Wafer inspection jig

Abstract

The utility model belongs to the technical field of semiconductor manufacturing detection jigs, and particularly relates to a wafer inspection jig which comprises a base, a transverse guide rail, a longitudinal guide rail connected with the transverse guide rail in a matched mode and a linear bearing movably connected with the transverse guide rail and the longitudinal guide rail in a matched mode. A rotating bearing is fixedly installed on the middle supporting seat, a rotating platform is arranged on the rotating bearing in a matched and rotating connection mode, a lifting support is movably connected to the rotating platform, a wafer placing jig is fixedly connected to the lifting support, a wafer placing clamping groove is formed in the wafer placing jig, and the wafer placing clamping groove is fixedly connected to the lifting support. According to the utility model, the wafer can be prevented from being scratched or broken during inspection, the inspection efficiency is high, and the product quality is ensured.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor manufacturing detection jigs, and specifically relates to a wafer inspection jig. Background Art

[0002] A tooling fixture for wafer inspection in the semiconductor front-line production process is used for product quality inspection before and after dicing. After receiving the customer's wafer, IQC needs to inspect the quality of the customer's incoming wafers, and the qualified products are delivered to the workshop for production. The wafer production steps are: IQC inspection-wafer front film-grinding-wafer inspection-wafer back film-wafer cutting-wafer inspection. The appearance of the wafer needs to be inspected for the incoming IQC inspection and the wafers after grinding and cutting, and personnel need to manually take the wafer under a 50x microscope for inspection.

[0003] The traditional working method in the industry is to place the wafer directly under a microscope for inspection. The existing traditional inspection method has the following defects: 1. When using the existing traditional inspection method, some wafers have moisture on the back and are not completely dry, which can easily cause the back of the wafer to be adsorbed on the microscope table, making it difficult to move and pick up the wafer, and there is a risk of quality abnormalities such as chipping of the wafer corners; 2. When using the existing traditional inspection method, it is inconvenient to inspect the back of the wafer, and it is necessary to place anti-scratch paper on the front of the wafer to protect the front of the wafer from being scratched, affecting work efficiency; 3. When using the existing traditional inspection method, the wafer is directly placed on the inspection table for inspection, which is easy for dust to contaminate the wafer, and it also There is a risk of scratches; 4. When using the existing traditional inspection method, it is inconvenient to move the wafer up and down on the inspection table. If the operation is improper, it is easy to cause a backlog of individual products, and there is a risk of quality abnormalities such as product corner chipping; 5. When using the existing traditional inspection method, when inspectors inspect product quality under a microscope, they are likely to touch the product due to human factors, causing the wafer to be scratched or contaminated; 6. When using the existing traditional inspection method, the wafer is placed on the table of the microscope for inspection. The table is completely exposed, and foreign matter is easily attached, resulting in abnormal product quality; 7. When using the existing traditional inspection method, the operation speed is slow and the efficiency is low, which greatly increases the company's labor costs. Utility Model Content

[0004] In view of the above-mentioned deficiencies existing in the prior art, the utility model provides a wafer inspection fixture to solve the above-mentioned existing problems.

[0005] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0006] A wafer inspection jig comprises a base, a transverse guide rail, a longitudinal guide rail connected to the transverse guide rail, and a linear bearing movably connected to the transverse guide rail and the longitudinal guide rail, wherein an intermediate support seat is installed on the longitudinal guide rail, a rotating bearing is fixedly installed on the intermediate support seat, a rotating platform is rotatably connected to the rotating bearing, a lifting bracket is movably connected to the rotating platform, a wafer placement jig is fixedly connected to the lifting bracket, and a wafer placement slot is provided on the wafer placement jig.

[0007] Furthermore, the wafer placement jig is U-shaped, and the wafer placement slots are arranged on two side walls of the wafer placement jig.

[0008] Furthermore, the lifting bracket is hinged to the rotating platform.

[0009] Furthermore, the rotary bearing is located in the middle of the intermediate support seat.

[0010] Furthermore, the intermediate support seat is cylindrical.

[0011] Compared with the prior art, the utility model has the following beneficial effects:

[0012] 1. When using the utility model, the wafer will not contact the inspection table, and the wafer will not be adsorbed on the table due to wet water, resulting in chipping of the wafer corner;

[0013] 2. When using the utility model, when inspecting the back of the wafer, there is no need to place anti-scratch paper on the front of the wafer, which greatly improves the work efficiency of employees;

[0014] 3. The utility model is equipped with a slide rail, which can easily move up, down, left and right, and can avoid scratching the wafer due to human factors;

[0015] 4. The use of this utility model greatly improves the work efficiency of employees and reduces the company's labor costs;

[0016] 5. When the utility model is used, the wafer cannot touch the inspection table, and the staff cannot touch the wafer during the inspection process, so the occurrence of wafer cracking during the IQC incoming material inspection process can be prevented. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a three-dimensional structural schematic diagram of an embodiment of a wafer inspection fixture of the utility model (viewing angle 1);

[0018] Figure 2 This is a schematic diagram of the three-dimensional structure of an embodiment of a wafer inspection fixture of the utility model (viewing angle 2);

[0019] The reference numerals in the drawings of the specification include:

[0020] Base 1, transverse guide rail 2, longitudinal guide rail 3, linear bearing 4, intermediate support seat 5, rotary bearing 6, rotary platform 7, lifting bracket 8, wafer placement fixture 9, wafer placement slot 10. DETAILED DESCRIPTION

[0021] In order to enable those skilled in the art to better understand the present invention, the technical solution of the present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0022] Among them, the drawings are only used for illustrative explanations, and they only represent schematic diagrams rather than actual pictures, and should not be understood as limitations on this patent; in order to better illustrate the embodiments of the utility model, some parts of the drawings may be omitted, enlarged or reduced, and do not represent the size of the actual product; for those skilled in the art, it is understandable that some well-known structures and their descriptions in the drawings may be omitted.

