Drying device and glass substrate processing equipment

Abstract

The utility model relates to the technical field of liquid crystal display panel processing, in particular to a drying device and glass substrate processing equipment. The drying device comprises a drying chamber, a heating plate and a heating assembly, the heating plate is located in the drying chamber, the relative position of the heating plate and a bottom plate of the drying chamber is fixed, the heating plate is used for bearing a glass substrate coated with photoresist, the heating assembly is located below the heating plate, and the heating assembly is used for heating the heating plate. And the position of the heating assembly relative to the heating plate is adjustable. According to the drying device, when the temperature consistency of all the positions of the heating plate is poor, the temperature consistency of all the positions on the heating plate can be improved by adjusting the position of the heating assembly relative to the heating plate, it is guaranteed that a solvent in photoresist is more evenly removed, the drying effect is improved, a new heating plate does not need to be replaced, and the cost is reduced. According to the glass substrate processing equipment, the drying device is applied, so that the cost is reduced, and the processing effect on the glass substrate is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of liquid crystal display panel processing, in particular to a drying device and glass substrate processing equipment. Background Art

[0002] During the photolithography process of the glass substrate in the liquid crystal display panel, a drying device is required to dry the glass substrate coated with photoresist, thereby removing most of the solvent in the photoresist and increasing the adhesion between the photoresist and the glass substrate, facilitating subsequent exposure and development operations on the glass substrate.

[0003] In the related art, the drying device generally includes a heating element and a heating plate. The heating element is fixedly arranged on the heating plate. The heating element heats the heating plate, and then the glass substrate coated with the photoresist is placed on the heating plate, so that the heating plate is used to dry the glass substrate. After the heating plate is used for a long time, the heating plate is prone to slight deformation and other problems, so that the heating element at the current fixed position cannot uniformly heat the entire glass substrate, thereby failing to ensure the consistency of the drying of the photoresist at various positions on the glass substrate. It is necessary to replace a new heating plate to dry the glass substrate, which greatly increases the cost.

[0004] Therefore, there is an urgent need for a drying device and a glass substrate processing equipment to solve the above problems. Utility Model Content

[0005] The purpose of the utility model is to provide a drying device and glass substrate processing equipment, which can improve the consistency of temperature at various positions on a heating plate, ensure more uniform removal of solvents in photoresist, improve the drying effect and processing effect of the glass substrate, and reduce costs.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] A drying device, comprising:

[0008] Drying chamber;

[0009] A heating plate, the heating plate is located in the drying chamber, and the relative position of the heating plate and the bottom plate of the drying chamber is fixed, and the heating plate is used to carry the glass substrate coated with photoresist; and

[0010] A heating assembly is located below the heating plate, the heating assembly is configured to heat the heating plate, and the position of the heating assembly relative to the heating plate is adjustable.

[0011] As an optional solution, the drying device also includes an adjustment guide assembly, which includes a first guide rail and a first slider that are slidably connected, the first guide rail extends along the adjustment direction of the heating assembly, one of the first guide rail and the first slider is arranged on the heating assembly, and the other of the first guide rail and the first slider is arranged on the bottom plate or the heating plate.

[0012] As an optional solution, the drying device includes:

[0013] a plurality of temperature detection components, each of which is configured to detect the temperature at a plurality of locations of the heating plate; and

[0014] A driving component is communicatively connected with the plurality of temperature detection components, and the driving component is configured to drive the heating component to move relative to the heating plate.

[0015] As an optional solution, the drying device further includes:

[0016] A locking bolt is configured to lock the first guide rail and the first slider.

[0017] As an optional solution, the other of the first guide rail and the first sliding block is arranged on the bottom plate, and the drying device further comprises a fastening bolt;

[0018] A threaded hole is provided on the bottom plate, and a long through hole is provided on the heating component. The long through hole extends along the extension direction of the first guide rail. The fastening bolt is threadedly connected with the threaded hole, and the screw rod of the fastening bolt passes through the long through hole and abuts against the heating plate.

[0019] As an optional solution, the other of the first guide rail and the first slider is arranged on the bottom plate, and the drying device further comprises a connecting column;

[0020] The heating component is provided with a long through hole, which extends along the extension direction of the first guide rail. The first end of the connecting column is fixedly connected to the bottom plate, and the second end of the connecting column is fixedly connected to the heating plate after passing through the long through hole.

[0021] As an optional solution, the other of the first guide rail and the first slider is disposed on the heating plate;

[0022] The adjustment guide assembly also includes a second guide rail and a second slider that are slidably connected, the second guide rail extends along the adjustment direction of the heating assembly, one of the second guide rail and the second slider is arranged on the heating assembly, and the other of the second guide rail and the second slider is arranged on the bottom plate.

