Batch pumping speed testing device for getter film

Abstract

The utility model relates to a getter film batch pumping speed testing device which comprises a support, an air inlet system and a testing system, wherein the air inlet system and the testing system are arranged on the support. The first air exhaust system is used for vacuumizing the air inlet system; and the second air exhaust system and the third air exhaust system are used for vacuumizing the testing system. According to the technical scheme, the Monte Carlo simulation method is adopted, the maximum pressure ratio of the two ends of the pipeline is obtained through experiments, the thin film pumping speed is obtained by comparing simulation results, meanwhile, in order to improve efficiency and save economy, the method of one gas path and two testing cavities is adopted, parallel testing can be achieved, and efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the research field of vacuum coating and film characteristics, and in particular to a getter film batch pumping speed testing device. Background Art

[0002] In order to obtain lower beam emittance, the new generation of diffraction-limited storage rings use high-gradient magnets, which results in a smaller magnet aperture. The overly small magnet aperture limits the aperture of the storage ring vacuum chamber. Due to the limitation of conductance of the small-aperture vacuum chamber, the decentralized vacuum pumping scheme in the traditional accelerator can no longer meet the use requirements. Non-evaporable getter films have pumping speeds that are not limited by conductance and low surface outgassing, so coating getter films on the inner wall of the vacuum pipe has become an ideal solution to this problem.

[0003] The performance test of getter film is particularly important, among which the pumping speed is one of the key indicators. The existing test method is difficult to accurately measure the pumping speed of pipeline film. The existing getter film pipeline adhesion coefficient measurement adopts the transmission coefficient method. Theoretical calculation shows that when the adhesion coefficient is greater than a certain value, the pressure ratio at both ends increases abruptly, which is inconsistent with the actual situation. Utility Model Content

[0004] The utility model aims to provide a getter film batch pumping speed test device, which adopts a Monte Carlo simulation method to obtain the maximum pressure ratio at both ends of the pipeline through experiments, thereby obtaining the film pumping speed by comparing the simulation results. At the same time, in order to improve efficiency and save economy, a method of one gas path and two test cavities is adopted, which can be tested in parallel and improve efficiency.

[0005] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme: comprising a bracket and an air intake system and a test system arranged on the bracket; further comprising a first air exhaust system for vacuumizing the air intake system and a second air exhaust system and a third air exhaust system for vacuumizing the test system;

[0006] The air intake system comprises a main air pipe, one end of which is connected to the first air pipe and the second air pipe through a first three-way connection, and the other end of which is connected to the first all-metal micro-leak valve and the second all-metal micro-leak valve through a second three-way connection; the first air pipe is connected to the carbon monoxide compressed gas cylinder through a first pressure reducing valve, and the first air pipe is provided with a first valve, the second air pipe is connected to the hydrogen compressed gas cylinder through a second pressure reducing valve, and the second air pipe is provided with a second valve; a filter, a first expansion cavity and a second expansion cavity are sequentially connected in series on the main air pipe, both ends of the filter are connected with a bypass, and a third valve is provided on the bypass; a fourth valve is provided between the filter and the first expansion cavity, and a fifth valve is provided between the first expansion cavity and the second expansion cavity, the cavity volume of the first expansion cavity is larger than that of the second expansion cavity, and the first expansion cavity and the second expansion cavity are respectively connected with a first thin film vacuum gauge and a second thin film vacuum gauge; the main air pipe is connected to the exhaust pipe in the first exhaust system;

[0007] The test system includes two test chambers arranged in parallel, the upper ends of the two test chambers are respectively connected to the first residual gas analyzer through the coating pipeline, and the lower ends of the two test chambers are respectively connected to the two plug-in valves in the third exhaust system. The chamber wall of the test chamber is connected to the second residual gas analyzer, the hot cathode ionization vacuum gauge, the first flange connection port and the second flange connection port, wherein: the first flange connection ports in the two test chambers are respectively connected to the first all-metal micro-leak valve and the second all-metal micro-leak valve in the intake system, and the second flange connection ports in the two test chambers are respectively connected to the two second all-metal angle valves in the second exhaust system.

[0008] The air intake system further comprises a liquid nitrogen tank arranged between the first three-way connection and the filter, and the main air pipe is provided with a spiral tube body immersed in the liquid nitrogen tank.

[0009] The first air pumping system includes a first bellows, one end of which is connected to the main air pipe through an air pumping pipe, and a sixth valve is provided on the air pumping pipe, the other end of the first bellows is connected to the first turbomolecular pump through a first all-metal angle valve, and the first turbomolecular pump is connected to the first dry pump.

