Degumming frame and crystal support two-in-one manipulator

Abstract

The utility model discloses a degumming frame crystal support two-in-one mechanical arm which comprises an upper layer platform and a lower layer platform, the upper layer platform is connected with a lifting support in a sliding mode, the lower end of the lifting support is fixedly connected with the lower layer platform, and a power assembly driving the lifting support to ascend and descend is arranged on the upper layer platform. A degumming frame grabbing manipulator, a crystal support grabbing manipulator and a sensor are installed on the lower-layer platform, the degumming frame grabbing manipulator comprises a movable connecting rod and a fixed connecting rod, a telescopic air cylinder is installed between the movable connecting rod and the fixed connecting rod and drives the movable connecting rod to be close to or away from the fixed connecting rod, and degumming frame grabbing fixing claws are installed at the two ends of the fixed connecting rod; degumming frame grabbing movable claws are installed at the two ends of the movable connecting rod. According to the utility model, one transplanting device is used on the production line and is simultaneously provided with the degumming frame grabbing manipulator and the crystal support grabbing manipulator, so that the requirements of grabbing and placing of the degumming frame and the crystal support can be met, the structure of the production line is optimized, the silicon wafer production efficiency is improved, the grabbing of two mechanisms can be completed through the single transplanting device, and the resource configuration is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing equipment, in particular to a two-in-one robot for a debonding rack and a crystal support. Background Art

[0002] In semiconductor silicon wafer production lines, debonding racks and wafer trays are commonly used to transport silicon wafers. Existing debonding racks and wafer trays are generally equipped with independent loading and unloading devices, resulting in low operating efficiency and a certain waste of production line resources.

[0003] Therefore, we propose a two-in-one robot for debonding rack and crystal support to solve the above problems. Utility Model Content

[0004] The purpose of the utility model is to provide a two-in-one robot for a debonding rack and a crystal support to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above purpose, the utility model provides the following technical solutions: a debonding rack crystal support two-in-one manipulator, comprising: an upper platform and a lower platform, the upper platform is slidably connected to a lifting bracket, the lower end of the lifting bracket is fixedly connected to the lower platform, and a power component for driving the lifting bracket to rise and fall is provided on the upper platform;

[0006] The lower platform is equipped with a debonding rack grabbing manipulator, a crystal tray grabbing manipulator and a sensor;

[0007] The degumming rack grabbing manipulator comprises a moving connecting rod and a fixed connecting rod, and a telescopic cylinder is installed between the moving connecting rod and the fixed connecting rod to drive the moving connecting rod to approach or move away from the fixed connecting rod;

[0008] The two ends of the fixed connecting rod are installed with fixed claws of the degumming frame, and the two ends of the moving connecting rod are installed with movable claws of the degumming frame.

[0009] Preferably, the power assembly comprises a lifting drive motor group, a rack is fixedly installed on the side of the lifting bracket, the lifting drive motor group is connected to a gearbox, the output end of the gearbox is connected to a gear, and the gear is meshed and connected to the rack.

[0010] Preferably, the upper platform is also provided with a component for cooperating with the upper track for lateral movement, and the component includes a horizontal movement drive motor group and a concave pulley. The horizontal movement drive motor group is fixedly mounted on the upper platform, the horizontal movement drive motor group drives the concave pulley, and the concave pulley is slidably connected to the upper track.

[0011] Preferably, a slide seat and a slide rail for linear movement of the moving link are provided above the lower platform, the slide rail is fixedly mounted on the upper surface of the lower platform, the slide seat is slidably connected to the slide rail, and the moving link is fixedly mounted on the slide seat.

[0012] Preferably, the crystal support grasping robot comprises a lifting cylinder fixed on the lower platform, the lifting cylinder is provided with a telescopic rod, the lower end of the telescopic rod is connected to the crystal support grasping plate, and a guide rod is provided between the crystal support grasping plate and the lower platform.