[0023] As an optional solution, the heating assembly includes a first fixing plate, a second fixing plate and a heating element, and the heating element is clamped and fixed between the first fixing plate and the second fixing plate.

[0024] As an optional solution, heat-conducting glue is filled between the first fixing plate, the second fixing plate and the heating element.

[0025] A glass substrate processing device comprises an exposure machine and the drying device as described above, wherein the exposure machine is configured to expose the glass substrate after being dried by the drying device.

[0026] Beneficial effects of the utility model:

[0027] The utility model provides a drying device, which includes a drying chamber, a heating plate and a heating assembly, wherein the heating plate is located in the drying chamber, and the relative position of the heating plate and the bottom plate of the drying chamber is fixed, the heating plate is used to carry a glass substrate coated with a photoresist, the heating assembly is located below the heating plate, the heating assembly is used to heat the heating plate, and the position of the heating assembly relative to the heating plate is adjustable. The drying device provided by the utility model can improve the consistency of the temperature at various positions on the heating plate by adjusting the position of the heating assembly relative to the heating plate when the temperature consistency at various positions on the heating plate is poor, thereby ensuring more uniform removal of the solvent in the photoresist, improving the drying effect, and reducing the cost without replacing a new heating plate.

[0028] The utility model also provides a glass substrate processing device, which reduces the cost and improves the processing effect of the glass substrate by applying the drying device. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 This is a structural schematic diagram of a heating plate provided in Embodiment 1 of the present utility model drying a glass substrate;

[0030] Figure 2 It is a structural cross-sectional view of a drying device provided in Embodiment 1 of the present utility model;

[0031] Figure 3 It is a top view of the heating plate provided in the first embodiment of the utility model;

[0032] Figure 4 It is a structural cross-sectional view of a drying device provided in Embodiment 2 of the present utility model;

[0033] Figure 5 It is a structural sectional view of a drying device provided in Embodiment 3 of the present utility model.

[0034] In the figure:

[0035] 20. Glass substrate; 30. Photoresist;

[0036] 1. Bottom plate; 11. Threaded hole; 2. Heating plate; 21. Heating partition; 3. Heating assembly; 31. First fixing plate; 32. Second fixing plate; 33. Heating element; 34. Long hole; 4. Adjustment guide assembly; 41. First guide rail; 42. First slider; 43. Second guide rail; 44. Second slider; 5. Fastening bolts; 6. Connecting column. DETAILED DESCRIPTION

[0037] In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved more clearly, the technical solutions of the present invention are further explained below with reference to the accompanying drawings and through specific implementation methods.

[0038] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0040] In the description of this embodiment, the terms "upper", "lower", "left", "right" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0041] Embodiment 1

[0042] In the prior art, the drying device generally includes a heating element and a heating plate, wherein the heating element is fixedly disposed on the heating plate, and the heating element heats the heating plate, and then a glass substrate coated with a photoresist is placed on the heating plate, thereby achieving a drying operation on the glass substrate through the heating plate. After the heating plate is used for a long time, the heating plate is prone to slight deformation and other problems, so that the heating element at the current fixed position cannot uniformly heat the entire glass substrate, thereby failing to ensure the consistency of drying of the photoresist at various positions on the glass substrate, and a new heating plate needs to be replaced to dry the glass substrate, which greatly increases the cost.

[0043] Figure 1 This is a schematic diagram of the structure of the heating plate 2 provided in the first embodiment of the utility model drying the glass substrate 20; Figure 2 It is a structural cross-sectional view of a drying device provided in Embodiment 1 of the present utility model; Figure 3 1 is a top view of the heating plate 2 provided in the first embodiment of the present utility model. Figure 1 to Figure 3 As shown, the present embodiment provides a drying device, which includes a drying chamber, a heating plate 2 and a heating assembly 3, wherein the heating plate 2 is located in the drying chamber, and the relative position of the heating plate 2 and the bottom plate 1 of the drying chamber is fixed, the heating plate 2 is used to carry the glass substrate 20 coated with the photoresist 30, the heating assembly 3 is located below the heating plate 2, the heating assembly 3 is used to heat the heating plate 2, and the position of the heating assembly 3 relative to the heating plate 2 is adjustable. In the drying device provided in the present embodiment, when the temperature consistency of each position of the heating plate 2 is poor, the position of the heating assembly 3 relative to the heating plate 2 can be adjusted to improve the temperature consistency of each position on the heating plate 2, thereby ensuring more uniform removal of the solvent in the photoresist 30, improving the drying effect, and reducing the cost without replacing a new heating plate 2.

