Solar cell silicon wafer surface ozone treatment equipment
By adding a water washing process to the silicon wafer wool making process, and cleaning it in ozone water after removing the alkali liquid, the problem of lowering ozone concentration is solved, ensuring the stability and cleaning effect of ozone water, and reducing production costs.
Patent Information
- Application Number
- CN202421125782.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-22
- Publication Date
- 2025-01-07
- Estimated Expiration
- 2034-05-22
AI Technical Summary
In the silicon wafer shredding process, since the silicon wafer directly enters the ozone water after the alkaline liquid is treated, the ozone concentration is rapidly reduced, affecting the cleaning effect. The existing technology is difficult to effectively solve this problem, and the ozone generator may be increased or the use of large capacity Equipment can only slow down problems and increase production costs.
Design a solar cell silicon wafer surface ozone treatment equipment, by adding a water washing process between the alkali liquid treatment process and the ozone water cleaning process, removing residual alkali liquid and then entering the ozone water cleaning process, and using a rotating screw and an electric push rod to drive it The drain net moves between the clear water tank and the ozone tank to ensure the stable ozone water concentration.
Effectively prevent the sharp decrease of ozone concentration, enhance the efficiency of alkali removal, ensure the cleaning effect of ozone water, facilitate the normal progress of subsequent silicon wafer wool making processes, and reduce production costs.
Smart Images
Figure CN222322102U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon slice processing, in particular to ozone processing equipment for the surface of solar cell silicon slices. Background Art
[0002] In recent years, the industry has mostly used ozone generators to use ozone to texturize the surface of silicon wafers. The treatment process is: first use alkali solution to roughly polish the surface of the single crystal silicon wafer to remove the surface damage layer generated by the silicon wafer during cutting, and then put the silicon wafer into ozone water for cleaning before the texturizing process. In this process, since the silicon wafer is first put into the alkali solution for rough polishing and then directly into the ozone water, it is inevitable that more and more alkali solution will be brought into the ozone water. Due to the characteristics of ozone, it cannot coexist with alkali solution. In alkaline solution, the concentration of ozone will quickly become zero, and the silicon wafer cannot be effectively cleaned, which will affect the subsequent texturizing effect.
[0003] Therefore, it is necessary to continuously introduce ozone into the ozone water through an ozone generator, or to use a large-capacity ozone generator, but this can only slow down the process of rapid reduction of ozone concentration at best, and cannot fundamentally solve the problem, and this will also lead to an increase in production costs.
[0004] Therefore, it is particularly important to design an ozone treatment device for the surface of solar cell silicon wafers to change the above technical defects and improve the overall practicality. Utility Model Content
[0005] The utility model aims to provide a solar cell silicon wafer surface ozone treatment device to solve the problems raised in the above background technology.
[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:
[0007] A solar cell silicon wafer surface ozone treatment device comprises an equipment support, wherein the interior of the equipment support is symmetrically embedded with a clean water tank and an ozone tank respectively, an ozone generator is installed inside the ozone tank and near the bottom, a fixed cross bar is arranged on the top of the front of the equipment support, a forward and reverse motor is installed on the left side of the fixed cross bar, the driving end of the forward and reverse motor passes through the interior of the fixed cross bar and is connected with a rotating screw, the outer side of the rotating screw is threadedly sleeved with a screw slide, the bottom of the screw slide extending out of the front end of the fixed cross bar is connected with a supporting top plate, electric push rods are arranged on the left and right sides of the bottom of the supporting top plate, the driving end of the electric push rod is connected with a drain net, the rear side wall inside the drain net is symmetrically rotatably connected with a pulley, a transmission belt is connected between the two groups of the pulleys, a clip is fixed on the lower side of the transmission belt, a cleaning brush is installed on the bottom of the clip, a driving motor is installed on the right end of the rear side of the drain net, and the driving end of the driving motor is connected to one of the groups of pulleys.
