Boat support base

Abstract

The utility model discloses a boat support base. The boat support base is arranged in the vertical furnace and comprises a base, a fixing ring and a hanging plate, the base is parallel to the fixing ring, the hanging plate is vertically connected between the base and the fixing ring and is annularly arranged at intervals, a plurality of hanging positions are arranged at intervals in the length direction of the hanging plate, and each hanging position is provided with a hook hole for hanging a vertical quartz boat. A plurality of vertical quartz boats can be hung on the boat support base at the same time, the productivity of the vertical furnace is greatly increased, and the problem that the productivity of an existing vertical furnace is low is solved. The boat support base provided by the utility model is also provided with a driving assembly, and the driving assembly can drive the base to rotate so as to drive the vertical quartz boat to rotate, so that silicon wafers on the vertical quartz boat are uniformly heated.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, in particular to a boat support base. Background Art

[0002] With the increasing global demand for renewable energy, the solar photovoltaic industry has developed rapidly. With the current proliferation of the photovoltaic industry, most processes such as oxidation, annealing, doping, PECVD (tubular plasma vapor deposition), and LPCVD (tubular low-pressure chemical vapor deposition furnace) use horizontal furnace structures. The existing horizontal furnace uses Sic paddles as a carrier to transport the wafer boat filled with silicon wafers into the reactor tube for processing, and then the silicon wafers and wafer boats are sent out after the process is completed. However, with the development of high-capacity equipment, the horizontal furnace structure can only increase the capacity by continuously lengthening the horizontal furnace tube and increasing the radial size. However, the development trend of silicon wafer size continues to expand, and the weight carried by the Sic paddle is constantly increasing, and the Sic paddle will produce greater droop and deformation. The difficulty of adjustment increases, and the installation and maintenance costs are higher. The growth of the capacity of horizontal furnace equipment is limited, and the continuous lengthening of the horizontal furnace tube will cause uneven heating of the battery cells. In the existing vertical furnace, silicon wafers are loaded on vertical quartz boats and then transported to the reactor for processing. The vertical quartz boats are usually placed in the reactor by stacking or placing them in a placement box. These two methods of placing vertical quartz boats have poor stability, which can easily cause the position of the vertical quartz boat to deviate from the set position. In addition, the number of placements is limited, and the production capacity is low. Utility Model Content

[0003] In order to solve the technical problem of low production capacity in the existing vertical furnace, the utility model provides a boat support base.

[0004] The technical solution adopted by the utility model is:

[0005] The utility model proposes a boat support base, which is arranged in a vertical furnace. The boat support base comprises a base and a hanging part vertically arranged on the base, and a plurality of hanging places for hanging a vertical quartz boat are arranged on the hanging part.

[0006] Furthermore, the plurality of hanging locations are arranged in a ring shape around the inner furnace tube of the vertical furnace, and are arranged in multiple layers along the height direction of the hanging portion.

[0007] Furthermore, the hanging portion is ring-shaped.

[0008] Furthermore, a fixing ring and a plurality of hanging plates, one end of the hanging plate is connected to the base, and the other end is connected to the fixing ring, and the plurality of hanging plates are vertically and spaced in an annular manner between the base and the fixing ring, and the hanging plate is provided with a plurality of hanging and taking places along the vertical direction.

[0009] Furthermore, the hanging part includes: a fixing ring and a plurality of hanging plates; the plurality of hanging plates are arranged in a ring-shaped manner between the base and the fixing ring at intervals, and the hanging plates are provided with a plurality of hanging places along the vertical direction.

[0010] Furthermore, a fastener and a fixing plate are provided on the base, the fastener is in the shape of a slot with an opening on one side, one end of the hanging plate is inserted into the slot, the fixing plate is clamped at the opening, and the fixing plate, the hanging plate and the fastener are fixed by screws.

[0011] Furthermore, a heat insulation cover is provided on the base, and a heat insulation material is installed in a chamber between the heat insulation cover and the base.

[0012] Furthermore, the side wall of the heat insulation cover is provided with a plurality of recesses at intervals, and the fasteners are respectively arranged at the recesses.

[0013] Furthermore, a limiting hole corresponding to the position of the hanging plate is provided on the heat insulation cover, and the hanging plate passes through the limiting hole.