[0044] It should be noted that after the photoresist 30 is coated on the glass substrate 20, the photoresist 30 contains a lot of solvent. When the glass substrate 20 coated with the photoresist 30 is placed on the heating plate 2 for drying, most of the solvent in the photoresist 30 can be evaporated, and the thickness of the photoresist 30 will become thinner, and the adhesion between the photoresist 30 and the glass substrate 20 is greatly enhanced. The drying device of this embodiment can evenly remove the solvent in the photoresist 30, and also ensure the consistency of the thickness of each position of the photoresist 30, further improving the processing quality.

[0045] In this embodiment, if Figure 2As shown, the drying device also includes an adjustment guide assembly 4, which includes a first guide rail 41 and a first slider 42 that are slidably connected, wherein the first guide rail 41 extends along the adjustment direction of the heating assembly 3, one of the first guide rail 41 and the first slider 42 is arranged on the heating assembly 3, and the other of the first guide rail 41 and the first slider 42 is arranged on the heating plate 2. Optionally, in this embodiment, the first guide rail 41 is arranged on the heating plate 2, and the first slider 42 is arranged on the heating assembly 3. When the position of the heating assembly 3 relative to the heating plate 2 needs to be adjusted, the first slider 42 drives the heating assembly 3 to move along the first guide rail 41, thereby providing a moving guide for the position adjustment of the heating assembly 3. Optionally, in this embodiment, the position of the heating assembly 3 along the length direction of the heating plate 2 is adjustable. Exemplarily, the two ends of the heating plate 2 along its length direction are the first end and the second end, respectively. When the temperature of the first end of the heating plate 2 is much greater than the temperature of the second end, the heating assembly 3 is fine-tuned and moved along the first guide rail 41 toward the second end to ensure that the temperatures of the first end and the second end are substantially the same. Optionally, in other embodiments, the first guide rail 41 may be disposed on the heating assembly 3 , and the first slider 42 may be disposed on the heating plate 2 .

[0046] Optionally, in this embodiment, if Figure 2 As shown, the adjustment guide assembly 4 further includes a second guide rail 43 and a second slider 44 which are slidably connected, wherein the second guide rail 43 extends along the adjustment direction of the heating assembly 3, the second guide rail 43 is arranged on the bottom plate 1, and the second slider 44 is arranged on the heating assembly 3. By arranging the second guide rail 43 and the second slider 44 which are slidably connected, it is more convenient to smoothly adjust the position of the heating assembly 3 relative to the heating plate 2 and the bottom plate 1. Optionally, in other embodiments, the second guide rail 43 may also be arranged on the heating assembly 3, and the second slider 44 may be arranged on the bottom plate 1.

[0047] Optionally, in this embodiment, the drying device further includes a driving component (not shown in the figure) and a plurality of temperature detection components (not shown in the figure), wherein the plurality of temperature detection components are respectively used to detect the temperature at a plurality of positions of the heating plate 2, the driving component is communicatively connected with the plurality of temperature detection components, and the driving component can drive the heating component 3 to move relative to the heating plate 2 according to the detection value of each temperature detection component, thereby realizing automatic adjustment of the position of the heating component 3. Specifically, the temperature detection component can be a temperature sensor, the driving component can be a linear motor, the output end of the linear motor is transmission-connected with the heating component 3, the drying device further includes a control system, the plurality of temperature sensors are communicatively connected with the linear motor through the control system, the plurality of temperature sensors transmit the detected temperature values ​​to the control system in real time, the control system compares the temperature at each position of the heating plate 2, thereby controlling the linear motor to drive the heating component 3 to move along the first guide rail 41 and the second guide rail 43 toward a position with a lower temperature on the heating plate 2.

[0048] Optionally, in the present embodiment, the heating plate 2 is divided into a plurality of heating zones 21, each heating zone 21 is provided with a corresponding heating component 3 to heat the heating zone 21, and each heating zone 21 is provided with a plurality of temperature sensors at intervals to detect the temperature at a plurality of positions on the heating zone 21, so that the heating component 3 on each heating zone 21 can be adjusted in position according to the temperature conditions at different positions on the heating zone 21, thereby ensuring the consistency of the temperature at various positions on the entire heating plate 2. Optionally, in the present embodiment, the heating plate 2 is evenly divided into eight heating zones 21, and in other embodiments, the number of heating zones 21 can also be adjusted according to specific needs.

