Large plate cooling and cleaning device

Through the design of the large market to cool down the cleaning device, the combination of the jet device and the exhaust holes realizes the removal of foreign bodies and oxygen layers on the vacuum coating equipment, solve the problem of insufficient equipment pollution and binding force during the vacuum coating process, improve the coating effect and the effect of coating and the effect of coating and the effect of coating and Environmental cleanliness.

CN222385490UActive Publication Date: 2025-01-24SUZHOU XINGLAN NANO TECH CO LTD
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Patent Information

Application Number
CN202420316341.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-02-21
Publication Date
2025-01-24
Estimated Expiration
2034-02-21

AI Technical Summary

Technical Problem

During the vacuum coating process, foreign matters are easily hung on the equipment, which affects the stability of internal pressure and vacuum degree, and it is difficult to effectively remove the oxide layer and dust on the surface of the substrate, affecting the coating effect.

Method used

A large plate cooling and cleaning device is designed, which includes a cleaning cavity, a left-right symmetrical jet device and a rear-end partition with exhaust holes evenly spaced on the partition. Through the cooperation of the air jet device and the exhaust hole, the temperature inside the cleaning chamber is rapidly cooled, the parts with poor bonding force are peeled off, and are discharged through the exhaust hole to reduce the amount of dust.

Benefits of technology

Effectively remove foreign bodies and dust layers and dust on the equipment, maintain the cleanliness of the surrounding environment of the workpiece, avoid secondary pollution, and improve the combination and effect of vacuum coating.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides a cooling and cleaning device for a large plate, which comprises a cleaning cavity, equipment which is provided with a product and is coated with a film together is cleaned by arranging symmetrical air injection devices on the left side and the right side, a bearing device and a positioning piece are arranged at the bottom of the cleaning cavity, and the bearing device is used for mounting the equipment which is provided with the product and is coated with the film together. The positioning piece is used for conveniently positioning equipment which is provided with products and is coated with the products during feeding and discharging, so that the equipment is not prone to toppling over, the partition plate is arranged at the rear end of the cleaning cavity, the multiple exhaust holes are evenly formed in the partition plate at intervals, and the air injection device is matched with the exhaust holes, so that the temperature in the cleaning cavity is rapidly cooled, and the cleaning efficiency is improved. The part with poor binding force on the equipment which is provided with the product and is coated together with the product is peeled off and is discharged through the exhaust hole, so that the dust amount is reduced, and the surrounding environment of the workpiece is clean.
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Description

Technical Field

[0001] The utility model belongs to the technical field of coating cleaning equipment, and more specifically relates to a large plate cooling and cleaning device. Background Art

[0002] Vacuum coating is an important aspect of vacuum application. It is based on vacuum technology, uses physical or chemical methods, and absorbs a series of new technologies such as electron beam, molecular beam, ion beam, plasma beam, radio frequency and magnetron to provide a new process for thin film preparation for scientific research and actual production. Simply put, the method of evaporating or sputtering metals, alloys or compounds in a vacuum to solidify and deposit them on the coated object (called substrate, substrate or matrix) is called vacuum coating. Vacuum coating technology is generally divided into two categories, namely physical vapor deposition (PVD) technology and chemical vapor deposition (CVD) technology.

[0003] An important factor affecting the effect of vacuum coating is the bonding strength between the coating and the substrate. If the bonding strength is low, it is easy for the coating to fall off the surface of the substrate. Theoretically, the cleanliness of the substrate surface is an important factor affecting the bonding strength between the coating and the substrate during the vacuum coating process. Therefore, before coating the substrate, it is necessary to use cleaning equipment to clean it to keep the substrate environment clean.

[0004] During use, a lot of foreign matter will often hang on the equipment. These foreign matter will adhere to the equipment and affect the stability of internal pressure and vacuum. Therefore, a cleaning device is needed to remove the oxide layer, dust and irrelevant substances on the surface, maintain the cleanliness of the environment around the workpiece, and avoid secondary pollution. Utility Model Content

[0005] In view of this, in order to solve the above problems, the utility model proposes a large plate cooling and cleaning device, including a cleaning chamber 1, by arranging symmetrical jet devices 2 on the left and right sides, to clean the equipment that is loaded with products and has been coated together, by arranging a partition 4 at the rear end of the cleaning chamber 1, the partition 4 is evenly spaced with a plurality of exhaust holes 44, and the jet device 2 cooperates with the exhaust holes 44 to rapidly cool the temperature in the cleaning chamber 1, and the parts with poor bonding strength on the equipment that is loaded with products and has been coated together are peeled off and discharged through the exhaust holes 44, thereby reducing the amount of dust and making the surrounding environment of the workpiece clean.