[0010] The second air extraction system includes a second bellows and a third bellows arranged in parallel, one end of the second bellows and the third bellows are respectively connected to the second flange connection ports in the two test chambers through a second all-metal angle valve, the other ends of the second bellows and the third bellows are respectively connected to the third all-metal angle valve through a third three-way valve, the third all-metal angle valve is connected to the second turbomolecular pump, and the second turbomolecular pump is connected to the second dry pump.

[0011] The third exhaust system comprises two sputtering ion pumps arranged in parallel, and the two sputtering ion pumps are respectively connected to the lower ends of two test chambers in the test system through plug valves.

[0012] The third air extraction system is integrated on the bracket, and the first air extraction system and the second air extraction system are both externally arranged beside the bracket.

[0013] The carbon monoxide compressed gas cylinder and the hydrogen compressed gas cylinder are arranged in parallel on a gas cylinder fixing frame, and the gas cylinder fixing frame is fixed on the bottom plate of the bracket.

[0014] The two sputtering ion pumps are respectively fixed on the bottom plate of the bracket through an ion pump bracket.

[0015] The beneficial effects of the utility model are:

[0016] 1) In the test system of the utility model, two test chambers are arranged in parallel, and parallel testing is performed through a one-gas-path dual-test chamber structure, thereby improving efficiency.

[0017] 2) Before testing, the utility model first evacuates the air intake system through the first exhaust system, and evacuates the test system through the second exhaust system and the third exhaust system, and then introduces gas into the test system through the air intake system to obtain relevant values, thereby obtaining the film pumping speed and adsorption capacity.

[0018] 3) The utility model can solve the problem of reduced flow conductance caused by installing a filter by setting a bypass, thereby solving the problem of difficulty in evacuating the air intake system.

[0019] 4) The utility model can effectively condense impurity gases such as water vapor and carbon dioxide and purify the gas by providing a liquid nitrogen tank.

[0020] 5) The utility model can further purify the gas by setting a filter, and filter out particles larger than 0.5um in the gas.

[0021] 6) The utility model adopts the Monte Carlo simulation method, which can more accurately obtain the functional relationship between different adhesion coefficients and the pressure ratios at both ends, thereby calculating the corresponding pumping speed. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the structure of the utility model Figure 1 ;

[0023] Figure 2 This is a schematic diagram of the structure of the utility model Figure 2 ;

[0024] Figure 3 This is a connection diagram of the utility model after the bracket is removed;

[0025] Figure 4 It is a structural schematic diagram of the air intake system of the utility model;

[0026] Figure 5 It is a structural schematic diagram of the test system of the utility model;

[0027] Figure 6 This is a schematic diagram of the structure of the first air extraction system of the utility model. Figure 1 ;

[0028] Figure 7 This is a schematic diagram of the structure of the first air extraction system of the utility model. Figure 2 ;

[0029] Figure 8 This is a schematic diagram of the structure of the second air extraction system of the utility model. Figure 1 ;

[0030] Fig. 9 This is a schematic diagram of the structure of the second air extraction system of the utility model. Figure 2 ;

[0031] Fig.10 It is a structural schematic diagram of the third air extraction system of the utility model.

[0032] The marks in the above drawings are: bracket 1, air intake system 2, main air pipe 201, spiral tube body 2011, first three-way 202, first air pipe 203, second air pipe 204, second three-way 205, first all-metal micro-leakage valve 206, second all-metal micro-leakage valve 207, first pressure reducing valve 208, carbon monoxide compressed gas cylinder 209, first valve 210, second pressure reducing valve 211, hydrogen compressed gas cylinder 212, second valve 213, filter 214, first expansion chamber 215, second expansion chamber 216, bypass 217, third valve 218, fourth valve 219, fifth valve 220, first film vacuum gauge 221, second film vacuum gauge 222, liquid nitrogen tank 223, gas cylinder Fixed frame 224, test system 3, test chamber 31, coating pipeline 32, first residual gas analyzer 33, second residual gas analyzer 34, hot cathode ionization vacuum gauge 35, first flange connection port 36, second flange connection port 37, first exhaust system 4, exhaust pipe 41, first bellows 42, sixth valve 43, first all-metal angle valve 44, first turbomolecular pump 45, first dry pump 46, second exhaust system 5, second bellows 51, third bellows 52, second all-metal angle valve 53, third three-way 54, third all-metal angle valve 55, second turbomolecular pump 56, second dry pump 57, third exhaust system 6, sputtering ion pump 61, plug valve 62, ion pump bracket 63. DETAILED DESCRIPTION

[0033] The utility model is further described below in conjunction with the accompanying drawings:

[0034] like Figure 1 , Figure 2 The device for testing the batch pumping speed of a getter film shown in the figure comprises a support 1, an air intake system 2 and a testing system 3 arranged on the support 1; and further comprises a first air exhaust system 4 for vacuuming the air intake system 2, and a second air exhaust system 5 and a third air exhaust system 6 for vacuuming the testing system 3. In this embodiment, the third air exhaust system 6 is integrated on the support 1, and the first air exhaust system 4 and the second air exhaust system 5 are both externally arranged beside the support 1.

