Driving device of semiconductor manufacturing equipment
By using the power output mechanism driven by rotating cylinders or motors and belts in semiconductor manufacturing equipment, the problems of low rotational movement angle accuracy and large space occupation are solved, and more accurate, safe and efficient swing arm rotation is achieved.
Patent Information
- Application Number
- CN202420902999.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-28
- Publication Date
- 2025-01-17
- Estimated Expiration
- 2034-04-28
AI Technical Summary
In current semiconductor manufacturing equipment, the rotational movement method controls the rotational movement of the swing arm with low angular accuracy, and the mechanical movement is complex and takes up a large space.
The power output mechanism including a rotating cylinder or motor is adopted to synchronously drive the swing arm to rotate through the belt, and combine the connecting mechanism between the bearing flange and the annular flange edge to achieve more accurate and stable swing arm rotation and save space in the equipment structure.
It improves the accuracy and stability of swing arm rotation, reduces the equipment space occupied, and achieves the characteristics of space saving and safety and efficiency.
Smart Images
Figure CN222363360U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of manufacturing equipment driving devices, in particular to a semiconductor manufacturing equipment driving device. Background Art
[0002] With the progress of society, semiconductor manufacturing equipment is constantly developing. Various mechanical devices are increasingly developing in the direction of energy saving, easy use, space saving, safety and efficiency, and multi-functionality. At present, when controlling the rotational movement of the common shutter, a cylinder is generally installed on the left side of the bottom plate, and then fixed by a swing bracket, and then the rotation movement is controlled by the cylinder. This method of rotational movement controls the angle accuracy of the swing arm rotational movement, and its method is more complicated in mechanical movement, and occupies a large space in the equipment structure. For this reason, a semiconductor manufacturing equipment driving device is proposed. Utility Model Content
[0003] The purpose of the utility model is to solve the problem that the current rotational movement method of controlling the rotational movement of the swing arm has low angular accuracy, is relatively complex in mechanical action, and occupies a large space in the equipment structure. The utility model provides a semiconductor manufacturing equipment drive device.
[0004] In order to achieve the above-mentioned purpose, the utility model specifically adopts the following technical solutions:
[0005] A driving device for semiconductor manufacturing equipment comprises a mounting block, a top base is arranged in the mounting block, a main shaft is arranged on the lower side of the top base, a main shaft sleeve is arranged on the main shaft, a connecting base plate is fixed to one end of the main shaft sleeve, an in-line cylinder is arranged on the connecting base plate, and it is characterized in that a swing core is fixedly mounted on the side wall of the connecting base plate, a power output mechanism is arranged on the connecting base plate at one side of the swing core, a power transmission mechanism is arranged between the swing core and the power output mechanism, a connecting mechanism is arranged on the swing core, and a swing arm is arranged on one side of the connecting mechanism.
[0006] Preferably, the power output mechanism comprises a rotary cylinder, one side of which is fixedly mounted on the connecting base plate, and a cylinder synchronous wheel is arranged on the rotary cylinder.
[0007] Preferably, a square groove is provided on the side wall of the connecting bottom plate, and one side of the rotating cylinder is fixedly installed in the square groove.
[0008] Preferably, the power transmission mechanism comprises an oscillating core synchronous wheel, the oscillating core synchronous wheel is mounted on the oscillating core, and a belt is provided between the oscillating core synchronous wheel and the cylinder synchronous wheel.
[0009] Preferably, an annular groove is provided on the side wall of the connecting base plate, and one side of the swing core is fixedly installed in the annular groove.
[0010] Preferably, the connecting mechanism includes a bearing flange, the bearing flange is fixedly mounted on the bearing of the swing core, an annular flange edge is fixedly mounted on the outer wall of the bearing flange, and a positioning hole is opened on the annular flange edge, and the swing arm and the bearing flange are connected via the annular flange edge.
[0011] The beneficial effects of the utility model are as follows:
[0012] 1. In the utility model, by replacing the left in-line cylinder in the prior art with a rotary cylinder or a motor, the swing arm can be driven to move by rotation, and the design of synchronously driving the rotation with the help of a leather wheel can control the rotation of the swing arm more accurately and smoothly, and can greatly save the space occupied by the left side on the existing basis, thereby having the characteristics of space saving, safety and efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] Figure 1 It is a schematic diagram of the overall three-dimensional connection structure of the utility model;
[0014] Figure 2 It is a schematic diagram of the three-dimensional connection structure of the connecting bottom plate and the mounting block in the utility model;
[0015] Figure 3 It is a schematic diagram of the three-dimensional connection structure between the connecting bottom plate and the power output mechanism in the utility model;
[0016] Figure 4 It is a schematic diagram of the three-dimensional connection structure between the connecting bottom plate and the power transmission mechanism in the utility model;
[0017] Figure 5 It is a schematic diagram of the three-dimensional connection structure of the connection mechanism and the swing core in the utility model.
[0018] Figure numerals: 1. mounting block; 2. top base; 3. main shaft; 4. main shaft sleeve; 5. in-line cylinder; 6. connecting base plate; 7. belt; 8. swing arm; 9. rotating cylinder; 10. cylinder synchronous wheel; 11. swing core; 12. swing core synchronous wheel; 13. bearing flange; 14. annular flange edge. DETAILED DESCRIPTION
[0019] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.
