Inclined evaporation coating device and composite current collector

Abstract

The utility model provides an inclined evaporation coating device and a composite current collector. The inclined evaporation coating device comprises a first coating main roller, a first evaporation source and a second evaporation source, the first evaporation source and the second evaporation source are located on the two sides of the lower portion of the first coating main roller respectively, a first included angle is formed between the first evaporation source and the center line of the first coating main roller in the vertical direction, and a second included angle is formed between the second evaporation source and the center line of the first coating main roller in the vertical direction. According to the embodiment of the utility model, a certain included angle is formed between the first evaporation source and the first coating main roller and between the second evaporation source and the first coating main roller, so that the growth modes of different coatings are adjusted, and the transverse binding force and compactness of coating deposition are improved; the technical problem that the prepared composite current collector is poor in pull-up rebound resilience due to structural defects in the transverse spreading direction of a film layer caused by vertical unidirectional growth of a film surface crystal cluster is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of thin film evaporation, in particular to an inclined evaporation coating device and a composite current collector. Background Art

[0002] In the existing coating method, the evaporation surface is facing the deposition substrate film, and the film passes through the circular cooling main roller, or is pulled by the roller system into a plane suspension and quickly passes over the evaporation source, so that the evaporation vapor is deposited on the film surface to form a metal film layer. However, whether it is the deposition coating with the main roller or the plane suspension coating, the evaporation surface and the film surface are in a vertical state.

[0003] Since the speed of steam molecules is very large relative to the linear velocity of the membrane surface, after the steam molecules collide with the membrane surface and deposit, they grow vertically at almost 90 degrees on the surface of the film. Therefore, during the rapid deposition and longitudinal growth process, the force on the internal lateral surface of the film layer is weak, resulting in a poor crystallization state, weak bonding force, and even local defects of poor lateral bonding force in the microstructure of the coating layer, forming microgaps in some locations, reducing the conductivity of the film layer, and reducing the tensile resilience of the finished coating. Under the action of tension, due to the structural defects in the lateral direction of the film layer caused by the vertical unidirectional growth of the crystal clusters on the membrane surface, the poor lateral bonding force leads to poor tensile resilience of the prepared composite current collector. Utility Model Content

[0004] In view of this, the purpose of the embodiments of the utility model is to provide an inclined evaporation coating device and a composite current collector to solve the technical problems in the prior art of structural defects in the lateral direction of the film layer caused by the vertical unidirectional growth of crystal clusters on the membrane surface, and poor lateral bonding force resulting in poor tensile rebound performance of the prepared composite current collector.

[0005] To achieve the above-mentioned purpose, in a first aspect, an embodiment of the utility model provides an inclined evaporation coating device, the inclined evaporation coating device comprising: a first coating main roller, a first evaporation source and a second evaporation source;

[0006] The first evaporation source and the second evaporation source are respectively located on both sides below the first coating main roller. The first evaporation source has a first angle with the center line of the first coating main roller in the vertical direction, and the second evaporation source has a second angle with the center line of the first coating main roller in the vertical direction.

[0007] In some possible implementations, the inclined evaporation coating device includes: further including a second coating main roller, a third evaporation source and a fourth evaporation source;

[0008] The third evaporation source and the fourth evaporation source are respectively located on both sides below the second coating main roller, and a third angle is formed between the third evaporation source and the center line of the second coating main roller in the vertical direction, and a fourth angle is formed between the fourth evaporation source and the center line of the second coating main roller in the vertical direction.

[0009] In some possible implementations, the first angle, the second angle, the third angle, and the fourth angle are all greater than 0 degrees and less than 30 degrees.

[0010] In some possible implementations, the first angle, the second angle, the third angle, and the fourth angle are equal.

[0011] In some possible implementations, the vertical distances between the first evaporation source, the second evaporation source and the first coating main roller, and the vertical distances between the third evaporation source, the fourth evaporation source and the second coating main roller are all 15 cm to 25 cm.