[0014] Furthermore, the fixing ring includes a plurality of unconnected fixing strips, and a fixing strip is connected between every two adjacent hanging plates.

[0015] Compared with the prior art, the utility model proposes a boat support base. The boat support base is arranged in a vertical furnace. The boat support base includes: a base, a fixed ring and a hanging plate. The base is arranged in parallel with the fixed ring. The hanging plate is vertically connected between the base and the fixed ring and arranged in a ring-shaped interval. A plurality of hanging places are arranged at intervals along the length direction of the hanging plate. Each hanging place is provided with a hook hole for hanging a vertical quartz boat. The boat support base can hang multiple vertical quartz boats at the same time, which greatly increases the production capacity of the vertical furnace and solves the problem of low production capacity of the existing vertical furnace. The boat support base proposed by the utility model is also provided with a driving assembly, which can drive the base to rotate, thereby driving the vertical quartz boat to rotate, so that the silicon wafers on the vertical quartz boat are heated evenly. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0017] Figure 1 This is a schematic diagram of the three-dimensional structure of an embodiment of the utility model;

[0018] Figure 2 This is a schematic diagram of the three-dimensional structure of the first embodiment of the utility model;

[0019] Figure 3 This is a front view of the first embodiment of the utility model;

[0020] Figure 4 This is a bottom view of the first embodiment of the utility model;

[0021] Figure 5 This is the three-dimensional structure of the second embodiment of the utility model;

[0022] Figure 6 This is a schematic diagram of a suspended vertical quartz boat according to the second embodiment of the utility model;

[0023] Figure 7 This is a schematic diagram of a vertical quartz boat of the utility model;

[0024] 401, vertical quartz boat; 41, fixing ring; 42, base; 43, hanging plate; 44, hook hole; 45, fastener; 46, fixing plate; 47, rotating shaft; 48, motor; 49, heat shield; 402, fixing strip;

[0025] 51. top plate; 52. bottom plate; 53. upright column; 54. placement slot;

[0026] 551. Connecting block; 552. Hook. DETAILED DESCRIPTION

[0027] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0028] The principle and structure of the present utility model are described in detail below with reference to the accompanying drawings and embodiments.

[0029] With the increasing global demand for renewable energy, the solar photovoltaic industry has developed rapidly. With the current proliferation of the photovoltaic industry, most processes such as oxidation, annealing, doping, PECVD (tubular plasma vapor deposition), and LPCVD (tubular low-pressure chemical vapor deposition furnace) use horizontal furnace structures. The existing horizontal furnace uses Sic paddles as a carrier to transport the wafer boat filled with silicon wafers into the reactor tube for processing, and then the silicon wafers and wafer boats are sent out after the process is completed. However, with the development of high-capacity equipment, the horizontal furnace structure can only increase the capacity by continuously lengthening the horizontal furnace tube and increasing the radial size. However, the development trend of silicon wafer size continues to expand, and the weight carried by the Sic paddle is constantly increasing, and the Sic paddle will produce greater droop and deformation. The difficulty of adjustment increases, and the installation and maintenance costs are higher. The growth of the capacity of horizontal furnace equipment is limited, and the continuous lengthening of the horizontal furnace tube will cause uneven heating of the battery cells. In the existing vertical furnace, silicon wafers are loaded on vertical quartz boats and then transported to the reactor for processing. The vertical quartz boats are usually placed in the reactor by stacking or placing them in a placement box. These two methods of placing vertical quartz boats have poor stability and can easily cause the position of the vertical quartz boat to deviate from the set position. In addition, the number of placements is limited and cannot meet the required production capacity.

[0030] like Figure 1 As shown, the utility model proposes a boat support base, which is installed in a vertical furnace and is used to hang a vertical quartz boat 401. Multiple vertical quartz boats 401 can be hung at the same time to increase the production capacity of the vertical furnace.

[0031] The boat support base includes: a base 42 and a hanging part vertically arranged on the base 42, and the hanging part is provided with a plurality of hanging places for hanging the vertical quartz boat. The plurality of hanging places are arranged in a ring shape around the inner furnace tube of the vertical furnace, and are arranged in multiple layers along the height direction of the hanging part. Each hanging place can be heated evenly, and multiple vertical quartz boats can be hung, so that the production capacity of the vertical furnace is greatly increased.