[0006] A large plate cooling and cleaning device comprises a cleaning chamber 1, wherein jet devices 2 are symmetrically arranged on the left and right sides of the cleaning chamber 1 for cleaning equipment loaded with products and coated together, wherein a carrying device is arranged on the bottom surface of the cleaning chamber 1 for connecting the equipment loaded with products and coated together with the carrying device, wherein a partition plate 4 is arranged at the rear end of the cleaning chamber 1, wherein a plurality of exhaust holes 44 are evenly spaced on the partition plate 4, wherein the jet device 2 cooperates with the exhaust holes 44 to rapidly cool the temperature in the cleaning chamber 1, wherein parts with poor bonding strength on the equipment loaded with products and coated together are peeled off and discharged through the exhaust holes 44, thereby reducing the amount of dust and making the surrounding environment of the workpiece clean.

[0007] Furthermore, the carrying device includes a base 32 and a rotating disk 33 . The rotating disk 33 is disposed on the base 32 . One end of the base 32 is connected to the lower part of the partition 4 , and the other end is located at the opening of the cleaning chamber 1 .

[0008] Furthermore, a workpiece rack 10 is provided on the large plate 9, and products are placed on the workpiece rack 10. A rotating shaft is provided at the bottom of the large plate 9, and the base 32 is inserted through the rotating shaft. The rotating plate 33 is connected to the rotating shaft, so that the rotating plate 33 drives the large plate 9 to rotate 360° during cleaning.

[0009] Furthermore, the partition 4 is densely covered with exhaust holes 44 at the same height as the cleaning position. The exhaust holes 44 are evenly spaced and used to discharge substances with poor binding force generated during cleaning. The middle part of the partition 4 is an arc panel convex outward, which is used to avoid the large plate 9.

[0010] Furthermore, a support frame 5 is provided at the lower part of the cleaning chamber 1 , and guide rails 6 are provided on both sides of the support frame 5 for matching with a conveying vehicle loaded with a large plate 9 to play a guiding role.

[0011] Furthermore, a control device 7 is provided on one side of the outer side of the cleaning chamber 1 . The control device 7 is provided with a control button and a pressure gauge. The control device 7 is electrically connected to the rotating disk 33 and the jet device 2 .

[0012] Furthermore, the front end of the cleaning cavity 1 is open and a sealing door 8 is hinged at the opening. A handle is provided on the outside of the sealing door 8 . The sealing door 8 is transparent and visible, so that the cleaning condition in the cleaning cavity 1 can be easily observed.

[0013] Furthermore, a driving motor is provided on one side of the outer side of the cleaning chamber 1 .

[0014] Beneficial effects of the utility model: The utility model proposes a large plate cooling and cleaning device, comprising a cleaning chamber 1, by arranging symmetrical jet devices 2 on the left and right sides, to clean the equipment that is loaded with products and has been coated together, by arranging a partition 4 at the rear end of the cleaning chamber 1, the partition 4 is evenly spaced with a plurality of exhaust holes 44, the jet device 2 cooperates with the exhaust holes 44, so that the temperature in the cleaning chamber 1 is rapidly cooled, and the parts with poor bonding strength on the equipment that is loaded with products and has been coated together are peeled off and discharged through the exhaust holes 44, thereby reducing the amount of dust and making the surrounding environment of the workpiece clean. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the large plate cooling and cleaning device of the utility model.

[0016] Figure 2 It is a structural schematic diagram of the large plate and the workpiece rack of the utility model.

[0017] Main component symbols

[0018] Clean the cavity 1 Jet device 2 Base 32 Rotating disk 33 Sensor needle 34 Positioning parts 35 Partition 4 Exhaust Hole 44 Support frame 5 guide 6 Controls 7 Sealed door 8 Market 9 Workpiece rack 10

[0019] The following specific implementation manner will further illustrate the present utility model in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0020] like Figure 1 As shown, it is a schematic diagram of the overall structure of the large plate cooling and cleaning device of the utility model; Figure 2 The figure shows the structure of the large plate and the workpiece rack of the utility model.

[0021] A large plate cooling and cleaning device comprises a cleaning chamber 1, wherein jet devices 2 are symmetrically arranged on the left and right sides of the cleaning chamber 1 for cleaning equipment loaded with products and coated together, wherein a partition 4 is arranged at the rear end of the cleaning chamber 1, wherein a plurality of exhaust holes 44 are evenly spaced on the partition 4, wherein the jet device 2 cooperates with the exhaust holes 44 to rapidly cool the temperature in the cleaning chamber 1, and portions with poor bonding strength on the equipment loaded with products and coated together are peeled off and discharged through the exhaust holes 44, thereby reducing the amount of dust and making the surrounding environment of the workpiece clean.

[0022] The carrying device includes a base 32 and a rotating disk 33 . The rotating disk 33 is disposed on the base 32 . One end of the base 32 is connected to the lower part of the partition 4 , and the other end is located at the opening of the cleaning chamber 1 .

