Center-adjustable single crystal furnace structure

Abstract

The utility model relates to the technical field of semiconductor substrate material manufacturing, and particularly discloses a self-aligning single crystal furnace structure which comprises a first bracket, a second bracket, an X-Y direction movement self-aligning platform, a heating furnace, a camera calibration assembly and a controller, the X-Y direction movement aligning platform is connected to the first bracket, a material pipe mounting seat for placing a single crystal material pipe to be heated is arranged on the X-Y direction movement aligning platform, and the X-Y direction movement aligning platform can drive the material pipe mounting seat to move along the X direction or the Y direction; the heating furnace is arranged on the second bracket; the camera calibration assembly is arranged at the end, away from the first support, of the second support and used for obtaining the circle center position of the heating furnace and the circle center position of the single crystal material pipe to be heated. And the controller is configured to control the X-Y direction movement aligning platform according to the circle center positions, fed back by the camera calibration assembly, of the heating furnace and the single crystal tube to be heated. The device can reduce correction and adjustment time, realizes automatic adjustment, and reduces personnel participation.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor substrate material manufacturing, in particular to a center-adjustable single crystal furnace structure. Background Art

[0002] Indium phosphide substrates have an application market in the manufacture of high-frequency and high-power devices, fiber-optic communications, wireless transmission, radio astronomy and other RF devices. RF devices made using indium phosphide substrates have demonstrated excellent performance in application scenarios such as satellites and radars. They are highly competitive in the RF front-end of radar and communication systems, analog / mixed signal wide-bandwidth circuits, and are suitable for applications such as high-speed data processing and high-precision wide-bandwidth A / D conversion. In addition, indium phosphide-based RF device-related devices such as low-noise amplifiers, modules and receivers are also widely used in satellite communications, millimeter-wave radars, active and passive millimeter-wave imaging and other equipment. At bandwidth levels above 100GHz, the use of indium phosphide-based RF devices has obvious advantages in wireless transmission in backhaul networks and point-to-point communication networks.

[0003] A single crystal furnace is a device that can melt semiconductor substrate materials and produce single crystals in an inert gas environment, such as single crystal growth of indium phosphide substrate sheets. Before processing, the indium phosphide substrate sheet needs to be positioned and calibrated so that the indium phosphide substrate sheet can enter the single crystal furnace; the existing technology usually sets a fixed position and manually calibrates the indium phosphide substrate sheet, that is, the indium phosphide substrate sheet is first moved to the fixed position for calibration, and then enters the single crystal furnace after manual judgment and calibration. This method has the problems of long calibration cycle, low efficiency and high labor cost. Utility Model Content

[0004] The technical problem to be solved by the utility model is: how to solve the problems of long calibration cycle, low efficiency and high labor cost in the prior art of indium phosphide substrate processing.

[0005] In order to solve the above technical problems, the utility model provides a center-adjustable single crystal furnace structure, which has two intersecting X-directions, Y-directions and Z-directions, including:

[0006] A first bracket extending along the Y direction;

[0007] A second bracket connected to the first bracket along the Z direction;

[0008] An XY-direction motion centering platform connected to the first bracket, wherein the XY-direction motion centering platform is provided with a material tube mounting seat for placing the single crystal material tube to be heated, and the XY-direction motion centering platform can drive the material tube mounting seat to move along the X direction or the Y direction;

[0009] A heating furnace, arranged on the second bracket;

[0010] a camera calibration assembly, disposed at an end of the second bracket away from the first bracket, for obtaining the center positions of the heating furnace and the single crystal tube to be heated; and

[0011] A controller is configured to control the XY motion centering platform according to the center positions of the heating furnace and the single crystal tube to be heated fed back by the camera calibration component.

[0012] Further preferably, the XY motion centering platform comprises:

[0013] An X-direction centering mechanism, the X-direction centering mechanism is disposed on the first bracket, and the X-direction centering mechanism is used to drive the material pipe mounting seat to move along the X-direction; and

[0014] The Y-direction centering mechanism is arranged on the X-direction centering mechanism, the material pipe mounting seat is arranged on the Y-direction centering mechanism, and the Y-direction centering mechanism is used to drive the material pipe mounting seat to move along the Y direction.