[0032] In one embodiment, the hanging part is annular and cylindrical, and a plurality of hanging places are arranged on the outer wall of the hanging part. The plurality of hanging places are arranged in annular shape around the inner furnace tube of the vertical furnace, and are arranged in multiple layers along the height direction of the hanging part, so that more vertical quartz boats can be hung. The hanging place is provided with a hook hole for hanging the vertical quartz boat.

[0033] In another embodiment, the hanging portion includes a fixed ring and a plurality of hanging plates. One end of the hanging plate is connected to the base, and the other end is connected to the fixed ring. The plurality of hanging plates are vertically and spaced in a ring shape between the base and the fixed ring, and the hanging plate is provided with a plurality of hanging places along the vertical direction. The base 42 is in the shape of a circular plate, and the fixed ring 41 is in the shape of a circular ring. The base 42 and the fixed ring 41 are placed horizontally, and the fixed ring 41 is above the base 42 and parallel to each other. A plurality of hanging plates 43 are provided between the base 42 and the fixed ring 41. The hanging plates are in the shape of long strips, and one end of the hanging plates 43 is connected to the base 42, and the other end is connected to the fixed ring 41. The plurality of hanging plates 43 are vertically and spaced between the base 42 and the fixed ring 41, and the other end of the hanging plates 43 is connected to the fixed ring 41. , multiple hanging plates 43 are arranged in a ring shape, and multiple hanging places are provided at intervals along the length direction of the hanging plates 43 for hanging the vertical quartz boat 401. The vertical quartz boat 401 is hung on the hanging places of the outer wall of the hanging plates 43 facing outward. After being hung, the vertical quartz boats at the hanging places of the same height of the hanging plates 43 surround the inner furnace tube of the vertical furnace in a ring shape. Since each hanging plate is provided with multiple hanging places in the vertical direction, the vertical quartz boat 401 can be hung in multiple layers around the inner furnace tube of the vertical furnace. The hanging place is provided with hook holes 44, and the number of the hook holes is consistent with the number of hooks on the vertical quartz boat. The upper part of the hook hole 44 is wider and the lower part is narrower, which is convenient for hanging the vertical quartz boat 401. The vertical quartz boat 401 is provided with a hook 552 that can be inserted into the hook hole 44 facing downward. The hook 552 of the vertical quartz boat 401 is inserted into the hook hole 44, so that the vertical quartz boat 401 is hung at the hanging place. Multiple hanging and unloading locations can hang multiple vertical quartz boats 401, greatly increasing the production capacity of the vertical furnace.

[0034] The boat support base also includes a driving component, which can drive the base 42 to rotate, thereby driving the vertical quartz boat 401 to rotate in the vertical furnace, so that the silicon wafers on the vertical quartz boat 401 are heated evenly.

[0035] The driving assembly specifically includes: a motor 48 and a rotating shaft 47. The motor 48 is fixed to the outside of the furnace door at the bottom of the vertical furnace. Specifically, the motor 48 can be fixed to the furnace door at the bottom of the vertical furnace by a bracket. The rotor of the motor 48 faces the inside of the vertical furnace. One end of the rotating shaft 47 is connected to the rotor of the motor 48, and the other end passes through the furnace door at the bottom of the vertical furnace and is connected to the base 42. When the motor 48 is running, the rotor drives the rotating shaft 47 to rotate, thereby driving the base 42 to rotate, so that the vertical quartz boat 401 suspended on the boat support base also rotates, so as to prevent the silicon wafers on the vertical quartz boat 401 from being heated unevenly.

[0036] The furnace body of the existing vertical furnace is arranged vertically, and a furnace door is provided at the bottom of the furnace body. A round hole is provided in the middle of the furnace door for the rotating shaft 47 to pass through. The motor 48 of the driving assembly can be fixed on the bracket at the bottom of the furnace body, and the rotor of the motor 48 faces the inside of the furnace body, so that the motor 48 can be conveniently connected to the base 42 through the rotating shaft.

