Film box frame

Abstract

The utility model relates to a film magazine frame, which comprises a hollow rotating frame; a plurality of hanging racks are distributed in the circumferential direction of the rotating rack; the hanging frame comprises a rotating shaft and a hanging piece, the hanging frame is rotationally connected with the rotating frame through the rotating shaft, and the hanging piece is of a plate-shaped structure and is used for hanging a mold with a built-in wafer box; compared with the prior art, the multiple hanging frames are arranged on the rotating frame, the hanging piece rotating shaft on each hanging frame is rotationally connected with the rotating frame, meanwhile, the hanging piece is of a plate-shaped structure, and therefore a wafer box fixing and placing area does not need to be designed on the wafer box frame; the mold can be directly hung on the hanging piece, and the hollow inner space of the rotating frame is used as a placing area, so that the film box frame structure is not limited by the size and the shape of the film box, and the storage of the film boxes with different sizes and specifications is met.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer storage, in particular to a wafer box rack. Background Art

[0002] The wafer will be contaminated during each process, so it needs to be cleaned and dried. The cassette, as the carrier of the wafer, also needs to be cleaned and dried regularly.

[0003] In order to solve the above problems, the Chinese patent application number 202210318213.3 discloses a portable cassette cleaning machine cassette rack, the above disclosed cassette rack comprises a fixed frame main body frame, the inner side of the fixed frame main body frame is provided with a cassette body placement area, the top two sides of the cassette body placement area are provided with cassette body placement tracks, the lower part of the cassette body placement area is provided with a cassette cover placement area, the top two sides of the cassette cover placement area are provided with cassette cover inclined tracks, and one side of the cassette cover placement area is provided with a cassette cover blocking structure. The Chinese patent application number 201220255337.3 discloses a wafer box storage rack, the above disclosed wafer box storage rack comprises a bracket and a foot located below the bracket, a high-efficiency filter is provided above the bracket, three sides of the bracket are surrounded by anti-static soft curtains, a plurality of wafer box fixing grooves are provided in the middle of the bracket, and nylon guide strips are provided in the wafer box fixing grooves.

[0004] The wafer size has grown from the original 1.5 inches to the current 12 inches. Many wafer fabs produce wafers of various sizes at the same time. Wafers of different sizes require cassettes of different sizes, and the shapes of cassettes are also diverse. The cassette rack in the above solution can only hold cassettes of a single size and shape, which means that a cleaning machine with the above cassette rack mechanism can only clean cassettes of a single specification. If a wafer fab needs to clean cassettes of different specifications, it has to purchase equipment of different models, which increases production costs. Utility Model Content

[0005] The utility model aims to overcome the defects in the above-mentioned prior art and provides a film box rack, which is compatible with almost all film boxes of different sizes and shapes on the market. When a wafer factory needs to clean different types of film boxes, it only needs to design a mold corresponding to the film box, without purchasing new equipment, thereby greatly reducing the cost of the wafer factory.

[0006] In order to achieve the above-mentioned purpose of the utility model, the utility model adopts the following technical scheme: a film box rack, including: a rotating frame, the rotating frame is hollow; a hanging rack, and a plurality of hanging racks are distributed along the circumference of the rotating frame; the hanging rack includes a rotating shaft and a hanging member, the hanging rack is rotatably connected to the rotating frame through the rotating shaft, the hanging member is a plate-like structure, and the hanging member is used to hang the mold of the built-in film box.

[0007] The film box rack designed by the utility model utilizes the hanging cooperation between the plate-like hanger and the mold of the built-in film box. When the film box needs to be placed, the plate-like hanger is rotated toward the outside of the rotating frame so that the plate-like hanger is located outside the rotating frame, and then the mold with the built-in film box is hung on the plate-like hanger, and then the hanger is rotated toward the inside of the rotating frame so that the mold is located inside the rotating frame. Therefore, the internal area of ​​the rotating frame can be used as a film box storage area, and there is no need to design a fixed placement area for the film box on the film box rack. This means that the film box rack structure is not limited by the size and shape of the film box, and is compatible with almost all film boxes of different sizes and shapes on the market. When the wafer factory needs to clean different types of film boxes, it only needs to design a mold structure corresponding to the film box, and there is no need to purchase new equipment, thereby greatly reducing the cost of the wafer factory.

