Crystal loading device of vertical diffusion furnace

Abstract

The utility model provides a vertical diffusion furnace crystal loading device, which relates to the technical field of crystal production and processing, and comprises a diffusion furnace main body, one side of the diffusion furnace main body is provided with an automatic feeding assembly, the automatic feeding assembly comprises a feeding frame and a feeding port, the feeding frame is connected to one side of the diffusion furnace main body, and the feeding port is connected to the other side of the diffusion furnace main body. Four sets of feeding ports are formed in the side, close to the feeding frame, of the diffusion furnace main body, a motor is arranged on the outer surface of one side of the feeding frame, the output end of the motor is connected with a one-way screw rod, and when crystals need to be fed into the diffusion furnace main body for machining, four sets of crystals can be put into four sets of feeding plates correspondingly; and then the push plate is pushed by the motor to move towards the diffusion furnace main body, the four groups of feeding plates are driven to be completely inserted into the material inlet, and then the crystal is pushed into the diffusion furnace main body by the electric push rod, so that the processing and feeding of the crystal are completed, and the working efficiency of the diffusion furnace main body is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal production and processing, in particular to a vertical diffusion furnace crystal loading device. Background Art

[0002] The diffusion furnace is one of the important process equipment in the front process of the semiconductor production line. It is mainly used for diffusion, oxidation, annealing, alloying and sintering in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers.

[0003] Existing, Publication No.: CN204957758U, a feeding and wafer feeding device applied to oxidation diffusion furnace. The device includes A lifting guide rail, A lifting guide rail substrate, translation motor, translation guide rail, paddle, translation motor bracket, B lifting guide rail substrate, B lifting guide rail, lifting motor bracket, lifting motor, translation guide rail slider, lifting screw nut, translation guide rail substrate, lifting guide rail slider, lifting screw, translation screw nut and translation screw. This design adopts the technology of single paddle to feed wafers to multiple furnaces, and uses PLC to control the paddle carrying silicon wafers to lift the Y axis and move horizontally on the X axis through two servo motors respectively, so that after reaching different furnace mouth height positions according to the corresponding process, the paddle is pushed into the furnace to complete the wafer feeding. This design improves the automation level of feeding and wafer feeding of oxidation diffusion furnace equipment; solves the problems encountered in manual operation during feeding and wafer feeding; and improves work efficiency.

[0004] This patent can realize automatic loading, but during the loading process, only one group of materials can be loaded at a time, and multiple groups of materials cannot be loaded at one time, which reduces the working efficiency of the diffusion furnace and its practicality needs to be improved. Utility Model Content

[0005] The utility model aims to solve the problem that only one group of materials can be loaded each time, multiple groups of materials cannot be loaded at one time, and the working efficiency of the diffusion furnace is reduced, and a vertical diffusion furnace crystal loading device is proposed.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a vertical diffusion furnace crystal loading device, comprising a diffusion furnace body, one side of the diffusion furnace body is provided with an automatic feeding assembly, the automatic feeding assembly comprises a feeding frame and a feeding port, the feeding frame is connected to one side of the diffusion furnace body, the side of the diffusion furnace body close to the feeding frame is provided with four groups of feeding ports, a motor is provided on the outer surface of one side of the feeding frame, the output end of the motor is connected to a one-way screw, one end of the one-way screw is provided with a bearing, and the one-way screw is provided with a bearing. A push plate is provided on the surface of the screw, a threaded hole is provided inside the push plate, sliding blocks are provided at the upper and lower ends of the push plate, sliding grooves are provided on the inner walls of the upper and lower ends of the feeding frame, four groups of feeding plates are provided on the side of the push plate close to the feeding port, a supporting frame is provided at the bottom of the feeding plate, a fixed block is connected to one side of the surface of the feeding plate, a notch is provided inside the fixed block, an electric push rod is provided inside the notch, the output end of the electric push rod is fixedly connected to the push plate, and a cooling fan is provided on the outer surface of one side of the fixed block.

[0007] Preferably, the motor is electrically connected to an external power source via a control switch, and the output end of the motor passes through a feeding frame and is fixedly connected to a one-way screw rod.

[0008] Preferably, the one-way screw is rotationally connected to the bearing, and the push plate is threadedly connected to the one-way screw via a threaded hole.

