Semiconductor processing machine tool positioning mechanism

Abstract

The utility model discloses a semiconductor processing machine tool positioning mechanism, and relates to the technical field of semiconductor processing. A plurality of sliding plates are bilaterally symmetrically arranged on the front and rear sides of the upper surface of the fixed plate, the lower sides of the adjacent sliding plates are fixed on a movable plate at equal intervals, the movable plate is slidably arranged in the fixed plate, mounting plates are bilaterally symmetrically arranged on the left and right sides of the upper side of the fixed plate, and the mounting plates are connected with the sliding plates; the first adjusting lead screws are in front-back symmetry in pairs and are rotationally connected to the left side and the right side in the fixed plate through bearings, and the movable plates are rotationally connected to the corresponding first adjusting lead screws through threads in a one-to-one correspondence mode. The adjusting motors are connected with one ends of the first adjusting lead screws in a one-to-one correspondence mode, and the adjusting motors are embedded in the fixing plate through waterproof covers. The abutting rods are symmetrically arranged on the side, adjacent to the center of the fixing plate, of the mounting plate in pairs and connected with the mounting plate through a driving mechanism. According to the invention, irregular semiconductors can be positioned, and the phenomenon of deviation does not occur in the processing process, so that the processing efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a semiconductor processing machine tool positioning mechanism. Background Art

[0002] Semiconductors refer to materials whose electrical conductivity at room temperature is between that of conductors and insulators. Semiconductors are widely used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting applications, high-power power conversion and other fields. Semiconductors need to be positioned during the processing, but the positioning mechanism in the existing technology cannot position irregular shapes, and displacement is prone to occur during the processing, thereby affecting the processing efficiency. Utility Model Content

[0003] The purpose of the utility model is to provide a semiconductor processing machine tool positioning mechanism with reasonable design and convenient use in view of the defects and shortcomings of the prior art, which can effectively solve the defects of the above-mentioned prior art.

[0004] To achieve the above purpose, the technical solution adopted by the utility model is: it comprises a fixed plate, a sliding plate and a mounting plate, the front and rear sides of the upper surface of the fixed plate are both symmetrically provided with a plurality of sliding plates, the lower sides of the adjacent plurality of sliding plates are equidistantly fixed on the movable plate, the movable plate is slidably arranged in the fixed plate, the left and right sides of the upper side of the fixed plate are both symmetrically provided with mounting plates, and the mounting plates are connected to the sliding plates; it also comprises:

[0005] The number of the number one adjusting screw rods is four, and the number of the number one adjusting screw rods is symmetrical in front and back and is screwed together at the left and right sides of the fixed plate through bearings, and the movable plates are screwed together on the corresponding number one adjusting screw rods through threads one by one;

[0006] Adjustment motors, there are four adjustment motors, and they are connected one by one to one end of the first adjustment screw rod, and the adjustment motors are embedded in the fixed plate through a waterproof cover;

[0007] The number of the resisting rods is eight, and the resisting rods are symmetrically arranged in pairs on one side of the mounting plate adjacent to the center of the fixing plate, and the resisting rods are connected to the mounting plate through a driving mechanism;

[0008] Through the above technical scheme, according to the size of the semiconductor, the adjusting motor is started, the adjusting motor drives the corresponding No. 1 adjusting screw to rotate, the No. 1 adjusting screw drives the movable plate on the upper side to move, the movable plate drives the mounting plate to move through the sliding plate, the mounting plate drives the interference rod to move through the driving mechanism, until the interference rods on the four driving mechanisms are respectively located at the front and rear sides of the two sides of the semiconductor, and then the semiconductor is placed on the fixed plate, the driving mechanism is started, and the driving mechanism drives the interference rods on each side to move toward one side of the semiconductor until the interference rods are in contact with the side of the semiconductor, thereby limiting the semiconductor.

[0009] As a further improvement of the utility model, a positioning plate is provided on the lower side of the mounting plate, the lower surface of the positioning plate is fixed on the sliding plate adjacent thereto, a No. 2 adjusting screw rod is embedded on both the front and rear sides of the positioning plate, the two ends of the No. 2 adjusting screw rod are respectively connected by a synchronous wheel transmission assembly, a twisting disk is fixed on one end of a No. 2 adjusting screw rod in the same positioning plate, the twisting disk is suspended on the outer side of the positioning plate, and the nut on the No. 2 adjusting screw rod passes through the slide groove on the upper surface of the positioning plate and is fixedly connected to the mounting plate;

[0010] Through the above technical solution, when the semiconductor is small, the No. 2 adjusting screw connected to it is driven to rotate by turning the disk, and the No. 2 adjusting screw drives another No. 2 adjusting screw to rotate through the synchronous wheel transmission assembly. The two adjusting screws simultaneously drive the mounting plate to move through the nut, and the mounting plate moves through the driving mechanism resistance rod until the resistance rod reaches a suitable position.