[0012] In some possible implementations, the inclined evaporation coating device includes: a vacuum chamber, and an unwinding roller, a winding roller, and a passing roller rotatably installed in the vacuum chamber;

[0013] After the film substrate is unwound by the unwinding roller, it is guided by the passing roller and tangentially adheres to the circular surface of the first coating main roller and the circular surface of the second coating main roller in sequence. The metal particles evaporated from the first evaporation source, the second evaporation source, the third evaporation source and the fourth evaporation source are deposited on the film surface of the film substrate at different incident angles, and then it is wound up by the winding roller.

[0014] In a second aspect, the embodiment of the utility model further provides a composite current collector, which is prepared according to the inclined evaporation coating device, and comprises: a thin film substrate, and a first coating layer and a second coating layer arranged on a first surface of the thin film substrate;

[0015] The angle between the growth direction of the steam molecules of the first coating layer and the first surface of the film substrate is an acute angle or an obtuse angle;

[0016] The growth direction of the vapor molecules of the second coating layer is opposite to the growth direction of the vapor molecules of the first coating layer, and the vapor molecules of the second coating layer are embedded in the edge of the first coating layer.

[0017] In some possible implementations, the composite current collector further includes: a third coating layer and a fourth coating layer sequentially disposed on the second coating layer;

[0018] The growth direction of the steam molecules of the third coating layer is opposite to the growth direction of the steam molecules of the second coating layer, and the third coating layer is embedded in the edge of the second coating layer;

[0019] The growth direction of the steam molecules of the fourth coating layer is opposite to the growth direction of the steam molecules of the third coating layer, and the fourth coating layer is embedded in the edge of the third coating layer.

[0020] In some possible implementations, the composite current collector further includes: a fifth coating layer, a sixth coating layer, a seventh coating layer and an eighth coating layer sequentially disposed on the second surface of the film substrate;

[0021] The angle between the growth direction of the steam molecules of the fifth coating layer and the second surface of the film substrate is an acute angle or an obtuse angle;

[0022] The growth direction of the steam molecules of the sixth coating layer is opposite to the growth direction of the steam molecules of the fifth coating layer, and the sixth coating layer is embedded in the edge of the fifth coating layer;

[0023] The growth direction of the steam molecules of the seventh coating layer is opposite to the growth direction of the steam molecules of the sixth coating layer, and the seventh coating layer is embedded in the edge of the sixth coating layer;

[0024] The growth direction of the steam molecules of the eighth coating layer is opposite to the growth direction of the steam molecules of the seventh coating layer, and the eighth coating layer is embedded in the edge of the seventh coating layer.

[0025] In some possible embodiments, the first coating, the second coating, the third coating, and the fourth coating have a side away from the first surface of the film substrate that is wavy, and the fifth coating, the sixth coating, the seventh coating, and the eighth coating have a side away from the second surface of the film substrate that is wavy.

[0026] In a third aspect, an embodiment of the utility model further provides a composite current collector, the composite current collector comprising: a thin film substrate, and a plurality of coating layers sequentially arranged on a first surface and / or a second surface of the thin film substrate, each of the coating layers being obtained by inclined evaporation, and the inclination directions of any two adjacent coating layers being opposite;

[0027] The surface of any one of the coating layers away from the film substrate is wavy;

[0028] The latter plating layer of any two adjacent plating layers is embedded in the wavy surface of the former plating layer.

[0029] The beneficial technical effects of the above technical solution are:

[0030] The utility model embodiment provides an inclined evaporation coating device and a composite current collector, the inclined evaporation coating device comprises: a first coating main roller, a first evaporation source and a second evaporation source; the first evaporation source and the second evaporation source are respectively located on both sides below the first coating main roller, the first evaporation source and the first coating main roller have a first angle between the center line in the vertical direction, and the second evaporation source and the first coating main roller have a second angle between the center line in the vertical direction. In the utility model embodiment, due to a certain angle between the first evaporation source and the second evaporation source and the first coating main roller, the growth mode of different coatings is adjusted to improve the lateral bonding force and density of the coating deposition, and the technical problem of poor pull-up resilience of the prepared composite current collector caused by structural defects in the lateral direction of the film layer caused by the vertical unidirectional growth of crystal clusters on the film surface is avoided. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0032] Figure 1 It is a partial schematic diagram of an inclined evaporation coating device according to an embodiment of the utility model;