[0049] Optionally, in other embodiments, the operator can also manually adjust the position of the heating assembly 3 by observing the detection values ​​of each temperature sensor. In addition, when the position of the heating assembly 3 needs to be manually adjusted, the drying device further includes a locking bolt, which is used to lock the first guide rail 41 and the first slider 42. Specifically, a through hole is provided on the first slider 42, and a plurality of threaded fixing holes are provided on the first guide rail 41 at intervals along its extension direction. When the position of the heating assembly 3 needs to be fixed, the locking bolt passes through the through hole and is threadedly connected with the threaded fixing hole at the corresponding position on the first guide rail 41, thereby locking the first slider 42 and the first guide rail 41. When the position of the heating assembly 3 needs to be adjusted, the locking bolt can be loosened at this time, and the locking bolt can be taken out to unlock the first slider 42 and the first guide rail 41.

[0050] Optionally, in this embodiment, if Figure 2As shown, the heating assembly 3 includes a first fixing plate 31, a second fixing plate 32 and a heating element 33, wherein the heating element 33 is clamped and fixed between the first fixing plate 31 and the second fixing plate 32, thereby achieving the fixation of the heating element 33. Specifically, the heating element 33 can be in the form of a heating wire, and the first fixing plate 31, the second fixing plate 32 and the heating plate 2 are all made of a material with good thermal conductivity. In addition, in this embodiment, the first slider 42 is arranged on the upper end surface of the first fixing plate 31, and the second slider 44 is arranged on the lower end surface of the second fixing plate 32.

[0051] Optionally, in this embodiment, thermally conductive adhesive is filled between the first fixing plate 31, the second fixing plate 32 and the heating element 33, which further improves the heating effect of the heating assembly 3 on the heating plate 2. Specifically, the thermally conductive adhesive can be thermally conductive silica gel.

[0052] The present embodiment further provides a glass substrate processing device, which includes an exposure machine and the above-mentioned drying device, and the exposure machine is used to expose the glass substrate 20 dried by the drying device. The glass substrate processing device provided in the present embodiment reduces the cost and improves the processing effect of the glass substrate 20 by applying the above-mentioned drying device.

[0053] Example 2

[0054] The drying device provided in this embodiment is basically the same as that in the first embodiment. The difference between the drying device provided in this embodiment and that in the first embodiment is that:

[0055] Figure 4 This is a cross-sectional view of the structure of the drying device provided in the second embodiment of the present utility model. Figure 4 As shown, one of the first guide rail 41 and the first slider 42 is arranged on the heating assembly 3, and the other of the first guide rail 41 and the first slider 42 is arranged on the bottom plate 1. The drying device also includes a fastening bolt 5. The bottom plate 1 is provided with a threaded hole 11, and the heating assembly 3 is provided with a long through hole 34. The long through hole 34 extends along the extension direction of the first guide rail 41. The fastening bolt 5 is threadedly connected with the threaded hole 11, and the screw of the fastening bolt 5 passes through the long through hole 34 and abuts against the heating plate 2. By providing the fastening bolt 5, a stable support effect on the heating plate 2 is achieved. In addition, the above-mentioned arrangement avoids interference and resistance caused by the fastening bolt 5 and the heating plate 2 to the position movement of the heating assembly 3.

[0056] Specifically, in this embodiment, the first guide rail 41 is disposed on the bottom plate 1, the first slider 42 is disposed on the lower end surface of the second fixing plate 32, and the long hole 34 is penetrated through the first fixing plate 31, the second fixing plate 32 and the heating element 33. In other embodiments, the first guide rail 41 may also be disposed on the lower end surface of the second fixing plate 32, and the first slider 42 may be disposed on the bottom plate 1.

[0057] Optionally, in this embodiment, the gap between the heating plate 2 and the first fixed plate 31 along the vertical direction is greater than 0 mm and less than or equal to 1 mm, which not only avoids the resistance interference caused by the heating plate 2 on the position adjustment of the heating component 3, but also ensures the heating effect of the heating component 3 on the heating plate 2.

[0058] Embodiment 3

[0059] The drying device provided in this embodiment is basically the same as that in the first embodiment. The difference between the drying device provided in this embodiment and that in the first embodiment is that:

[0060] Figure 5 This is a cross-sectional view of the structure of the drying device provided in the third embodiment of the present utility model. Figure 5 As shown, one of the first guide rail 41 and the first slider 42 is arranged on the heating assembly 3, and the other of the first guide rail 41 and the first slider 42 is arranged on the bottom plate 1. The drying device also includes a connecting column 6. A long hole 34 is provided on the heating assembly 3, and the long hole 34 extends along the extension direction of the first guide rail 41. The first end of the connecting column 6 is fixedly connected to the bottom plate 1, and the second end of the connecting column 6 is fixedly connected to the heating plate 2 after passing through the long hole 34. By setting the connecting column 6, a fixed connection between the heating plate 2 and the bottom plate 1 is achieved. In addition, the above arrangement avoids interference and resistance caused by the connecting column 6 to the position movement of the heating assembly 3.