[0035] Further, such as Figure 3 , Figure 4 As shown, the air intake system 2 includes a main air pipe 201, one end of which is connected to a first air pipe 203 and a second air pipe 204 through a first three-way connection 202, and the other end of the main air pipe 201 is connected to a first all-metal micro-leakage valve 206 and a second all-metal micro-leakage valve 207 through a second three-way connection 205. The first air pipe 203 is connected to a carbon monoxide compressed gas cylinder 209 through a first pressure reducing valve 208, and a first valve 210 is provided on the first air pipe 203, and the second air pipe 204 is connected to a hydrogen compressed gas cylinder 212 through a second pressure reducing valve 211, and a second valve 213 is provided on the second air pipe 204. The carbon monoxide compressed gas cylinder 209 and the hydrogen compressed gas cylinder 212 are arranged side by side on a gas cylinder fixing frame 224, and the gas cylinder fixing frame 224 is fixed on the bottom plate of the bracket 1.

[0036] The main air pipe 201 is connected in series with a filter 214, a first expansion chamber 215, and a second expansion chamber 216. Both ends of the filter 214 are connected with a bypass 217, and a third valve 218 is provided on the bypass 217. Since the installation of the filter 214 will cause the problem of reduced flow conductance, the bypass 217 is provided in this embodiment to solve this problem, thereby solving the problem of difficulty in air extraction of the intake system.

[0037] A fourth valve 219 is provided between the filter 214 and the first expansion chamber 215, and a fifth valve 220 is provided between the first expansion chamber 215 and the second expansion chamber 216. The cavity volume of the first expansion chamber 215 is larger than that of the second expansion chamber 216, and the first expansion chamber 215 and the second expansion chamber 216 are respectively connected to the first thin film vacuum gauge 221 and the second thin film vacuum gauge 222; the main air pipe 201 is connected to the exhaust pipe 41 in the first exhaust system 4.

[0038] Furthermore, the air intake system 2 further includes a liquid nitrogen tank 223 disposed between the first three-way valve 202 and the filter 214, and the main air pipe 201 is provided with a spiral tube body 2011 immersed in the liquid nitrogen tank 223, that is, a section of the tube body of the main air pipe 201 is configured as a spiral tube body 2011, and the section of the spiral tube body 2011 is disposed at the front end of the filter 214, that is, the gas in the main air pipe 201 first passes through the liquid nitrogen tank 223 and then enters the filter 214. The liquid nitrogen tank 223 is provided to effectively condense impurity gases such as water vapor and carbon dioxide to purify the gas.

[0039] Further, such as Figure 3 , Figure 5 As shown, the test system 3 includes two test chambers 31 arranged in parallel, the upper ends of the two test chambers 31 are respectively connected to the first residual gas analyzer 33 through the coating pipe 32, and the lower ends of the two test chambers 31 are respectively connected to the two plug valves 62 in the third exhaust system 6, and the chamber wall of the test chamber 31 is connected to the second residual gas analyzer 34, the hot cathode ionization vacuum gauge 35, the first flange connection port 36 and the second flange connection port 37, wherein: the first flange connection port 36 in the two test chambers 31 is respectively connected to the first all-metal micro-leakage valve 206 and the second all-metal micro-leakage valve 207 in the intake system 2, and the second flange connection port 37 in the two test chambers 31 is respectively connected to the two second all-metal angle valves 53 in the second exhaust system 5.

[0040] Further, such as Figure 6 , Figure 7 As shown, the first exhaust system 4 includes a first bellows 42, one end of the first bellows 42 is connected to the main air pipe 201 through an exhaust pipe 41, and a sixth valve 43 is provided on the exhaust pipe 41, the other end of the first bellows 42 is connected to the first turbomolecular pump 45 through a first all-metal angle valve 44, and the first turbomolecular pump 45 is connected to the first dry pump 46.