[0013] Preferably, gripper drive cylinders are symmetrically installed at both ends of the crystal support grabbing plate, and the telescopic ends of the gripper drive cylinders are fixedly connected to the crystal support grabbing claws.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] Using a transplanting device on the production line and equipping it with a debonding rack grasping robot and a wafer tray grasping robot can meet the needs of grasping and placing the debonding rack and the wafer tray, optimize the structure of the production line, and improve the silicon wafer production efficiency. A single transplanting device can complete the grasping of the two mechanisms, reducing resource allocation. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the structure of the utility model;

[0017] Figure 2 This is a schematic diagram of the structure of the grabbing and degumming rack and the crystal support of the utility model;

[0018] Figure 3 This is a schematic diagram of the structure of components on the upper platform of the utility model;

[0019] Figure 4 This is a schematic diagram of the structure of components on the lower platform of the utility model;

[0020] Figure 5 It is a partial structural schematic diagram of the crystal tray grabbing manipulator in the utility model.

[0021] In the figure: 1. upper platform; 11. concave pulley; 12. lifting drive motor group; 13. gearbox; 14. gear; 15. horizontal movement drive motor group; 2. lifting bracket; 21. rack; 3. lower platform; 31. degumming rack grabbing manipulator; 311. slide rail; 312. telescopic cylinder; 313. slide seat; 314. degumming rack grabbing action claw; 315. degumming rack grabbing fixed claw; 316. fixed connecting rod; 317. moving connecting rod; 32. crystal support grabbing manipulator; 321. lifting cylinder; 322. guide rod; 323. telescopic rod; 324. gripper drive cylinder; 325. crystal support grabbing claw; 326. crystal support grabbing plate; 33. sensor. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] See also Figure 1-5 The utility model provides a technical solution: a debonding rack and crystal support two-in-one manipulator, comprising: an upper platform 1 and a lower platform 3, wherein the upper platform 1 is slidably connected to a lifting bracket 2, and the lower end of the lifting bracket 2 is fixedly connected to the lower platform 3;

[0024] The upper platform 1 is provided with a power assembly for driving the lifting bracket 2 to lift, and the power assembly includes a lifting drive motor group 12;

[0025] Specifically, a rack 21 is fixedly installed on the side of the lifting bracket 2, the lifting drive motor group 12 is connected to the gearbox 13, the output end of the gearbox 13 is connected to the gear 14, and the gear 14 is meshed and connected to the rack 21;

[0026] The gear 14 is driven to rotate by the lifting drive motor group 12 and the gearbox 13, and the driving rack 21 drives the lifting bracket 2 to drive the lower platform 3 to lift;

[0027] The upper platform 1 is also provided with a component for cooperating with the upper track for lateral movement, and the component includes a horizontal movement drive motor group 15 and a concave pulley 11. The horizontal movement drive motor group 15 is fixedly installed on the upper platform 1, and the horizontal movement drive motor group 15 drives the concave pulley 11, and the concave pulley 11 is slidably connected to the upper track. The concave pulley 11 is driven by the horizontal movement drive motor group 15 to drive the upper platform 1 to move laterally along the upper track, thereby realizing the horizontal movement of the lower platform 3, thereby increasing the range of motion of the lower platform 3;

[0028] The lower platform 3 is equipped with a degumming rack grabbing manipulator 31, a crystal tray grabbing manipulator 32 and a sensor 33. The sensor 33 is used to sense whether there is material on the degumming rack and the crystal tray, and then control the degumming rack grabbing manipulator 31 and the crystal tray grabbing manipulator 32 through the control system to complete the grabbing action of the degumming rack and the crystal tray;

[0029] Specifically, the degumming rack grabbing manipulator 31 includes a moving link 317 and a fixed link 316, and a telescopic cylinder 312 is installed between the moving link 317 and the fixed link 316 to drive the moving link 317 to approach or move away from the fixed link 316;

[0030] The two ends of the fixed link 316 are equipped with fixed claws 315 for grabbing the degumming frame, and the two ends of the movable link 317 are equipped with movable claws 314 for grabbing the degumming frame. The degumming frame is released by moving the fixed claws 315 and the movable claws 314 closer to each other, and the degumming frame is grabbed when they are farther away from each other.

[0031] A slide seat 313 and a slide rail 311 for linear movement of a movable link 317 are provided above the lower platform 3. The slide rail 311 is fixedly installed on the upper surface of the lower platform 3. The slide seat 313 is slidably connected to the slide rail 311. The movable link 317 is fixedly installed on the slide seat 313.