[0011] As a further improvement of the utility model, a rubber protective sleeve is sleeved and fixed on the abutment rod;

[0012] Through the above technical solution, when the semiconductor is positioned by the interference rod, the interference rod and the semiconductor are isolated by the rubber protective sleeve, thereby preventing the interference rod from damaging the semiconductor.

[0013] As a further improvement of the utility model, the driving mechanism comprises:

[0014] An electric push rod, which is embedded and fixed on one side of the mounting plate, and a gear is fixed on the piston rod of the electric push rod through a fixing frame;

[0015] Racks, there are two racks, and they are symmetrically meshed on the front and rear sides of the gear. A sliding bar is fixed on one side wall of the rack away from the gear. The sliding bar is slidably arranged in the sliding grooves on the front and rear inner walls of the mounting plate. One end of the rack passes through the mounting plate and is fixedly connected to the abutment rod;

[0016] Through the above technical solution, the electric push rod is started, the electric push rod drives the gear to move, the gear drives the rack to move, the rack drives the interference rod to move, until the interference rod interferes with the semiconductor. When the side wall of the semiconductor is irregular, when one of the interference rods interferes with the semiconductor, the interference rod interferes with the rack on it, causing the rack to stop moving. At the same time, the electric push rod continues to move, and the stopped rack drives the gear to rotate, and the gear drives another rack to continue to move, and the rack drives the interference rod on it to move until the interference rod interferes with the semiconductor.

[0017] As a further improvement of the utility model, a limiting block is fixed on one side wall of the sliding bar, and the limiting block is slidably arranged in a limiting groove on the mounting plate;

[0018] The above technical solution can facilitate the movement of the sliding bar to prevent the rack and the sliding bar from moving out of the mounting plate.

[0019] Compared with the prior art, the beneficial effects of the utility model are as follows: the semiconductor processing machine tool positioning mechanism described in the utility model can position irregular semiconductors without offset during the processing, thereby improving the processing efficiency. The utility model has the advantages of reasonable setting and low production cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a structural schematic diagram of the utility model.

[0021] Figure 2 It is an exploded view of the utility model.

[0022] Figure 3 It is an exploded view of the mounting plate, the driving mechanism and the positioning plate in the utility model.

[0023] Figure 4 for Figure 3 Enlarged view of part A in the middle.

[0024] Description of reference numerals:

[0025] Fixed plate 1, sliding plate 2, mounting plate 3, moving plate 4, No. 1 adjusting screw 5, adjusting motor 6, resistance rod 7, driving mechanism 8, electric push rod 8-1, gear 8-2, rack 8-3, sliding bar 8-4, positioning plate 9, No. 2 adjusting screw 10, twisting disk 11, rubber protective cover 12, limit block 13. DETAILED DESCRIPTION

[0026] The utility model is further described below in conjunction with the accompanying drawings.

[0027] Example 1: Figure 1-Figure 4As shown, this embodiment comprises a fixed plate 1, a sliding plate 2 and a mounting plate 3, wherein a plurality of sliding plates 2 are symmetrically arranged on both the front and rear sides of the upper surface of the fixed plate 1, and the lower sides of the adjacent plurality of sliding plates 2 are equidistantly welded and fixed on the movable plate 4, and the movable plate 4 is slidably arranged in the fixed plate 1, and the mounting plates 3 are symmetrically arranged on both the left and right sides of the upper side of the fixed plate 1, and the mounting plates 3 are connected to the sliding plates 2; it also comprises:

[0028] The first adjusting screw rod 5 is four in number, and two of them are symmetrical in front and back and are screwed together at the left and right sides of the fixed plate 1 through bearings, and the movable plates 4 are screwed together on the corresponding first adjusting screw rods 5 through threads one by one;

[0029] The regulating motor 6 is four in number and is connected to one end of the first regulating screw rod 5 in a one-to-one correspondence. The regulating motor 6 is embedded in the fixing plate 1 through a waterproof cover.

