Polycrystalline silicon reduction furnace nozzle

Abstract

The utility model discloses a polycrystalline silicon reduction furnace nozzle, which comprises a nozzle (1) arranged at the top and a connecting part (2) arranged at the bottom, the inner wall of the nozzle (1) is frustum-shaped, and the diameter of the inner wall at the top of the nozzle (1) is smaller than that of the inner wall at the bottom of the nozzle (1); the top and the bottom of the nozzle (1) are connected through a connecting channel (3), and the diameter of the connecting channel (3) is smaller than that of the inner wall of the top of the nozzle (1). An existing spiral type nozzle and an existing straight hole type nozzle are optimized, a channel which is gradually shrunk is formed in the nozzle, and a conical outlet is formed. When gas passes through the nozzle, the flow speed is increased along with the reduction of the channel, so that high-speed gas flow is formed at the outlet of the nozzle. The frustum-shaped nozzle can provide large flow and high flow speed.

Description

Technical Field

[0001] The utility model relates to the technical field of polysilicon reduction furnaces, in particular to a polysilicon reduction furnace nozzle. Background Art

[0002] The reduction furnace nozzles have different apertures, shapes, sizes and structures, and the ejected materials have different concentrations, which have a significant impact on the growth of silicon rods in the reduction furnace. Secondly, the arrangement and number of nozzles have a significant impact on the gas circulation and gas field stability in the reduction furnace.

[0003] At present, straight hole and spiral nozzles are widely used in reduction furnaces. However, the height of the material sprayed by the straight hole nozzle is insufficient, and the large head on the top of the silicon rod is easy to contact the molten silicon. Utility Model Content

[0004] The purpose of the utility model is to provide a polysilicon reduction furnace nozzle to solve the above problems, optimize the existing spiral nozzle and straight hole nozzle, so that when the gas passes through the nozzle, the flow rate increases as the channel shrinks, thereby forming a high-speed airflow at the nozzle outlet. The cone-shaped nozzle can provide a larger flow rate and a higher flow rate.

[0005] The technical solution of the utility model is as follows:

[0006] A polysilicon reduction furnace nozzle includes a nozzle arranged at the top and a connecting portion at the bottom, wherein the inner wall of the nozzle is in a frustum shape, and the diameter of the inner wall at the top of the nozzle is smaller than the diameter of the inner wall at the bottom of the nozzle; the top and bottom of the nozzle are connected by a connecting channel, and the diameter of the connecting channel is smaller than the diameter of the inner wall at the top of the nozzle. The existing spiral nozzle and straight hole nozzle are optimized, and a gradually shrinking channel is provided inside to form a conical outlet; when the gas passes through the nozzle, the flow rate increases as the channel shrinks, thereby forming a high-speed airflow at the nozzle outlet. The frustum nozzle can provide a larger flow rate and a higher flow rate.

[0007] Furthermore, the connecting portion is arranged below the nozzle, and the connecting portion is fixedly connected to the nozzle.

[0008] Furthermore, the outer surface of the connecting portion is provided with a serrated connecting structure.

[0009] Furthermore, the nozzle is a cylindrical structure.

[0010] Furthermore, a clamping platform is provided on the outer surface of the nozzle and at the connection between the nozzle and the connecting part.

[0011] Furthermore, the positioning of the card table is the top and bottom outer walls inside the nozzle.

[0012] Furthermore, the structure and size of the inner wall diameter of the connecting portion are the same as the structure and size of the inner wall diameter of the nozzle bottom.

[0013] Furthermore, the outer wall diameter of the nozzle is larger than the outer wall diameter of the connecting portion.

[0014] Furthermore, the height of the nozzle is greater than the height of the connecting portion.

[0015] Furthermore, the height of the top of the nozzle is the same as the height of the bottom of the nozzle.

[0016] Compared with the existing technology, the beneficial effects of the utility model are:

[0017] A polysilicon reduction furnace nozzle optimizes the existing spiral nozzle and straight hole nozzle, with a gradually shrinking channel inside to form a conical outlet; when the gas passes through the nozzle, the flow rate increases as the channel shrinks, thereby forming a high-speed airflow at the nozzle outlet. The frustum-shaped nozzle can provide a larger flow rate and a higher flow rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 The present invention is a schematic diagram of the internal structure of a nozzle of a polysilicon reduction furnace.

[0019] Figure 2 This is a schematic diagram of the front structure of a nozzle of a polysilicon reduction furnace.

[0020] Figure 3 The figure is a schematic diagram of the nozzle top structure of a polysilicon reduction furnace nozzle.

[0021] Figure numerals: 1-nozzle, 2-connecting part, 3-connecting channel, 4-card stage. DETAILED DESCRIPTION

[0022] It should be noted that relational terms such as "first" and "second" are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0023] The features and performance of the present invention are further described in detail below in conjunction with the embodiments.

