve plate (2) to move is also arranged on the valve body (1), wherein the directions in which the first driving component (3) and the second driving member drive the valve plate (2) to move are perpendicular to each other, and wherein a control component (4) for controlling whether the second driving member can be driven is arranged on the valve body (1).

2. A two-stage rectangular valve according to claim 1, characterized in that: The first driving assembly (3) comprises a first cylinder (31) fixedly connected to the valve body (1), a second cylinder (32) fixedly connected to the valve body (1), and a connecting block (33) arranged on the piston rod of the first cylinder (31); a first connecting member is connected to the piston rod of the first cylinder (31); a second connecting member is connected to the piston rod of the second cylinder (32); an end of the first connecting member away from the piston rod of the first cylinder (31) is connected to the connecting block (33); an end of the second connecting member away from the piston rod of the second cylinder (32) is connected to the connecting block (33); and the valve plate (2) is fixedly connected to the connecting block (33).

3. A two-stage rectangular valve according to claim 2, characterized in that: The first connecting member is a first connecting thin plate (5), and the second connecting member is a second connecting thin plate (6).

4. A two-stage rectangular valve according to claim 2, characterized in that: The valve body (1) is provided with a guide rod (7), and the guide rod (7) is passed through the connecting block (33).

5. A two-stage rectangular valve according to claim 4, characterized in that: The second driving member is a third cylinder (8) fixedly connected to the valve body (1), and the piston rod of the third cylinder (8) is fixedly connected to the guide rod (7).

6. A two-stage rectangular valve according to claim 5, characterized in that: The control assembly (4) comprises a gas distribution block (41) fixedly mounted on the valve body (1), a one-way valve (42) fixedly mounted on the gas distribution block (41), a push rod (43) slidably connected to the one-way valve (42), and a pressure plate (44) fixedly connected to the piston rod of the first cylinder (31), wherein the push rod (43) is used to control whether the one-way valve (42) is unidirectionally transported, and the gas distribution block (41) is used to supply gas to the first cylinder (31), the second cylinder (32), and the third cylinder (8).

7. A two-stage rectangular valve according to claim 6, characterized in that: The valve body (1) is also provided with a pressure regulating valve (9), and the pressure regulating valve (9) is used to adjust the air pressure supplied by the air distribution block (41) to the third cylinder (8).

8. A two-stage rectangular valve according to claim 4, characterized in that: A sealing ring (10) is installed on the valve plate (2).

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