[0008] As a preferred solution of the utility model, each hanger is provided with two groups of hangers, and the two groups of hangers are respectively arranged on opposite sides of the rotating shaft.

[0009] As a preferred solution of the utility model, the hanging member includes a plurality of hanging rods arranged along the height direction of the film box frame, and the mold is formed with a hanging part, which is hung on the hanging rods.

[0010] As a preferred solution of the utility model, the hanger further includes an upper plate and a lower plate, and the upper plate and the lower plate are respectively connected to opposite ends of the hanger.

[0011] As a preferred solution of the utility model, the rotating frame includes an upper turntable, a lower turntable and a plurality of support columns, the upper turntable and the lower turntable are connected to opposite ends of the plurality of support columns, and the plurality of support columns are arranged along the circumferential direction of the upper turntable and the lower turntable.

[0012] As a preferred solution of the utility model, both ends of the rotating shaft are rotatably connected to the upper rotating disk and the lower rotating disk respectively, and each hanging bracket is arranged between adjacent supporting columns.

[0013] As a preferred solution of the utility model, the cassette rack further includes a positioning member for limiting the relative position of the hanger and the rotating frame. After the mold of the built-in cassette is hung on the hanger, the positioning member can be used to fix the relative position of the hanger and the rotating frame, thereby ensuring that the hanger can remain stable when the rotating frame rotates at high speed in the cleaning machine to clean the wafers.

[0014] As a preferred solution of the utility model, the positioning member includes a lower positioning member, and the lower positioning member includes a positioning block and a knob plunger. The positioning block in the lower positioning member is arranged on the side of the lower turntable close to the hanger, and the knob plunger in the lower positioning member is suitable for passing through the lower plate and cooperating with the positioning block. When it is necessary to hang the mold, pull out the knob of the knob plunger to retract the front end of the knob plunger from the positioning block. At this time, the hanger and the rotating frame are in an unlocked state, and the rotating hanger is rotated to the outside of the rotating frame. After the mold is hung on the hanger, the hanger is rotated toward the inside of the rotating frame so that the mold is located in the rotating frame, and then the knob of the knob plunger is pressed so that the front end of the knob plunger protrudes and extends into the positioning block. At this time, the relative position of the hanger and the rotating frame is fixed, and the hanger and the rotating frame are in a locked state, thereby ensuring that the hanger can remain stable when the subsequent rotating frame rotates at high speed in the cleaning machine to clean the wafer.

[0015] As a preferred solution of the utility model, the positioning member also includes an upper positioning member, which includes a positioning block and a knob plunger. The positioning block in the upper positioning member is arranged on a side of the upper turntable close to the hanger, and the knob plunger in the upper positioning member is suitable for passing through the upper plate and cooperating with the positioning block.

[0016] As a preferred solution of the utility model, the lower positioning member and the upper positioning member on the same hanger are arranged in a staggered manner. The staggered lower positioning member and the upper positioning member can further improve the rotation stability of the hanger and the rotating frame when they are in a locked state.

[0017] As a preferred solution of the utility model, the hanging part is configured as a hanging groove, and a plurality of hanging grooves are configured along the height direction of the mold. The plurality of hanging grooves along the height direction of the mold are configured to help improve the stability of the mold hanging.

[0018] Compared with the prior art, the beneficial effects of the utility model are:

[0019] 1. By setting a plurality of hangers on the rotating frame, the hangers on each hanger are rotatably connected with the rotating frame under the action of the rotating shaft, and the hangers are plate-shaped structures, so there is no need to design a fixed placement area for the film box on the film box frame, and the mold can be directly hung on the hangers and the hollow inner space of the rotating frame can be used as the placement area, so that the film box frame structure is not limited by the size and shape of the film box, and meets the storage of film boxes of different sizes and specifications;

