Wafer sucker quick-changing device

Abstract

The utility model discloses a wafer sucker quick-changing device, and relates to the technical field of semiconductor detection. The device comprises a stop block, a rotary table, an adapter plate and a wafer sucker, two connecting arms are symmetrically arranged on the stop block, and stop pins matched with stop pin holes in the side part of the adapter plate are mounted on the connecting arms through bolt holes, so that the adapter plate and the lower square part of the rotary table body are fixed and do not move along with the wafer suction cup on the upper layer; two key-shaped combined positioning holes and a tension spring stand column threaded mounting hole are symmetrically formed in the two sides, relative to the axis, of the disc face of the wafer suction disc, and the combined positioning holes comprise a small-diameter semicircular positioning hole and a large-diameter blind pin positioning hole. According to the utility model, the wafer suction cup can be quickly disassembled and replaced, the positioning is accurate, the disassembly is convenient, complicated marking, assembling and adjusting are not needed, the downtime of a production line can be greatly saved, the production efficiency is improved, and quick replacement can be realized without the participation of professional debugging personnel.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor detection, and particularly relates to a wafer suction cup quick-change device. Background Art

[0002] In the inspection process of semiconductor production, the turntable needs to carry the wafer and rotate at high speed due to the demand for inspection efficiency. In order to overcome the eccentric vibration caused by high speed, the eccentric moment of the turntable wafer and the wafer suction cup needs to be as small as possible. Therefore, when the size of the semiconductor wafer on the production line changes, the machine can only be shut down and the suction cup can be replaced to achieve sufficient accuracy. If this replacement is frequent, it will be very inconvenient for the user. Not only do they need to adapt to two different specifications of wafer suction cups, but they also need to avoid the complicated process of metering during the replacement process.

[0003] At present, the commonly used structure and process for wafer suction cup installation and adjustment are that there is no need for such rapid installation and adjustment. It can only be used after the installation and adjustment to check the flatness and coaxiality of the wafer suction cup relative to the turntable motion reference. It is not only time-consuming and laborious, but also easy to collapse a large amount of debris during installation and adjustment. It seriously affects the cleanliness and causes damage to the production environment, thereby reducing the yield. For example, the structure of the quick-change wafer suction cup disclosed in CN219350190U is fixed by tightening and fixing the screws and nuts evenly distributed around the periphery. In terms of positioning, the coaxiality positioning is directly positioned through the screw holes, and the parallelism is manually ground. Although the purpose of quick change can be achieved, the coaxiality positioning accuracy is not high and the eccentricity is serious. It can only be used for static or low-speed motion conditions. Although the flatness obtained by manual grinding is highly accurate, the efficiency is very poor and it is not suitable for mass production applications. Therefore, this technical solution proposes a quick-change device for wafer suction cups. Utility Model Content

[0004] The utility model provides a wafer suction cup quick-change device, which forms a precise positioning mechanism and a quick loading and unloading mechanism through a wafer suction cup, a wafer suction cup, a positioning pin with a hole, a transfer plate and a locking screw. The wafer suction cup can be quickly disassembled and replaced, and the positioning is precise and the disassembly is convenient. There is no need for complicated marking and adjustment, which can greatly save the production line downtime and improve production efficiency, and quick replacement can be achieved without the participation of professional debugging personnel. In summary, the problems in the background technology are solved.

[0005] In order to solve the above technical problems, the utility model is realized by the following technical solutions:

[0006] The utility model discloses a wafer suction cup quick-change device, comprising a stop block, a turntable surrounded by the stop block, an adapter plate installed on the turntable, and a wafer suction cup installed on the adapter plate;

[0007] The stop block is symmetrically provided with two connecting arms, and the connecting arms are provided with stop pins matching the stop pin holes on the side of the adapter plate through the pin holes, so that the adapter plate and the lower square of the turntable body are fixed and will not move with the upper wafer suction cup;

[0008] Two key-shaped combination positioning holes and threaded mounting holes for tension spring columns are symmetrically provided on the disk surface relative to the axis on both sides. The combination positioning holes include a small-diameter semicircular positioning hole and a large-diameter blind pin positioning hole. A perforated positioning pin with the hole end facing upward is punched into the blind pin positioning hole. A tension spring plug is installed in the positioning hole. A tension spring column is installed in the threaded mounting hole of the tension spring column. A tension spring is connected between the upper tension spring hole of the tension spring plug and the upper tension spring hole of the tension spring column. The bottom of the perforated positioning pin passes through the blind pin positioning hole and is connected to the blind pin hole on the adapter plate.

[0009] Furthermore, a cone-angle guide flange is provided at the bottom of the wafer suction cup, and a circular guide groove corresponding to the central circular hole of the cone-angle guide flange is provided on the adapter plate.