[0033] Figure 2 It is a partial schematic diagram of another inclined evaporation coating device according to an embodiment of the utility model;

[0034] Figure 3 This is a schematic diagram of the overall structure of an inclined evaporation coating device according to an embodiment of the utility model;

[0035] Figure 4 is a schematic diagram of the decomposition of the incident force and velocity of an incident particle in an embodiment of the present invention;

[0036] Figure 5 It is the crack formed by the longitudinal growth of the membrane surface in the prior art;

[0037] Figure 6 It is a schematic structural diagram of the first composite current collector of the embodiment of the utility model;

[0038] Figure 7 It is a schematic structural diagram of a second composite current collector according to an embodiment of the utility model;

[0039] Figure 8 It is a schematic structural diagram of the third composite current collector of the embodiment of the utility model.

[0040] Description of Figure Numbers:

[0041] 10. Vacuum chamber; 11. First coating main roller; 12. First evaporation source; 13. Second evaporation source; 14. Second coating main roller; 15. Third evaporation source; 16. Fourth evaporation source; 17. Unwinding roller; 18. Winding roller; 19. Passing roller;

[0042] 20. Film substrate; 21. First coating; 22. Second coating; 23. Third coating; 24. Fourth coating; 25. Fifth coating; 26. Sixth coating; 27. Seventh coating; 28. Eighth coating; a1. First angle; a2. Second angle; a3. Third angle; a4. Fourth angle; A. Crack. DETAILED DESCRIPTION

[0043] The features and exemplary embodiments of various aspects of the utility model will be described in detail below. In the detailed description below, many specific details are proposed in order to provide a comprehensive understanding of the utility model. However, it is obvious to those skilled in the art that the utility model can be implemented without the need for some of these specific details. The following description of the embodiment is only to provide a better understanding of the utility model by illustrating an example of the utility model. In the drawings and the following description, at least part of the known structures and technologies are not shown in order to avoid unnecessary ambiguity to the utility model; and, for clarity, the size of some structures may be exaggerated. In addition, the features, structures or characteristics described below may be combined in one or more embodiments in any suitable manner.

[0044] Figure 1 FIG. 1 is a partial schematic diagram of an inclined evaporation coating device according to an embodiment of the utility model. Figure 1 As shown, the inclined evaporation coating device includes: a first coating main roller 11, a first evaporation source 12 and a second evaporation source 13; the first evaporation source 12 and the second evaporation source 13 are respectively located on both sides below the first coating main roller 11, and the first evaporation source 12 has a first angle a1 with the center line of the first coating main roller 11 in the vertical direction, and the second evaporation source 13 has a second angle a2 with the center line of the first coating main roller 11 in the vertical direction.

[0045] In the embodiment of the utility model, a certain angle is formed between the first evaporation source 12, the second evaporation source 13 and the first coating main roller 11 to adjust the growth mode of different coatings, improve the lateral bonding force and density of the coating deposition, and avoid the technical problem of poor tensile rebound performance of the prepared composite current collector due to structural defects in the lateral direction of the film layer caused by the vertical unidirectional growth of crystal clusters on the film surface.

[0046] Figure 2 FIG. 1 is a partial schematic diagram of another inclined evaporation coating device according to an embodiment of the present utility model. Figure 2 As shown, the inclined evaporation coating device includes: a second coating main roller 14, a third evaporation source 15 and a fourth evaporation source 16; the third evaporation source 15 and the fourth evaporation source 16 are respectively located on both sides below the second coating main roller 14, and the third evaporation source 15 and the second coating main roller 14 have a third angle a3 between the center line in the vertical direction, and the fourth evaporation source 16 and the second coating main roller 14 have a fourth angle a4 between the center line in the vertical direction. In this embodiment, the second coating main roller 14 and the third evaporation source 15 and the fourth evaporation source 16 are provided to increase the thickness of the coating layer stacked on the surface of the thin film substrate 20. Similarly, since there is a certain angle between the third evaporation source 15 and the fourth evaporation source 16 and the second coating main roller 14, the growth mode of different coating layers is adjusted to further improve the lateral bonding force and density of the coating deposition, and avoid the technical problem that the prepared composite current collector has poor pull-up rebound performance due to the structural defects in the lateral direction of the film layer caused by the vertical unidirectional growth of the crystal cluster on the film surface.

