Substrate correction device
By designing a substrate correction device including fixed components and moving components, the problem of the glass substrate being offset at the inlet of the coating cavity is solved, effective position correction and damage avoidance of the substrate are achieved, and production efficiency and product quality are improved.
Patent Information
- Application Number
- CN202421249221.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-03
- Publication Date
- 2025-02-07
- Estimated Expiration
- 2034-06-03
AI Technical Summary
During the production process of display panels, the offset of the glass substrate at the inlet of the coating cavity can easily lead to substrate chipping, increasing the defect rate, and the corrector design in the prior art can easily lead to substrate edge extrusion and damage.
A substrate correction device is designed, including two correction mechanisms, each consisting of a fixed assembly and a moving assembly. The adsorbent of the fixed assembly is adsorbed and fixed with the lower surface of the substrate, and the moving bracket of the moving assembly is rotatably connected to the slider in the guide cavity of the adsorbent, and the movement of the slider drives the rotation of the adsorbent to achieve position correction of the substrate.
It effectively avoids damage to the substrate during calibration process and improves product quality and production efficiency.
Smart Images
Figure CN222433524U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of substrate production, in particular to a substrate correction device. Background Art
[0002] During the production process of display panels, the glass substrate needs to be placed in a coating chamber for coating. A supporting platform is placed at the entrance of the coating chamber. The glass substrate needs to be transported to the supporting platform first, and then placed in the coating chamber for coating by a robot. If the glass substrate is offset, it will cause the glass substrate to break after entering the coating chamber, increasing the defective rate of the product.
[0003] In the prior art, two sets of correctors 10' are relatively arranged on both sides of the glass substrate 30', and the two sets of correctors 10' move relatively to abut against the edge of the glass substrate 30', thereby pushing the glass substrate 30' to rotate, but in this process, the edge of the glass substrate 30' is easily squeezed and damaged. In addition, because the two correctors 10' are both on the same horizontal plane as the glass substrate 30', and the two correctors 10' are respectively arranged on both sides of the glass substrate 30', the glass substrate 30' may also be damaged during the placement process due to position interference with the correctors 10', etc., which ultimately causes production accidents and waste of raw materials. Utility Model Content
[0004] The utility model aims to provide a substrate correction device, which can not only correct the position of the substrate, but also avoid substrate damage, thereby improving product quality and production efficiency.
[0005] To achieve this purpose, the utility model adopts the following technical solutions:
[0006] Provided is a substrate correction device, comprising two correction mechanisms, the substrate can be placed above the two correction mechanisms, the two correction mechanisms are spaced apart in a first direction and symmetrical with respect to the center point of the substrate, and each correction mechanism comprises a fixed component and a movable component;
[0007] The fixing assembly includes an adsorption member and a slider, wherein the adsorption member is located below the substrate and can be adsorbed and fixed to the lower surface of the substrate, the adsorption member has a guide cavity, the slider is arranged in the guide cavity and can move along the extension direction of the guide cavity, and a through hole is arranged on a side of the guide cavity away from the substrate;
[0008] The movable assembly includes a movable bracket, a first end of which extends into the guide cavity through the through hole and is rotatably connected to the slider, and the two movable brackets can move relative to or opposite to each other along the second direction, so that the slider moves along the extension direction of the guide cavity and drives the substrate adsorbed and fixed to the adsorption member to rotate, the first direction is perpendicular to the second direction, and the second direction is set at an angle to the extension direction of the guide cavity.
[0009] As a preferred solution of the substrate correction device, the moving assembly further includes a driving member, an output end of the driving member is connected to the moving bracket, and the driving member is used to drive the two moving brackets to move relative to or away from each other along the second direction.
[0010] As a preferred solution of the substrate correction device, the substrate correction device also includes a detection member, which is in the same horizontal plane as the substrate and is located on one side of the substrate, and the detection member is used to obtain the projection length C1 of the first edge of the substrate in the second direction and the projection length C2 of the second edge in the second direction to detect the deflection direction of the substrate, the first edge and the second edge are two adjacent edges of the substrate, and the first edge and the second edge are both located on the side of the substrate facing the detection member.
[0011] As a preferred solution of the substrate correction device, the substrate correction device also includes an elastic member, one end of the elastic member is connected to the adsorption member, and the other end of the elastic member is connected to the movable bracket, and the elastic member is used to ensure that the adsorption member always has a tendency to rotate to an initial position.