[0020] 2. Furthermore, by providing a hanging groove matching the hanging rod on the hanging part of the mold, it is convenient to take and place the mold, and then to store the film box. In addition, by providing an upper positioning block on the upper turntable and a lower positioning block on the lower turntable which cooperate with the corresponding upper knob plunger on the upper plate and the lower knob plunger on the lower plate respectively, and at the same time, the upper positioning piece and the lower positioning piece on the same hanger are staggered, so that the hanger is fixed on the rotating frame, ensuring that the hanger can remain stable when the rotating frame rotates at high speed. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of the utility model;

[0022] Figure 2 This is a schematic diagram of the structure of the utility model hanger

[0023] Figure numerals: rotating frame 1, upper turntable 101, supporting column 102, lower turntable 103, hanging frame 2, hanging member 201, hanging rod 2011, supporting rod 2012, rotating shaft 202, upper plate 203, lower plate 204, film box 3, mold 4, hanging part 401, hanging groove 4011, positioning member 5, lower positioning member 501, lower positioning block 5011, lower knob plunger 5012, upper positioning member 502, upper positioning block 5021, upper knob plunger 5022. DETAILED DESCRIPTION

[0024] The embodiments of the utility model are described in detail below with reference to the accompanying drawings.

[0025] like Figure 1-Figure 2 As shown, a film box rack includes: a rotating frame 1, which is hollow; a hanging rack 2, which is distributed along the circumference of the rotating frame 1; the hanging rack 2 includes a rotating shaft 202 and a hanging member 201, the hanging rack 2 is rotatably connected to the rotating frame 1 through the rotating shaft 202, and the hanging member 201 is a plate-like structure, and the hanging member 201 is used to hang the mold 4 of the built-in film box 3.

[0026] Furthermore, the rotating frame 1 is a cylindrical structure, and the interior of the rotating frame 1 is a hollow structure, in which the film box 3 is placed, and a plurality of hangers 2 are arranged along the circumferential direction of the rotating frame 1, so that the plurality of hangers 2 are arranged around the rotating frame 1 to form a cylindrical structure, and at the same time, each hanger 2 is arranged along the height direction of the rotating frame 1, and a plurality of hangers 2 are arranged in the rotating frame 1, and the diameter of the cylindrical structure surrounded by the plurality of hangers 2 is the same as the diameter of the rotating frame 1; the hanger 201 is arranged along the height direction of the rotating frame 1, the rotating shaft 202 is arranged parallel to the height direction of the hanger 201, and the rotating shaft 202 is rotatably connected to the hanger 201, the mold 4 is hung on the hanger 201, and the film box 3 is placed on the mold 4, and the mold 4 can be used to store film boxes 3 of different specifications.

[0027] Each hanger 2 is provided with two groups of hangers 201 , and the two groups of hangers 201 are respectively arranged on two opposite sides of the rotating shaft 202 .

[0028] Furthermore, the hanger 201 includes a plurality of hanger rods 2011 arranged along the height direction of the cassette rack. The hanger 201 is a plate-shaped structure. The plate-shaped hanger 201 can be a flat plate structure with a hollow area formed by connecting a plurality of hanger rods 2011 and a plurality of support rods 2012. Figure 1 and 2As shown, the plate-like hanger 201 is a ladder frame formed by mutually parallel horizontal hanging rods 2011 and mutually parallel vertical support rods 2012. The support rods 2012 are connected to opposite ends of the hanging rods 2011, and the hanging rods 2011 are supported and fixed by the support rods 2012.

[0029] The mold 4 is formed with a hanging portion 401 , and the hanging portion 401 is hung on a hanging rod 2011 ; each group of hangers 201 includes a plurality of hanging rods 2011 arranged along the height direction of the hangers 201 , and the mold 4 is hung on the hanging rods 2011 .

[0030] In addition, the hangers 201 are arranged along the height direction of the hanger 2, and the hangers 201 located on both sides of the rotating shaft 202 are symmetrically arranged. The plurality of hanging rods 2011 are all metal rods. At the same time, the plurality of hanging rods 2011 are arranged horizontally, and the plurality of hanging rods 2011 can be distributed equidistantly or unequally. By hanging the mold 4 on the plurality of hanging rods 2011, the storage of film boxes 3 of different sizes can be met.