[0047] In some embodiments, the first angle a1, the second angle a2, the third angle a3, and the fourth angle a4 are all greater than 0 degrees and less than 30 degrees. Optionally, in order to make the coatings of the first evaporation source 12, the second evaporation source 13, the third evaporation source 15, and the fourth evaporation source 16 stacked on the surface of the film substrate 20 have consistency, the first angle a1, the second angle a2, the third angle a3, and the fourth angle a4 in this embodiment are equal.

[0048] In some embodiments, the vertical distances between the first evaporation source 12 and the second evaporation source 13 and the first coating main roller 11, and the vertical distances between the third evaporation source 15 and the fourth evaporation source 16 and the second coating main roller 14 are all 15 cm to 25 cm. At this time, the vapor particles of each evaporation source can be better layered on the surface of the film substrate 20.

[0049] Figure 3 Schematic diagram of the overall structure of an inclined evaporation coating device according to an embodiment of the utility model. Figure 3 As shown, in some embodiments, the inclined evaporation coating device includes: also includes: a vacuum chamber 10, and a unwinding roller 17, a winding roller 18 and a passing roller 19 that are rotatably installed in the vacuum chamber 10; after the thin film substrate 20 is unwound by the unwinding roller 17, it is guided by the passing roller 19 and tangentially adheres to the circular surface of the first coating main roller 11 and the circular surface of the second coating main roller 14 in sequence during the tape conveyance, the metal particles evaporated from the first evaporation source 12, the second evaporation source 13, the third evaporation source 15 and the fourth evaporation source 16 are deposited on the film surface of the thin film substrate 20 at different incident angles, and then are wound up by the winding roller 18.

[0050] Specifically, taking the first evaporation source 12 as an example, the first evaporation source 12 with high temperature is located above the circular first coating main roller 11, which can be a cooling main roller. The film substrate 20 to be evaporated is tangentially attached to the circular surface of the first coating main roller 11 under the guidance of the roller 19 and moves with it. The first coating main roller 11 is filled with cooling liquid to prevent the high-temperature first evaporation source 12 and high-temperature steam below from scalding the film substrate 20. The center point of the first evaporation source 12 obliquely below the first coating main roller 11 is aligned with the first coating main roller 11. The line connecting the vertical centers of the first coating main roller 11 and the line connecting the vertical centers of the first coating main roller 11 have a certain angle a1, that is, the center of the first evaporation source 12 and the center of the first coating main roller 11 in the vertical direction are not on the same vertical line, thereby forming a certain offset; the offset, the minimum vertical distance between the first evaporation source 12 and the first coating main roller 11, and the diameter of the first coating main roller 11 will determine the deposition angle of the coating area of ​​the first coating main roller 11; wherein the deposition angle can be understood as the angle between the tangent plane at the deposition point and the incident particle.

[0051] Since the section angles at different positions of the coating area of ​​the first coating main roller 11 change with the surface arc of the first coating main roller 11, as the film surface moves, the coating angle of the same deposition point changes continuously from large to small in the process of entering the coating area and exiting the coating area, thereby achieving different coating deposition angles.

[0052] For example, at the beginning of the film substrate 20 entering the coating area, the vapor deposition direction is closer to perpendicular to the substrate surface, and the incident angle is relatively large, for example, close to 90°. At this time, the incident particles collide with the film surface at a nearly perpendicular angle, which can achieve better film surface adhesion. As the film substrate 20 moves on the roller, the incident angle gradually becomes smaller, for example, 10°, or even smaller. Figure 4 FIG. 1 is a schematic diagram of the decomposition of the incident force and velocity of an incident particle according to an embodiment of the present invention. Figure 4 As shown, the angle at which the incident particles enter the thin film substrate 20 is β. At this time, the velocity and contact impact force of the incident particles can be decomposed into the longitudinal and lateral directions of the film surface, that is, the lateral component of the incident force and velocity of the particles and the longitudinal component of the incident force and velocity. The lateral components of the incident force and velocity of the particles form a collision, extrusion and planar migration on the surrounding adjacent particles. The lateral collision and extrusion realizes the lateral bonding force between the new incident particles and the original deposited particles. The planar migration formed by the longitudinal components of the incident force and velocity of the particles makes the transverse arrangement of the film layer crystals more compact and not easy to form a cross-section, thereby enabling the microscopic growth process of the film layer to achieve better lateral bonding and macroscopic mechanical / electrical properties.

