Laser COC test device and system

Abstract

The utility model discloses a laser COC testing device and a laser COC testing system. The laser COC testing device comprises a bottom plate, a carrying platform, and a CCD module, an integrating sphere module and a plurality of probe modules which are arranged on the bottom plate. The carrying table is used for carrying a COC sample to be detected; each probe module can be adjusted in multiple directions so as to adaptively abut against a COC sample to be tested through a probe and is used for supplying power to the COC sample to be tested; the CCD module can be adjusted in multiple directions so as to adaptively collect image data of the COC sample to be detected; the integrating sphere module can be adjusted in multiple directions so as to adaptively receive the laser emitted by the COC sample to be measured. Compared with the prior art, the COC testing device can test COC of lasers with different sizes and wires, and the testing efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of laser equipment, in particular to a laser COC testing device and system. Background Art

[0002] In the optoelectronics industry, especially in the field of semiconductor lasers, COC (Chip on Carrier) is a packaging technology that refers to a packaging style in which the laser chip is directly placed and interconnected on a carrier. This packaging method makes the laser more compact and efficient, and is convenient for integration into more complex optical or electronic systems. For example, lasers in fiber-optic communication modules often use COC or similar packaging forms.

[0003] The current test system for COC mainly focuses on automated testing, but the drawback of automated testing is that the test fixture needs to be customized according to the product. COCs of different designs need to match specified fixtures to adapt to changes in power-on position or size. This test system is only suitable for products that have been mass-produced. Currently, optical communication products will produce COCs in the front-end process, but the COC sizes and wiring of each manufacturer are different, resulting in customized designs of test platforms, test probes, etc., which will result in high system production costs and long production cycles. In particular, products used in the R&D stage require more diversified test systems. Utility Model Content

[0004] The main purpose of the utility model is to provide a laser COC testing device and system, which can be used to test laser COCs of different sizes and wirings, thereby improving the testing efficiency.

[0005] To achieve the above purpose, the utility model provides a laser COC test device comprising:

[0006] Base plate;

[0007] A carrier, used for carrying the COC sample to be tested;

[0008] A plurality of probe modules are arranged on the bottom plate, and each of the probe modules can be adjusted in multiple directions to be adapted to abut against the COC sample to be tested through the probe, so as to supply power to the COC sample to be tested;

[0009] A CCD module is disposed on the bottom plate, and the CCD module can be adjusted in multiple directions to adaptively collect image data of the COC sample to be tested;

[0010] The integrating sphere module is arranged on the bottom plate, and the integrating sphere module can be adjusted in multiple directions to adaptively receive the laser emitted by the COC sample to be tested.

[0011] In one embodiment, each of the probe modules comprises:

[0012] Six-axis adjustment platform;

[0013] The probe is arranged on the six-axis adjustment platform, and the probe is used to access the COC sample to be tested and to supply power to the COC sample to be tested.

[0014] In one embodiment, the six-axis adjustment platform comprises:

[0015] a first regulating mechanism;

[0016] a second adjustment mechanism, rotatably connected to the first adjustment mechanism; and

[0017] The clamping portion is arranged on the second adjusting mechanism and is used for clamping and fixing the probe.

[0018] In one embodiment, the CCD module comprises:

[0019] A vertical bracket fixed on the bottom plate;

[0020] A slide rail, arranged on the vertical support;

[0021] A CCD adjustment frame is slidably disposed on the slide rail;

[0022] The CCD camera is fixedly arranged on the CCD adjustment frame.

[0023] In one embodiment, the CCD adjustment frame includes:

[0024] a third adjusting mechanism, slidably disposed on the slide rail, wherein the third adjusting mechanism integrates a first X-axis moving unit, a first Y-axis moving unit and a first Z-axis moving unit;

[0025] A horizontal bracket is fixedly connected to the third adjusting mechanism, and the horizontal bracket is used to fix the CCD camera.

[0026] In one embodiment, the integrating sphere module comprises:

[0027] An integrating sphere adjustment platform is arranged on the bottom plate;

[0028] The integrating sphere is arranged on the integrating sphere adjustment platform.