[0015] Further preferably, the X-axis centering mechanism includes a fixed plate and a first slider, the fixed plate is arranged on a side surface of the first bracket facing the heating furnace, the fixed plate is provided with a first guide rail extending along the X-axis, and the first slider is slidably connected to the first guide rail.

[0016] Further preferably, the X-axis centering mechanism further includes a first motor and a first screw rod, the first motor is arranged at a side end of the fixed plate, the first screw rod is connected to an output end of the first motor, and the first slider is connected to the first screw rod.

[0017] Further preferably, the Y-direction centering mechanism comprises a movable plate and a second slider, the movable plate is connected to the first slider, the movable plate is provided with a second guide rail extending along the Y-direction, and the second slider is slidably connected to the second guide rail.

[0018] Further preferably, the Y-axis centering mechanism also includes a second motor and a second screw rod, the second motor is arranged at the side end of the movable plate, the second screw rod is connected to the output end of the second motor, and the second slider is connected to the second screw rod.

[0019] More preferably, it further comprises a linear motion module, which is installed on the second bracket along the Z direction, the linear motion module is connected to a support seat, and the heating furnace is installed on the support seat along the Z direction.

[0020] Further preferably, the camera calibration component comprises:

[0021] a cantilever, one end of which is connected to the second bracket, and the other end of which extends to an end of the heating furnace away from the support seat; and

[0022] A camera body is connected to the cantilever and is located on the axis of the heating furnace.

[0023] Further preferably, the camera calibration assembly further includes a connecting rod and a light source, the connecting rod is connected to the cantilever, and the light source is connected to the connecting rod for supplementing light.

[0024] Further preferably, the linear motion module includes a third motor, a third screw rod and a third slider, the third screw rod is installed on the second bracket along the Z direction, the third motor is connected to one end of the third screw rod, and the third slider is connected to the third screw rod, and the third motor can drive the third slider to move along the Z direction through the third screw rod.

[0025] Compared with the prior art, the center-adjustable single crystal furnace structure provided by the utility model has the following beneficial effects:

[0026] The utility model arranges an XY motion centering platform on the first bracket, and arranges a material tube mounting seat on the XY motion centering platform. After the single crystal material tube to be heated is placed on the material tube mounting seat, the XY motion centering platform can drive the single crystal material tube to be heated to move along the X direction or the Y direction, so as to adjust the center position of the single crystal material tube to be heated. The heating furnace is arranged above the single crystal material tube to be heated through the second bracket, and a camera calibration component is arranged to detect the center position of the heating furnace and the single crystal material tube to be heated, obtain the center deviation of the two, and feed back the center deviation of the two to the controller. Since the center position of the heating furnace is relative to the X The X and Y directions are fixed, and for this purpose, the controller calculates the data required for the center position of the single crystal tube to be heated to coincide with the center position of the heating furnace, and feeds back to the XY direction motion centering platform, so that the center position of the single crystal tube to be heated can move in the X direction or the Y direction until the center position of the single crystal tube to be heated coincides with the center position of the heating furnace; the utility model can directly obtain the center deviation of the heating furnace and the single crystal tube to be heated by setting a camera calibration component, so that the XY direction motion centering platform can automatically adjust the center position of the heated single crystal tube through the controller, which reduces the adjustment time, reduces the participation of personnel, and reduces the labor cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a structural schematic diagram of a centerable single crystal furnace structure described in this embodiment.

[0028] Figure 2 It is a partial structural diagram of a centerable single crystal furnace structure described in this embodiment.

[0029] Figure 3 It is a structural schematic diagram of the XY motion centering platform described in this embodiment.

[0030] Figure 4 Schematic diagram of the internal structure of the XY motion centering platform described in this embodiment.

[0031] Figure 5 Schematic diagram of the structure of the camera calibration component described in this embodiment.

[0032] Figure 6 It is a structural schematic diagram of the linear motion module described in this embodiment.