[0023] The same or similar numbers in the drawings of the embodiments of the present invention correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "upper", "lower", "left", "right", "inner", "outer", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the terms describing the position relationship in the drawings are only used for illustrative purposes and cannot be understood as a limitation on this patent. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0024] In the description of the present invention, unless otherwise clearly specified and limited, if the term "connection" or the like appears to indicate the connection relationship between components, the term should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two components or the interaction relationship between two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0025] Example:

[0026] like Figure 1-Figure 2As shown, a wafer inspection jig of the utility model comprises a base 1, a transverse guide rail 2, a longitudinal guide rail 3 connected to the transverse guide rail 2, and a linear bearing 4 movably connected to the transverse guide rail 2 and the longitudinal guide rail 3, an intermediate support seat 5 is installed on the longitudinal guide rail 3, a rotating bearing 6 is fixedly installed on the intermediate support seat 5, a rotating platform 7 is rotatably connected to the rotating bearing 6, a lifting bracket 8 is movably connected to the rotating platform 7, a wafer placing jig 9 is fixedly connected to the lifting bracket 8, a wafer placing jig 9 is provided on the wafer placing jig 9, the wafer placing jig 9 is U-shaped, the wafer placing slot 10 is arranged on both side walls of the wafer placing jig 9, the lifting bracket 8 is hinged to the rotating platform 7, the rotating bearing 6 is located in the middle of the intermediate support seat 5, and the intermediate support seat 5 is cylindrical.

[0027] Base 1: Made of metal, it is the bottom plate of the fixture device. All devices are installed on the base 1.

[0028] Transverse guide rail 2: a common part in the market, used in conjunction with linear bearing 4 to achieve the lateral movement of the jig on the platform.

[0029] Longitudinal guide rail 3: a common part in the market, used in conjunction with linear bearing 4 to achieve the longitudinal movement function of the jig on the platform.

[0030] Linear bearing 4: a common part in the market, used with guide rails (horizontal and vertical) to realize the movement of the tool in the X and Y directions

[0031] The middle support seat 5 is made of metal and is installed on the longitudinal guide rail 3 to realize the movement function in the X and Y directions.

[0032] Rotating platform 7: made of metal material, installed on the rotating bearing 6 to achieve the rotating function.

[0033] The rotating bearing 6 is connected to the rotating platform 7 and fixed on the intermediate support seat 5 to realize the function of the rotating platform 7 rotating on the intermediate support seat 5 .

[0034] Lifting bracket 8: A three-level bracket, nested layer by layer, made of metal material, can be raised or shortened to achieve the function of adjusting the height.

[0035] Wafer placement jig 9: a component used to place wafers in cooperation with the wafer placement slot 10, made of stainless steel plate, connected to the lifting bracket 8, to realize the inspection function of the wafer jig.

[0036] The above are only embodiments of the utility model. The common sense such as the known specific structures and characteristics in the scheme is not described in detail here. The ordinary technicians in the relevant field are aware of all the common technical knowledge in the technical field to which the utility model belongs before the application date or priority date, can obtain all the existing technologies in the field, and have the ability to apply the conventional experimental means before that date. The ordinary technicians in the relevant field can improve and implement the scheme in combination with their own abilities under the enlightenment given by this application. Some typical known structures or known methods should not become obstacles for the ordinary technicians in the relevant field to implement this application. It should be pointed out that for the technicians in this field, without departing from the structure of the utility model, several deformations and improvements can be made, which should also be regarded as the protection scope of the utility model, and these will not affect the effect of the implementation of the utility model and the practicality of the patent.

Claims

1. A wafer inspection jig, characterized in that: It includes a base, a transverse guide rail, a longitudinal guide rail connected to the transverse guide rail, and a linear bearing movably connected to the transverse guide rail and the longitudinal guide rail. An intermediate support seat is installed on the longitudinal guide rail, a rotating bearing is fixedly installed on the intermediate support seat, a rotating platform is rotatably connected to the rotating bearing, a lifting bracket is movably connected to the rotating platform, a wafer placement fixture is fixedly connected to the lifting bracket, and a wafer placement slot is provided on the wafer placement fixture.

2. A wafer inspection jig as claimed in claim 1, characterized in that: The wafer placement fixture is U-shaped, and the wafer placement slots are arranged on two side walls of the wafer placement fixture.

3. A wafer inspection jig as claimed in claim 2, characterized in that: The lifting bracket is hinged to the rotating platform.

4. A wafer inspection jig as claimed in claim 3, characterized in that: The rotary bearing is located in the middle of the intermediate support seat.

5. A wafer inspection jig as claimed in claim 4, characterized in that: The intermediate support seat is cylindrical.

Images