Pressure sensor overload protection structure

Abstract

The utility model relates to the technical field of sensors, in particular to a pressure sensor overload protection structure which comprises a sintering seat, a lower substrate is fixedly connected to the outer wall of the top end of the sintering seat, a flat diaphragm is arranged on the outer wall of the top end of the lower substrate, and an upper substrate is arranged on the outer wall of the top end of the flat diaphragm. A pressure sensing corrugated diaphragm is arranged on the outer wall of the top end of the upper substrate, a pressing ring is arranged on the outer wall of the top end of the pressure sensing corrugated diaphragm, a mounting groove is formed in the outer wall of the top end of the sintering seat, an insulating cover is mounted on the inner wall of the mounting groove, and a chip is mounted on the inner wall of the insulating cover; when pressure reaches overload pressure, the internal central diaphragm is completely attached, the external pressure-sensitive corrugated diaphragm is not temporarily attached to the upper substrate profiling body, at the moment, when the pressure is continuously increased, the pressure-sensitive corrugated diaphragm is also attached to the profiling body, and therefore overload protection of the sensor under high pressure is achieved through two times of attachment of the double diaphragms. The overload protection of the pressure sensor can be realized, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of sensors, in particular to an overload protection structure for a pressure sensor. Background Art

[0002] A pressure sensor is a mechanical property testing device that can sense the pressure information of the measured object and convert the sensed pressure information into an electrical signal or information output in the required form according to a certain rule to meet the requirements of information transmission, processing, storage, display, recording and control. Pressure sensors are widely used in various industrial automatic control environments, involving water conservancy and hydropower, railway transportation, intelligent buildings, production automatic control, aerospace, military industry, petrochemical, oil wells, electric power, ships, machine tools, pipelines and many other industries.

[0003] In the prior art, when using a pressure sensor, if the sensor is subjected to the maximum load pressure for a long time, or the overload protection of the pressure sensor itself cannot always ensure that the load applied to the pressure sensor changes within the standard range, the pressure sensor may be damaged and the normal operation of the pressure sensor may be affected. Therefore, a pressure sensor overload protection structure is needed to meet people's needs. Utility Model Content

[0004] The purpose of the utility model is to provide a pressure sensor overload protection structure to solve the problems raised in the above background technology.

[0005] The technical solution of the utility model is: a pressure sensor overload protection structure, including a sintering seat, the top outer wall of the sintering seat is fixedly connected with a lower substrate, the top outer wall of the lower substrate is provided with a flat diaphragm, the top outer wall of the flat diaphragm is provided with an upper substrate, the top outer wall of the upper substrate is provided with a pressure-sensitive corrugated diaphragm, the top outer wall of the pressure-sensitive corrugated diaphragm is provided with a pressure ring, the top outer wall of the sintering seat is provided with a mounting groove, the inner wall of the mounting groove is provided with an insulating cover, the inner wall of the insulating cover is provided with a chip, and the bottom inner wall of the sintering seat is provided with a plurality of adapter terminals.

[0006] Preferably, a pin groove 1 is formed on an outer wall of one side of the upper substrate, a small pin is installed on the inner wall of the pin groove 1, and a pin groove 2 is formed on an inner wall of one side of the bottom end of the sintering seat, a large pin is installed on the inner wall of the pin groove 2.

[0007] Preferably, a plurality of eccentric holes are formed on the top outer wall of the lower base plate, and a central through hole is formed on the top outer wall of the upper base plate.

[0008] Preferably, the top outer wall of the lower substrate is provided with a curved spherical surface, and the insulating cover is made of ceramic material.

[0009] The utility model provides a pressure sensor overload protection structure through improvement, which has the following improvements and advantages compared with the prior art:

[0010] The utility model is provided with a pressure ring, a flat diaphragm, a chip, an upper substrate, a lower substrate and an insulating cover. Excessive pressure is offset by the material strength of structures such as the flat diaphragm and the lower substrate. When the pressure increases, the flat diaphragm is deformed and temporarily not fitted. When the pressure continues to increase and exceeds the overload pressure of the chip, the flat diaphragm fits the contour, and the pressure cannot be transmitted to the chip through the silicone oil in the second cavity. The sensor continuously outputs at the maximum value of the overload pressure, and the pressure is restored to normal measurement after it is reduced to within the measuring range. Overload protection of the pressure sensor can be achieved, and the sensor is prevented from being subjected to the pressure of the maximum load for a long time, or the overload protection of the pressure sensor itself cannot always ensure that the load applied to the pressure sensor changes within the standard measuring range, the pressure sensor is damaged, and the normal operation of the pressure sensor is affected, thereby improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The utility model is further explained below in conjunction with the accompanying drawings and embodiments:

[0012] Figure 1 It is a schematic cross-sectional view of the overall structure of the utility model;

[0013] Figure 2 The utility model Figure 1 A schematic diagram of the enlarged structure in the middle;

[0014] Figure 3 It is an exploded schematic diagram of the upper base plate connection structure of the utility model.