[0031] The bracket 2 also includes an upper plate 203 and a lower plate 204, which are respectively connected to the opposite ends of the hanger 201. The upper plate 203 and the lower plate 204 are arranged in parallel, and the structures of the upper plate 203 and the lower plate 204 are the same. The two ends of the support rod 2012 are respectively connected to the upper plate 203 and the lower plate 204.

[0032] The rotating frame 1 includes an upper turntable 101, a lower turntable 103 and a plurality of support columns 102. The upper turntable 101 and the lower turntable 103 are connected to the opposite ends of the plurality of support columns 102. The plurality of support columns 102 are arranged along the circumferential direction of the upper turntable 101 and the lower turntable 103. Furthermore, the upper turntable 101 and the lower turntable 103 are hollow plates with the same structure, and the plurality of support columns 102 are fixedly connected between the upper turntable 101 and the lower turntable 103.

[0033] The two ends of the rotating shaft 202 are rotatably connected to the upper turntable 101 and the lower turntable 103 respectively, and each hanger 2 is arranged between adjacent supporting columns 102. Furthermore, the rotating shaft 202 is rotatably connected between the upper turntable 101 and the lower turntable 103 through a bearing. The rotation of the hanger 2 can be realized through the rotating shaft 202. When it is necessary to place the film box 3, the hanger 2 is rotated toward the outside of the rotating frame 1, and the film box 3 can be directly hung on the hanging rod 2011. Then the hanger 2 is rotated back to its original position, and the film box 3 is rotated into the rotating frame 1. When the film box 3 is to be taken out, the hanger 2 can be rotated to take out the film box 3 just like placing the film box 3, thereby facilitating the taking and placing of the film box 3.

[0034] The film box rack further includes a positioning member 5 for defining the relative position between the hanging rack 2 and the rotating rack 1 . Furthermore, a plurality of positioning members 5 are provided, and the positioning members 5 are arranged along the circumferential direction of the rotating rack 1 .

[0035] Specifically, the positioning member 5 includes a lower positioning member 501, and the lower positioning member 501 includes a lower positioning block 5011 and a lower knob plunger 5012. The lower positioning block 5011 in the lower positioning member 501 is arranged on the side of the lower turntable 103 close to the hanger 2, and the lower knob plunger 5012 in the lower positioning member 501 is suitable for passing through the lower plate 204 and cooperating with the lower positioning block 5011. Further, the lower positioning block 5011 is arranged along the circumferential direction of the lower turntable 103, and the lower positioning block 5011 is arranged on the upper side of the lower turntable 103, and the lower knob plunger 5012 is located on the lower side of the lower plate 204, and the lower knob plunger 5012 cooperates with the lower positioning block 5011 to fix the bottom end of the hanger 2.

[0036] The positioning member 5 also includes an upper positioning member 502, which includes an upper positioning block 5021 and an upper knob plunger 5022. The upper positioning block 5021 in the upper positioning member 502 is arranged on the side of the upper turntable 101 close to the hanger 2, and the upper knob plunger 5022 in the upper positioning member 502 is suitable for passing through the upper plate 203 and cooperating with the upper positioning block 5021. Furthermore, the upper positioning block 5021 is arranged along the circumferential direction of the upper turntable 101, and the upper positioning block 5021 is arranged on the lower side of the upper turntable 101, and the upper knob plunger 5022 is located on the upper side of the upper plate 203. The upper knob plunger 5022 cooperates with the upper positioning block 5021 to fix the top end of the hanger 2.

[0037] The lower positioning member 501 and the upper positioning member 502 on the same hanger 2 are arranged in a staggered manner to achieve position limiting fixation of the hanger 2, thereby fixing the hanger 2 on the rotating frame 1 to ensure that the hanger 2 can remain stable when the rotating frame 1 rotates at high speed.

