Evaporation line source crucible with anti-blocking evaporation nozzle

Abstract

According to the evaporation line source crucible with the anti-blocking evaporation nozzle, through a heat conduction rod and a heat preservation cover arranged on the peripheral side of the nozzle, in the evaporation process, a heating source of evaporation equipment heats the bottom of a crucible body, so that an evaporation material in an inner cavity of the crucible body is heated at high temperature to be converted into gaseous molecules, and the gaseous molecules overflow through the nozzle of a crucible cover; meanwhile, the lower ends of the heat conduction rods distributed on the peripheral side of the nozzle extend into the inner cavity of the crucible body, so that the heat conduction rods can conduct heat in the inner cavity of the crucible body to the peripheral side of the nozzle, and the temperature of the side wall of the nozzle can be increased; the heat insulation cover arranged on the peripheral sides of the nozzle and the heat conduction rod can conduct reflection insulation on heat conducted by the heat conduction rod, so that the temperature of the peripheral side of the nozzle is kept in a high state, loss of the temperature of the side wall of the nozzle is avoided, and the situation that the evaporation materials are condensed and accumulated on the inner side wall of the nozzle due to the low temperature of the nozzle can be avoided; therefore, the evaporation speed of the evaporation material and the quality of a thin film formed by evaporation are guaranteed.

Description

Technical Field

[0001] The present application relates to the technical field of line source crucibles, and in particular to an evaporation line source crucible with an anti-blocking evaporation nozzle. Background Art

[0002] Organic light-emitting diodes (OLEDs) have the advantages of high contrast, wide viewing angle, fast response time, flexible and thin design, low power consumption, no need for backlight, eco-friendly, high color saturation, etc., and are widely used in the field of high-performance display technology. In the current vacuum evaporation preparation of OLED devices, the line source crucible is used as the evaporation source of the evaporation equipment. The material to be evaporated is placed in the crucible of the vacuum evaporation source device. By heating the crucible, the atoms, atomic groups or molecules of the material are transformed from solid to gaseous, overflowing through the nozzle on the crucible cover, and then condensed onto the surface of the substrate to be coated to form a thin film, which is used to realize the light emission of OLED devices.

[0003] In the evaporation process of OLED, the heating component heats the bottom of the evaporation source (i.e., the crucible body) to promote the sublimation of the internal evaporation material and release it through the nozzle set on the top of the crucible body. However, due to the large distance between the nozzle and the bottom of the crucible body, a large amount of heat will be lost to the external environment during the process of heat transfer from the bottom to the nozzle. This heat loss will cause the temperature of the nozzle to drop, making it easy for the evaporation material to condense and accumulate on the inner wall of the nozzle. This phenomenon will not only affect the evaporation rate of the evaporation material, but also have an adverse effect on the quality of the film formed by evaporation. More seriously, the condensed evaporation material may clog the nozzle, interfere with the normal operation of the evaporation equipment, and increase the maintenance cost and difficulty of the equipment. Utility Model Content

[0004] In view of the shortcomings of the prior art, the purpose of the present application is to provide a evaporation line source crucible with anti-clogging of the evaporation nozzle, so as to solve the problems raised in the above background technology.

[0005] According to one aspect of the present application, a evaporation line source crucible with anti-clogging of evaporation nozzles comprises a crucible body, a line source crucible cover, a heat conductor and a heat insulation cover, wherein a line source crucible cover is provided on the top of the crucible body, and a plurality of nozzles are provided on the line source crucible cover along its length direction, each of the nozzles is an integrally formed structure with the line source crucible cover, each of the nozzles is connected to the inner cavity of the crucible body, a heat conductor is provided on the outer peripheral side of each nozzle, and the lower end of the heat conductor extends into the inner cavity of the crucible body, and a heat insulation cover is also provided on the outer peripheral side of each nozzle, and the heat conductor located on the outer peripheral side of the nozzle is arranged in the corresponding heat insulation cover.