[0015] Description of reference numerals:

[0016] 1. Pressure ring; 2. Pressure-sensitive corrugated diaphragm; 3. Flat diaphragm; 4. Chip; 5. Small pin; 6. Upper substrate; 7. Lower substrate; 8. Eccentric hole; 9. Insulation cover; 10. Sintering seat; 11. Transfer terminal; 12. Large pin. DETAILED DESCRIPTION

[0017] The utility model is described in detail below, and the technical solutions in the embodiments of the utility model are clearly and completely described. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] The utility model provides a pressure sensor overload protection structure through improvement. The technical solution of the utility model is:

[0019] like Figure 1-Figure 3 As shown, a pressure sensor overload protection structure includes a sintering seat 10, the top outer wall of the sintering seat 10 is fixedly connected to the lower substrate 7, the top outer wall of the lower substrate 7 is provided with a flat diaphragm 3, the top outer wall of the flat diaphragm 3 is provided with an upper substrate 6, the top outer wall of the upper substrate 6 is provided with a pressure-sensitive corrugated diaphragm 2, the top outer wall of the pressure-sensitive corrugated diaphragm 2 is provided with a pressure ring 1, the top outer wall of the sintering seat 10 is provided with a mounting groove, the inner wall of the mounting groove is provided with an insulating cover 9, the inner wall of the insulating cover 9 is provided with a chip 4, and the bottom inner wall of the sintering seat 10 is provided with a plurality of adapter terminals 11.

[0020] Furthermore, a pin groove 1 is opened on the outer wall of one side of the upper base plate 6, and a small pin 5 is installed on the inner wall of the pin groove 1. A pin groove 2 is opened on the inner wall of one side of the bottom end of the sintering seat 10, and a large pin 12 is installed on the inner wall of the pin groove 2. The small pin 5 and the large pin 12 are used to seal the oil filling hole.

[0021] Furthermore, a plurality of eccentric holes 8 are provided on the top outer wall of the lower substrate 7, a central through hole is provided on the top outer wall of the upper substrate 6, a curved spherical surface is provided on the top outer wall of the lower substrate 7, the insulating cover 9 is made of ceramic material, the eccentric hole 8 is a channel for pressure transmission using silicone oil, and the pressure-sensitive corrugated diaphragm 2 is punched out by the flat diaphragm 3 according to the contoured body of the upper substrate 6. When the pressure reaches the overload pressure, the internal center diaphragm is completely fitted, and the external pressure-sensitive corrugated diaphragm 2 is not yet fitted with the contoured body of the upper substrate 6. At this time, when the pressure continues to increase, the pressure-sensitive corrugated diaphragm 2 is also fitted with the contoured body, thereby utilizing the double fitting of the double diaphragms to realize overload protection of the sensor under high pressure. The edge of the lower substrate 7 has multiple eccentric holes 8 to improve the fluidity of the silicone oil to ensure that the diaphragm can rebound normally, avoid contact between the center of the diaphragm and the hole, and reduce stress concentration.

[0022] Working principle: The structure is specially used for overload pressure protection of small-range pressure sensors. The flat diaphragm 3 divides the interior into two independent closed chambers. Both chambers are filled with silicone oil. The pressure acts on the pressure-sensitive corrugated diaphragm 2. The silicone oil in the first chamber is transmitted to the flat diaphragm 3 through the central through hole of the upper substrate 6, causing the flat diaphragm 3 to deform. The silicone oil transmits force to the pressure chip 4 through the eccentric hole 8 on the lower substrate 7. The overload pressure protection structure mainly utilizes the fit between the maximum deflection of the center of the flat diaphragm 3 and the upper spherical surface of the lower substrate 7 (diaphragm deformation profiling), thereby limiting the pressure chip 4 from being subjected to pressure exceeding its maximum The overload pressure is maintained, and the excess pressure is offset by the material strength of the flat diaphragm 3, the lower substrate 7 and other structures. When the pressure increases, the flat diaphragm 3 is deformed and temporarily not fitted. When the pressure continues to increase and exceeds the overload pressure of the chip 4, the flat diaphragm 3 fits the contour, and the pressure cannot be transmitted to the chip 4 through the silicone oil in the second cavity. The sensor continues to output at the maximum value of the overload pressure. After the pressure decreases to within the range, it recovers and can be measured normally. The eccentric hole 8 on the lower substrate 7 is designed to avoid a large stress concentration when the maximum deformation area in the center of the flat diaphragm 3 contacts the center hole.

[0023] The technical means disclosed in the utility model are not limited to the technical means disclosed in the above technical means, but also include technical solutions composed of equivalent replacement of the above technical features. Matters not covered in the utility model belong to the common knowledge of those skilled in the art.

Claims

1. A pressure sensor overload protection structure, comprising a sintered seat (10), characterized in that: The top outer wall of the sintering seat (10) is fixedly connected to a lower substrate (7), the top outer wall of the lower substrate (7) is provided with a flat diaphragm (3), the top outer wall of the flat diaphragm (3) is provided with an upper substrate (6), the top outer wall of the upper substrate (6) is provided with a pressure-sensitive corrugated diaphragm (2), the top outer wall of the pressure-sensitive corrugated diaphragm (2) is provided with a pressure ring (1), the top outer wall of the sintering seat (10) is provided with a mounting groove, the inner wall of the mounting groove is provided with an insulating cover (9), the inner wall of the insulating cover (9) is provided with a chip (4), and the bottom inner wall of the sintering seat (10) is provided with a plurality of transfer terminals (11).

2. The pressure sensor overload protection structure according to claim 1, characterized in that: A pin groove 1 is formed on an outer wall of one side of the upper base plate (6), and a small pin (5) is installed on the inner wall of the pin groove 1. A pin groove 2 is formed on an inner wall of one side of the bottom end of the sintering seat (10), and a large pin (12) is installed on the inner wall of the pin groove 2.

3. The pressure sensor overload protection structure according to claim 1, characterized in that: A plurality of eccentric holes (8) are provided on the top outer wall of the lower base plate (7), and a central through hole is provided on the top outer wall of the upper base plate (6).

4. The pressure sensor overload protection structure according to claim 1, characterized in that: The top outer wall of the lower substrate (7) is provided with a curved spherical surface, and the insulating cover (9) is made of ceramic material.

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