Sintering furnace for preparing air pressure sintering silicon nitride

Abstract

The utility model relates to the technical field of sintering furnaces, and discloses a sintering furnace for preparing air pressure sintering silicon nitride, which comprises a sintering furnace body, a sintering furnace exhaust pipe is connected onto the sintering furnace body, a silencing component is connected at the top end of the sintering furnace exhaust pipe, the silencing component comprises a silencing shell, and a cooling chamber and a noise reduction chamber are arranged in the silencing shell. A coil pipe is arranged in the cooling chamber, a water inlet pipe and a water outlet pipe are connected into the cooling chamber in a penetrating mode, the top of the coil pipe extends to the noise reduction chamber through a second air pipe, a flow dividing assembly is arranged at the top of the second air pipe, a honeycomb plate is arranged above the flow dividing assembly, the flow dividing assembly comprises an inverted-triangle-shaped shell, and a plurality of flow dividing pipes are connected to the top of the inverted-triangle-shaped shell. Air in the coil pipe is cooled, so that the temperature of the silencing assembly is reduced, normal operation of equipment is guaranteed, the air is diffused through the honeycomb plate and the flow dividing pipe, the flow velocity of airflow is buffered, and the noise reduction effect is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of sintering furnaces, in particular to a sintering furnace for preparing silicon nitride by gas pressure sintering. Background Art

[0002] A sintering furnace refers to a special equipment that allows powder compacts to obtain the required physical, mechanical properties and microstructure through sintering. The sintering furnace is used to dry the slurry on the silicon wafer, remove the organic components in the slurry, complete the sintering of the aluminum back field and gate lines, etc.

[0003] Generally, a connecting exhaust pipe is welded on the sintering furnace to discharge the gas in the sintering furnace and adjust the internal air pressure atmosphere. When the gas is discharged from the exhaust pipe, the air flow speed is fast, which brings a lot of noise and affects the environmental protection effect. At the same time, the general muffler lacks a cooling component, which is easy to cause internal damage under high temperature conditions and cannot be used for a long time.

[0004] Therefore, those skilled in the art are in urgent need of developing a sintering furnace for preparing silicon nitride by gas pressure sintering. Utility Model Content

[0005] The utility model aims to solve the shortcomings in the prior art and proposes a sintering furnace for preparing silicon nitride by gas pressure sintering.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a sintering furnace for preparing silicon nitride by gas pressure sintering, comprising a sintering furnace body, the sintering furnace body is connected to a sintering furnace exhaust pipe, the top of the sintering furnace exhaust pipe is connected to a silencer assembly, the silencer assembly comprises a silencer shell, the interior of the silencer shell is provided with a cooling chamber and a noise reduction chamber in sequence along the exhaust direction; a partition is arranged between the cooling chamber and the noise reduction chamber, a coil is arranged inside the cooling chamber, the bottom of the coil is connected to a first air pipe, the bottom of the first air pipe is connected to an air collecting hood, a water inlet pipe and a water outlet pipe are connected through the cooling chamber, the top of the coil is connected to a second air pipe, the second air pipe passes through the partition and extends to the noise reduction chamber.

[0007] Preferably, a flow diversion component is provided on the top of the second air pipe, and a honeycomb plate is provided above the flow diversion component.

[0008] Preferably, the diversion assembly comprises an inverted triangle shell, the interior of the inverted triangle shell is a hollow structure and the bottom is connected to the second air pipe, and the top of the inverted triangle shell is connected to a plurality of diversion pipes.

[0009] Preferably, the air collecting hood and the partition are respectively sealed and connected to the inner wall of the sound-absorbing shell.

[0010] Preferably, a first filter is provided at the bottom of the air collecting hood, and a second filter is provided at the top of the sound-absorbing shell.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] In the utility model, cooling water is circulated into the cooling chamber through the water inlet pipe and the water outlet pipe, thereby cooling the gas inside the coil, thereby reducing the temperature of the silencer component and ensuring the normal operation of the equipment; the honeycomb plate effectively buffers the air flow velocity and reduces the noise generated by excessive air flow velocity; the diverter pipe diffuses the gas, improves the utilization rate of the honeycomb plate, and effectively increases the noise reduction effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0014] In the figure: 1-sintering furnace exhaust pipe; 2-silencer shell; 3-partition; 4-coil; 5-gas collecting hood; 6-first filter; 7-first air pipe; 8-water inlet pipe; 9-water outlet pipe; 10-second air pipe; 11-diverter assembly; 12-diverter pipe; 13-honeycomb plate; 14-second filter. DETAILED DESCRIPTION

[0015] The present invention is described in detail below in conjunction with the drawings and specific embodiments in the embodiments of the present invention. The description here is only used to explain the present invention, but not to limit the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work, any modifications, equivalent replacements, improvements, etc., should be included in the protection scope of the present invention.