[0023] A workpiece rack 10 is provided on the large plate 9, and products are placed on the workpiece rack 10. A rotating shaft is provided at the bottom of the large plate 9, and the base 32 is inserted through the rotating shaft. The rotating plate 33 is connected to the rotating shaft, so that the rotating plate 33 drives the large plate 9 to rotate 360° during cleaning.

[0024] The partition 4 is densely covered with exhaust holes 44 at the same height as the cleaning position. The exhaust holes 44 are evenly spaced and are used to discharge substances with poor binding force generated during cleaning. The middle part of the partition 4 is an arc panel convex outward, which is used to avoid the large plate 9.

[0025] A support frame 5 is provided at the lower part of the cleaning chamber 1 , and guide rails 6 are provided on both sides of the support frame 5 for matching with a conveying vehicle carrying a large plate 9 to guide the conveying vehicle.

[0026] A control device 7 is also provided on one side of the outer side of the cleaning chamber 1 . The control device 7 is provided with a control button and a pressure gauge. The control device 7 is electrically connected to the rotating disk 33 and the jet device 2 .

[0027] The front end of the cleaning chamber 1 is open and a sealing door 8 is hinged at the opening. A handle is provided on the outside of the sealing door 8 . The sealing door 8 is transparent and visible, so that the cleaning condition in the cleaning chamber 1 can be easily observed.

[0028] A driving motor is also provided on one side of the outer side of the cleaning chamber 1 .

[0029] Beneficial effects of the utility model: The utility model proposes a large plate cooling and cleaning device, comprising a cleaning chamber 1, by arranging symmetrical jet devices 2 on the left and right sides, to clean the equipment that is loaded with products and has been coated together, by arranging a partition 4 at the rear end of the cleaning chamber 1, the partition 4 is evenly spaced with a plurality of exhaust holes 44, the jet device 2 cooperates with the exhaust holes 44, so that the temperature in the cleaning chamber 1 is rapidly cooled, and the parts with poor bonding strength on the equipment that is loaded with products and has been coated together are peeled off and discharged through the exhaust holes 44, thereby reducing the amount of dust and making the surrounding environment of the workpiece clean.

[0030] The above-mentioned embodiments only express several implementation methods of the utility model, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A large plate cooling and cleaning device, comprising a cleaning chamber (1), characterized in that: The cleaning chamber (1) is symmetrically provided with jet devices (2) on both sides thereof for cleaning equipment loaded with products and subjected to coating. The cleaning chamber (1) is provided with a carrying device on its bottom surface thereof for connecting the equipment loaded with products and subjected to coating to the carrying device. The cleaning chamber (1) is provided with a partition (4) at the rear end thereof. The partition (4) is evenly spaced and provided with a plurality of exhaust holes (44). The jet devices (2) cooperate with the exhaust holes (44) to rapidly cool the temperature in the cleaning chamber (1), and parts of the equipment loaded with products and subjected to coating with poor bonding strength are peeled off and discharged through the exhaust holes (44).

2. The large plate cooling and cleaning device according to claim 1, characterized in that: The bearing device comprises a base (32) and a rotating disk (33); the rotating disk (33) is arranged on the base (32); one end of the base (32) is connected to the lower part of the partition (4), and the other end is located at the opening of the cleaning chamber (1).

3. The large plate cooling and cleaning device according to claim 2, characterized in that: A workpiece rack (10) is arranged on the large plate (9), and products are placed on the workpiece rack (10). A rotating shaft is arranged at the bottom of the large plate (9), and the rotating shaft is inserted into the base (32). The rotating plate (33) is connected to the rotating shaft, so that the rotating plate (33) drives the large plate (9) to rotate 360 ​​degrees during cleaning.

4. The large plate cooling and cleaning device according to claim 1, characterized in that: The partition (4) is densely covered with exhaust holes (44) at the same height as the cleaning position. The exhaust holes (44) are evenly spaced and distributed. The middle part of the partition (4) is an outwardly convex arc panel.

5. The large plate cooling and cleaning device according to claim 1, characterized in that: A support frame (5) is provided at the lower part of the cleaning chamber (1), and guide rails (6) are respectively provided on both sides of the support frame (5).

6. The large plate cooling and cleaning device according to claim 1, characterized in that: A control device (7) is also provided on one side of the outer side of the cleaning chamber (1), and a control button and a pressure gauge are provided on the control device (7). The control device (7) is electrically connected to the rotating disk (33) and the jet device (2).

7. The large plate cooling and cleaning device according to claim 1, characterized in that: The front end of the cleaning chamber (1) is open and a sealing door (8) is hingedly connected to the opening. A handle is provided on the outside of the sealing door (8), and the sealing door (8) is transparent and visible.

8. The large plate cooling and cleaning device according to claim 1, characterized in that: A driving motor is also provided on one side of the outer side of the cleaning chamber (1).