[0010] Furthermore, a locking bolt connection hole is provided on the cone-angle guide flange of the wafer suction cup, and a locking screw corresponding to the bolt connection hole on the adapter plate is installed in the locking bolt connection hole.

[0011] Compared with the prior art, the utility model has the following beneficial effects:

[0012] The utility model constitutes a precise positioning mechanism and a quick loading and unloading mechanism through a wafer suction cup, a wafer suction cup, a positioning pin with a hole, a transfer plate and a locking screw. The wafer suction cup can be quickly disassembled and replaced, with precise positioning and convenient disassembly, without the need for complicated marking and adjustment, which can greatly save production line downtime, improve production efficiency, and can achieve quick replacement without the participation of professional debugging personnel.

[0013] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for describing the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0015] Figure 1 This is a schematic structural diagram of a wafer suction cup quick-change device of the utility model;

[0016] Figure 2 for Figure 1 The right side view of the structure;

[0017] Figure 3 for Figure 1 Exploded diagram of the structure;

[0018] Figure 4 for Figure 3 The right side view of the structure;

[0019] Figure 5 for Figure 1 A bird's eye view of the structure Figure 1 ;

[0020] Figure 6 for Figure 5 Middle AA section;

[0021] Figure 7 for Figure 1 A bird's eye view of the structure Figure 2 ;

[0022] Figure 8 for Figure 7 Middle BB section;

[0023] Fig. 9 for Figure 1 A top view of the structure of the transfer table combined with the adapter plate;

[0024] Fig.10 for Fig. 9 Middle CC section;

[0025] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0026] 1-turntable, 2-adapter plate, 21-blind pin hole, 3-wafer suction cup, 5-locating pin with hole, 6-tension spring, 7-tension spring column, 8-tension spring pin, 9-stop block, 10-stop pin, 11-locking screw. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] In the description of the present invention, it should be understood that the terms "upper", "lower", "side", "upper layer", "disk", "bottom" and the like indicating orientation or positional relationship are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0029] See also Figure 1-10 As shown, a wafer sucker quick-change device of the utility model is used to solve the problem of directly replacing wafer suckers of different specifications without re-testing. The wafer sucker quick-change device includes a stopper 9, a turntable 1 surrounded by the stopper 9, an adapter plate 2 mounted on the turntable 1, and a wafer sucker 3 mounted on the adapter plate 2; the turntable 1 and the wafer sucker 3 adapted to wafers of different specifications are connected through the adapter plate 2;

[0030] The stop block 9 is symmetrically provided with two connecting arms, and the connecting arms are provided with stop pins 10 matching the stop pin holes on the side of the adapter plate 2 through the pin holes, so that the adapter plate 2 and the lower square of the turntable 1 body are fixed and will not move with the upper wafer suction cup 3;

[0031] Two key-shaped combination positioning holes and threaded mounting holes for tension spring columns are symmetrically provided on the disk surface of the wafer suction cup 3 on both sides relative to the axis. The combination positioning hole includes a small-diameter semicircular positioning hole and a large-diameter blind pin positioning hole. A perforated positioning pin 5 with the hole end facing upward is punched into the blind pin positioning hole. A tension spring plug 8 is installed in the positioning hole. A tension spring column 7 is installed in the threaded mounting hole of the tension spring column. A tension spring 6 is connected between the upper tension spring hole of the tension spring plug 8 and the upper tension spring hole of the tension spring column 7. The bottom of the perforated positioning pin 5 passes through the blind pin positioning hole and is connected to the blind pin hole 21 on the adapter plate 2. The hole in the positioning pin provides one of the two fulcrums of the tension spring 6; the combined positioning hole is divided into a large end and a small end, the small end is a precise semicircle, the diameter of the large end is much larger than the positioning pin with a hole, and the two holes are connected through a large gap through a pin groove; one end of the tension spring is hung on the tension spring column, and the other end is hung on the tension spring pin, the tension spring column is screwed on the screw hole of the wafer suction cup, and the tension spring pin is inserted into the center hole of the positioning pin with a hole, and the positioning pin with a hole is fixed on the adapter plate; the lower end of the stop block is stuck on the square base of the turntable, and a stop pin is inserted on each side of the upper end to fix the adapter plate so that it cannot rotate with the wafer suction cup; the meter is used to detect the adapter plate to find the rotation center of the turntable and level it, and there is no need to use the meter to replace the wafer suction cup later.

[0032] Among them, a cone-angle guide flange is arranged at the bottom of the wafer suction cup 3, and a circular guide groove corresponding to the central circular hole of the cone-angle guide flange is arranged on the adapter plate 2.

[0033] Among them, a locking bolt connection hole is also provided on the cone-angle guide flange of the wafer suction cup 3, and a locking screw 11 corresponding to the bolt connection hole on the adapter plate 2 is installed in the locking bolt connection hole.