[0061] Specifically, in this embodiment, the first guide rail 41 is disposed on the bottom plate 1, the first slider 42 is disposed on the lower end surface of the second fixing plate 32, and the long hole 34 is penetrated through the first fixing plate 31, the second fixing plate 32 and the heating element 33. In other embodiments, the first guide rail 41 may also be disposed on the lower end surface of the second fixing plate 32, and the first slider 42 may be disposed on the bottom plate 1.

[0062] Optionally, in this embodiment, the gap between the heating plate 2 and the first fixed plate 31 in the vertical direction is greater than 0 mm and less than or equal to 1 mm, which not only avoids the resistance interference caused by the heating plate 2 on the position adjustment of the heating component 3, but also ensures the heating effect of the heating component 3 on the heating plate 2.

[0063] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. A drying device, characterized in that: include: Drying chamber; a heating plate (2), the heating plate (2) being located in the drying chamber, and the relative position of the heating plate (2) and the bottom plate (1) of the drying chamber being fixed, the heating plate (2) being used for carrying a glass substrate (20) coated with a photoresist (30); as well as A heating component (3), the heating component (3) is located below the heating plate (2), the heating component (3) is configured to heat the heating plate (2), and the position of the heating component (3) relative to the heating plate (2) is adjustable.

2. The drying device according to claim 1, characterized in that: The drying device further comprises an adjustment guide assembly (4), wherein the adjustment guide assembly (4) comprises a first guide rail (41) and a first slider (42) which are slidably connected, wherein the first guide rail (41) extends along the adjustment direction of the heating assembly (3), and one of the first guide rail (41) and the first slider (42) is arranged on the heating assembly (3), and the other of the first guide rail (41) and the first slider (42) is arranged on the bottom plate (1) or the heating plate (2).

3. The drying device according to claim 2, characterized in that: The drying device comprises: A plurality of temperature detection components, each of which is configured to detect the temperature at a plurality of positions of the heating plate (2); and A driving component is communicatively connected to the plurality of temperature detection components, and the driving component is configured to drive the heating component (3) to move relative to the heating plate (2).

4. The drying device according to claim 2, characterized in that: The drying device also includes: A locking bolt is configured to lock the first guide rail (41) and the first slider (42).

5. The drying device according to any one of claims 2 to 4, characterized in that: The other of the first guide rail (41) and the first sliding block (42) is arranged on the bottom plate (1), and the drying device further comprises a fastening bolt (5); The bottom plate (1) is provided with a threaded hole (11), the heating component (3) is provided with a through hole (34), the through hole (34) extends along the extension direction of the first guide rail (41), the fastening bolt (5) is threadedly connected to the threaded hole (11), and the screw rod of the fastening bolt (5) passes through the through hole (34) and is abutted against the heating plate (2).

6. The drying device according to any one of claims 2 to 4, characterized in that: The other of the first guide rail (41) and the first sliding block (42) is arranged on the bottom plate (1), and the drying device further comprises a connecting column (6); The heating component (3) is provided with a long through hole (34), the long through hole (34) extending along the extension direction of the first guide rail (41), the first end of the connecting column (6) is fixedly connected to the bottom plate (1), and the second end of the connecting column (6) passes through the long through hole (34) and is fixedly connected to the heating plate (2).

7. The drying device according to any one of claims 2 to 4, characterized in that: The other of the first guide rail (41) and the first slider (42) is arranged on the heating plate (2); The adjustment guide assembly (4) further comprises a second guide rail (43) and a second slider (44) which are slidably connected, wherein the second guide rail (43) extends along the adjustment direction of the heating assembly (3), one of the second guide rail (43) and the second slider (44) is arranged on the heating assembly (3), and the other of the second guide rail (43) and the second slider (44) is arranged on the bottom plate (1).

8. The drying device according to any one of claims 1 to 4, characterized in that: The heating assembly (3) comprises a first fixing plate (31), a second fixing plate (32) and a heating element (33); the heating element (33) is clamped and fixed between the first fixing plate (31) and the second fixing plate (32).

9. The drying device according to claim 8, characterized in that: Heat-conducting glue is filled between the first fixing plate (31), the second fixing plate (32) and the heating element (33).

10. A glass substrate processing device, characterized in that: It comprises an exposure machine and the drying device according to any one of claims 1 to 9, wherein the exposure machine is configured to expose the glass substrate (20) after being dried by the drying device.

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