[0033] In the figure:

[0034] 10. The first bracket;

[0035] 20. Second bracket;

[0036] 30. XY-axis motion centering platform; 31. X-axis centering mechanism; 311. fixed plate; 312. first guide rail; 313. first slider; 314. first motor; 315. first screw rod; 32. Y-axis centering mechanism; 321. movable plate; 322. second guide rail; 323. second slider; 324. second motor; 325. second screw rod;

[0037] 40. Material pipe mounting seat;

[0038] 50. Single crystal tube to be heated;

[0039] 60. Linear motion module; 61. Third motor; 62. Third screw rod; 63. Third slider;

[0040] 70. Support seat;

[0041] 80. Heating furnace;

[0042] 90. Camera calibration assembly; 91. Cantilever; 92. Camera body; 93. Connecting rod; 94. Light source. DETAILED DESCRIPTION

[0043] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0044] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like used in the present invention to indicate the orientation or position relationship is based on the orientation or position relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention.

[0045] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0046] In addition, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0047] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0048] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0049] like Figure 1-Figure 6 As shown, this embodiment provides a centering single crystal furnace structure, which has two intersecting X-direction, Y-direction and Z-direction. It should be noted that the X-direction refers to the Figure 3 The X-axis indicates the direction of the 3D coordinate system, and the Y-axis indicates the direction of the Figure 3 The Y-axis in the 3D coordinate system indicates the direction, and the Z-axis refers to the direction of the Figure 3 The direction indicated by the Z axis in the dimensional coordinate system.

[0050] In a specific embodiment, the centerable single crystal furnace structure includes a first bracket 10 extending along the Y direction, a second bracket 20 connected to the first bracket 10 along the Z direction, an XY direction motion centering platform 30 connected to the first bracket 10, a heating furnace 80, a camera calibration assembly 90 and a controller.

[0051] In the above embodiment, a tube mounting seat 40 for placing a single crystal tube 50 to be heated (such as an indium phosphide substrate sheet) is provided on the XY motion centering platform 30, and the XY motion centering platform 30 can drive the tube mounting seat 40 to move along the X direction or the Y direction; the heating furnace 80 is arranged on the second bracket 20; the camera calibration component 90 is arranged at one end of the second bracket 20 away from the first bracket 10, and is used to obtain the center position of the heating furnace 80 and the single crystal tube 50 to be heated; the controller is configured to control the XY motion centering platform 30 according to the center position of the heating furnace 80 and the single crystal tube 50 to be heated fed back by the camera calibration component 90. Thus, after the single crystal tube 50 to be heated is placed on the tube mounting seat 40, the XY motion centering platform 30 can drive the single crystal tube 50 to be heated to move along the X direction or the Y direction, thereby adjusting the center position of the single crystal tube 50 to be heated, and the heating furnace 80 is arranged above the single crystal tube 50 to be heated through the second bracket 20, and a camera calibration component 90 is arranged to detect the center position of the heating furnace 80 and the single crystal tube 50 to be heated, obtain the center deviation between the two, and feed back the center deviation between the two to the controller. The controller calculates the data required for the center position of the single crystal tube 50 to be heated to coincide with the center position of the heating furnace 80, and feeds back to the XY motion centering platform 30, thereby realizing the center position of the single crystal tube 50 to be heated to move in the X direction or the Y direction until the center position of the single crystal tube 50 to be heated coincides with the center position of the heating furnace 80.

[0052] It should be noted that this embodiment can directly obtain the center deviation of the heating furnace 80 and the single crystal tube 50 to be heated by setting a camera calibration component 90, so as to realize automatic adjustment of the center position of the heated single crystal tube 50 by the XY motion centering platform 30 through the controller, thereby reducing adjustment time, reducing personnel participation, and reducing labor costs.

[0053] In some embodiments, a linear motion module 60 is further included, which is installed on the second bracket 20 along the Z direction. A support seat 70 is connected to the linear motion module 60. A heating furnace 80 is installed on the support seat 70 along the Z direction. The linear motion module 60 is used to drive the heating furnace 80 to move along the Z direction so that the single crystal material tube 50 to be heated can enter the heating furnace 80.