[0020] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0021] It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. In addition, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.
[0022] In the description of the embodiments of the present invention, it should be noted that the terms "inside", "outside", "upper", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0023] like Figure 1-5 As shown, a driving device for semiconductor manufacturing equipment includes a mounting block 1, a top base 2 is arranged in the mounting block 1, and a main shaft 3 is arranged on the lower side of the top base 2, a main shaft sleeve 4 is arranged on the main shaft 3, and a connecting base plate 6 is fixed to one end of the main shaft sleeve 4, an inline cylinder 5 is arranged on the connecting base plate 6, a swing core 11 is fixedly installed on the side wall of the connecting base plate 6, an annular groove is opened on the side wall of the connecting base plate 6, and one side of the swing core 11 is fixedly installed in the annular groove, by means of the provided annular groove, the connection between the swing core 11 and the connecting base plate 6 can be made more stable, and the volume of the device can be reduced at the same time.
[0024] A power output mechanism is provided on one side of the swing core 11 on the connecting base plate 6, and the power output mechanism includes a rotating cylinder 9. One side of the rotating cylinder 9 is fixedly installed on the connecting base plate 6, and a square groove is provided on the side wall of the connecting base plate 6. The space occupied by the device can be saved by means of the set square groove, and at the same time, it can better cooperate with the swing core 11. One side of the rotating cylinder 9 is fixedly installed in the square groove, and a cylinder synchronization wheel 10 is provided on the rotating cylinder 9.
[0025] A power transmission mechanism is arranged between the swing core 11 and the cylinder synchronous wheel 10, and the power transmission mechanism includes a swing core synchronous wheel 12. The swing core synchronous wheel 12 is installed on the swing core 11, and a belt 7 is arranged between the swing core synchronous wheel 12 and the cylinder synchronous wheel 10. A connecting mechanism is arranged on the swing core 11, and the connecting mechanism includes a bearing flange 13. The bearing flange 13 is fixedly sleeved and installed on the bearing of the swing core 11. An annular flange edge 14 is fixedly installed on the outer wall of the bearing flange 13, and a positioning hole is opened on the annular flange edge 14. The bearing flange 13 is fixedly connected to the swing arm 8 through the annular flange edge 14.
[0026] In summary: during installation, fix the swing core 11 on the connecting base plate 6, then fix the smaller rotating cylinder 9 on the left side of the connecting base plate 6, and fix the cylinder synchronous wheel 10 on the top of the rotating cylinder 9, then install the belt 7 together with the cylinder synchronous wheel 10 and the swing core synchronous wheel 12, finally fix the bearing flange 13 on the bearing of the swing core 11, and finally install the swing arm 8, so that when the rotating cylinder 9 is driven by air, the rotating cylinder 9 will rotate, and the belt 7 will drive the swing core synchronous wheel 12 to rotate together, thereby achieving the function of horizontal rotation of the swing arm 8.
[0027] The above description enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A semiconductor manufacturing equipment driving device, comprising a mounting block (1), wherein a top base (2) is arranged in the mounting block (1), and a main shaft (3) is arranged on the lower side of the top base (2), a main shaft sleeve (4) is arranged on the main shaft (3), and a connecting base plate (6) is fixed to one end of the main shaft sleeve (4), and an inline cylinder (5) is arranged on the connecting base plate (6), characterized in that: A swing core (11) is fixedly mounted on the side wall of the connecting base plate (6), and a power output mechanism is arranged on the connecting base plate (6) on one side of the swing core (11), a power transmission mechanism is arranged between the swing core (11) and the power output mechanism, a connecting mechanism is arranged on the swing core (11), and a swing arm (8) is arranged on one side of the connecting mechanism.
2. A semiconductor manufacturing equipment driving device according to claim 1, characterized in that: The power output mechanism comprises a rotary cylinder (9), one side of which is fixedly mounted on a connection base plate (6), and a cylinder synchronous wheel (10) is arranged on the rotary cylinder (9).
3. A semiconductor manufacturing equipment driving device according to claim 2, characterized in that: A square groove is provided on the side wall of the connecting bottom plate (6), and one side of the rotating cylinder (9) is fixedly installed in the square groove.
4. A semiconductor manufacturing equipment driving device according to claim 2, characterized in that: The power transmission mechanism comprises an oscillating core synchronous wheel (12), the oscillating core synchronous wheel (12) is mounted on the oscillating core (11), and a belt (7) is arranged between the oscillating core synchronous wheel (12) and the cylinder synchronous wheel (10).
5. A semiconductor manufacturing equipment driving device according to claim 4, characterized in that: An annular groove is provided on the side wall of the connecting bottom plate (6), and one side of the swing core (11) is fixedly installed in the annular groove.
6. A semiconductor manufacturing equipment driving device according to claim 1, characterized in that: The connection mechanism comprises a bearing flange (13), wherein the bearing flange (13) is fixedly sleeved on the bearing of the swing core (11), an annular flange edge (14) is fixedly mounted on the outer wall of the bearing flange (13), and a positioning hole is provided on the annular flange edge (14), and the swing arm (8) and the bearing flange (13) are connected via the annular flange edge (14).