Power supply control cabinet for semiconductor production

Abstract

The utility model relates to the technical field of semiconductor production equipment, in particular to a power supply control cabinet for semiconductor production. According to the technical scheme, the cabinet comprises a cabinet body and a rectangular installation hole formed in the side wall of the cabinet body, and further comprises a heat dissipation mechanism installed in the rectangular installation hole, and the heat dissipation mechanism is fixedly connected with a limiting clamping block used for being clamped into the rectangular installation hole. The limiting clamping block is provided with a clamping block mechanism used for enabling the heat dissipation mechanism and the limiting clamping block to be rapidly disengaged from the rectangular mounting hole. According to the utility model, the rectangular mounting hole, the heat dissipation mechanism, the clamping block mechanism, the telescopic mechanism and other structures are matched, so that the heat dissipation mechanism on the power supply control cabinet can be disassembled by gently pressing with a hand without using a tool when being disassembled. Compared with bolt disassembly and assembly, clamping block pressing type disassembly and assembly are more convenient, and time and labor are saved. Meanwhile, the structure of pressing and clamping block type disassembly and assembly is relatively simple, accessories such as bolts and nuts are not needed, and the fault rate and the maintenance difficulty are reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production equipment, in particular to a power supply control cabinet used for semiconductor production. Background Art

[0002] Semiconductor production refers to the process of making semiconductor materials into electronic devices with specific functions through a series of process flows. At present, the equipment in the semiconductor production process has very high requirements for power supply stability. Among them, the power control cabinet can not only effectively filter and stabilize the power supply, ensure the stable power supply required by the equipment, and prevent production failures caused by power supply fluctuations. In addition, the power control cabinet has overvoltage, overcurrent, short circuit and other protection functions, and can cut off the power supply in time under abnormal conditions to prevent equipment damage and personnel safety accidents. The existing power control cabinet is usually equipped with a detachable heat dissipation mechanism, which can effectively help the internal components of the power control cabinet dissipate heat and ensure the normal operation of the equipment.

[0003] However, the heat dissipation mechanism on some current power control cabinets is usually installed by bolts, and in order to ensure the firmness of the bolt connection, it is necessary to accurately drill holes in the heat dissipation mechanism and the mounting plate. The hole precision requirement is high, and during the installation process, it is necessary to ensure that the bolt tightening force is uniform and appropriate. Over-tightening may cause the bolt to break or the heat dissipation mechanism to deform, while over-loosening may cause the connection to be loose. Therefore, the utility model designs a power control cabinet for semiconductor production. Utility Model Content

[0004] The purpose of the utility model is to provide a power supply control cabinet for semiconductor production in view of the problems existing in the background technology.

[0005] The technical solution of the utility model: a power supply control cabinet for semiconductor production, comprising a cabinet body and a rectangular mounting hole opened on the side wall of the cabinet body, and also comprising: a heat dissipation mechanism installed in the rectangular mounting hole, a limiting card block fixedly connected to the heat dissipation mechanism for being inserted into the rectangular mounting hole, a card block mechanism for allowing the heat dissipation mechanism and the limiting card block to quickly escape from the rectangular mounting hole is arranged on the limiting card block; a telescopic mechanism for driving the card block mechanism to quickly open after being pressed on the limiting card block.

[0006] Optionally, the clamping block mechanism includes a support frame connected to the limit clamping block, the support frame is provided with a pair of sliding holes, the sliding holes are slidably connected to a rotating rod, a telescopic rotating clamping block is sleeved on the rotating rod, a protrusion for clamping a rectangular mounting hole is provided at the end of the telescopic rotating clamping block away from the rotating rod, and a pair of return springs for pulling the telescopic rotating clamping block to return to its original position are provided inside the support frame.

[0007] Optionally, the telescopic mechanism includes a telescopic hole opened on the heat dissipation mechanism, the telescopic hole is internally slidably connected to a button with one end used to resist the telescopic rotating block, the button is fixedly connected to a connecting block for limiting the button from escaping from the heat dissipation mechanism, the connecting block is fixedly connected to a pulling spring, and the pulling spring is fixedly connected to the telescopic rotating block at one end away from the connecting block.

[0008] Optionally, both ends of the rotating rod are fixedly connected to fixed blocks after movably passing through the sliding hole.

[0009] Optionally, one end of the button away from the telescopic rotating block is fixedly connected to a pressing block.

[0010] Optionally, a pair of handle grooves are provided on the heat dissipation mechanism.

[0011] Optionally, a plurality of linearly arranged inclined baffles are provided inside the heat dissipation mechanism.