[0054] In the above embodiment, the linear motion module 60 includes a third motor 61, a third screw rod 62 and a third slider 63. The third screw rod 62 is installed on the second bracket 20 along the Z direction. The third motor 61 is connected to one end of the third screw rod 62. The third slider 63 is connected to the third screw rod 62. The third motor 61 can drive the third slider 63 to move along the Z direction through the third screw rod 62. Since the heating furnace 80 is installed on the linear motion module 60 through the support seat 70, the heating furnace 80 can only move in the Z direction, but not in the X and Y directions. After the center of the single crystal material tube 50 to be heated and the heating furnace 80 are corrected and overlapped, the third motor 61 can drive the heating furnace 80 to move in the Z direction through the third screw rod 62 and the third slider 63, so that the single crystal material tube 50 to be heated enters the interior of the heating furnace 80 and starts processing.

[0055] In other embodiments, in order to ensure the balance and stability of the support base 70, at least two groups of linear motion modules 60 are provided, which may be two groups, three groups, four groups or five groups. In this embodiment, two groups are preferred.

[0056] In some embodiments, the camera calibration assembly 90 includes a cantilever 91 and a camera body 92, wherein one end of the cantilever 91 is connected to the second bracket 20, and the other end extends to the end of the heating furnace 80 away from the support seat 70, and the camera body 92 is connected to the cantilever 91, and the camera body 92 is located on the axis of the heating furnace 80. The camera body 92 can simultaneously capture the center positions of the heating furnace 80 and the single crystal tube 50 to be heated in the Z direction, thereby obtaining the center deviation between the two, and feeding back the center deviation between the two to the controller, and the controller controls the XY motion centering platform 30 to adjust the center position of the single crystal tube 50 to be heated, so that the center position of the single crystal tube 50 to be heated coincides with the center position of the heating furnace 80, ensuring that when the heating furnace 80 moves along the Z direction under the action of the linear motion module 60, the single crystal tube 50 to be heated can enter the heating furnace 80.

[0057] In some embodiments, in order to improve the shooting clarity of the camera body 92, the camera calibration assembly 90 also includes a connecting rod 93 and a light source 94. The connecting rod 93 is connected to the cantilever 91, and the light source 94 is connected to the connecting rod 93. The light source 94 is used to supplement light for the heating furnace 80 and the single crystal tube 50 to be heated, thereby improving the shooting clarity of the camera body 92 to obtain a more accurate center deviation.

[0058] In some embodiments, the XY motion centering platform 30 includes an X-direction centering mechanism 31 and a Y-direction centering mechanism 32. The X-direction centering mechanism 31 is disposed on the first bracket 10. The X-direction centering mechanism 31 is used to drive the material tube mounting seat 40 to move along the X-direction. The Y-direction centering mechanism 32 is disposed on the X-direction centering mechanism 31. The material tube mounting seat 40 is disposed on the Y-direction centering mechanism 32. The Y-direction centering mechanism 32 is used to drive the material tube mounting seat 40 to move along the Y-direction. In this way, the controller calculates the data required for the center position of the single crystal material tube 50 to be heated to coincide with the center position of the heating furnace 80, and feeds back to the X-direction centering mechanism 31 and the Y-direction centering mechanism 32. The X-direction centering mechanism 31 and the Y-direction centering mechanism 32 respectively adjust the offset of the single crystal material tube 50 to be heated in the X-direction and the Y-direction until the center position of the single crystal material tube 50 to be heated coincides with the center position of the heating furnace 80, and the calibration is completed.

[0059] In the above embodiment, the X-axis centering mechanism 31 includes a fixed plate 311, a first slider 313, a first motor 314 and a first screw rod 315. The fixed plate 311 is arranged on a side surface of the first bracket 10 facing the heating furnace 80. The fixed plate 311 is provided with a first guide rail 312 extending along the X-axis, and the first slider 313 is slidably connected to the first guide rail 312. The first motor 314 is arranged at the side end of the fixed plate 311, the first screw rod 315 is connected to the output end of the first motor 314, and the first slider 313 is connected to the first screw rod 315. When the controller calculates that the data required for the center position of the single crystal material tube 50 to be heated to coincide with the center position of the heating furnace 80 is X-axis movement, since the first slider 313 is slidably connected to the first guide rail 312, the first motor 314 drives the first slider 313 to move along the X-axis through the first screw rod 315 until the center position of the single crystal material tube 50 to be heated moves toward the center position of the heating furnace 80 in the X-axis until the two coincide, and the calibration is completed.