[0008] As a preferred solution of the utility model, the left and right sides of the clean water tank are respectively connected with a water inlet and a water outlet.
[0009] As a preferred solution of the utility model, a control panel is arranged on the outside of the equipment bracket, wherein the control panel is respectively connected to the ozone generator, the electric push rod and the drive motor through wires, and the connection method is electrical connection.
[0010] As a preferred solution of the utility model, both ends of the rotating screw are rotatably connected to the inside of the fixed cross bar through a bearing seat.
[0011] As a preferred solution of the utility model, a sliding groove extending along the length direction of the fixed cross bar is opened on the front side of the fixed cross bar.
[0012] As a preferred solution of the utility model, the external structure size of the drainage net is respectively adapted to the internal structure size of the clean water tank and the ozone tank.
[0013] Compared with the prior art, the beneficial effects of the utility model are:
[0014] In the utility model, an ozone treatment device for the surface of a solar cell silicon wafer is set up. The ozone treatment process for the surface of the solar cell silicon wafer increases a water washing process between the alkali solution treatment process and the ozone water cleaning process, and enters the ozone water cleaning process after removing the residual alkali solution. This can effectively prevent the problem of a sharp decrease in ozone concentration in the ozone water due to the introduction of alkali solution, and can clean the surface of the cell silicon wafer, enhance the efficiency of alkali solution removal, thereby ensuring the stability of the ozone water concentration, ensuring the effect of the ozone water cleaning process, and facilitating the subsequent silicon wafer texturing. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 This is the main view of the overall structure of the utility model;
[0016] Figure 2 This is the internal diagram of the overall structure of the utility model;
[0017] Figure 3 This is the internal structure diagram of the drain net of the utility model.
[0018] In the figure: 1. Equipment bracket; 2. Clean water tank; 3. Ozone tank; 4. Ozone generator; 5. Fixed cross bar; 501. Forward and reverse motor; 502. Rotating screw; 503. Screw slide; 504. Support top plate; 505. Electric push rod; 6. Drain net; 601. Pulley; 602. Transmission belt; 603. Clip; 604. Cleaning brush; 605. Drive motor. DETAILED DESCRIPTION
[0019] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.
[0020] For examples, see Figure 1-3 , the utility model provides a technical solution:
[0021] A solar cell silicon wafer surface ozone treatment device comprises a device support 1, wherein a clean water tank 2 and an ozone tank 3 are respectively embedded in the device support 1 in a left-right symmetrical manner, an ozone generator 4 is installed inside the ozone tank 3 and near the bottom, and a fixed cross bar 5 is arranged on the top of the front of the device support 1;
[0022] The left and right sides of the clear water tank 2 are respectively connected with a water inlet and a water outlet.
[0023] In this embodiment, please refer to Figure 2 A forward and reverse motor 501 is installed on the left side of the fixed cross bar 5, and the driving end of the forward and reverse motor 501 passes through the interior of the fixed cross bar 5 and is connected to a rotating screw 502. The outer thread of the rotating screw 502 is sleeved with a screw slide 503, and the screw slide 503 extends out of the bottom of the front end of the fixed cross bar 5 and is connected to a supporting top plate 504. Electric push rods 505 are arranged on both sides of the bottom of the supporting top plate 504, and the driving end of the electric push rod 505 is connected to a drain net 6;
[0024] Both ends of the rotating screw rod 502 are rotatably connected to the inside of the fixed cross bar 5 through the bearing seat, and the front side of the fixed cross bar 5 is provided with a sliding groove extending along the length direction of the fixed cross bar 5.