[0009] Preferably, the push plate is slidably connected to the slide groove via a slider, and the outer surface of the slider is in contact with the inner surface wall of the slide groove.

[0010] Preferably, a ventilation assembly is provided on the top of one side of the diffusion furnace body, and the ventilation assembly comprises an air outlet and a ventilation frame, and the air outlet is opened on the top of one side of the diffusion furnace body.

[0011] Preferably, a ventilation rack is provided just above the air outlet, a slot is provided inside the ventilation rack, a temperature insulation plate is provided inside the slot, and an exhaust fan is fixedly connected to the top of the ventilation rack.

[0012] Preferably, the position and size of the insulation board match the position and size of the slot, and the insulation board is slidably connected to the ventilation frame via the slot.

[0013] Compared with the prior art, the advantages and positive effects of the utility model are:

[0014] 1. According to the utility model, when it is necessary to feed crystals into the main body of the diffusion furnace for processing, four groups of crystals can be placed in four groups of feeding plates respectively, and then the push plates are pushed by a motor to move toward the main body of the diffusion furnace, and after all the four groups of feeding plates are driven to be inserted into the feed inlet, the crystals are pushed into the main body of the diffusion furnace by an electric push rod, thereby completing the processing and feeding of the crystals and improving the working efficiency of the main body of the diffusion furnace.

[0015] 2. The utility model can realize rapid cooling of the diffusion furnace body by pulling out the insulation plate from the card slot when the temperature in the diffusion furnace body needs to be lowered after the crystal processing is completed, and then turning on the cold fan to discharge the high temperature in the diffusion furnace body, thereby avoiding the problem that the operator is easily burned by high temperature when opening the diffusion furnace body to take out the crystal, and improving the safety of the operator when operating the diffusion furnace body to take out materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A three-dimensional structural diagram of a vertical diffusion furnace crystal loading device is proposed for the utility model;

[0017] Figure 2 Another perspective structural diagram of a vertical diffusion furnace crystal loading device proposed by the utility model;

[0018] Figure 3 An exploded diagram of a feeding frame of a vertical diffusion furnace crystal loading device is proposed for the utility model;

[0019] Figure 4 An exploded diagram of a fixing block of a vertical diffusion furnace crystal loading device is proposed for the utility model;

[0020] Figure 5 The utility model provides an explosion diagram of a gas exchange rack of a vertical diffusion furnace crystal loading device.

[0021] Legend:

[0022] 1. Diffusion furnace body; 2. Automatic feeding assembly; 201. Feeding frame; 202. Feeding port; 203. Motor; 204. One-way screw; 205. Bearing; 206. Push plate; 207. Threaded hole; 208. Slider; 209. Slide; 210. Feeding plate; 211. Support frame; 212. Fixed block; 213. Notch; 214. Electric push rod; 215. Push plate; 216. Cooling fan; 3. Ventilation assembly; 301. Air outlet; 302. Ventilation frame; 303. Slot; 304. Insulation board; 305. Exhaust fan. DETAILED DESCRIPTION

[0023] In order to more clearly understand the above-mentioned purpose, features and advantages of the utility model, the utility model is further described below in conjunction with the accompanying drawings and embodiments. It should be noted that the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

[0024] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways than those described herein. Therefore, the present invention is not limited to the specific embodiments of the following disclosure.