[0034] The appearance and assembly relationship of each part are shown in the exploded view: from bottom to top, the turntable 1, the adapter plate 2, the wafer suction cup 3, and the stop block 9 are arranged in sequence to surround the turntable 1, and the stop pin 10 is pinned into it; the positioning pin 5 with a hole is knocked on the adapter plate 2, and the tension spring column 7 is pinned into the hole on it, and the tension spring column 7 is screwed into the corresponding screw hole of the wafer suction cup 3, and the tension spring holes are connected with the tension spring 6;

[0035] Precision positioning mechanism: involves wafer suction cup 3, positioning pin with hole 5, adapter plate 2 and locking screw 11; two key-shaped combination positioning holes with very precise positions and symmetrical distribution are processed on the disk surface of wafer suction cup 3 relative to the axis, and the small end semicircle of the key hole is the precise positioning hole, and the adapter plate 2 is punched with a precise blind pin hole at the position corresponding to the bottom of wafer suction cup 3, and the hole end of the positioning pin 5 with hole faces upward and is punched into the blind pin hole, so that the pin hole accuracy of the adapter plate 2 is transferred to the two positioning pins 5 with holes; at this time, when the small end semicircle of the two key-shaped positioning holes of wafer suction cup 3 is precisely half-hole, respectively close to the two positioning pins 5 with holes, and then the relative position of the adapter plate 2 and wafer suction cup 3 is locked by the locking screw 11, the precise positioning of the adapter plate 2 and wafer suction cup 3 is completed;

[0036] Quick loading and unloading mechanism: It also involves a wafer suction cup 3, a positioning pin with a hole 5 and a locking screw 11; two key-shaped combined positioning holes with very precise positions and symmetrical distribution are processed on the disk surface of the wafer suction cup 3 relative to the axis, and the large end circular hole of the key hole is an avoidance hole for the positioning pin with a hole 5 during loading and unloading. When the positioning pin with a hole 5 is located in this large hole, it can be easily loaded and unloaded. The tolerance size of the large gap through the pin groove is much larger than that of the positioning pin with a hole 5, so that the positioning pin with a hole 5 can smoothly rotate in and out of the semicircular positioning surface of the small end of the positioning hole; at the same time, in order to play a pre-alignment role, the wafer suction cup 3 is designed with a cone-angle guide flange, and the adapter plate 2 is designed with a corresponding circular guide groove;

[0037] Tensioning mechanism: involves adapter plate 2, standard wafer suction cup 3, positioning pin with hole 5, tension spring 6, tension spring column 7, tension spring plug 8, locking screw 11; two key-shaped combined positioning holes are processed on the disk surface of wafer suction cup 3 relative to the axis, and the positioning pin with hole 5 is pressed against the small end semicircle of the keyhole. At this time, the pressing force is generated by the tension spring 6; one end of the tension spring 6 is hung in the tension spring hanging hole of the tension spring column 7, and the tension spring column 7 is tightened in the corresponding screw hole on the wafer suction cup 3. The other end is hung in the tension spring hanging hole on the tension spring plug 8, and the lower end of the tension spring plug 8 is inserted in the center hole of the positioning pin with hole 5. At this time, the tension spring 6 is in a stretched state, providing lateral tensioning force to make the positioning pin with hole 5 press against the small end semicircle of the keyhole. The positioning pin with hole 5 is precisely fixed on the adapter plate 2. Tightening the locking screw 11 can achieve the precise fixation of the standard wafer suction cup 3 relative to the adapter plate 2;

[0038] Stop mechanism: involves turntable 1, stop block 9, stop pin 11 and adapter plate 2; the side of adapter plate 2 is processed with symmetrically distributed pin holes, which correspond to the stop pin holes on the upper part of stop block 9. After the two sides of the space at the lower part of stop block 9 are stuck in the side walls of the lower square of turntable 1, the upper stop pin hole is aligned with the corresponding stop pin hole on adapter plate 2 and the stop pin 11 is inserted, the adapter plate will be fixed with the lower square of turntable 1 body and will not move with the upper wafer suction cup;

[0039] The installation and process are as follows:

[0040] The first step is to establish an installation baseline:

[0041] The assembly steps of the adapter plate 2 and the positioning pins with holes 5 are as follows: before the turntable 1 and the adapter plate 2 are installed, the positioning pins with holes 5 have been driven into the pin holes of the adapter plate 2. Before tightening the connecting screws of the turntable 1 and the adapter plate 2, use a meter to adjust the coaxiality of the turntable 1 shaft and the outer circle of the adapter plate 2, as well as the level of the upper surface of the adapter plate 2 relative to the bottom surface of the turntable 1, and then tighten the screws to fix it. At this time, the coaxiality reference is the two positioning pins with holes 5, and the flatness reference is the upper plane of the adapter plate 2, such as Figure 6 As shown;

[0042] The second step is to install the stop block 9 and the stop pin 10:

[0043] Push the stop block 9 to the bottom from the side opposite to the driving part of the turntable 1, so that the stop block 9 is clamped on the square part below the turntable 1, and then insert the stop pin 10 into the pin hole at the upper end of the stop block 9, and then rotate the adapter plate at the upper end of the turntable 1, find the pin hole on its outer circle corresponding to the stop pin 10 and insert it to the bottom, so that the adapter plate 2 is fixed; Figure 1-4 shown.