[0037] A plurality of fasteners 45 and fixing plates 46 are provided on the base 42 for fixing the hanging plate. The number of the fasteners 45 is the same as the number of the hanging plates 43, and the fixing plates 46 are used in a one-to-one cooperation with the fasteners 45. The fasteners 45 are in the shape of a slot, and a long strip opening is provided on one side. The fixing plate 46 is in the shape of a rectangular plate, and can be stuck in the long strip opening of the fastener 45. The hanging plate 43 is inserted into the fastener 45 from one end of the fastener 45, and the fixing plate 46 is stuck in the long strip opening of the fastener 45. The fixing plate 46, the hanging plate 43 and the fastener 45 are installed by screws. By adjusting the tightness of the screws, the hanging plate 43 can be adjusted to tilt toward the side of the hanging vertical quartz boat 401 or the side opposite thereto.

[0038] In another embodiment, a heat insulating cover 49 is provided on the base 42, and a heat insulating material is installed in the chamber between the heat insulating cover 49 and the bottom plate 52 to prevent the heat in the vertical furnace from being transferred to the furnace door, thereby protecting the drive components and other parts at the furnace door at the bottom of the vertical furnace and reducing the energy loss in the vertical furnace.

[0039] The heat shield is arranged on the base 42, and the outer wall of the heat shield 49 is provided with a plurality of gear-shaped recesses at intervals, and the fasteners 45 are arranged at the notch of the base 42 and the recess of the heat shield 49, so as to better fix the fasteners 45. The fixing ring 41 is parallel to the base 42, and a plurality of slots are provided at intervals on the fixing ring 41. The end where the hanging plate 43 is fixed to the fixing ring 41 is provided with a clip that can be inserted into the slot, and the clip is inserted into the slot of the fixing ring 41 and fixed. The shape of the fixing ring 41 can be circular or square according to the arrangement of the hanging plate 43. If the hanging part is annular, the fixing ring 41 may not be provided.

[0040] like Figure 5-6 As shown, in another embodiment, the base 42 is in the shape of a circular plate, fasteners 45 are arranged at intervals near the outer edge of the base 42, the heat shield 49 is in the shape of a cylindrical barrel, one end of which is not sealed and is covered on the base 42, and the top surface of the heat shield 49 is provided with limiting holes corresponding to the fasteners 45. After the plurality of hanging plates 43 are passed through the plurality of limiting holes, the fasteners 45 are clamped at the limiting holes of the heat shield 49 for limiting. When the hanging plates 43 are passed through the reserved holes of the heat shield 49, the tightness of the screws of the fixing plate 46, the hanging plates 43 and the fasteners 45 can be adjusted so that the hanging plates 43 can be tilted and smoothly passed through the limiting holes of the heat shield 49.

[0041] The fixing ring 41 is composed of a plurality of unconnected fixing strips 402, and the fixing strips 402 are strip-shaped, and the ends of each two adjacent hanging plates 43 are fixed by a fixing strip 402. A plurality of fixing rings 41 can be provided at intervals along the length direction of the hanging plates 43, so that the structure between the hanging plates 43 is more stable. A hook 552 is provided on the vertical quartz boat 401 hung on the boat support base, so that the vertical quartz boat 401 can be hung on the hanging and unloading place of the boat support base.

[0042] like Figure 1 and 7 As shown, specifically, the vertical quartz boat 401 includes a top plate 51, a bottom plate 52, a column 53 and a hanging plate. The top plate 51 and the bottom plate 52 are arranged parallel to each other, and four columns 53 are arranged between the bottom plate 52 and the top plate 51. The columns 53 are provided with multiple placement grooves 54 for fixing silicon wafers at intervals along the length direction, and the placement grooves 54 at the same position height of multiple columns 53 are used to fix a silicon wafer. Two hanging plates are arranged on the columns 53, and the two hanging plates are arranged at intervals along the length direction of the same two columns 53. The vertical quartz boat 401 can be hung on the hanging place of the boat support base in the vertical furnace through the hanging plates, and the boat support base is provided with multiple hanging places to hang the vertical quartz boat 401, which can increase the capacity of the vertical furnace. The hanging plate includes: a connecting block 551 and a hook 552. The connecting block 551 is in the shape of a plate, one side of which is in contact with the column 53 and fixed by screws. The connecting blocks 551 of the two hanging plates are arranged at intervals along the length direction of the same two columns 53. A hook 552 protruding from the vertical quartz boat 401 is installed on the back of the connecting block 551, and the hook portion of the hook 552 is arranged downward so that it can be hung on the hanging position of the boat support base in the vertical furnace. A vertical quartz boat 401 is hung on each hanging position of the boat support base, and two hook holes 44 are arranged on each hanging position so that the vertical quartz boat 401 is hung on the hanging position of the boat support base. Hanging the vertical quartz boat 401 on the boat support base in the vertical furnace can increase the production capacity of the vertical furnace, and the rotation of the boat support base can make the silicon wafers on the vertical quartz boat 401 more evenly heated. The setting of the boat support base can ensure the stability of the placement of the vertical quartz boat 401, and it is not easy to deviate from the setting position. It prevents the problem that the traditional vertical quartz boat 401 is not firmly fixed in the vertical furnace and has poor stability, resulting in the failure of processing of the silicon wafers placed on the vertical quartz boat 401.