[0029] In one embodiment, the integrating sphere adjustment platform comprises:

[0030] a fourth adjustment mechanism, wherein the fourth adjustment mechanism is integrated with a second X-axis moving unit, a second Y-axis moving unit, and a second Z-axis moving unit;

[0031] a fifth adjusting mechanism, rotatably disposed on the fourth adjusting mechanism; and

[0032] The integrating sphere carrying platform is fixedly arranged on the fifth adjusting mechanism and is used for carrying the integrating sphere.

[0033] In one embodiment, the carrier comprises:

[0034] The vacuum adsorption hole is used for vacuum adsorption of the COC sample, and the vacuum adsorption hole is connected to an external vacuum pump through a vacuum conduit.

[0035] In one embodiment, a TEC is disposed inside the carrier, and the TEC is electrically connected to an external temperature controller via a TEC control line.

[0036] The utility model also provides a laser COC test system, which is characterized by comprising the laser COC test device described above, and:

[0037] A source meter, electrically connected to the probe, for applying power to the COC sample to be tested;

[0038] A temperature controller, electrically connected to the TEC, for controlling the temperature of the carrier;

[0039] A power meter connected to the integrating sphere via an integrating sphere wire;

[0040] The spectrometer is connected to the integrating sphere via an optical fiber.

[0041] Compared with the prior art, the utility model has the following beneficial effects:

[0042] The probe used for powering on the laser COC test is clamped on a six-axis adjustment platform, and the probe position can be moved at will to adapt to laser COCs with different wiring. At the same time, the CCD module and the integrating sphere module can be adjusted to suitable positions in multiple directions to adapt to CCD image acquisition and to adapt to receiving the laser emitted by the laser COC to be tested. The carrier has a vacuum adsorption function and can carry COCs of different sizes. Therefore, the utility model can test laser COCs with different wiring and sizes, thereby improving the test efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0044] Figure 1This is one of the three-dimensional structural diagrams of an embodiment of the laser COC testing device of the utility model;

[0045] Figure 2 This is the second three-dimensional structural diagram of an embodiment of the laser COC testing device of the utility model;

[0046] Figure 3 This is a three-dimensional structural diagram of the probe module of the utility model;

[0047] Figure 4 This is one of the three-dimensional structural diagrams of the six-axis adjustment platform of the utility model;

[0048] Figure 5 This is the second three-dimensional structural diagram of the six-axis adjustment platform of the utility model;

[0049] Figure 6 This is a structural diagram of the CCD module of the utility model;

[0050] Figure 7 This is one of the three-dimensional structural diagrams of the integrating sphere module of the utility model;

[0051] Figure 8 This is the second three-dimensional structural diagram of the integrating sphere module of the utility model;

[0052] Fig. 9 This is a three-dimensional structural diagram of the integrating sphere adjustment platform of the utility model;

[0053] Fig.10 This is a three-dimensional structural diagram of the base of the utility model;

[0054] Fig.11 This is a schematic diagram of the structure of the first embodiment of the laser COC test system of the utility model;

[0055] Fig.12 It is a structural schematic diagram of the second embodiment of the laser COC testing system of the utility model.

[0056] Description of Figure Numbers:

[0057] Label name Label name 1 Base Plate 2 Stage 21 Carrier base 22 Vacuum adsorption hole 23 Vacuum tube 24 TEC control line 3 Probe module 31 Probe 32 Six-axis adjustment platform 321 The first adjustment mechanism 322 Second adjustment mechanism 322-1 Vertical rotation unit 322-2 Horizontal rotation unit 323 Clamping part 324 Pads 4 CCD module 41 Vertical bracket 42 Slide rails 43 CCD adjustment stand 431 The third regulatory agency 432 Horizontal bracket 44 CCD camera 5 Integrating sphere module 51 Integrating sphere adjustment platform 511 Fourth adjustment mechanism 512 Fifth adjustment mechanism 513 Integrating sphere carrying platform 52 Integrating Sphere 53 Integrating sphere wire 54 optical fiber 6 Source table 7 Thermostat 8 Power Meter 9 Spectrometer

[0058] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0059] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0060] The descriptions of "first", "second", etc. in the present utility model are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.