[0024] See also Figure 1-3 A polysilicon reduction furnace nozzle comprises a nozzle 1 arranged at the top and a connecting portion 2 at the bottom, wherein the inner wall of the nozzle 1 is in a frustum shape, and the diameter of the inner wall at the top of the nozzle 1 is smaller than the diameter of the inner wall at the bottom of the nozzle 1; the top and bottom of the nozzle 1 are connected by a connecting channel 3, and the diameter of the connecting channel 3 is smaller than the diameter of the inner wall at the top of the nozzle 1. The existing spiral nozzle and straight hole nozzle are optimized, with a gradually shrinking channel inside to form a conical outlet; when the gas passes through the nozzle, the flow rate increases as the channel shrinks, thereby forming a high-speed airflow at the nozzle outlet. The frustum nozzle can provide a larger flow rate and a higher flow rate.

[0025] The connecting portion 2 is disposed below the nozzle, and the connecting portion 2 is fixedly connected to the nozzle 1 .

[0026] The outer surface of the connecting portion 2 is provided with a serrated connecting structure for easy connection.

[0027] The nozzle 1 is a cylindrical structure.

[0028] A clamping platform 4 is provided on the outer surface of the nozzle 1 and at the connection between the nozzle 1 and the connecting part 2 .

[0029] The positioning position of the card table 4 is the top and bottom outer wall of the nozzle 1.

[0030] The structure and size of the inner wall diameter of the connecting portion 2 are the same as the structure and size of the inner wall diameter of the bottom of the nozzle 1 .

[0031] The outer wall diameter of the nozzle 1 is larger than the outer wall diameter of the connecting portion 2 .

[0032] The height of the nozzle 1 is greater than the height of the connecting portion 2 .

[0033] The height of the top of the nozzle 1 is the same as the height of the bottom of the nozzle 1 .

[0034] The specific structural dimensions of the nozzle 1 are as follows: Figure 1 , Figure 2 and Figure 3 As shown, according to Figure 1 , Figure 2 and Figure 3 Design and manufacture according to specifications and dimensions, without changing the original nozzle layout, experiment with new nozzle structure, compare the growth of silicon rods, achieve the best gas circulation in the furnace, and the most dense and uniform growth of silicon rods.

[0035] How it works

[0036] The existing spiral nozzle and straight hole nozzle are optimized to have a gradually shrinking channel inside to form a conical outlet; when the gas passes through the nozzle, the flow rate increases as the channel shrinks, thus forming a high-speed airflow at the nozzle outlet. The frustum nozzle can provide a larger flow rate and a higher flow rate.

[0037] according to Figure 1 , Figure 2 and Figure 3 Design and manufacture according to specifications and dimensions, without changing the original nozzle layout, experiment with new nozzle structure, compare the growth of silicon rods, achieve the best gas circulation in the furnace, and the most dense and uniform growth of silicon rods.

[0038] The above-mentioned embodiments only express the specific implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the protection scope of the present application. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the technical solution concept of the present application, and these all belong to the protection scope of the present application.

Claims

1. A polysilicon reduction furnace nozzle, characterized in that: The invention comprises a nozzle (1) arranged at the top and a connecting portion (2) at the bottom, wherein the inner wall of the nozzle (1) is in a frustum shape, and the diameter of the inner wall at the top of the nozzle (1) is smaller than the diameter of the inner wall at the bottom of the nozzle (1); the top and bottom of the nozzle (1) are connected via a connecting channel (3), and the diameter of the connecting channel (3) is smaller than the diameter of the inner wall at the top of the nozzle.

2. A polysilicon reduction furnace nozzle according to claim 1, characterized in that: The connecting portion (2) is arranged below the nozzle (1), and the connecting portion (2) is fixedly connected to the nozzle (1).

3. A polysilicon reduction furnace nozzle according to claim 1 or 2, characterized in that: The outer surface of the connecting portion (2) is provided with a serrated connecting structure.

4. The polysilicon reduction furnace nozzle according to claim 1, characterized in that: The nozzle (1) is a cylindrical structure.

5. The polysilicon reduction furnace nozzle according to claim 1, characterized in that: A clamping platform (4) is provided on the outer surface of the nozzle (1) and at the connection point between the nozzle (1) and the connecting part (2).

6. The polysilicon reduction furnace nozzle according to claim 5, characterized in that: The card platform (4) is arranged at the top and bottom outer walls of the nozzle (1).

7. The polysilicon reduction furnace nozzle according to claim 1, characterized in that: The structure and size of the inner wall diameter of the connecting portion (2) are the same as the structure and size of the inner wall diameter of the bottom of the nozzle (1).

8. The polysilicon reduction furnace nozzle according to claim 1, characterized in that: The outer wall diameter of the nozzle (1) is greater than the outer wall diameter of the connecting portion (2).

9. The polysilicon reduction furnace nozzle according to claim 1, characterized in that: The height of the nozzle (1) is greater than the height of the connecting portion (2).

10. The polysilicon reduction furnace nozzle according to claim 1, characterized in that: The height of the top of the nozzle (1) is the same as the height of the bottom of the nozzle (1).

Images