[0041] When the first exhaust system 4 is evacuated, first the first bellows 42 is connected to the exhaust pipe 41 through a clamp, then the sixth valve 43 and the first all-metal angle valve 44 are opened, the first dry pump 46 is started, and after a period of time, the first turbomolecular pump 45 is opened, and vacuum can be evacuated after the first turbomolecular pump 45 is at full speed.

[0042] Further, such as Figure 8 , Fig. 9As shown, the second exhaust system 5 includes a second bellows 51 and a third bellows 52 arranged in parallel, one end of the second bellows 51 and the third bellows 52 are respectively connected to the second flange connection ports 37 in the two test chambers 31 through a second all-metal angle valve 53, the other ends of the second bellows 51 and the third bellows 52 are respectively connected to the third all-metal angle valve 55 through a third three-way valve 54, the third all-metal angle valve 55 is connected to the second turbomolecular pump 56, and the second turbomolecular pump 56 is connected to the second dry pump 57.

[0043] When the second exhaust system 5 is evacuated, firstly, the second bellows 51 and the third bellows 52 are respectively connected to the two second all-metal angle valves 53 through clamps, and then the second all-metal angle valve 53 and the third all-metal angle valve 55 are opened, and the second dry pump 57 is started. After a period of time, the second turbomolecular pump 56 is opened, and vacuum can be evacuated after the second turbomolecular pump 56 reaches full speed.

[0044] Further, such as Fig.10 As shown, the third exhaust system 6 includes two sputtering ion pumps 61 arranged in parallel, and the two sputtering ion pumps 61 are respectively connected to the lower ends of the two test chambers 31 in the test system 3 through the plug valve 62, and the two sputtering ion pumps 61 are respectively fixed to the bottom plate of the bracket 1 through the ion pump bracket 63.

[0045] When the third exhaust system 6 is evacuated, the second all-metal angle valve 53 is closed after the vacuuming process of the second exhaust system 5 is completed, and then the two sputtering ion pumps 61 are started to further evacuate.

[0046] The working principle and working process of the utility model are as follows:

[0047] First, the air intake system 2 is evacuated through the first air extraction system 4, and the first all-metal micro-leakage valve 206 and the second all-metal micro-leakage valve 207 are closed. After the vacuuming process is completed, the sixth valve 43, the third valve 218, the fourth valve 219 and the fifth valve 220 are closed first, and the first pressure reducing valve 208 or the second pressure reducing valve 211 is opened to introduce carbon monoxide or hydrogen into the air intake system 2, and then the fourth valve 219 is opened to fill a certain amount of gas into the first expansion chamber 215, and then the fourth valve 219 is closed and the fifth valve 220 is opened to fill a certain amount of gas into the second expansion chamber 216.

[0048] Secondly, the test system 3 is evacuated by the second exhaust system 5, and the entire test system 3 and the sputtering ion pump 61 are baked after the vacuum pump port reaches a certain vacuum degree, wherein the coating pipe 32 is baked to 80°C, and the other components are baked to 200-250°C. After baking for a certain period of time, the remaining components are cooled to 150°C, and the first residual gas analyzer 33, the second residual gas analyzer 34 and the hot cathode ionization vacuum gauge 35 are degassed. After the degassing is completed, the second all-metal angle valve 53 is closed, and the third exhaust system 6 is opened to evacuate the test system 3, and the baking of the sputtering ion pump 61 is stopped. The remaining components are cooled to room temperature, and the coating pipe 32 is heated to 180°C and kept warm for 24 hours and then cooled to room temperature.

[0049] Next, after the system to be tested 3 is cooled to room temperature for at least 12 hours, the first all-metal micro-leakage valve 206 and the second all-metal micro-leakage valve 207 are opened to allow air to enter the two test chambers 31 respectively.

[0050] Finally, by comparing the pressure ratio of the second residual gas analyzer 34 with the first residual gas analyzer 33 , the functional relationship curve between the pressure ratio at both ends of the pipeline and the adhesion coefficient of the getter film obtained by simulation is obtained to obtain the pumping speed and adsorption capacity of the coating pipeline 32 .

[0051] The embodiments described above are merely descriptions of preferred implementation modes of the present invention, and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary technicians in this field should all fall within the protection scope determined by the claims of the present invention.