[0006] Preferably, the heat conducting member includes a heat conducting rod, and a plurality of heat conducting rods are fixedly arranged uniformly and equidistantly on the outer peripheral side of each nozzle along its circumference, each of the heat conducting rods is vertically arranged, and the upper end of the heat conducting rod extends toward the top surface of the nozzle, and the lower end of the heat conducting rod passes through the line source crucible cover and extends toward the inner cavity of the crucible body, and the heat conducting rod is fixedly connected to the line source crucible cover. During the evaporation process, the heat conducting rod can extend into the evaporation material in the inner cavity of the crucible body.

[0007] Preferably, the heat conducting rod is made of graphite.

[0008] Preferably, the heat insulation cover is a truncated cone-shaped shell structure, and the heat insulation cover is arranged on the outer peripheral side of the corresponding nozzle and the plurality of heat-conducting rods. The top of the heat insulation cover is provided with an opening, and the inner side wall of the opening at the top of the heat insulation cover is in contact with the outer side wall of the nozzle, and the outer top surface of the heat insulation cover is flush with the top surface of the nozzle, and a groove is provided on the inner top surface of the heat insulation cover at the position corresponding to each heat-conducting rod, and the shape of the groove is adapted to the shape of the cross-section of the heat-conducting rod, and the top end of the heat-conducting rod can be clamped in the corresponding groove.

[0009] Preferably, the thermal insulation cover is made of ceramic material.

[0010] The advantages of the present application over the prior art are as follows: a evaporation line source crucible with an anti-clogging evaporation nozzle of the present application, through a heat-conducting rod and a heat-insulating cover arranged on the outer peripheral side of the nozzle, during the evaporation process, the heating source of the evaporation equipment heats the bottom of the crucible body so that the evaporation material in its inner cavity is heated to high temperature and converted into gaseous molecules and overflows through the crucible cover nozzle; at the same time, since the lower end of the heat-conducting rod distributed on the outer peripheral side of the nozzle extends into the inner cavity of the crucible body, the heat-conducting rod can conduct the heat in the inner cavity of the crucible body to the side around the nozzle, thereby increasing the temperature of the nozzle side wall; and the heat-insulating cover arranged on the outer peripheral side of the nozzle and the heat-conducting rod can reflect and insulate the heat conducted by the heat-conducting rod so that the temperature around the nozzle is kept at a high state, avoiding the loss of the nozzle side wall temperature, thereby avoiding the condensation and accumulation of the evaporation material on the inner wall of the nozzle due to the low temperature of the nozzle, thereby ensuring the evaporation rate of the evaporation material and the quality of the thin film formed by evaporation. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a three-dimensional diagram of an evaporation line source crucible for preventing evaporation nozzle from being blocked according to an embodiment of the present application.

[0012] Figure 2 This is a three-dimensional exploded view of an evaporation line source crucible for preventing evaporation nozzle blockage according to an embodiment of the present application.

[0013] Figure 3The cross-sectional view of an evaporation line source crucible for preventing evaporation nozzle from being blocked according to an embodiment of the present application.

[0014] Figure 4 The invention is a cross-sectional view of a heat insulation cover of an evaporation line source crucible for preventing evaporation nozzle from being blocked according to an embodiment of the present application.

[0015] Figure numerals: 1. crucible body; 2. line source crucible cover; 3. heat insulation cover; 4. nozzle; 5. heat conducting rod; 6. groove. DETAILED DESCRIPTION

[0016] In order to make the content of this application easier to understand, the technical solutions in the embodiments of this application will be described clearly and completely in conjunction with the drawings in the embodiments of this application. It should be noted that the words "front", "rear", "left", "right", "upper" and "lower" used in the following description refer to the attached drawings. Figure 3 As used herein, the terms "inward" and "outward" refer to directions toward and away from, respectively, the geometric center of the particular component.