[0012] As a preferred solution of the substrate correction device, a plurality of elastic members are provided, one of the movable brackets and one of the adsorption members are connected via at least two of the elastic members, and at least two of the elastic members are evenly spaced in the circumferential direction of the movable bracket.
[0013] As a preferred solution of the substrate correction device, the substrate correction device also includes a supporting bracket, which is used to support the substrate. The supporting bracket is provided in two groups, the two groups of supporting brackets are arranged at intervals along the first direction, and one group of supporting brackets is arranged opposite to one of the correction mechanisms in the second direction.
[0014] As a preferred solution of the substrate correction device, the support bracket is located below the substrate, a first ball is provided on the top of the support bracket, and the support bracket rolls against the substrate through the first ball.
[0015] As a preferred solution of the substrate correction device, the movable bracket is located below the substrate, a second ball is arranged on the top of the movable bracket, a rolling groove is arranged on the slider, and the second ball is inserted in the rolling groove.
[0016] As a preferred solution of the substrate correction device, the fixing component also includes a converter, the adsorption element has an adsorption cavity, and the adsorption cavity is provided with an adsorption port on the side facing the substrate, the substrate can be located on the adsorption element and block the adsorption port, the converter is used to discharge the gas in the adsorption cavity so that the substrate and the adsorption element are adsorbed and fixed, and the converter is also used to inflate the adsorption cavity to release the fixation of the substrate and the adsorption element.
[0017] As a preferred solution of the substrate correction device, the adsorption member further includes a soft rubber sheet, the soft rubber sheet is arranged around the adsorption port, and the adsorption member abuts against the substrate through the soft rubber sheet.
[0018] Compared with the prior art, the utility model has the following beneficial effects:
[0019] The utility model provides a substrate correction device including two correction mechanisms. The substrate can be placed above the two correction mechanisms. The two correction mechanisms are spaced apart in the first direction and symmetrical relative to the center point of the substrate. Each correction mechanism includes a fixed component and a movable component. The adsorbent of the fixed component is located below the substrate and can be adsorbed and fixed to the lower surface of the substrate. The slider of the fixed component is rotatably connected to the movable bracket of the movable component. When the adsorbent is fixed to the substrate and the movable bracket moves along the second direction, the slider can be driven to move in the guide cavity of the adsorbent. The guide cavity limits the moving direction of the slider, so that the slider can drive the adsorbent to rotate relative to the movable bracket, so that the adsorbent and the substrate can be synchronously rotated to a preset position. The two adsorbents of the substrate correction device are in contact with the lower surface of the substrate, rather than the two opposite sides of the substrate. The relative movement of the adsorbent will not cause extrusion to the edge of the substrate. The adsorbent is located below the substrate, which can also avoid position interference between the adsorbent and the substrate, effectively avoiding damage to the substrate and improving product quality and production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] The utility model is further described in detail below based on the drawings and embodiments.
[0021] Figure 1 It is an assembly diagram of a corrector and a glass substrate in the prior art;
[0022] Figure 2 It is an assembly diagram of a substrate correction device and a substrate provided in an embodiment of the utility model;
[0023] Figure 3is a cross-sectional view of a correction mechanism provided by an embodiment of the utility model;
[0024] Figure 4 It is a schematic diagram of the positions of the substrate and the detection element provided in the embodiment of the utility model;
[0025] Figure 5 This is a schematic diagram of a first calibration process of a substrate provided by an embodiment of the utility model;
[0026] Figure 6 yes Figure 5 Schematic diagram of the position change of the middle slider in the guide cavity;
[0027] Figure 7 This is a schematic diagram of a second calibration process of a substrate provided by an embodiment of the utility model;
[0028] Figure 8 yes Figure 7 Schematic diagram of the position change of the middle slider in the guide cavity;
[0029] Fig. 9 It is a schematic diagram of the calculation principle of the correction distance of the substrate provided in the embodiment of the utility model.