[0061] Currently, optical communication products all use COC in the front-end process. However, the COC sizes and wiring of each manufacturer are different, which leads to the need for customized design of test platforms, test probes, etc., which will result in high system production costs and long production cycles. In particular, products used in the research and development stage require more diversified test systems.

[0062] The utility model proposes a laser COC testing device, aiming to solve the above problems.

[0063] See also Figure 1 and Figure 2 In one embodiment, the laser COC test device proposed by the utility model includes:

[0064] Bottom plate 1;

[0065] Carrier 2, used for carrying the COC sample to be tested;

[0066] A plurality of probe modules 3 are arranged on the bottom plate 1, and each of the probe modules 3 can be adjusted in multiple directions to be adapted to abut against the COC sample to be tested through the probe, so as to supply power to the COC sample to be tested;

[0067] A CCD module 4 is disposed on the bottom plate 1, and the CCD module 4 can be adjusted in multiple directions to adaptively collect image data of the COC sample to be tested;

[0068] The integrating sphere module 5 is disposed on the bottom plate 1 . The integrating sphere module 5 can be adjusted in multiple directions to adaptively receive the laser emitted by the COC sample to be tested.

[0069] Specifically, each probe module 3 includes a probe 31 for abutting against the COC sample to be tested and energizing it. The probe module 3 can be adjusted in multiple directions so that the corresponding probe 31 can change the position of the probe tip in multiple directions in space; the probe module 3 and the probes included therein can realize six independent degrees of freedom in space, namely, moving in the X-axis, Y-axis, and Z-axis directions, and rotating around the X-axis, Y-axis, and Z-axis directions. Accordingly, the position of the probe tip in space can be adjusted arbitrarily to adapt to the COC samples to be tested at different heights and orientations: multiple probe modules 3 are arranged around the carrier, and the probe 31 is moved to a suitable position by manipulating the probe module 3 so that the probe tip abuts against the energized area of ​​the COC sample (generally the pins or electrodes of the chip), and the COC sample can be energized by the probe 31 to emit laser to test the photoelectric related characteristics.

[0070] In addition, the CCD module 4 includes a CCD camera 44, which collects image data of the COC sample to be tested and transmits it to an external display, and displays a real-time image of the COC sample to be tested on the display. According to the real-time image, the powered area of ​​the COC sample to be tested can be observed, and it can be determined whether the probe tip has abutted against the powered area of ​​the COC sample; the COC sample emits a laser during the power-on test, the integrating sphere module 5 receives the laser, and is connected to an external testing instrument to test the photoelectric characteristics and spectral characteristics of the laser.

[0071] Specifically, different types of COC samples have different numbers of powered areas, so in the actual testing process, the number of probe modules 3 can be reasonably selected according to demand. In an optional embodiment, the COC sample to be tested is a DFB (Distributed Feedback Laser Diode) chip, which can be used to make the DFB chip emit lasers through two probes, a power probe and an excitation current probe; if the intensity or phase modulation of the optical signal is required, the DFB chip needs to add a modulation signal input pin, and accordingly, the COC test device needs to add at least one probe adjustment module to provide a probe for accessing the modulation signal input pin. COC testing usually involves verification and parameter measurement of multiple aspects, including but not limited to laser characteristics, electro-absorption modulation characteristics and overall performance testing. When conducting such tests, the number of probe modules 3 required depends on the specific number of pins and test items of the COC.

[0072] The probe module 3, CCD module 4 and integrating sphere module 5 included in the utility model can be adjusted in multiple directions. When testing the COC sample, first place the COC sample on the stage, and adjust the six-axis adjustment platform 32 in multiple directions so that the probe tip can fit against the powered area on the surface of the COC sample; at the same time, the CCD module 4 can be adjusted in multiple directions so that the CCD camera 44 can be accurately moved to the top of the COC sample to be tested, and the probe 31 can be judged by observing the real-time image to be in contact with the area to be powered; at the same time, the integrating sphere module 5 can also be adjusted in multiple directions to adapt to different laser emission orientations. Therefore, the utility model can realize power-on testing of laser COCs with different wiring (such as general optical chips DFB, EML, FP, etc.).