[0043] Compared with the prior art, the utility model proposes a boat support base. The boat support base is arranged in a vertical furnace. The boat support base includes: a base 42, a fixing ring 41 and a hanging plate 43. The base 42 is arranged parallel to the fixing ring 41. The hanging plate 43 is vertically connected between the base 42 and the fixing ring 41 and arranged in a ring-shaped interval. A plurality of hanging places are arranged at intervals along the length direction of the hanging plate 43. Each hanging place is provided with a hook hole 44 for hanging a vertical quartz boat 401. The boat support base can simultaneously hang multiple vertical quartz boats 401, which greatly increases the production capacity of the vertical furnace and solves the problem of low production capacity of the existing vertical furnace. The boat support base proposed by the utility model is also provided with a driving component, which can drive the base 42 to rotate, thereby driving the vertical quartz boat 401 to rotate, so that the silicon wafers on the vertical quartz boat 401 are heated evenly.

[0044] It should be noted that the terms used above are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the utility model. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0045] In the description of the present utility model, it needs to be understood that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present utility model and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction, and therefore cannot be understood as limiting the scope of protection of the present utility model; the directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0046] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the utility model.

[0047] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A boat support base, the boat support base is arranged in a vertical furnace, characterized in that: The boat support base comprises: a base and a hanging portion vertically arranged on the base, and the hanging portion is provided with a plurality of hanging places for hanging a vertical quartz boat.

2. The boat support base as claimed in claim 1, characterized in that: The plurality of hanging locations are arranged in a ring shape around the inner furnace tube of the vertical furnace, and are arranged in multiple layers along the height direction of the hanging portion.

3. The boat support base as claimed in claim 1, characterized in that: The hanging portion is ring-shaped.

4. The boat support base as claimed in claim 1, characterized in that: The hanging part includes: a fixing ring and a plurality of hanging plates, one end of the hanging plate is connected to the base, and the other end is connected to the fixing ring, the plurality of hanging plates are vertically and spaced in a ring shape between the base and the fixing ring, and the hanging plate is provided with a plurality of hanging places along the vertical direction.

5. The boat support base as claimed in claim 1, characterized in that: The boat support base also includes: a driving assembly for driving the base to rotate, the driving assembly includes: a motor and a rotating shaft, the motor is fixed to the outside of the vertical furnace, one end of the rotating shaft is connected to the rotor of the motor, and the other end passes through the vertical furnace and is connected to the base, and the operation of the motor causes the rotating shaft to drive the base to rotate.

6. The boat support base as claimed in claim 4, characterized in that: A fastener and a fixing plate are provided on the base. The fastener is in the shape of a slot with an opening on one side. One end of the hanging plate is inserted into the slot, and the fixing plate is clamped at the opening. The fixing plate, the hanging plate and the fastener are fixed by screws.

7. The boat support base as claimed in claim 6, characterized in that: A heat insulation cover is arranged on the base, and a heat insulation material is arranged in a cavity between the heat insulation cover and the base.

8. The boat support base as claimed in claim 7, characterized in that: The side wall of the heat insulation cover is provided with a plurality of recesses at intervals, and the fasteners are respectively arranged at the recesses.

9. The boat support base as claimed in claim 7, characterized in that: The heat insulation cover is provided with a limiting hole corresponding to the position of the hanging plate, and the hanging plate passes through the limiting hole.

10. The boat support base as claimed in claim 4, characterized in that: The fixing ring includes a plurality of unconnected fixing strips, and a fixing strip is connected between every two adjacent hanging plates.

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