[0030] Figure 1 middle:
[0031] 10', calibrator; 30', glass substrate;
[0032] Figures 2 to 9 middle:
[0033] 1. Fixed component; 11. Adsorption component; 111. Guide cavity; 1111. Through hole; 112. Adsorption cavity; 113. Soft film; 12. Slider; 121. Ball groove; 13. Ventilation pipe; 14. Converter; 141. Air inlet; 142. Air outlet; 2. Moving component; 21. Moving bracket; 211. Second ball; 22. Driving component; 3. Elastic component; 4. Detection component;
[0034] 10. Correction mechanism; 20. Support bracket; 201. First ball bearing; 30. Base plate. DETAILED DESCRIPTION
[0035] The advantages and features of the present invention and the methods for achieving them will become apparent with reference to the embodiments described in detail below in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various forms. The present embodiments are provided only to complete the disclosure of the present invention and to enable those skilled in the art to fully understand the scope of the present invention, and the present invention is limited only by the scope of the claims. The same reference numerals represent the same constituent elements throughout the specification.
[0036] Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
[0037] The present embodiment provides a substrate correction device, including two correction mechanisms 10, a substrate 30 can be placed above the two correction mechanisms 10, and the two correction mechanisms 10 are arranged in a first direction at intervals and symmetrically relative to the center point of the substrate 30. Each correction mechanism 10 includes a fixed component 1 and a moving component 2, the fixed component 1 can be adsorbed and fixed to the substrate 30, and the moving component 2 can drive the fixed component 1 to rotate, thereby driving the substrate 30 that is not in the preset position to rotate around the center point of the substrate 30, so as to correct the position of the substrate 30.
[0038] like Figure 2 and Figure 3 As shown, the fixed component 1 includes an adsorbent 11 and a slider 12. The adsorbent 11 is located below the substrate 30 and can be adsorbed and fixed to the lower surface of the substrate 30. The adsorbent 11 has a guide cavity 111. The slider 12 is arranged in the guide cavity 111, and the slider 12 can move along the extension direction of the guide cavity 111. A through hole 1111 is arranged on the side of the guide cavity 111 away from the substrate 30. The moving component 2 includes a moving bracket 21. The first end of the moving bracket 21 extends into the guide cavity 111 through the through hole 1111 and is rotatably connected to the slider 12. The moving bracket 21 can move along a second direction, and the second direction is perpendicular to the first direction. In this embodiment, the first direction is Figure 4 The ab direction in the second direction is Figure 4cd direction in the drawing. In addition, the second direction is set at an angle with the extension direction of the guide cavity 111. When the adsorbent 11 is adsorbed and fixed to the substrate 30, the movable bracket 21 moves, and the slider 12 is limited by the extension direction of the guide cavity 111 and will rotate relative to the movable bracket 21. Therefore, when the two movable brackets 21 of the two correction mechanisms 10 move relative to or away from each other along the second direction, because the movement direction of the slider 12 is limited by the extension direction of the guide cavity 111, and the adsorbent 11 with the guide cavity 111 is adsorbed and fixed to the substrate 30, the slider 12 will rotate relative to the movable bracket 21 and move synchronously along the extension direction of the guide cavity 111, thereby driving the adsorbent 11 to rotate. The adsorbent 11 is fixed to the substrate 30, and when the two movable brackets 21 move relative to or away from each other along the second direction, the substrate 30 can rotate, so that the substrate 30 that is not in the preset position is rotated to the preset position. No matter the two adsorption members 11 of the substrate correction device are adsorbed and fixed to the substrate 30, or the substrate 30 is simply placed above the adsorption members 11, the adsorption members 11 are in contact with the lower surface of the substrate 30, rather than the prior art in which the two adsorption members 11 are respectively in contact with the two opposite sides of the substrate 30, that is, the relative movement of the two adsorption members 11 will not cause squeezing of the edge of the substrate 30, and because the two adsorption members 11 are both located below the substrate 30, position interference between the adsorption members 11 and the substrate 30 can also be avoided, thereby effectively avoiding damage to the substrate 30 and improving product quality and production efficiency.
[0039] In this embodiment, the adsorption member 11 has an adsorption chamber 112 and a guide chamber 111, which are not connected, and a through hole 1111 of the guide chamber 111 is arranged at the bottom of the adsorption member 11, the through hole 1111 is connected to the guide chamber 111, and the through hole 1111 is an elongated hole, and an extension direction of the elongated hole is consistent with an extension direction of the guide chamber 111, so that the first end of the movable bracket 21 passing through the through hole 1111 can drive the slider 12 to move along the extension direction of the guide chamber 111.