[0025] Embodiment 1, as Figure 1-4 As shown, the utility model provides a vertical diffusion furnace crystal loading device, including a diffusion furnace body 1, an automatic feeding assembly 2 is arranged on one side of the diffusion furnace body 1, the automatic feeding assembly 2 includes a feeding frame 201 and a feeding port 202, the feeding frame 201 is connected to one side of the diffusion furnace body 1, and four groups of feeding ports 202 are opened on the side of the diffusion furnace body 1 close to the feeding frame 201, a motor 203 is arranged on the outer surface of one side of the feeding frame 201, a one-way screw 204 is connected to the output end of the motor 203, a bearing 205 is arranged at one end of the one-way screw 204, a push plate 206 is arranged on the surface of the one-way screw 204, a threaded hole 207 is opened through the inside of the push plate 206, and sliders 208 are arranged at the upper and lower ends of the push plate 206, and slide grooves 209 are opened on the inner walls of the upper and lower ends of the feeding frame 201, and a one-way screw 204 is arranged on the side of the push plate 206 close to the feeding port 202. There are four groups of feeding plates 210, and a supporting frame 211 is provided at the bottom of the feeding plate 210. A fixed block 212 is connected to one side of the surface of the feeding plate 210. A notch 213 is opened inside the fixed block 212, and an electric push rod 214 is provided inside the notch 213. The output end of the electric push rod 214 is fixedly connected to a push plate 215. A cooling fan 216 is provided on the outer surface of one side of the fixed block 212. The motor 203 is electrically connected to the external power supply through the control switch. The output end of the motor 203 passes through the feeding frame 201 and is fixedly connected with the one-way screw 204. The one-way screw 204 is rotatably connected to the bearing 205. The push plate 206 is threadedly connected to the one-way screw 204 through the threaded hole 207. The push plate 206 is slidably connected to the slide groove 209 through the slider 208. The outer surface of the slider 208 fits the inner surface wall of the slide groove 209.

[0026] The effect achieved by the entire embodiment 1 is that when crystals need to be fed into the diffusion furnace body 1 for processing, the four groups of crystals can be placed in the four groups of feeding plates 210 respectively, and then the forward rotation function of the motor 203 is turned on by the control switch to drive the one-way screw 204 to perform the forward rotation function, so that the one-way screw 204 can rotate with the push plate 206 through the threaded hole 207, and drive the push plate 206 to push the four groups of feeding plates 210 to move toward the diffusion furnace body 1. While moving, the sliders 208 at the upper and lower ends of the push plate 206 will also slide in the slide groove 209, thereby improving the stability of the push plate 206 when moving, and allowing all the four groups of feeding plates 210 to be inserted into the feed port 202, and then the push plate 215 is pushed by the electric push rod 214. , push the crystal into the diffusion furnace body 1, thereby completing the simultaneous feeding of multiple groups, and then turn on the reverse rotation function of the motor 203 to drive the one-way screw 204 to rotate in the opposite direction, so that the one-way screw 204 can rotate in the opposite direction with the push plate 206 through the threaded hole 207, and the push plate 206 drives the four groups of feeding plates 210 to move outward, so that the feeding plates 210 return to their original positions and wait for the next feeding, and the support frame 211 can support the feeding plates 210, and the cold fan 216 can achieve the heat dissipation effect of the electric push rod 214, so as to avoid the problem of high temperature of the electric push rod 214 causing the service life to be reduced, thereby improving the working efficiency of the diffusion furnace body 1 and avoiding the problem that the existing feeding method can only feed one group of materials at a time.

[0027] Embodiment 2, as Figure 1 , Figure 2 and Figure 5 As shown, a ventilation component 3 is arranged at the top of one side of the diffusion furnace body 1, and the ventilation component 3 includes an air outlet 301 and a ventilation frame 302. The air outlet 301 is opened at the top of one side of the diffusion furnace body 1, and the ventilation frame 302 is arranged just above the air outlet 301. A slot 303 is opened inside the ventilation frame 302, and a thermal insulation board 304 is arranged inside the slot 303. An exhaust fan 305 is fixedly connected to the top of the ventilation frame 302. The position and size of the thermal insulation board 304 match the position and size of the slot 303. The thermal insulation board 304 is slidably connected to the ventilation frame 302 through the slot 303.

[0028] The effect achieved by the entire embodiment 2 is that when the temperature inside the diffusion furnace main body 1 needs to be cooled down after the crystal processing is completed, the insulation plate 304 can be pulled outward so that the insulation plate 304 can be pulled out from the slot 303, and then the cold fan 216 is turned on by the control switch to discharge the high temperature inside the diffusion furnace main body 1, thereby achieving rapid cooling of the diffusion furnace main body 1. When the diffusion furnace main body 1 needs to be operated to clamp the crystal, the insulation plate 304 can be pushed into the slot 303 for installation, thereby avoiding the problem of operators being easily burned by high temperature when opening the diffusion furnace main body 1 to take out the crystal, and improving the safety of operators when operating the diffusion furnace main body 1 to take out materials.