[0044] Step 3: Position the wafer suction cup 3:

[0045] Insert the conical guide flange of the wafer suction cup 3 downward into the mounting hole on the upper surface of the adapter plate 2, and then rotate the wafer suction cup 3 until the perforated positioning pin 5 on the adapter plate 2 makes it easily fall into the large end circular hole of the key-shaped hole of the wafer suction cup 3, so that the mounting surface of the wafer suction cup 3 is tightly attached to the plane on the adapter plate, and then rotate the wafer suction cup 3 counterclockwise. At this time, due to the action of the stop block 9 and the stop pin 10, the adapter plate 2 is fixed and will not rotate with the wafer suction cup 3, so that the two perforated positioning pins 5 are all stuck in the small end semicircle of the key-shaped hole of the wafer suction cup 3.

[0046] Step 4: Assemble the tension spring 6 to apply tension to the holed positioning pin 5 to tighten and fix it:

[0047] First, screw the tension spring support 7 into the corresponding screw hole of the wafer suction cup 3, then hang one end of the tension spring 6 into the tension spring hole of the tension spring support 7, and the other end into the tension spring hole on the tension spring latch 8, and then stretch the tension spring 6 until the lower end of the tension spring latch 8 is inserted into the spring support latch hole at the upper end of the perforated positioning pin 5. Repeat the same operation for the tension spring 6, the tension spring support 7 and the tension spring latch 8 on the other opposite side, so that the tension spring 6 can exert force to make the wafer suction cup 3 produce a relative clockwise rotation trend relative to the adapter plate 2, thereby pushing the perforated positioning pin 5 to apply a clamping force to the small end semicircular positioning surface of the key-shaped hole of the wafer suction cup 3. After confirming that they are firmly pressed together, tighten the screw 11 to connect and fix the wafer suction cup 3 and the adapter plate 2, completing the entire assembly process;

[0048] Step 5: Dismantle irrelevant parts to form a working state;

[0049] After the wafer suction cup 3 is installed, pull out the tension spring pin 8, unscrew the tension spring support 7, remove the tension spring 6, the tension spring support 7 and the tension spring pin 8, remove the stop block 9 and the stop pin 10, and form a normal working state;

[0050] Compared with the quick-change implementation examples currently commonly used, the utility model has extremely high positioning accuracy, is easy to disassemble, and does not require complicated metering and adjustment. It can greatly save production line downtime, greatly improve production efficiency, and the entire process does not require the participation of professional debugging personnel.

[0051] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A wafer chuck quick-change device, characterized in that: It comprises a stop block (9), a turntable (1) surrounded by the stop block (9), an adapter plate (2) mounted on the turntable (1), and a wafer suction cup (3) mounted on the adapter plate (2); The stop block (9) is symmetrically provided with two connecting arms, and a stop pin (10) matching the stop pin hole on the side of the adapter plate (2) is installed on the connecting arm through the pin hole, so that the adapter plate (2) and the lower square of the turntable (1) body are fixed and will not move with the upper wafer suction cup (3); The wafer suction cup (3) has two key-shaped combined positioning holes and a tension spring column threaded mounting hole symmetrically provided on both sides of the disk relative to the axis. The combined positioning hole includes a small-diameter semicircular positioning hole and a large-diameter blind pin positioning hole. A perforated positioning pin (5) with the hole end facing upward is punched into the blind pin positioning hole. A tension spring plug (8) is installed in the positioning hole. A tension spring column (7) is installed in the tension spring column threaded mounting hole. A tension spring (6) is connected between the upper tension spring hole of the tension spring plug (8) and the upper tension spring hole of the tension spring column (7). The bottom of the perforated positioning pin (5) passes through the blind pin positioning hole and is connected to the blind pin hole (21) on the adapter plate (2).

2. The wafer chuck quick-change device according to claim 1, characterized in that: The bottom of the wafer suction cup (3) is provided with a cone-angle guide flange, and the adapter plate (2) is provided with a circular guide groove corresponding to the central circular hole of the cone-angle guide flange.

3. The wafer chuck quick-change device according to claim 2, characterized in that: The cone-angle guide flange of the wafer suction cup (3) is also provided with a locking bolt connection hole, in which a locking screw (11) corresponding to the bolt connection hole on the adapter plate (2) is installed.

Images