[0073] It can be understood that in order to facilitate the disassembly and installation of the probe module 3, any probe module 3 is detachably fixedly connected to the base plate 1; at the same time, the integrating sphere module 5 is also designed to be detachably fixedly connected to the base plate 1 to facilitate the replacement and maintenance of the integrating sphere module 5.

[0074] This embodiment further includes a stage base 21 for carrying and fixing the stage. The stage base 21 is fixed on the bottom plate 1 , and its height is adapted to the height of the probe module 3 , the CCD module 4 and the integrating sphere module 5 .

[0075] Based on the above embodiments, further, refer to Figures 3 to 5 , each of the probe modules 3 comprises:

[0076] Six-axis adjustment platform 32;

[0077] The probe is disposed on the six-axis adjustment platform 32 and is used for connecting to the COC sample to be tested and supplying power to the COC sample to be tested.

[0078] Wherein, the six-axis adjustment platform 32 includes:

[0079] A first adjustment mechanism 321 is disposed on a cushion block 324. The first adjustment mechanism 321 is a six-axis adjustment mechanism. The cushion block 324 is detachably disposed on the bottom plate 1.

[0080] A second adjustment mechanism 322 is rotatably connected to the first adjustment mechanism 321, and the second adjustment mechanism 322 includes a horizontal rotation unit 322-2 and a vertical rotation unit 322-1;

[0081] And a clamping portion 323 is fixedly disposed on the second adjusting mechanism 322 and is used for clamping and fixing the probe.

[0082] Specifically, the six-axis adjustment platform is also called a six-degree-of-freedom platform or a six-axis motion platform. It is a mechanical device that can realize six independent degrees of freedom in space. Its working principle is based on the Stewart mechanism (also known as a parallel mechanism). A set of linked adjustment seats is used to drive the platform to achieve simultaneous and independent control of the six degrees of freedom. The six-axis adjustment platform 32 of this embodiment can use a standard six-axis adjustment platform product.

[0083] The probe is clamped on the six-axis adjustment platform 32, so it can follow the six-axis adjustment platform 32 to realize the movement of six independent degrees of freedom in space, that is, moving in the X-axis, Y-axis, and Z-axis directions, and rotating around the X-axis, Y-axis, and Z-axis directions respectively; at the same time, each six-axis adjustment platform 32 includes a first adjustment mechanism 321 and a second adjustment mechanism 322. The first adjustment mechanism 321 can coarsely adjust the probe position in six degrees of freedom through multiple adjustment blocks so that the probe tip approaches the power-on area of ​​the COC sample to be tested. The second adjustment mechanism 322 can further adjust the position of the probe in the horizontal plane and the vertical plane through the horizontal rotation unit and the vertical rotation unit respectively to fine-tune the probe position.

[0084] Therefore, the probe of the probe module 3 of the utility model can be adjusted in multiple directions in space, and can be adaptively abutted against the powered areas of different types of COC samples to be tested.

[0085] Further, see Figure 6 , the CCD module comprises:

[0086] A vertical bracket 41 is fixed on the bottom plate 1;

[0087] A slide rail 42, disposed on the vertical support 41;

[0088] A CCD adjustment frame 43 is slidably disposed on the slide rail 42; and

[0089] The CCD camera 44 is fixedly mounted on the CCD adjustment frame 43 .

[0090] Wherein, the CCD adjustment frame 43 includes:

[0091] A third adjustment mechanism 431 is slidably disposed on the slide rail 42, and the third adjustment mechanism 431 integrates a first X-axis moving unit, a first Y-axis moving unit, and a first Z-axis moving unit;

[0092] The horizontal bracket 432 is fixedly connected to the third adjustment mechanism 431 , and the horizontal bracket 432 is used to fix the CCD camera.