[0016] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0017] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0018] See also Figure 1 The utility model provides an embodiment: a sintering furnace for preparing silicon nitride by gas pressure sintering, comprising a sintering furnace body (not shown in the figure), a sintering furnace exhaust pipe 1 is connected to the sintering furnace body, a silencer assembly is connected to the top of the sintering furnace exhaust pipe 1, and the silencer assembly comprises a silencer shell 2, a cooling chamber and a noise reduction chamber are arranged in sequence inside the silencer shell 2 along the gas outlet direction; a partition 3 is arranged between the cooling chamber and the noise reduction chamber, a coil 4 is arranged inside the cooling chamber, a first air pipe 7 is connected to the bottom of the coil 4, and the first air pipe 7 is connected to the bottom of the coil 4. The bottom of the tube 7 is connected to an air collecting hood 5, and a water inlet pipe 8 and a water outlet pipe 9 are connected through the cooling chamber. The top of the coil 4 is connected to a second air pipe 10, which passes through the partition 3 and extends to the noise reduction chamber. The air collecting hood 5 and the partition 3 are respectively sealed with the inner wall of the silencer shell 2. When exhausting through the sintering furnace exhaust pipe 1, the gas first passes through the air collecting hood 5 into the cooling chamber, and cooling water is circulated into the cooling chamber through the water inlet pipe 8 and the water outlet pipe 9, thereby cooling the gas inside the coil 4.

[0019] Furthermore, a diversion component 11 is provided on the top of the second air pipe 10, and a honeycomb plate 13 is provided above the diversion component 11. The diversion component 11 includes an inverted triangular shell. The interior of the inverted triangular shell is a hollow structure and the bottom is connected to the second air pipe 10. A plurality of diversion pipes 12 are connected to the top of the inverted triangular shell. The cooled gas enters the noise reduction chamber through the second air pipe 10 and is dispersed through the diversion component 11. After the gas is discharged from the top of the plurality of diversion pipes 12, it enters the honeycomb plate 13. The honeycomb plate 13 can effectively buffer the airflow velocity and reduce the noise generated by the excessively high airflow velocity. The diversion pipe 12 diffuses the gas, improves the utilization rate of the honeycomb plate 13, and effectively increases the noise reduction effect.

[0020] Furthermore, a first filter screen 6 is provided at the bottom of the air collecting hood 5, and a second filter screen 14 is provided at the top of the silencer housing 2. The first filter screen 6 and the second filter screen 14 can effectively prevent impurities from entering the silencer assembly.

[0021] The working principle of the utility model is as follows: when working, the silencer shell 2 is connected to the exhaust pipe 1 of the sintering furnace. When exhaust is carried out through the exhaust pipe 1 of the sintering furnace, the gas first passes through the gas collecting hood 5 into the cooling chamber, and cooling water is circulated into the cooling chamber through the water inlet pipe 8 and the water outlet pipe 9, thereby cooling the gas inside the coil 4. The cooled gas enters the noise reduction chamber through the second air pipe 10 and is dispersed through the diversion component 11. After the gas is discharged from the top of the multiple diversion pipes 12, it enters the honeycomb plate 13. The honeycomb plate 13 can effectively buffer the airflow velocity and reduce the noise generated by the excessively high airflow velocity.

[0022] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A sintering furnace for preparing silicon nitride by gas pressure sintering, comprising a sintering furnace body, to which a sintering furnace exhaust pipe (1) is connected, characterized in that: The top end of the sintering furnace exhaust pipe (1) is connected to a silencer assembly, the silencer assembly comprising a silencer housing (2), the interior of the silencer housing (2) being provided with a cooling chamber and a noise reduction chamber in sequence along the gas outlet direction; A partition (3) is provided between the cooling room and the noise reduction room, a coil (4) is provided inside the cooling room, the bottom of the coil (4) is connected to a first air pipe (7), the bottom of the first air pipe (7) is connected to an air collecting hood (5), a water inlet pipe (8) and a water outlet pipe (9) are connected through the cooling room, the top of the coil (4) is connected to a second air pipe (10), and the second air pipe (10) passes through the partition (3) and extends to the noise reduction room.

2. The sintering furnace for preparing silicon nitride by gas pressure sintering according to claim 1, characterized in that: A flow splitter component (11) is provided on the top of the second air pipe (10), and a honeycomb plate (13) is provided above the flow splitter component (11).

3. The sintering furnace for preparing silicon nitride by gas pressure sintering according to claim 2, characterized in that: The flow splitter assembly (11) comprises an inverted triangular shell, the interior of the inverted triangular shell is a hollow structure and the bottom is connected to the second air pipe (10), and the top of the inverted triangular shell is connected to a plurality of flow splitters (12).

4. The sintering furnace for preparing silicon nitride by gas pressure sintering according to claim 1, characterized in that: The air collecting hood (5) and the partition plate (3) are respectively sealedly connected to the inner wall of the sound-absorbing outer shell (2).

5. The sintering furnace for preparing silicon nitride by gas pressure sintering according to claim 1, characterized in that: A first filter screen (6) is provided at the bottom of the air collecting hood (5), and a second filter screen (14) is provided at the top of the sound-absorbing housing (2).

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