[0017] like Figure 1 to Figure 4As shown, a evaporation line source crucible with anti-clogging of evaporation nozzles includes a crucible body 1, a line source crucible cover 2, a heat conducting member and a heat insulation cover 3. The top of the crucible body 1 is provided with a line source crucible cover 2, and a plurality of nozzles 4 are arranged on the line source crucible cover 2 along its length direction. Each nozzle 4 is an integrally formed structure with the line source crucible cover 2, and each nozzle 4 is connected to the inner cavity of the crucible body 1. A heat conducting member is arranged on the outer peripheral side of each nozzle 4. Specifically, the heat conducting member includes a heat conducting rod 5. A plurality of heat conducting rods 5 are evenly and equidistantly fixed on the outer peripheral side of each nozzle 4 along its circumference. The arrangement of the plurality of heat conducting rods 5 evenly and equidistantly distributed on the outer peripheral side of the nozzle 4 can ensure that the heat conducting rods 5 conduct heat. The heat of the nozzle 4 can be evenly distributed on the side wall of the nozzle 4; each heat-conducting rod 5 is vertically arranged, and the upper end of the heat-conducting rod 5 extends toward the top surface of the nozzle 4, and the lower end of the heat-conducting rod 5 passes through the line source crucible cover 2 and extends toward the inner cavity of the crucible body 1. During the evaporation process, the heat-conducting rod 5 can extend into the evaporation material in the inner cavity of the crucible body 1. This design allows the heat-conducting rod 5 to better conduct the heat of the inner cavity of the crucible body 1 to the side wall of the nozzle 4. The heat-conducting rod 5 is fixedly connected to the line source crucible cover 2 and the outer wall of the nozzle 4. In addition, the material of the heat-conducting rod 5 is graphite, which has extremely high thermal conductivity and high temperature resistance, and can ensure that the heat-conducting rod 5 has Good thermal conductivity enables the heat-conducting rod 5 to better conduct the heat from the inner cavity of the crucible body 1 to the side wall of the nozzle 4; the lower end of the heat-conducting member extends into the inner cavity of the crucible body 1, and the outer peripheral side of each nozzle 4 is also covered with a heat insulation cover 3. Specifically, the heat insulation cover 3 is a truncated cone shell structure, and the top of the heat insulation cover 3 is provided with an opening corresponding to the position of the nozzle 4 to prevent the heat insulation cover 3 from affecting the normal operation of the nozzle 4. In addition, a groove 6 is provided on the inner top surface of the heat insulation cover 3 at the position corresponding to each heat-conducting rod 5, and the shape of the groove 6 is adapted to the shape of the cross section of the heat-conducting rod 5. When the heat insulation cover 3 is sleeved and installed on the outer peripheral side of the nozzle 4, the heat insulation cover 3 The inner wall of the top opening of the cover 3 is in contact with the outer wall of the nozzle 4, and the outer top surface of the heat insulation cover 3 is flush with the top surface of the nozzle 4. The top end of the heat-conducting rod 5 can be stuck in the corresponding groove 6 to ensure the stable installation of the heat insulation cover 3, and the heat insulation cover 3 is arranged on the outer peripheral side of the corresponding nozzle 4 and multiple heat-conducting rods 5, so as to reflect and insulate the heat conducted by the heat-conducting rod 5 so that the temperature around the nozzle 4 is maintained at a high state, avoiding the loss of the temperature of the side wall of the nozzle 4; in addition, the material of the heat insulation cover 3 is ceramic material, and the ceramic material has good thermal insulation performance, so that the heat conducted by the heat-conducting rod 5 can be better maintained in the heat insulation cover 3.