[0093] Specifically, the CCD camera 44 needs to be located directly above the COC sample to be tested and maintain a suitable object distance to obtain a clear real-time image of the COC sample surface, and move the probe 31 according to the real-time image so that the tip of the probe 31 accurately abuts against the energized area.

[0094] The horizontal support 432 is a cantilever fixed on the third adjustment mechanism 431, and is provided with an installation position for installing the CCD camera 44. The third adjustment mechanism 431 can control the horizontal support 432 to move along the three directions of the X-axis, the Y-axis and the Z-axis respectively, so as to drive the CCD camera 44 to move in the direction; wherein one of the X-axis and the Y-axis is the extension direction of the slide rail 42, and the third adjustment mechanism 431 can slide on the slide rail 42. The third adjustment mechanism 431 moves in the X-axis or Y-axis direction to adaptively adjust the horizontal position of the CCD camera 44 so that it is located directly above the COC sample to be tested, and obtains a real-time image of the COC sample to be tested; the third adjustment mechanism 431 moves in the Z-axis direction to adaptively adjust the height of the CCD camera so that it maintains a suitable object distance with the COC sample to be tested, so as to adjust the size of the framing area of ​​the CCD camera 44, adapt to COC samples of different sizes and wiring, and make the real-time image clear and discernible; the CCD camera 44 can also adjust the magnification of the real-time image.

[0095] Therefore, the CCD module 4 described in the present invention can be adjusted in multiple directions in space to adapt to COC samples of different sizes and wirings, and collect clear real-time images for the operation requirements of the mobile probe abutting against the powered area.

[0096] Further, see Figures 7 to 9 , the integrating sphere module 5 comprises:

[0097] An integrating sphere adjustment platform 51 is detachably disposed on the base plate 1;

[0098] The integrating sphere 52 is fixedly disposed on the integrating sphere adjustment platform 51 .

[0099] Wherein, the integrating sphere adjustment platform 51 comprises:

[0100] A fourth adjustment mechanism 511, wherein the fourth adjustment mechanism 511 integrates a second X-axis moving unit, a second Y-axis moving unit, and a second Z-axis moving unit;

[0101] a fifth adjusting mechanism 512 rotatably disposed on the fourth adjusting mechanism 511 ; and

[0102] The integrating sphere carrying platform 513 is fixedly disposed on the fifth adjusting mechanism 512 and is used for carrying the integrating sphere 52 .

[0103] Specifically, the photoelectric detection device generally cannot withstand direct irradiation from the laser light source and needs to weaken the light intensity before measurement. Therefore, the laser emitted by the COC to be tested during the test needs to be received by an integrating sphere before being used for subsequent photoelectric testing.

[0104] The inner wall of the integrating sphere 52 is coated with diffuse reflection material to ensure that the laser is fully diffusely reflected inside the integrating sphere 52, while consuming the light intensity, effectively eliminating the measurement errors caused by factors such as beam shape and incident angle, and does not affect other optical properties. The integrating sphere 52 can be connected to an external power meter 8 through an integrating sphere wire 53 to characterize the COC optical power under a specified current. The integrating sphere can also be connected to an external spectrometer 9 through an optical fiber 54 to obtain the spectral characteristics of the corresponding COC sample.

[0105] The fourth adjustment mechanism 511 is detachably arranged on the base plate 1, and can complete the movement of three independent degrees of freedom, namely, moving along the X-axis, Y-axis and Z-axis directions respectively. The fifth adjustment mechanism 512 is a turntable, which is rotatably connected to the fourth adjustment mechanism 511, and the integrating sphere is connected to the fifth adjustment mechanism 512 through the integrating sphere supporting platform 513. By adjusting the fourth adjustment mechanism 511 in any one direction of the X-axis, Y-axis and Z-axis directions, the movement of the integrating sphere in the corresponding direction can be controlled. By rotating the fifth adjustment mechanism 512 in the horizontal direction, the different orientations of the integrating sphere on the horizontal plane can be controlled.