[0030] The resisting rods 7 are eight in number and are symmetrically arranged in pairs on one side of the mounting plate 3 adjacent to the center of the fixing plate 1. The resisting rods 7 are connected to the mounting plate 3 via a driving mechanism 8. A rubber protective sleeve 12 is sleeved and fixed on the resisting rods 7. When the semiconductor is positioned by the resisting rods 7, the rubber protective sleeve 12 is used to isolate the resisting rods 7 from the semiconductor, thereby preventing the resisting rods 7 from causing damage to the semiconductor.

[0031] A positioning plate 9 is provided on the lower side of the mounting plate 3, and the lower surface of the positioning plate 9 is welded and fixed to the sliding plate 2 adjacent thereto. A No. 2 adjusting screw 10 is embedded on the front and rear sides of the positioning plate 9, and the two ends of the No. 2 adjusting screw 10 are respectively connected by a synchronous wheel transmission assembly. A screwing disk 11 is fixed on one end of a No. 2 adjusting screw 10 in the same positioning plate 9, and the screwing disk 11 is suspended on the outer side of the positioning plate 9. The nut on the No. 2 adjusting screw 10 passes through the slide groove on the upper surface of the positioning plate 9 and is fixedly connected to the mounting plate 3.

[0032] Example 2: See Figure 2-4 As shown, based on Example 1, the driving mechanism 8 includes:

[0033] An electric push rod 8-1, wherein the electric push rod 8-1 is embedded and fixed to one side of the inside of the mounting plate 3 by bolts, and a gear 8-2 is fixed to the piston rod of the electric push rod 8-1 by a fixing frame;

[0034] Rack 8-3, there are two racks 8-3, and they are symmetrically meshed on the front and rear sides of the gear 8-2. A sliding bar 8-4 is welded and fixed on one side wall of the rack 8-3 away from the gear 8-2. The sliding bar 8-4 is slidably set in the sliding grooves on the front and rear inner walls of the mounting plate 3. After one end of the rack 8-3 passes through the mounting plate 3, it is fixedly connected to the abutment rod 7; a limiting block 13 is welded and fixed on one side wall of the sliding bar 8-4, and the limiting block 13 is slidably set in the limiting groove on the mounting plate 3, which can facilitate the movement of the sliding bar 8-4 to prevent the rack 8-3 and the sliding bar 8-4 from moving out of the mounting plate 3.

[0035] When using the utility model, when the semiconductor is small, the second adjusting screw 10 connected to it is driven to rotate by twisting the disk 11, and the second adjusting screw 10 drives another No. 2 adjusting screw 10 to rotate through the synchronous wheel transmission assembly, and the two adjusting screws simultaneously drive the mounting plate 3 to move through the nut, and the mounting plate 3 moves the resistance rod 7 through the driving mechanism 8 until the resistance rod 7 reaches a suitable position, and according to the size of the semiconductor, the adjusting motor 6 is started, and the adjusting motor 6 drives the corresponding No. 1 adjusting screw 5 to rotate, and the No. 1 adjusting screw 5 drives the movable plates 4 on their respective upper sides to move, and the movable plate 4 drives the mounting plate 3 to move through the sliding plate 2, and the mounting plate 3 drives the resistance rod 7 to move through the driving mechanism 8 until the resistance rods 7 on the four driving mechanisms 8 are respectively located in front of the two sides of the semiconductor. On both sides of the back, the semiconductor is then placed on the fixed plate 1, and the electric push rod 8-1 is started. The electric push rod 8-1 drives the gear 8-2 to move, the gear 8-2 drives the rack 8-3 to move, and the rack 8-3 drives the interference rod 7 to move until the interference rod 7 interferes with the semiconductor. When the side wall of the semiconductor is irregular, when one of the interference rods 7 interferes with the semiconductor, the interference rod 7 interferes with the rack 8-3 thereon, causing the rack 8-3 to stop moving. At the same time, the electric push rod 8-1 continues to move, and the stopped rack 8-3 drives the gear 8-2 to rotate, and the gear 8-2 drives the other rack 8-3 to continue moving, and the rack 8-3 drives the interference rod 7 thereon to move until the interference rod 7 interferes with the semiconductor, thereby limiting the semiconductor.