[0060] In the above embodiment, the Y-axis centering mechanism 32 includes a movable plate 321, a second slider 323, a second motor 324 and a second screw rod 325. The movable plate 321 is connected to the first slider 313. The movable plate 321 is provided with a second guide rail 322 extending along the Y-axis. The second slider 323 is slidably connected to the second guide rail 322. The second motor 324 is provided at the side end of the movable plate 321. The second screw rod 325 is connected to the output end of the second motor 324. The second slider 323 is connected to the second screw rod 325. Similarly, when the controller calculates that the data required for the center position of the single crystal material tube 50 to be heated to coincide with the center position of the heating furnace 80 is Y-axis movement, the second motor 324 drives the second slider 323 to move along the Y-axis through the second screw rod 325 until the center position of the single crystal material tube 50 to be heated moves toward the center position of the heating furnace 80 in the Y-axis until the two coincide, and the calibration is completed.

[0061] In some embodiments, the X-axis centering mechanism 31 and the Y-axis centering mechanism 32 do not interfere with each other, and the two can perform X-axis and Y-axis centering corrections synchronously.

[0062] The working process of this utility model is: please combine Figure 1-6 It is understood that the single crystal material tube 50 to be heated takes the indium phosphide substrate sheet as an example. Since the heating furnace 80 is installed on the linear motion module 60 through the support seat 70, the heating furnace 80 can only move in the Z direction, but not in the X direction and the Y direction. Therefore, the center position of the heating furnace 80 is fixed relative to the X direction and the Y direction. During the calibration process, the center position of the heating furnace 80 is used as the reference point to calibrate the center position of the indium phosphide substrate sheet so that the center position of the indium phosphide substrate sheet coincides with the center position of the heating furnace 80; specifically, after the indium phosphide substrate sheet is placed on the material tube mounting seat 40, the camera body 92 shoots the center positions of the heating furnace 80 and the indium phosphide substrate sheet along the Z direction, obtains the center deviation of the two (including the X-direction deviation and the Y-direction deviation), and The center deviation is fed back to the controller, and the controller calculates the data required for the center position of the indium phosphide substrate to coincide with the center position of the heating furnace 80, and feeds back the data to the X-axis centering mechanism 31 and the Y-axis centering mechanism 32. The X-axis centering mechanism 31 and the Y-axis centering mechanism 32 respectively adjust the offset of the indium phosphide substrate in the X direction and the Y direction until the center position of the indium phosphide substrate coincides with the center position of the heating furnace 80, and the correction is completed; thereafter, the third motor 61 can drive the heating furnace 80 to move in the Z direction through the third screw rod 62 and the third slider 63, so that the indium phosphide substrate enters the interior of the heating furnace 80 to start processing; the light source 94 can assist the camera body 92 to ensure the shooting clarity, thereby improving the accuracy of the center deviation of the two.

[0063] In summary, the embodiment of the utility model provides a centering single crystal furnace structure, which is provided with an XY-direction motion centering platform 30 on the first bracket 10, and a material tube mounting seat 40 is provided on the XY-direction motion centering platform 30. When the single crystal material tube 50 to be heated is placed on the material tube mounting seat 40, the XY-direction motion centering platform 30 can drive the single crystal material tube 50 to be heated to move along the X-direction or the Y-direction, so as to adjust the center position of the single crystal material tube 50 to be heated, and the heating furnace 80 is arranged above the single crystal material tube 50 to be heated through the second bracket 20, and a camera calibration component 90 is provided to detect the center position of the heating furnace 80 and the single crystal material tube 50 to be heated, obtain the center deviation between the two, and feed back the center deviation between the two to the controller, so as to obtain the center deviation between the two. The center position of the heating furnace 80 is fixed relative to the X-direction and the Y-direction. For this purpose, the controller calculates the data required for the center position of the single crystal tube 50 to be heated to coincide with the center position of the heating furnace 80, and feeds back the data to the XY motion centering platform 30, thereby realizing the movement of the center position of the single crystal tube 50 to be heated in the X-direction or the Y-direction until the center position of the single crystal tube 50 to be heated coincides with the center position of the heating furnace 80; the utility model can directly obtain the center deviation of the heating furnace 80 and the single crystal tube 50 to be heated by setting a camera calibration component 90, thereby realizing the automatic adjustment of the center position of the heated single crystal tube 50 by the XY motion centering platform 30 through the controller, thereby reducing the adjustment time, reducing the personnel participation, and reducing the labor cost.