[0106] Therefore, the integrating sphere module 5 described in the present invention can be adjusted in multiple directions in space to adapt to different positions and directions of the laser emitted by the COC sample, thereby ensuring the validity of the photoelectric test results.

[0107] Further, see Fig.10 , the carrier comprises:

[0108] The vacuum adsorption hole 22 is used for vacuum adsorption of the COC sample, and the vacuum adsorption hole 22 is connected to an external vacuum pump through a vacuum conduit 23 .

[0109] Specifically, the vacuum pump, vacuum conduit 23, and vacuum adsorption hole 22 constitute a path solution for vacuum adsorption. After placing the COC sample on the carrier, turn on the vacuum pump and fix the COC sample on the carrier by vacuum adsorption to avoid damage to the COC sample and the probe due to slippage of the COC sample during the probe abutment process and the power-on process, while ensuring the stability of the laser emission position and direction.

[0110] Further, see Fig.10 A TEC is provided inside the carrier, and the TEC is electrically connected to an external temperature controller 7 via a TEC control line 24 .

[0111] Specifically, TEC (Thermo-Electric Cooler) is a semiconductor refrigerator that uses electric current to transfer heat from one side to the other side that is oppositely arranged, thereby achieving a cooling or heating effect.

[0112] Since the laser COC generates a lot of heat during operation due to power loss and other issues, and too high a temperature will have a great impact on the output power, spectral characteristics and life of the laser COC, and even cause the failure of the laser COC. Therefore, the utility model is provided with a semiconductor refrigerator inside the carrier, and the semiconductor refrigerator is connected to an external temperature controller 7 to ensure that the test of the COC sample can proceed smoothly by controlling the temperature of the carrier.

[0113] The utility model also proposes a laser COC test system, see Fig.11 In one embodiment, the laser COC test system includes the laser COC test device described above, and:

[0114] A source meter 6, electrically connected to the probe 31, for energizing the COC sample to be tested;

[0115] A temperature controller 7, electrically connected to the TEC, for controlling the temperature of the carrier 2;

[0116] A power meter 8 connected to the integrating sphere 52 via an integrating sphere wire 53;

[0117] The spectrometer 9 is connected to the integrating sphere 52 via an optical fiber 54 .

[0118] Specifically, the source meter 6 combines the functions of a voltage source, a current source, a voltmeter and an ammeter, can accurately provide and measure current and voltage, and has extremely high control accuracy. During the test, the laser COC is connected to the source meter 6 through a probe, and works together with the TEC and the temperature controller 7 to obtain accurate and stable test data under different current load conditions.

[0119] The power meter 8 is used to quantify the optical signal homogenized by the integrating sphere to obtain the optical power data of the COC sample under the specified current. By adjusting the position of the integrating sphere and coupling the power value displayed by the power meter 8 to the maximum value, the COC optical power under the specified current can be obtained, and then the spectrometer 9 is turned on for spectral scanning to obtain the spectral characteristics of the corresponding COC sample.

[0120] In another alternative embodiment, see Fig.12 , the laser COC test system also includes a host computer.

[0121] The host computer is connected to the laser COC test device for communication, and the communication mode can be selected from at least one of GPIB and RS232.

[0122] The host computer is in communication connection with the spectrometer 9 and the power meter 8 to obtain and visualize power values ​​and spectrum data.

[0123] The laser COC test system can also be provided with multiple motor drive modules, and the host computer controls the operation of the motor drive modules; the multiple motor drive modules are used to drive the probe module 3, the CCD module 4 and the integrating sphere module 5 respectively, and control them to adjust in multiple directions to adapt to the test of different COC samples. The host computer is also connected to the source meter 6 and the temperature controller 7 for controlling the output current and voltage of the source meter 6, and for controlling the operation of the temperature controller 7. The host computer also includes a display unit for displaying the real-time image of the CCD.

[0124] In this embodiment, the host computer is built with storage media and control programs to realize the above automatic control of the laser COC test device. The laser COC test system provided in this embodiment can automatically perform photoelectric tests on the COC samples to be tested.