[0053] In this embodiment, the force direction of the deposition of the crystals of the film surface coating is changed from the unidirectional force perpendicular to the film surface to the oblique incident force, thereby strengthening the lateral bonding degree of the crystals on the film surface, and at the same time changing the vertical growth mode of the coating microscopically, from the single vertical growth to the oblique deposition growth, making it easier to grow in a whole piece on the horizontal surface, avoiding the longitudinal growth of the film layer to form Figure 5 The crack A shown, Figure 5 It is a crack formed by the longitudinal growth of the membrane surface in the prior art.

[0054] The embodiment of the present invention changes the original position of the evaporation source to change the incident angle of the evaporated particles, that is, the original evaporation source is adjusted from being directly below the coating main roller to being fixedly set at an angle below the coating main roller, so as to change the growth mode of the coating, improve the lateral bonding force and density of the coating deposition, avoid structural defects in the lateral direction of the film layer caused by the vertical unidirectional growth of crystal clusters on the film surface, and improve the tensile rebound performance of the composite current collector.

[0055] In addition, the embodiment of the utility model further provides a composite current collector, which is prepared by an inclined evaporation coating device. Figure 6 Schematic diagram of the structure of the first composite current collector of the utility model embodiment, such as Figure 6 As shown, the composite current collector includes: a thin film substrate 20, and a first coating layer 21 and a second coating layer 22 arranged on the first surface of the thin film substrate 20; the angle between the growth direction of the steam molecules of the first coating layer 21 and the first surface of the thin film substrate 20 is an acute angle or an obtuse angle; the growth direction of the steam molecules of the second coating layer 22 is opposite to the growth direction of the steam molecules of the first coating layer 21, that is, the inclination direction of the second coating layer 22 is opposite to the inclination direction of the first coating layer 21, and the steam molecules of the second coating layer 22 are embedded in the edge of the first coating layer 21. In this embodiment, the growth mode of the first coating layer 21 and the second coating layer 22 is changed from the original vertical growth to the oblique growth mode, so as to improve the lateral bonding force and density of the film deposition, avoid the structural defects in the lateral direction of the film caused by the vertical unidirectional growth of the crystal cluster on the film surface, and improve the tensile force of the composite current collector.

[0056] Figure 7 Schematic diagram of the structure of the second composite current collector of the utility model embodiment, such as Figure 7As shown, in some embodiments, in order to increase the coating thickness of the composite current collector, the composite current collector also includes: a third coating 23 and a fourth coating 24 sequentially arranged on the second coating 22; the growth direction of the vapor molecules of the third coating 23 is opposite to the growth direction of the vapor molecules of the second coating 22, that is, the inclination direction of the third coating 23 is opposite to the inclination direction of the second coating 22, and the third coating 23 is embedded in the edge of the second coating 22; the growth direction of the vapor molecules of the fourth coating 24 is opposite to the growth direction of the vapor molecules of the third coating 23, that is, the inclination direction of the fourth coating 24 is opposite to the inclination direction of the third coating 23, and the fourth coating 24 is embedded in the edge of the third coating 23.

[0057] Figure 8 Schematic diagram of the structure of the third composite current collector of the utility model embodiment, such as Figure 8 As shown, in some embodiments, the composite current collector further includes: a fifth coating layer 25, a sixth coating layer 26, a seventh coating layer 27 and an eighth coating layer 28 sequentially arranged on the second surface of the film substrate 20; the angle between the growth direction of the vapor molecules of the fifth coating layer 25 and the second surface of the film substrate 20 is an acute angle or an obtuse angle; the growth direction of the vapor molecules of the sixth coating layer 26 is opposite to the growth direction of the vapor molecules of the fifth coating layer 25, that is, the inclination direction of the sixth coating layer 26 is opposite to the inclination direction of the fifth coating layer 25, and the sixth coating layer 26 is embedded The seventh coating 27 is embedded in the edge of the sixth coating 26; the growth direction of the steam molecules of the seventh coating 27 is opposite to the growth direction of the steam molecules of the sixth coating 26, that is, the inclination direction of the seventh coating 27 is opposite to the inclination direction of the sixth coating 26, and the seventh coating 27 is embedded in the edge of the sixth coating 26; the growth direction of the steam molecules of the eighth coating 28 is opposite to the growth direction of the steam molecules of the seventh coating 27, that is, the inclination direction of the eighth coating 28 is opposite to the inclination direction of the seventh coating 27, and the eighth coating 28 is embedded in the edge of the seventh coating 27.