[0040] Optionally, the moving assembly 2 further includes a driving member 22, and the output end of the driving member 22 is signal-connected to the moving bracket 21, so that the driving member 22 can drive the two moving brackets 21 to move relative to or away from each other along the second direction. In specific implementation, if the substrate 30 is deflected and not in the preset position, the substrate 30 may be not in the preset position because of clockwise deflection, or may be not in the preset position because of counterclockwise deflection. If the substrate 30 is deflected clockwise, the two moving brackets 21 need to move relative to each other along the second direction so that the substrate 30 rotates counterclockwise to return to the preset position. If the substrate 30 is deflected counterclockwise, the two moving brackets 21 need to move away from each other along the second direction so that the substrate 30 rotates clockwise to return to the preset position.
[0041] Optionally, the substrate correction device further includes a detection member 4, which is used to detect the deflection direction of the substrate 30. In this embodiment, the detection member 4 is a linear CCD sensor, which is in the same horizontal plane as the substrate 30 and is disposed on one side of the substrate 30. The linear CCD sensor can obtain the projection length of the first side and the second side adjacent to the substrate 30 in the second direction. In a specific implementation, the substrate 30 is a rectangular structure, the substrate 30 has four sides, and the substrate 30 is deflected at a small angle during the actual production process. Therefore, whether the substrate 30 is deflected clockwise or counterclockwise, the first side and the second side adjacent to the substrate 30 have projections in the second direction. Figure 4 As shown, the projection length of the first side located on the left side in the first direction is C1 and C1>0, and the projection length of the second side located on the right side in the second direction is C2 and C2>0. Figure 5 and Figure 6 As shown, if C1>C2, the substrate 30 is deflected clockwise. At this time, the driving member 22 controls the two movable brackets 21 to move relative to each other in the second direction according to the detection result output by the detection member 4, so that the substrate 30 rotates counterclockwise to the preset position, thereby completing the position correction of the substrate 30. Figure 7 and Figure 8 As shown, if C1<C2, the substrate 30 is deflected counterclockwise. At this time, the driving member 22 controls the two movable brackets 21 to move oppositely in the second direction according to the detection result output by the detection member 4, so that the substrate 30 rotates clockwise to the preset position, thereby completing the position correction of the substrate 30.
[0042] In this embodiment, the first side is not limited to the long side of the substrate 30, and the second side is not limited to the short side of the substrate 30, but Figure 4 As shown, the projection of the first side in the second direction is located on the left side of the projection of the second side in the second direction, and the projection of the second side in the second direction is located on the right side of the projection of the first side in the second direction. Fig. 9As shown, the offset angle θ of the substrate 30 can be obtained according to the actual length B of the first side and the projection length C1 of the first side, θ=arcsin(C1 / B). In addition, the horizontal distance between the initial position of the slider 12 and the center point O of the substrate 30 in the first direction is E, and the vertical distance between the initial position of the slider 12 and the center point O of the substrate 30 in the second direction is F, α=arctan(F / E). After the position correction of the substrate 30 is completed, the vertical distance between the slider 12 and the center point O of the substrate 30 in the second direction is D+F, (D+F) / E=tan(α+θ), then the vertical movement distance D of the slider 12 in the second direction is D=E×tan(arctan(F / E)+arcsin(C1 / B))-F, and the vertical movement distance D of the slider 12 is the distance D that the moving bracket 21 needs to move along the second direction. In specific implementation, the initial position of the fixed component 1 remains unchanged each time, and the position of the center point O of the substrate 30 remains unchanged, so the horizontal distance E and the vertical distance F remain unchanged, and there is no need for multiple measurements. That is, the distance D that the movable bracket 21 needs to move can be obtained by measuring the data of C1 using the linear CCD sensor.
[0043] In other embodiments, the detection element 4 may also be an image sensor, which is located above the substrate 30. The image sensor collects a real-time picture of the substrate 30 and compares the real-time picture with a standard picture to determine whether the substrate 30 is in the preset position. For the substrate 30 that is not in the preset position, the image sensor further determines whether the substrate 30 is deflected clockwise or counterclockwise from the preset position.