[0125] In summary, the utility model proposes a laser COC test device and system, and the test device includes a probe module, a CCD module and an integrating sphere module that can be adjusted in multiple directions. The probe used for testing power-on is clamped on a six-axis adjustment platform, and the probe position can be moved at will to adapt to different power-on positions corresponding to laser COCs with different wiring. At the same time, the CCD module and the integrating sphere module can be adjusted to suitable positions in multiple directions to adapt to CCD image acquisition and to adapt to receiving lasers emitted by the laser COC to be tested; at the same time, the carrier has a vacuum adsorption function and can carry COCs of different sizes. Therefore, the utility model can test laser COCs with different wiring and sizes, thereby improving the test efficiency.

[0126] The above description is only a preferred embodiment of the utility model, and does not limit the patent scope of the utility model. All equivalent structures or equivalent process changes made by using the contents of the utility model specification and drawings under the utility model concept, or directly or indirectly used in other related technical fields are included in the patent protection scope of the utility model.

Claims

1. A laser COC test device, characterized in that: include: Base plate; A carrier, used for carrying the COC sample to be tested; A plurality of probe modules are arranged on the bottom plate, and each of the probe modules can be adjusted in multiple directions to be adapted to abut against the COC sample to be tested through the probe, so as to supply power to the COC sample to be tested; A CCD module is disposed on the bottom plate, and the CCD module can be adjusted in multiple directions to adaptively collect image data of the COC sample to be tested; The integrating sphere module is arranged on the bottom plate, and the integrating sphere module can be adjusted in multiple directions to adaptively receive the laser emitted by the COC sample to be tested.

2. The laser COC test device according to claim 1, characterized in that: Each of the probe modules comprises: Six-axis adjustment platform; The probe is arranged on the six-axis adjustment platform, and the probe is used to access the COC sample to be tested and to supply power to the COC sample to be tested.

3. The laser COC testing device according to claim 2, characterized in that: The six-axis adjustment platform comprises: a first regulating mechanism; a second adjustment mechanism, rotatably connected to the first adjustment mechanism; and The clamping portion is arranged on the second adjusting mechanism and is used for clamping and fixing the probe.

4. The laser COC testing device according to claim 1, characterized in that: The CCD module comprises: A vertical bracket fixed on the bottom plate; A slide rail, arranged on the vertical support; A CCD adjustment frame is slidably disposed on the slide rail; and The CCD camera is fixedly arranged on the CCD adjustment frame.

5. The laser COC testing device according to claim 4, characterized in that: The CCD adjustment frame comprises: A third adjustment mechanism is slidably disposed on the slide rail; A horizontal bracket is fixedly connected to the third adjusting mechanism and is used for fixing the CCD camera.

6. The laser COC testing device according to claim 1, characterized in that: The integrating sphere module comprises: An integrating sphere adjustment platform is arranged on the bottom plate; The integrating sphere is arranged on the integrating sphere adjustment platform.

7. The laser COC testing device according to claim 6, characterized in that: The integrating sphere adjustment platform comprises: Fourth regulating mechanism; a fifth adjusting mechanism, rotatably disposed on the fourth adjusting mechanism; and The integrating sphere carrying platform is fixedly arranged on the fifth adjusting mechanism and is used for carrying the integrating sphere.

8. A laser COC testing device as claimed in claim 1, characterized in that: The carrier comprises: The vacuum adsorption hole is used for vacuum adsorption of the COC sample to be tested, and the vacuum adsorption hole is connected to an external vacuum pump through a vacuum conduit.

9. The laser COC testing device according to claim 1, characterized in that: A TEC is provided inside the carrier, and the TEC is electrically connected to an external temperature controller through a TEC control line.

10. A laser COC test system, characterized in that: A laser COC testing device comprising any one of claims 1 to 9, and: A source meter, electrically connected to the probe, for applying power to the COC sample to be tested; A temperature controller, electrically connected to the TEC, for controlling the temperature of the carrier; A power meter connected to the integrating sphere via an integrating sphere wire; The spectrometer is connected to the integrating sphere via an optical fiber.

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