[0064] The above is only a preferred embodiment of the utility model. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the utility model, and these improvements and substitutions should also be regarded as the protection scope of the utility model. The above shows and describes the basic principles, main features and advantages of the utility model. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above preferred embodiments. The embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is defined by the attached claims rather than the above description, so it is intended to include all changes that fall within the meaning and scope of the equivalent elements of the claims in the utility model.

[0065] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in the embodiments may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A center-adjustable single crystal furnace structure, having two intersecting X-directions, Y-directions and Z-directions, characterized in that: include: A first bracket extending along the Y direction; A second bracket connected to the first bracket along the Z direction; An XY-direction motion centering platform connected to the first bracket, wherein the XY-direction motion centering platform is provided with a material tube mounting seat for placing the single crystal material tube to be heated, and the XY-direction motion centering platform can drive the material tube mounting seat to move along the X direction or the Y direction; A heating furnace, arranged on the second bracket; A camera calibration component, disposed at an end of the second bracket away from the first bracket, for obtaining the center positions of the heating furnace and the single crystal material tube to be heated; as well as A controller is configured to control the XY motion centering platform according to the center positions of the heating furnace and the single crystal tube to be heated fed back by the camera calibration component.

2. The center-adjustable single crystal furnace structure according to claim 1, characterized in that: The XY motion centering platform includes: An X-direction centering mechanism, the X-direction centering mechanism is disposed on the first bracket, and the X-direction centering mechanism is used to drive the material pipe mounting seat to move along the X-direction; and The Y-direction centering mechanism is arranged on the X-direction centering mechanism, the material pipe mounting seat is arranged on the Y-direction centering mechanism, and the Y-direction centering mechanism is used to drive the material pipe mounting seat to move along the Y direction.

3. The center-adjustable single crystal furnace structure according to claim 2, characterized in that: The X-axis centering mechanism includes a fixed plate and a first slider. The fixed plate is arranged on a side surface of the first bracket facing the heating furnace. The fixed plate is provided with a first guide rail extending along the X-axis. The first slider is slidably connected to the first guide rail.

4. The center-adjustable single crystal furnace structure according to claim 3, characterized in that: The X-axis centering mechanism further includes a first motor and a first screw rod, wherein the first motor is arranged at a side end of the fixing plate, the first screw rod is connected to an output end of the first motor, and the first slider is connected to the first screw rod.

5. The center-adjustable single crystal furnace structure according to claim 3, characterized in that: The Y-direction centering mechanism comprises a movable plate and a second slider, wherein the movable plate is connected to the first slider, the movable plate is provided with a second guide rail extending along the Y-direction, and the second slider is slidably connected to the second guide rail.

6. The center-adjustable single crystal furnace structure according to claim 5, characterized in that: The Y-axis centering mechanism also includes a second motor and a second screw rod, the second motor is arranged at the side end of the movable plate, the second screw rod is connected to the output end of the second motor, and the second slider is connected to the second screw rod.

7. The center-adjustable single crystal furnace structure according to claim 1, characterized in that: It also includes a linear motion module, which is installed on the second bracket along the Z direction. The linear motion module is connected to a support seat, and the heating furnace is installed on the support seat along the Z direction.

8. The center-adjustable single crystal furnace structure according to claim 7, characterized in that: The camera calibration component comprises: a cantilever, one end of which is connected to the second bracket, and the other end of which extends to an end of the heating furnace away from the support seat; and A camera body is connected to the cantilever and is located on the axis of the heating furnace.

9. The center-adjustable single crystal furnace structure according to claim 8, characterized in that: The camera calibration assembly also includes a connecting rod and a light source, wherein the connecting rod is connected to the cantilever, and the light source is connected to the connecting rod for supplementing light.

10. The center-adjustable single crystal furnace structure according to claim 7, characterized in that: The linear motion module includes a third motor, a third screw rod and a third slider. The third screw rod is installed on the second bracket along the Z direction. The third motor is connected to one end of the third screw rod. The third slider is connected to the third screw rod. The third motor can drive the third slider to move along the Z direction through the third screw rod.

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