Claims

1. A getter film batch pumping speed test device, characterized in that: It comprises a support (1), and an air intake system (2) and a test system (3) arranged on the support (1); it also comprises a first air exhaust system (4) for performing vacuum treatment on the air intake system (2), and a second air exhaust system (5) and a third air exhaust system (6) for performing vacuum treatment on the test system (3); The air intake system (2) comprises a main air pipe (201), one end of the main air pipe (201) is connected to a first air pipe (203) and a second air pipe (204) through a first three-way connection (202), and the other end of the main air pipe (201) is connected to a first all-metal micro-leakage valve (206) and a second all-metal micro-leakage valve (207) through a second three-way connection (205); the first air pipe (203) is connected to a carbon monoxide compressed gas cylinder (209) through a first pressure reducing valve (208), and a first valve (210) is provided on the first air pipe (203); the second air pipe (204) is connected to a hydrogen compressed gas cylinder (212) through a second pressure reducing valve (211), and a second valve (213) is provided on the second air pipe (204); the main air pipe (201) is connected in series with the first and second pressure reducing valves (211) and the second and second pressure reducing valves (213) in sequence; A filter (214), a first expansion chamber (215) and a second expansion chamber (216); both ends of the filter (214) are connected to a bypass (217); a third valve (218) is provided on the bypass (217); a fourth valve (219) is provided between the filter (214) and the first expansion chamber (215); a fifth valve (220) is provided between the first expansion chamber (215) and the second expansion chamber (216); the cavity volume of the first expansion chamber (215) is larger than that of the second expansion chamber (216); and the first expansion chamber (215) and the second expansion chamber (216) are respectively connected to a first thin-film vacuum gauge (221) and a second thin-film vacuum gauge (222); the main air pipe (201) is connected to an air extraction pipe (41) in a first air extraction system (4); The test system (3) comprises two test chambers (31) arranged in parallel, the upper ends of the two test chambers (31) are respectively connected to a first residual gas analyzer (33) through a coating pipe (32), the lower ends of the two test chambers (31) are respectively connected to two plug valves (62) in a third exhaust system (6), and the chamber wall of the test chamber (31) is connected to a second residual gas analyzer (34), a hot cathode ionization vacuum gauge (35), a first flange connection port (36) and a second flange connection port (37), wherein: the first flange connection port (36) in the two test chambers (31) is respectively connected to a first all-metal micro-leak valve (206) and a second all-metal micro-leak valve (207) in the intake system (2), and the second flange connection port (37) in the two test chambers (31) is respectively connected to two second all-metal angle valves (53) in the second exhaust system (5).

2. The getter film batch pumping speed test device according to claim 1, characterized in that: The air intake system (2) further comprises a liquid nitrogen tank (223) arranged between the first tee (202) and the filter (214), and the main air pipe (201) is provided with a spiral pipe body (2011) immersed in the liquid nitrogen tank (223).

3. The getter film batch pumping speed test device according to claim 1, characterized in that: The first air extraction system (4) comprises a first bellows (42), one end of the first bellows (42) is connected to the main air pipe (201) via an air extraction pipe (41), and a sixth valve (43) is provided on the air extraction pipe (41), the other end of the first bellows (42) is connected to a first turbomolecular pump (45) via a first all-metal angle valve (44), and the first turbomolecular pump (45) is connected to a first dry pump (46).

4. The getter film batch pumping speed test device according to claim 1, characterized in that: The second air extraction system (5) comprises a second bellows (51) and a third bellows (52) arranged in parallel, one end of the second bellows (51) and the third bellows (52) are respectively connected to the second flange connection ports (37) in the two test chambers (31) through a second all-metal angle valve (53), the other end of the second bellows (51) and the third bellows (52) are respectively connected to the third all-metal angle valve (55) through a third three-way valve (54), the third all-metal angle valve (55) is connected to the second turbomolecular pump (56), and the second turbomolecular pump (56) is connected to the second dry pump (57).

5. The getter film batch pumping speed test device according to claim 1, characterized in that: The third exhaust system (6) comprises two sputtering ion pumps (61) arranged in parallel, and the two sputtering ion pumps (61) are respectively connected to the lower ends of the two test chambers (31) in the test system (3) through gate valves (62).

6. The getter film batch pumping speed test device according to claim 1, characterized in that: The third air extraction system (6) is integrated on the bracket (1), and the first air extraction system (4) and the second air extraction system (5) are both externally arranged beside the bracket (1).

7. The getter film batch pumping speed test device according to claim 1, characterized in that: The carbon monoxide compressed gas cylinder (209) and the hydrogen compressed gas cylinder (212) are arranged in parallel on a gas cylinder fixing frame (224), and the gas cylinder fixing frame (224) is fixed on the bottom plate of the bracket (1).

8. The getter film batch pumping speed test device according to claim 5, characterized in that: The two sputtering ion pumps (61) are respectively fixed on the bottom plate of the bracket (1) via ion pump brackets (63).

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