[0032] The wafer tray grabbing manipulator 32 includes a lifting cylinder 321 fixed on the lower platform 3, and the lifting cylinder 321 is provided with a telescopic rod 323, the lower end of the telescopic rod 323 is connected to the wafer tray grabbing plate 326, and a guide rod 322 is provided between the wafer tray grabbing plate 326 and the lower platform 3. When the lifting cylinder 321 drives the telescopic rod 323 to extend and retract, the wafer tray grabbing plate 326 cooperates with the guide rod 322 to rise and fall linearly;

[0033] The two ends of the crystal support grab plate 326 are symmetrically installed with a gripper drive cylinder 324, and the telescopic end of the gripper drive cylinder 324 is fixedly connected to the crystal support grab claw 325;

[0034] When the crystal tray grasping plate 326 drives the crystal tray grasping claws 325 to descend to both sides of the crystal tray, the gripper drives the cylinder 324 to retract the crystal tray grasping claws 325, and the crystal tray grasping claws 325 hook the crystal tray to complete the grasping of the crystal tray.

[0035] Working principle: The upper platform 1 can drive the degumming rack grabbing robot 31 and the crystal tray grabbing robot 32 to move to the top of the degumming rack or the crystal tray through the concave pulley 11, and drive them to rise and fall through the lifting bracket 2 to reach the grabbing point, and then control the grabber through the cylinder to complete the grabbing of the degumming rack or the crystal tray, so as to realize the rapid transportation of the degumming rack or the crystal tray, save time for loading and unloading, and make loading and unloading faster, which greatly saves time. The use of the sensor 33 reduces the error rate, improves the production efficiency and the order of loading and unloading is the same.

[0036] The contents not described in detail in this specification belong to the prior art known to professional and technical personnel in this field.

[0037] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A two-in-one robot for debonding rack and crystal support, comprising: An upper platform (1) and a lower platform (3), wherein the upper platform (1) is slidably connected to a lifting bracket (2), the lower end of the lifting bracket (2) is fixedly connected to the lower platform (3), and a power component for driving the lifting bracket (2) to move up and down is provided on the upper platform (1); The invention is characterized in that: a debonding rack grabbing robot (31), a crystal tray grabbing robot (32) and a sensor (33) are installed on the lower platform (3); The degumming rack grabbing manipulator (31) comprises a moving connecting rod (317) and a fixed connecting rod (316), and a telescopic cylinder (312) is installed between the moving connecting rod (317) and the fixed connecting rod (316) to drive the moving connecting rod (317) to approach or move away from the fixed connecting rod (316); The two ends of the fixed connecting rod (316) are installed with the fixed claws (315) for grabbing the degumming frame, and the two ends of the moving connecting rod (317) are installed with the moving claws (314) for grabbing the degumming frame.

2. A two-in-one robot for debonding rack and crystal support according to claim 1, characterized in that: The power assembly comprises a lifting drive motor group (12), a rack (21) is fixedly mounted on the side of the lifting bracket (2), the lifting drive motor group (12) is connected to a gearbox (13), the output end of the gearbox (13) is connected to a gear (14), and the gear (14) is meshedly connected to the rack (21).

3. The debonding rack and crystal support two-in-one robot according to claim 1, characterized in that: The upper platform (1) is also provided with a component for cooperating with the upper track for lateral movement, the component comprising a horizontal movement drive motor group (15) and a concave pulley (11), the horizontal movement drive motor group (15) is fixedly mounted on the upper platform (1), the horizontal movement drive motor group (15) drives the concave pulley (11), and the concave pulley (11) is slidably connected to the upper track.

4. The debonding rack and crystal support two-in-one robot according to claim 1, characterized in that: A slide seat (313) and a slide rail (311) for linear movement of the moving link (317) are provided above the lower platform (3); the slide rail (311) is fixedly mounted on the upper surface of the lower platform (3); the slide seat (313) is slidably connected to the slide rail (311); and the moving link (317) is fixedly mounted on the slide seat (313).

5. The debonding rack and crystal support two-in-one robot according to claim 1, characterized in that: The crystal tray grasping robot (32) comprises a lifting cylinder (321) fixed on the lower platform (3), the lifting cylinder (321) is provided with a telescopic rod (323), the lower end of the telescopic rod (323) is connected to the crystal tray grasping plate (326), and a guide rod (322) is provided between the crystal tray grasping plate (326) and the lower platform (3).

6. The debonding rack and crystal support two-in-one robot according to claim 5, characterized in that: The two ends of the crystal support grabbing plate (326) are symmetrically mounted with a gripper driving cylinder (324), and the telescopic end of the gripper driving cylinder (324) is fixedly connected to the crystal support grabbing claw (325).

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