[0058] like Figures 6 to 8As shown, since the growth mode of the vapor particles of the evaporation source changes from a single longitudinal vertical growth to an inclined deposition growth, the surface of each coating layer away from the surface of the film substrate 20 is wavy, that is, the surface of the first coating layer 21, the second coating layer 22, the third coating layer 23, and the fourth coating layer 24 away from the first surface of the film substrate 20 is wavy, and the surface of the fifth coating layer 25, the sixth coating layer 26, the seventh coating layer 27, and the eighth coating layer 28 away from the second surface of the film substrate 20 is wavy. In this embodiment, since the inclination directions of the two adjacent coating layers are opposite, during the coating process, the vapor particles of the latter coating layer will be embedded in the groove of the wavy edge of the previous coating layer, for example, the vapor particles of the second coating layer 22 are embedded in the groove of the wavy edge of the first coating layer 21, and the vapor particles of the third coating layer 23 are embedded in the groove of the wavy edge of the second coating layer 22, and so on. In this way, there is not only no crack, but also the lateral bonding force of the coating can be improved, and the tensile strength between any two adjacent layers is also improved, thereby improving the tensile strength of the composite current collector product.

[0059] Furthermore, an embodiment of the utility model also provides a composite current collector, which includes: a thin film substrate, and a plurality of coating layers sequentially arranged on the first surface and / or the second surface of the thin film substrate, each coating layer is obtained by inclined evaporation, and the inclination directions of any two adjacent coating layers are opposite; the surface of any one coating layer on the side away from the thin film substrate is wavy; the latter one of any two adjacent coating layers is embedded in the wavy surface of the former one.

[0060] In the description of the embodiments of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "upper, lower, inner and outer" are based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present utility model. In addition, the terms "first, second or third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0061] In the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "install, connect, connect" should be understood in a broad sense, for example: it can be a fixed connection, a detachable connection or an integral connection; it can also be a mechanical connection, an electrical connection or a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0062] Although the present invention has been described with reference to preferred embodiments, various modifications may be made thereto and parts thereof may be replaced with equivalents without departing from the scope of the present invention. In particular, the various technical features mentioned in the various embodiments may be combined in any manner as long as there is no structural conflict. The present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. An inclined evaporation coating device, characterized in that: The inclined evaporation coating device comprises: a first coating main roller (11), a first evaporation source (12) and a second evaporation source (13); wherein: The first evaporation source (12) and the second evaporation source (13) are respectively located on both sides below the first coating main roller (11); a first angle (a1) is formed between the first evaporation source (12) and the center line of the first coating main roller (11) in the vertical direction; and a second angle (a2) is formed between the second evaporation source (13) and the center line of the first coating main roller (11) in the vertical direction.

2. The inclined evaporation coating device according to claim 1, characterized in that: The inclined evaporation coating device comprises: a second coating main roller (14), a third evaporation source (15) and a fourth evaporation source (16); The third evaporation source (15) and the fourth evaporation source (16) are respectively located on both sides below the second coating main roller (14); a third angle (a3) ​​is formed between the third evaporation source (15) and the center line of the second coating main roller (14) in the vertical direction; and a fourth angle (a4) is formed between the fourth evaporation source (16) and the center line of the second coating main roller (14) in the vertical direction.

3. The inclined evaporation coating device according to claim 2, characterized in that: The first angle (a1), the second angle (a2), the third angle (a3) ​​and the fourth angle (a4) are all greater than 0 degrees and less than 30 degrees.