[0012] Compared with the prior art, the utility model has the following beneficial technical effects:

[0013] The utility model utilizes the coordination of the rectangular mounting hole, the heat dissipation mechanism, the card block mechanism and the telescopic mechanism, so that the heat dissipation mechanism on the power control cabinet does not need to use tools when disassembling and assembling, and can be disassembled by gently pressing with hands. Compared with bolt disassembly and assembly, the card block disassembly and assembly is more convenient, saving time and labor. At the same time, the structure of the card block disassembly and assembly is relatively simple, and no accessories such as bolts and nuts are required, which reduces the failure rate and maintenance difficulty. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 A schematic structural diagram of a power supply control cabinet for semiconductor production according to the utility model is given;

[0015] Figure 2 for Figure 1 Schematic diagram of the split structure;

[0016] Figure 3 for Figure 2 Schematic diagram of the disassembled structure of the heat dissipation mechanism and the limit block;

[0017] Figure 4 for Figure 3 A partial structural diagram of

[0018] Figure 5 for Figure 4 The enlarged schematic diagram of point A in the middle;

[0019] Figure 6 for Figure 5 Schematic diagram of part of the structure.

[0020] Figure numerals: 1, cabinet; 11, rectangular mounting hole; 2, heat dissipation mechanism; 21, handle groove; 22, telescopic hole; 23, inclined baffle; 3, limit card block; 31, button; 32, support frame; 33, telescopic rotation card block; 34, reset spring; 35, sliding hole; 36, fixed block; 37, pulling spring; 38, connecting card block; 39, pressing card block; 391, protrusion; 392, rotating rod. DETAILED DESCRIPTION

[0021] The technical solution of the present utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present utility model, rather than all of the embodiments.

[0022] The components of the embodiments of the present invention generally described and shown in the drawings herein can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention.

[0023] Based on the embodiments of the present utility model, all other embodiments obtained by ordinary technicians in the field without making any creative work shall fall within the scope of protection of the present utility model.

[0024] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0025] It should be noted that the terms "include", "comprises" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0026] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] Example

[0028] like Figure 1-6 As shown, the utility model proposes a power supply control cabinet for semiconductor production, comprising a cabinet body 1 and a rectangular mounting hole 11 provided on the side wall of the cabinet body 1, and further comprising: a heat dissipation mechanism 2 installed in the rectangular mounting hole 11, the middle part of the heat dissipation mechanism 2 is penetrated and used to dissipate the heat in the cabinet body 1 to the outside, thereby keeping the temperature in the cabinet within a safe range and preventing the equipment from being damaged by overheating. A pair of handle grooves 21 are provided on the heat dissipation mechanism 2, and the function of the handle grooves 21 is to facilitate the user to hold the heat dissipation mechanism 2 and take the heat dissipation mechanism 2 out of the rectangular mounting hole 11 when disassembling the heat dissipation mechanism 2. A plurality of linearly arranged inclined baffles 23 are provided inside the heat dissipation mechanism 2, and the inclined baffles 23 mainly play the role of guiding the airflow and improving the heat dissipation effect. A limit block 3 is fixedly connected to the heat dissipation mechanism 2 for being inserted into the rectangular mounting hole 11, and a block mechanism for allowing the heat dissipation mechanism 2 and the limit block 3 to quickly escape from the rectangular mounting hole 11 is provided on the limit block 3; and a telescopic mechanism is provided on the limit block 3 for driving the block mechanism to open quickly after being pressed.

[0029] Furthermore, the block mechanism includes a support frame 32 connected to the limit block 3, and a pair of sliding holes 35 are provided on the support frame 32. The function of the sliding holes 35 is to make the telescopic rotating block 33 squeeze and move in the direction of the reset spring 34 after receiving a force. A rotating rod 392 is slidably connected inside the sliding hole 35, and both ends of the rotating rod 392 are fixedly connected to the fixed block 36 after movably passing through the sliding hole 35. The telescopic rotating block 33 is sleeved on the rotating rod 392, and a protrusion 391 for clamping the rectangular mounting hole 11 is provided at one end of the telescopic rotating block 33 away from the rotating rod 392. The function of the protrusion 391 is to make the telescopic rotating block 33 retract in the direction of the reset spring 34 by pressing hard when the limit block 3 is clamped into the rectangular mounting hole 11. A pair of return springs 34 are provided inside the support frame 32 for pulling the telescopic rotating block 33 back to its original position. The function of the return spring 34 is to make the telescopic rotating block 33 drive the protrusion 391 to always clamp the rectangular mounting hole 11.

[0030] Furthermore, the telescopic mechanism includes a telescopic hole 22 provided on the heat dissipation mechanism 2, and a button 31 having one end for resisting the telescopic rotating block 33 is slidably connected inside the telescopic hole 22, and a pressing block 39 is fixedly connected to one end of the button 31 away from the telescopic rotating block 33, and a connecting block 38 for limiting the button 31 from escaping from the heat dissipation mechanism 2 is fixedly connected to the button 31, and a pulling spring 37 is fixedly connected to the connecting block 38, and the function of the pulling spring 37 is to make the telescopic rotating block 33 more difficult to rotate after being used in conjunction with the reset spring 34, thereby preventing the telescopic rotating block 33 from driving the protrusion 391 to easily escaping from the rectangular mounting hole 11. One end of the pulling spring 37 away from the connecting block 38 is fixedly connected to the telescopic rotating block 33.