[0044] Optionally, the substrate correction device further includes an elastic member 3, and the adsorbent 11 is connected to the movable bracket 21 via the elastic member 3, and the elastic member 3 is used to make the adsorbent 11 always have a tendency to return to the initial position. In specific implementation, after the two movable brackets 21 move relative to or away from each other to drive the substrate 30 fixed to the adsorbent 11 to rotate, the substrate 30 is already in a preset position at this time, and the substrate 30 and the adsorbent 11 can be released from being fixed, so that the adsorbent 11 can return to the initial position under the action of the elastic member 3. In this embodiment, when the adsorbent 11 is in the initial position, the extension direction of the guide cavity 111 is parallel to the first direction.
[0045] Preferably, a plurality of elastic members 3 are provided, and a mobile bracket 21 and an adsorption member 11 are connected through at least two elastic members 3, and at least two elastic members 3 are evenly spaced and arranged on the mobile bracket 21. In this embodiment, two elastic members 3 are provided, and the elastic members 3 are springs, one end of the two springs is connected to the outer peripheral surface of the mobile bracket 21, and the other end of the two springs is connected to the bottom of the adsorption member 11, that is, the side away from the substrate 30, and the two elastic members 3 are arranged opposite to each other on the mobile bracket 21.
[0046] In this embodiment, the correction mechanism 10 is located below the substrate 30. The correction mechanism 10 has two spaced apart. The adsorption member 11 of the correction mechanism 10 is fixed to the substrate 30. When the two moving components 2 move relative to or opposite to each other, they can not only drive the substrate 30 to rotate, but also support the substrate 30. Optionally, the substrate correction device also includes a support bracket 20. The support bracket 20 has the same height as the correction mechanism 10. The support bracket 20 is used to support the substrate 30. The support bracket 20 can share the force applied to the correction mechanism 10 by the substrate 30 when the substrate 30 is placed above the correction mechanism 10. There are two groups of support brackets 20. The two groups of support brackets 20 are spaced apart along the first direction. One group of support brackets 20 and one correction mechanism 10 are arranged relative to each other along the second direction, that is, the support brackets 20 and the correction mechanism 10 are evenly spaced below the substrate 30 to ensure the stability of the substrate 30 during rotation. Optionally, a group of support brackets 20 includes at least one support bracket 20. If a group of support brackets 20 includes a plurality of support brackets 20, the plurality of support brackets 20 can be evenly spaced.
[0047] Optionally, the support bracket 20 is located below the substrate 30, and a first ball 201 is provided at the top of the support bracket 20. The support bracket 20 rolls and abuts against the substrate 30 through the first ball 201, which can not only support the substrate 30, but also reduce the friction between the support bracket 20 and the substrate 30, thereby avoiding resistance to the rotation of the substrate 30.
[0048] Optionally, the movable bracket 21 is located below the base plate 30, a second ball 211 is disposed on the top of the movable bracket 21, a rolling groove is disposed on the slider 12, and the second ball 211 is inserted into the rolling groove, so as to realize the rolling connection between the movable bracket 21 and the slider 12. Figure 5 and Figure 7 As shown, since the movable bracket 21 is rollingly connected to the slider 12, during the movement of the movable bracket 21 along the second direction, the relative position of the central axis of the second ball 211 and the movable bracket 21 remains unchanged, and the slider 12 rotates relative to the movable bracket 21, thereby driving the adsorption member 11 to rotate.
[0049] Optionally, the fixing component 1 further includes a converter 14, the adsorbent 11 has an adsorption chamber 112, the adsorption chamber 112 has a vent and an adsorption port, the vent and the converter 14 are connected via a vent pipe 13, and the converter 14 is provided with an air inlet 141 and an air outlet 142. The converter 14 can ventilate the adsorption chamber 112 via the air inlet 141, and can also discharge the gas in the adsorption chamber 112 via the air outlet 142. In specific implementation, when the substrate 30 is placed above the adsorbent 11 and the adsorption port is blocked, if the substrate 30 and the adsorbent 11 need to be fixed, the converter 14 can be used to discharge the gas in the adsorption chamber 112, so that the air pressure in the adsorption chamber 112 is reduced to below the preset air pressure, so that the substrate 30 is adsorbed and fixed on the adsorbent 11, so as to perform subsequent substrate 30 calibration work. After the calibration of the substrate 30 is completed, the converter 14 can be used to inflate the adsorption chamber 112 so that the air pressure in the adsorption chamber 112 is increased to above the preset air pressure to release the fixation of the substrate 30 and the adsorption member 11. Using vacuum adsorption technology to fix the adsorption member 11 and the substrate 30 is a conventional technology in the art and will not be described in detail here.