4. The inclined evaporation coating device according to claim 2, characterized in that: The first angle (a1), the second angle (a2), the third angle (a3) ​​and the fourth angle (a4) are equal.

5. The inclined evaporation coating device according to claim 2, characterized in that: The vertical distances between the first evaporation source (12) and the second evaporation source (13) and the first coating main roller (11), and the vertical distances between the third evaporation source (15) and the fourth evaporation source (16) and the second coating main roller (14) are all 15 cm to 25 cm.

6. The inclined evaporation coating device according to claim 2, characterized in that: The inclined evaporation coating device comprises: a vacuum chamber (10), and an unwinding roller (17), a winding roller (18) and a passing roller (19) rotatably installed in the vacuum chamber (10); After the thin film substrate (20) is unwound by the unwinding roller (17), it is guided by the passing roller (19) and tangentially adheres to the circular surface of the first coating main roller (11) and the circular surface of the second coating main roller (14) in sequence. After the metal particles evaporated from the first evaporation source (12), the second evaporation source (13), the third evaporation source (15) and the fourth evaporation source (16) are deposited on the film surface of the thin film substrate (20) at different incident angles, the thin film substrate is wound up by the winding roller (18).

7. A composite current collector, characterized in that: The composite current collector is prepared according to the inclined evaporation coating device according to any one of claims 1 to 6, and the composite current collector comprises: a thin film substrate (20), and a first coating layer (21) and a second coating layer (22) arranged on a first surface of the thin film substrate (20); The angle between the growth direction of the steam molecules of the first coating layer (21) and the first surface of the film substrate (20) is an acute angle or an obtuse angle; The growth direction of the steam molecules of the second coating layer (22) is opposite to the growth direction of the steam molecules of the first coating layer (21), and the steam molecules of the second coating layer (22) are embedded in the edge of the first coating layer (21); The composite current collector further comprises: a third coating layer (23) and a fourth coating layer (24) sequentially arranged on the second coating layer (22); The growth direction of the steam molecules of the third coating layer (23) is opposite to the growth direction of the steam molecules of the second coating layer (22), and the third coating layer (23) is embedded in the edge of the second coating layer (22); The growth direction of the steam molecules of the fourth coating layer (24) is opposite to the growth direction of the steam molecules of the third coating layer (23), and the fourth coating layer (24) is embedded in the edge of the third coating layer (23).

8. A composite current collector according to claim 7, characterized in that: The composite current collector further comprises: a fifth coating layer (25), a sixth coating layer (26), a seventh coating layer (27) and an eighth coating layer (28) which are sequentially arranged on the second surface of the film substrate (20); The angle between the growth direction of the steam molecules of the fifth coating layer (25) and the second surface of the film substrate (20) is an acute angle or an obtuse angle; The growth direction of the steam molecules of the sixth coating layer (26) is opposite to the growth direction of the steam molecules of the fifth coating layer (25), and the sixth coating layer (26) is embedded in the edge of the fifth coating layer (25); The growth direction of the steam molecules of the seventh coating layer (27) is opposite to the growth direction of the steam molecules of the sixth coating layer (26), and the seventh coating layer (27) is embedded in the edge of the sixth coating layer (26); The growth direction of the steam molecules of the eighth coating layer (28) is opposite to the growth direction of the steam molecules of the seventh coating layer (27), and the eighth coating layer (28) is embedded in the edge of the seventh coating layer (27).

9. A composite current collector according to claim 8, characterized in that: The first coating (21), the second coating (22), the third coating (23), and the fourth coating (24) have a side that is away from the first surface of the film substrate (20) and is wavy, and the fifth coating (25), the sixth coating (26), the seventh coating (27), and the eighth coating (28) have a side that is away from the second surface of the film substrate (20) and is wavy.

10. A composite current collector, characterized in that: The composite current collector comprises: a thin film substrate (20), and a plurality of coating layers sequentially arranged on a first surface and / or a second surface of the thin film substrate, each of the coating layers being obtained by inclined evaporation, and the inclination directions of any two adjacent coating layers being opposite; The surface of any one of the coating layers on a side away from the film substrate (20) is wavy; The latter plating layer of any two adjacent plating layers is embedded in the wavy surface of the former plating layer.

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