[0031] In this embodiment, when semiconductor production requires the use of a power control cabinet, such as Figure 1 As shown, the pressing block 39 is pressed toward the cabinet 1, and the pressing block 39 drives the button 31 to slide along the telescopic hole 22, as shown in FIG. Figure 5 As shown, the other end of the button 31 abuts against the telescopic rotating block 33, and the telescopic rotating block 33 rotates inside the pair of sliding holes 35 with the rotating rod 392 as the center, and the protrusion 391 at one end of the telescopic rotating block 33 rotates until it cannot be stuck in the rectangular mounting hole 11 on the cabinet 1. At this time, the heat dissipation mechanism 2 and the limit block 3 can be taken out from the inside of the rectangular mounting hole 11 through the handle groove 21 on the heat dissipation mechanism 2, which is simple and easy to operate.

[0032] When the heat dissipation mechanism 2 and the limiting block 3 need to be installed inside the rectangular mounting hole 11, it is only necessary to first move the heat dissipation mechanism 2, then insert the limiting block 3 on the heat dissipation mechanism 2 into the rectangular mounting hole 11 on the cabinet 1, and then press the limiting block 3 hard toward the cabinet 1. Figure 5 As shown, after the protrusion 391 on the telescopic rotating block 33 abuts against the cabinet 1, it will retract in the direction of the reset spring 34. At the same time, one end of the telescopic rotating block 33 slides along a pair of sliding holes 35 through the rotating rod 392. When the limit block 3 is completely inserted into the interior of the rectangular mounting hole 11, the telescopic rotating block 33 is subjected to the elastic thrust of the pair of reset springs 34, so that the telescopic rotating block 33 drives the protrusion 391 to clamp the rectangular mounting hole 11, thereby limiting the limit block 3 and the heat dissipation mechanism 2 from escaping from the rectangular mounting hole 11 and away from the cabinet 1.

[0033] The preferred embodiments of the utility model of the above utility model are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to only specific implementation methods. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A power supply control cabinet for semiconductor production, comprising a cabinet body (1) and a rectangular mounting hole (11) provided on a side wall of the cabinet body (1), characterized in that: Also includes: A heat dissipation mechanism (2) is installed in the rectangular mounting hole (11), a limiting block (3) is fixedly connected to the heat dissipation mechanism (2) and is inserted into the rectangular mounting hole (11), and a block mechanism is provided on the limiting block (3) for enabling the heat dissipation mechanism (2) and the limiting block (3) to quickly escape from the rectangular mounting hole (11); A telescopic mechanism is arranged on the limit clamping block (3) and is used to drive the clamping block mechanism to open quickly after being pressed.

2. A power supply control cabinet for semiconductor production according to claim 1, characterized in that: The clamping block mechanism comprises a support frame (32) connected to the limit clamping block (3), a pair of sliding holes (35) are provided on the support frame (32), a rotating rod (392) is slidably connected inside the sliding hole (35), a telescopic rotating clamping block (33) is sleeved on the rotating rod (392), a protrusion (391) for clamping the rectangular mounting hole (11) is provided at one end of the telescopic rotating clamping block (33) away from the rotating rod (392), and a pair of return springs (34) for pulling the telescopic rotating clamping block (33) to return to its original position are provided inside the support frame (32).

3. A power supply control cabinet for semiconductor production according to claim 1, characterized in that: The telescopic mechanism comprises a telescopic hole (22) provided on the heat dissipation mechanism (2); a button (31) having one end for resisting against a telescopic rotating block (33) is slidably connected inside the telescopic hole (22); a connecting block (38) for limiting the button (31) from escaping from the heat dissipation mechanism (2) is fixedly connected to the button (31); a pulling spring (37) is fixedly connected to the connecting block (38); and one end of the pulling spring (37) away from the connecting block (38) is fixedly connected to the telescopic rotating block (33).

4. A power supply control cabinet for semiconductor production according to claim 2, characterized in that: Both ends of the rotating rod (392) are movably passed through the sliding hole (35) and are fixedly connected to a fixing block (36).

5. The power control cabinet for semiconductor production according to claim 3, characterized in that: One end of the button (31) away from the telescopic rotating block (33) is fixedly connected to a pressing block (39).

6. A power supply control cabinet for semiconductor production according to claim 1, characterized in that: The heat dissipation mechanism (2) is provided with a pair of handle grooves (21).

7. A power supply control cabinet for semiconductor production according to claim 1, characterized in that: A plurality of linearly arranged inclined baffles (23) are provided inside the heat dissipation mechanism (2).

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