[0025] In this embodiment, please refer to Figure 3 , the rear side wall inside the drain net 6 is connected to a pulley 601 for symmetrical rotation, a transmission belt 602 is connected between the two sets of pulleys 601, a clip 603 is fixed to the lower side of the transmission belt 602, a cleaning brush 604 is installed at the bottom of the clip 603, a driving motor 605 is installed at the right end of the rear side of the drain net 6, and the driving end of the driving motor 605 is connected to one of the sets of pulleys 601;
[0026] A control panel is provided on the outside of the equipment bracket 1, wherein the control panel is connected to the ozone generator 4, the electric push rod 505, and the driving motor 605 through wires, and the connection method is electrical connection. The external structure size of the drain net 6 is adapted to the internal structure size of the clean water tank 2 and the ozone tank 3.
[0027] The working process of the utility model is as follows: when in use, the solar cell silicon wafer is laid flat on the inside of the drain net 6, and then the rotating screw 502 is driven by the forward and reverse motors 501 to drive the screw slide 503 to move horizontally, first driving the drain net 6 to stop above the clean water pool 2, and then driven by the electric push rod 505 to slowly fall and soak in the clean water. The water washing process can remove the residual alkali solution, and at the same time, under the action of the pulley 601, the driving motor 605 drives the transmission belt 602 to move horizontally downward, thereby driving the cleaning brush 604 to clean the surface of the battery silicon wafer, thereby enhancing the efficiency of alkali solution removal. After cleaning, the electric push rod 505 rises and drives the drain net to the top of the ozone pool 3 through the screw structure and falls, and finally soaks in the inside of the ozone pool 3, thereby ensuring the stability of the ozone water concentration and the effect of the ozone water cleaning process, which is beneficial to the subsequent silicon wafer texturing.
[0028] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A solar cell silicon wafer surface ozone treatment device, comprising a device support (1), characterized in that: The equipment support (1) has a clean water tank (2) and an ozone tank (3) symmetrically embedded therein, and an ozone generator (4) is installed inside the ozone tank (3) near the bottom. A fixed cross bar (5) is provided at the top of the front of the equipment support (1). A forward and reverse motor (501) is installed on the left side of the fixed cross bar (5). The driving end of the forward and reverse motor (501) passes through the interior of the fixed cross bar (5) and is connected to a rotating screw (502). The outer side of the rotating screw (502) is threadedly sleeved with a screw slide (503). The bottom of the screw slide (503) extends out of the front end of the fixed cross bar (5) and is connected to a supporting top plate (501). 04), electric push rods (505) are arranged on both the left and right sides of the bottom of the supporting top plate (504), the driving end of the electric push rod (505) is connected to the drain net (6), the rear side wall inside the drain net (6) is symmetrically rotatably connected to the pulley (601), a transmission belt (602) is connected between the two groups of the pulleys (601), a clip (603) is fixed on the lower side of the transmission belt (602), a cleaning brush (604) is installed at the bottom of the clip (603), a driving motor (605) is installed at the right end of the rear side of the drain net (6), and the driving end of the driving motor (605) is connected to one of the groups of pulleys (601).
2. The ozone treatment equipment for the surface of solar cell silicon wafers according to claim 1, characterized in that: The left and right sides of the clear water tank (2) are respectively connected with a water inlet and a water outlet.
3. The ozone treatment equipment for the surface of solar cell silicon wafers according to claim 1, characterized in that: A control panel is provided on the outside of the equipment support (1), wherein the control panel is respectively connected to the ozone generator (4), the electric push rod (505), and the drive motor (605) via wires, and the connection method is electrical connection.
4. The ozone treatment equipment for the surface of solar cell silicon wafers according to claim 1, characterized in that: Both ends of the rotating screw rod (502) are rotatably connected to the interior of the fixed cross bar (5) via a bearing seat.
5. The ozone treatment equipment for the surface of solar cell silicon wafers according to claim 1, characterized in that: The front side of the fixed cross bar (5) is provided with a sliding groove extending along the length direction of the fixed cross bar (5).
6. The ozone treatment equipment for the surface of solar cell silicon wafers according to claim 1, characterized in that: The external structure size of the drainage net (6) is respectively adapted to the internal structure size of the clean water tank (2) and the ozone tank (3).