[0050] Optionally, the adsorption member 11 further includes a soft film 113, which is arranged around the adsorption port. The adsorption member 11 abuts against the substrate 30 via the soft film 113 to prevent the adsorption member 11 from damaging the substrate 30 during adsorption and fixing.
[0051] Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but can be manufactured in various forms, and those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical spirit or basic features of the present invention. Therefore, it should be understood that the above embodiments are exemplary and not restrictive in all aspects.
Claims
1. A substrate correction device, characterized in that: The substrate correction device comprises two correction mechanisms, the substrate can be placed above the two correction mechanisms, the two correction mechanisms are spaced apart in a first direction and symmetrical with respect to the center point of the substrate, and each correction mechanism comprises a fixed component and a movable component; The fixing assembly includes an adsorption member and a slider, wherein the adsorption member is located below the substrate and can be adsorbed and fixed to the lower surface of the substrate, the adsorption member has a guide cavity, the slider is arranged in the guide cavity and can move along the extension direction of the guide cavity, and a through hole is arranged on a side of the guide cavity away from the substrate; The movable assembly includes a movable bracket, a first end of which extends into the guide cavity through the through hole and is rotatably connected to the slider, and the two movable brackets can move relative to or opposite to each other along the second direction, so that the slider moves along the extension direction of the guide cavity and drives the substrate adsorbed and fixed to the adsorption member to rotate, the first direction is perpendicular to the second direction, and the second direction is set at an angle to the extension direction of the guide cavity.
2. The substrate correction device according to claim 1, characterized in that: The moving assembly further comprises a driving member, an output end of which is connected to the moving bracket, and the driving member is used to drive the two moving brackets to move relative to or away from each other along the second direction.
3. The substrate correction device according to claim 2, characterized in that: The substrate correction device also includes a detection member, which is in the same horizontal plane as the substrate and is located on one side of the substrate. The detection member is used to obtain a projection length C1 of a first side of the substrate in the second direction and a projection length C2 of a second side of the substrate in the second direction to detect the deflection direction of the substrate. The first side and the second side are two adjacent sides of the substrate, and the first side and the second side are both located on a side of the substrate facing the detection member.
4. The substrate correction device according to claim 1, characterized in that: The substrate correction device further comprises an elastic member, one end of which is connected to the adsorption member, and the other end of which is connected to the movable bracket, and the elastic member is used to ensure that the adsorption member always has a tendency to rotate to an initial position.
5. The substrate correction device according to claim 4, characterized in that: A plurality of elastic members are provided, one of the movable brackets and one of the adsorbents are connected via at least two of the elastic members, and at least two of the elastic members are evenly spaced in the circumferential direction of the movable bracket.
6. The substrate correction device according to claim 1, characterized in that: The substrate correction device further comprises a support bracket, which is used to support the substrate. The support bracket is provided in two groups, the two groups of support brackets are arranged at intervals along the first direction, and one group of support brackets is arranged opposite to one of the correction mechanisms in the second direction.
7. The substrate correction device according to claim 6, characterized in that: The support bracket is located below the base plate, a first ball is disposed on the top of the support bracket, and the support bracket is in rolling contact with the base plate through the first ball.
8. The substrate correction device according to claim 1, characterized in that: The movable bracket is located below the base plate, a second ball is arranged on the top of the movable bracket, a rolling groove is arranged on the sliding block, and the second ball is inserted in the rolling groove.
9. The substrate correction device according to any one of claims 1 to 8, characterized in that: The fixing component also includes a converter, the adsorption element has an adsorption cavity, and a suction port is provided on the side of the adsorption cavity facing the substrate. The substrate can be located on the adsorption element and block the adsorption port. The converter is used to discharge the gas in the adsorption cavity so that the substrate and the adsorption element are adsorbed and fixed. The converter is also used to inflate the adsorption cavity so that the substrate and the adsorption element are released.
10. The substrate correction device according to claim 9, characterized in that: The adsorption member further comprises a soft film, and the soft film is arranged around the adsorption port, and the adsorption member abuts against the substrate through the soft film.