[0029] Working principle: when it is necessary to feed the crystals into the diffusion furnace body 1 for processing, the four groups of crystals can be placed in the four groups of feeding plates 210 respectively, and then the push plate 206 is pushed by the motor 203 to move toward the diffusion furnace body 1, and after all the four groups of feeding plates 210 are driven to be inserted into the feed port 202, the crystals are pushed into the diffusion furnace body 1 by the electric push rod 214, thereby completing the processing and feeding of the crystals, and improving the working efficiency of the diffusion furnace body 1. After the crystal processing is completed, when the temperature in the diffusion furnace body 1 needs to be cooled down, the insulation plate 304 can be pulled out of the card slot 303, and then the cold fan 216 is turned on to discharge the high temperature in the diffusion furnace body 1, so as to achieve rapid cooling of the diffusion furnace body 1, avoiding the problem that the operator is easily scalded by high temperature when opening the diffusion furnace body 1 to take out the crystal, and improving the safety of the operator when operating the diffusion furnace body 1 to take out the material.

[0030] The above description is only a preferred embodiment of the present invention and does not limit the present invention in other forms. Any technician familiar with the profession may use the technical content disclosed above to change or modify it into an equivalent embodiment with equivalent changes and apply it to other fields. However, any simple modification, equivalent change and modification made to the above embodiment based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still falls within the protection scope of the technical solution of the present invention.

Claims

1. A vertical diffusion furnace crystal loading device, comprising a diffusion furnace body (1), characterized in that: An automatic feeding assembly (2) is provided on one side of the diffusion furnace body (1); The automatic feeding assembly (2) comprises a feeding frame (201) and a feeding port (202); the feeding frame (201) is connected to one side of a diffusion furnace body (1); four groups of feeding ports (202) are provided on a side of the diffusion furnace body (1) close to the feeding frame (201); a motor (203) is provided on an outer surface of one side of the feeding frame (201); a one-way screw (204) is connected to an output end of the motor (203); a bearing (205) is provided at one end of the one-way screw (204); a push plate (206) is provided on the surface of the one-way screw (204); a threaded hole (207) is provided inside the push plate (206); and a threaded hole (207) is provided on the upper surface of the push plate (206). A slider (208) is provided at the lower end, and a slide groove (209) is provided on the inner wall of the upper and lower ends of the feeding frame (201). Four groups of feeding plates (210) are provided on the side of the push plate (206) close to the feeding port (202), and a support frame (211) is provided at the bottom of the feeding plate (210). A fixed block (212) is connected to one side of the surface of the feeding plate (210), and a notch (213) is provided inside the fixed block (212). An electric push rod (214) is provided inside the notch (213), and a push plate (215) is fixedly connected to the output end of the electric push rod (214). A cooling fan (216) is provided on the outer surface of one side of the fixed block (212).

2. A vertical diffusion furnace crystal loading device according to claim 1, characterized in that: The motor (203) is electrically connected to an external power source via a control switch, and an output end of the motor (203) passes through the feeding frame (201) and is fixedly connected to a one-way screw rod (204).

3. A vertical diffusion furnace crystal loading device according to claim 2, characterized in that: The one-way screw rod (204) and the bearing (205) are rotatably connected, and the push plate (206) is threadedly connected to the one-way screw rod (204) via the threaded hole (207).

4. A vertical diffusion furnace crystal loading device according to claim 3, characterized in that: The push plate (206) is slidably connected to the slide groove (209) via the slider (208), and the outer surface of the slider (208) is in contact with the inner surface wall of the slide groove (209).

5. The vertical diffusion furnace crystal loading device according to claim 1, characterized in that: A ventilation assembly (3) is provided at the top of one side of the diffusion furnace body (1), the ventilation assembly (3) comprising an air outlet (301) and a ventilation frame (302), and the air outlet (301) is opened at the top of one side of the diffusion furnace body (1).

6. A vertical diffusion furnace crystal loading device according to claim 5, characterized in that: A ventilation rack (302) is arranged just above the air outlet (301), a slot (303) is provided inside the ventilation rack (302), a temperature insulation board (304) is provided inside the slot (303), and an exhaust fan (305) is fixedly connected to the top of the ventilation rack (302).

7. A vertical diffusion furnace crystal loading device according to claim 6, characterized in that: The position and size of the temperature insulation plate (304) match the position and size of the slot (303), and the temperature insulation plate (304) is slidably connected to the ventilation frame (302) via the slot (303).

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