[0018] Working principle: During the evaporation process, the heating source of the evaporation equipment heats the bottom of the crucible body 1 so that the evaporation material in its inner cavity is heated to high temperature and converted into gaseous molecules and overflows through the crucible cover nozzle 4. At the same time, since the lower end of the heat-conducting rod 5 distributed on the outer side of the nozzle 4 extends into the inner cavity of the crucible body 1, the heat-conducting rod 5 can conduct the heat in the inner cavity of the crucible body 1 to the side around the nozzle 4, thereby increasing the temperature of the side wall of the nozzle 4, and the heat insulation cover 3 arranged on the outer side of the nozzle 4 and the heat-conducting rod 5 can reflect and insulate the heat conducted by the heat-conducting rod 5 so that the temperature around the nozzle 4 is kept at a high state, avoiding the loss of the temperature of the side wall of the nozzle 4, thereby avoiding the condensation and accumulation of the evaporation material on the inner wall of the nozzle 4 due to the low temperature of the nozzle 4, thereby ensuring the evaporation rate of the evaporation material and the quality of the thin film formed by evaporation.

[0019] The above embodiments are only used to illustrate the technical solutions of the embodiments of the present application, rather than to limit them. Although the embodiments of the present application are described in detail with reference to the above embodiments, it should be understood by those skilled in the art that the technical solutions described in the above embodiments can still be modified, or some of the technical features can be replaced by equivalents, without departing from the spirit and scope defined by the claims of the present application.

Claims

1. A evaporation line source crucible for preventing evaporation nozzle from being blocked, comprising a crucible body (1), a line source crucible cover (2), a heat conducting member and a heat insulation cover (3), characterized in that: A linear source crucible cover (2) is provided on the top of the crucible body (1), and a plurality of nozzles (4) are provided on the linear source crucible cover (2) along its length direction, each of the nozzles (4) is an integrally formed structure with the linear source crucible cover (2), each of the nozzles (4) is connected to the inner cavity of the crucible body (1), a heat conducting member is provided on the outer peripheral side of each of the nozzles (4), and the lower end of the heat conducting member extends into the inner cavity of the crucible body (1), and a heat insulation cover (3) is also provided on the outer peripheral side of each of the nozzles (4), and the heat conducting member located on the outer peripheral side of the nozzle (4) is arranged in the corresponding heat insulation cover (3).

2. The evaporation line source crucible for preventing evaporation nozzle blockage according to claim 1, characterized in that: The heat conducting member comprises a heat conducting rod (5), and a plurality of heat conducting rods (5) are fixedly provided on the outer peripheral side of each nozzle (4) at uniform intervals along the circumference thereof, and each heat conducting rod (5) is vertically arranged, and the upper end of the heat conducting rod (5) is extended toward the top surface of the nozzle (4), and the lower end of the heat conducting rod (5) is extended toward the inner cavity of the crucible body (1) through the line source crucible cover (2), and the heat conducting rod (5) is fixedly connected to the line source crucible cover (2), and during the evaporation process, the heat conducting rod (5) can extend into the evaporation material in the inner cavity of the crucible body (1).

3. The evaporation line source crucible for preventing evaporation nozzle from being blocked according to claim 2, characterized in that: The material of the heat conducting rod (5) is graphite.

4. The evaporation line source crucible for preventing evaporation nozzle from being blocked according to claim 2, characterized in that: The heat insulation cover (3) is a truncated cone-shaped shell structure. The heat insulation cover (3) is arranged on the outer peripheral side of the corresponding nozzle (4) and the plurality of heat-conducting rods (5). The top of the heat insulation cover (3) is provided with an opening, and the inner side wall of the opening at the top of the heat insulation cover (3) is in contact with the outer side wall of the nozzle (4), and the outer top surface of the heat insulation cover (3) is flush with the top surface of the nozzle (4). A groove (6) is provided on the inner top surface of the heat insulation cover (3) at the position corresponding to each heat-conducting rod (5). The shape of the groove (6) is adapted to the shape of the cross section of the heat-conducting rod (5), and the top end of the heat-conducting rod (5) can be clamped in the corresponding groove (6).

5. The evaporation line source crucible for preventing evaporation nozzle from being blocked according to claim 4, characterized in that: The material of the heat insulation cover (3) is ceramic material.

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