[0038] The hanging portion 401 is configured as a hanging groove 4011, and a plurality of hanging grooves 4011 are arranged along the height direction of the mold 4. Further, each hanging groove 4011 is arranged along the height direction of the mold 4, and the distance between adjacent hanging grooves 4011 is the same as the distance between two adjacent hanging rods 2011. By setting the mold 4 for fixing the film box 3, film boxes 3 of different sizes can be placed, and a plurality of hanging grooves 4011 matching the hanging rods 2011 are arranged on the mold 4, thereby facilitating the taking and placing of the film box 3.

[0039] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention; therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

[0040] Although the following terms are used more frequently in this paper: rotating frame 1, upper turntable 101, support column 102, lower turntable 103, hanger 2, hanger 201, hanger rod 2011, support rod 2012, rotating shaft 202, upper plate 203, lower plate 204, film box 3, mold 4, hanging part 401, hanging groove 4011, positioning member 5, lower positioning member 501, lower positioning block 5011, lower knob plunger 5012, upper positioning member 502, upper positioning block 5021, upper knob plunger 5022, etc., the possibility of using other terms is not excluded. These terms are used only to more conveniently describe and explain the essence of the utility model; interpreting them as any additional restrictions is contrary to the spirit of the utility model.

Claims

1. A film cassette holder, characterized in that: include: A rotating frame (1) is hollow; a hanging frame (2) is arranged along the circumference of the rotating frame (1); the hanging frame (2) comprises a rotating shaft (202) and a hanging member (201); the hanging frame (2) is rotatably connected to the rotating frame (1) via the rotating shaft (202); the hanging member (201) is a plate-shaped structure; the hanging member (201) is used to hang a mold (4) of a built-in film box (3).

2. A film cassette holder according to claim 1, characterized in that: Each of the hangers (2) is provided with two groups of hangers (201), and the two groups of hangers (201) are respectively arranged on opposite sides of the rotating shaft (202).

3. A film cassette holder according to claim 1, characterized in that: The hanging member (201) comprises a plurality of hanging rods (2011) arranged along the height direction of the film box frame, and the mold (4) is formed with a hanging portion (401), and the hanging portion (401) is hung on the hanging rods (2011).

4. A film cassette holder according to claim 1, characterized in that: The hanger (2) further comprises an upper plate (203) and a lower plate (204), wherein the upper plate (203) and the lower plate (204) are respectively connected to opposite ends of the hanger (201).

5. A film cassette holder according to claim 4, characterized in that: The rotating frame (1) comprises an upper rotating disk (101), a lower rotating disk (103) and a plurality of supporting columns (102); the upper rotating disk (101) and the lower rotating disk (103) are connected to opposite ends of the plurality of supporting columns (102); and the plurality of supporting columns (102) are arranged along the circumferential direction of the upper rotating disk (101) and the lower rotating disk (103).

6. A film cassette holder according to claim 5, characterized in that: The film box rack also includes a positioning member (5) for limiting the relative position of the hanging rack (2) and the rotating rack (1).

7. A film cassette holder according to claim 6, characterized in that: The positioning member (5) comprises a lower positioning member (501), and the lower positioning member (501) comprises a lower positioning block (5011) and a lower knob plunger (5012). The lower positioning block (5011) in the lower positioning member (501) is arranged on a side of the lower turntable (103) close to the hanger (2), and the lower knob plunger (5012) in the lower positioning member (501) is suitable for passing through the lower plate (204) and cooperating with the lower positioning block (5011).

8. A film cassette holder according to claim 7, characterized in that: The positioning member (5) further comprises an upper positioning member (502), the upper positioning member (502) comprising an upper positioning block (5021) and an upper knob plunger (5022), the upper positioning block (5021) in the upper positioning member (502) being arranged on a side of the upper turntable (101) close to the hanger (2), and the upper knob plunger (5022) in the upper positioning member (502) being adapted to pass through the upper plate (203) and cooperate with the upper positioning block (5021).

9. A film cassette holder according to claim 8, characterized in that: The lower positioning member (501) and the upper positioning member (502) on the same hanger (2) are arranged in a staggered manner.

10. A film cassette holder according to claim 3, characterized in that: The hanging portion (401) is configured as a hanging groove (4011), and a plurality of hanging grooves (4011) are provided along the height direction of the mold (4).

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