[0036] Compared with the prior art, the beneficial effects of this specific implementation are as follows:

[0037] 1. The position of the resistance rod 7 in the front-to-back direction can be adjusted by adjusting the motor 6 and the No. 1 adjusting screw 5, and the position of the resistance rod 7 in the left-to-right direction can be adjusted by the cooperation of the No. 2 adjusting screw 10 and the positioning plate 9, so as to be suitable for positioning semiconductors of different specifications;

[0038] 2. The driving mechanism 8 disposed inside the mounting plate 3 can drive the abutment rods 7 to move separately, and the positions of two adjacent abutment rods 7 can also be adjusted separately according to the positions of the semiconductors, which is suitable for positioning irregular semiconductors.

[0039] The above description is only used to illustrate the technical solution of the utility model rather than to limit it. Other modifications or equivalent substitutions made to the technical solution of the utility model by ordinary technicians in this field should be included in the scope of the claims of the utility model as long as they do not depart from the spirit and scope of the technical solution of the utility model.

Claims

1. A semiconductor processing machine tool positioning mechanism, comprising a fixed plate (1), a sliding plate (2) and a mounting plate (3), wherein a plurality of sliding plates (2) are symmetrically arranged on both the front and rear sides of the upper surface of the fixed plate (1), the lower sides of the adjacent plurality of sliding plates (2) are equidistantly fixed on a movable plate (4), the movable plate (4) is slidably arranged in the fixed plate (1), the left and right sides of the upper side of the fixed plate (1) are symmetrically arranged on both the front and rear sides, and the mounting plate (3) is connected to the sliding plate (2); characterized in that: It also contains: A number one adjusting screw rod (5), wherein the number of the number one adjusting screw rods (5) is four, and the number two of the number one adjusting screw rods (5) are symmetrical in front and back and are screwed together via bearings and arranged on the left and right sides of the interior of the fixed plate (1), and the movable plates (4) are screwed together on the corresponding number one adjusting screw rods (5) via threads one by one; An adjusting motor (6), wherein the adjusting motor (6) is four in number and is connected one-to-one with one end of the first adjusting screw rod (5), and the adjusting motor (6) is embedded in the fixing plate (1) through a waterproof cover; The resisting rods (7) are eight in number and are symmetrically arranged in pairs on one side of the mounting plate (3) adjacent to the center of the fixing plate (1). The resisting rods (7) are connected to the mounting plate (3) via a driving mechanism (8).

2. A semiconductor processing machine tool positioning mechanism according to claim 1, characterized in that: A positioning plate (9) is provided on the lower side of the mounting plate (3), the lower surface of the positioning plate (9) is fixed on the sliding plate (2) adjacent thereto, and a No. 2 adjusting screw rod (10) is embedded on both the front and rear sides of the positioning plate (9), and the two ends of the No. 2 adjusting screw rod (10) are respectively connected through a synchronous wheel transmission assembly, and a screwing disk (11) is fixed on one end of a No. 2 adjusting screw rod (10) in the same positioning plate (9), and the screwing disk (11) is suspended on the outer side of the positioning plate (9), and the nut on the No. 2 adjusting screw rod (10) passes through the slide groove on the upper surface of the positioning plate (9) and is fixedly connected to the mounting plate (3).

3. A semiconductor processing machine tool positioning mechanism according to claim 1, characterized in that: A rubber protective sleeve (12) is sleeved and fixed on the resistance rod (7).

4. A semiconductor processing machine tool positioning mechanism according to claim 1, characterized in that: The driving mechanism (8) comprises: An electric push rod (8-1), the electric push rod (8-1) being embedded in and fixed on one side of the interior of the mounting plate (3), and a gear (8-2) being fixed on a piston rod of the electric push rod (8-1) via a fixing frame; Racks (8-3), there are two racks (8-3), which are symmetrically meshed on the front and rear sides of the gear (8-2), a sliding bar (8-4) is fixed on a side wall of the rack (8-3) away from the gear (8-2), and the sliding bar (8-4) is slidably arranged in the sliding grooves on the front and rear inner walls of the mounting plate (3), and one end of the rack (8-3) passes through the mounting plate (3) and is fixedly connected to the abutment rod (7).

5. A semiconductor processing machine tool positioning mechanism according to claim 4, characterized in that: A limiting block (13) is fixed on one side wall of the sliding bar (8-4), and the limiting block (13) is slidably arranged in a limiting groove on the mounting plate (3).

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