Heat shield, furnace body and battery production equipment

Abstract

The utility model discloses a heat insulation cover, a furnace body and battery production equipment, the heat insulation cover is used for a furnace shell arranged in the furnace body so as to define a mounting space together with the furnace shell, the mounting space is used for accommodating a furnace tail of a furnace tube in the furnace body, and the heat insulation cover and the furnace tail are arranged at an interval; a through hole is formed in the heat insulation cover and used for allowing a waste discharge pipe connected with the furnace tail to penetrate through so that the waste discharge pipe can penetrate out of the installation space. The production capacity can be improved, and the spare part loss is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of battery production equipment, and in particular to a heat insulation cover, a furnace body and battery production equipment. Background Art

[0002] In the related art, the production process of single crystal solar cell is mainly divided into four parts: cleaning, high temperature, coating and screen. Among them, the high temperature part is divided into three processes: diffusion, oxidation and annealing, and the three processes are all carried out in the furnace body. Specifically, the furnace body usually includes a furnace shell, a furnace tube arranged in the furnace shell, the furnace tail of the furnace tube is arranged outside the furnace shell, and a waste pipe connected to the furnace tube is arranged on the furnace tail of the furnace tube. The three processes of diffusion, oxidation and annealing are all carried out in the furnace tube, and the furnace tube must meet a process temperature of more than 1000 degrees Celsius and certain vacuum conditions.

[0003] Since the process temperature in the furnace tube is above 1000 degrees Celsius, the temperature at the furnace tail must be high. The furnace tail set outside the furnace shell will cause the temperature of its surrounding environment to rise. When the temperature of the surrounding environment of the furnace tail is high, on the one hand, since the vacuum pump for evacuating the furnace tube is set in the surrounding environment of the furnace tail, when the ambient temperature is higher than the limit temperature of the inverter in the vacuum pump, it will cause the inverter to short-circuit and burn out, and then cause the vacuum pump to stop working. After the vacuum pump stops working, the process in the furnace tube ends halfway, and the silicon wafers that have not been processed in the furnace tube need to be reworked, which leads to reduced production capacity; on the other hand, since various spare parts such as air pipes and wiring are also set in the surrounding environment of the furnace tail, when the ambient temperature is high, the above spare parts are also easily burned out, resulting in spare parts loss. Utility Model Content

[0004] In view of the above-mentioned deficiencies in the related art, the present application provides a heat insulation cover, a furnace body and a battery production equipment to solve the problems of reduced production capacity and spare parts loss in the related art.

[0005] In order to solve the above technical problems, in a first aspect, the present application provides a heat insulation cover, which is used to be arranged in a furnace shell in a furnace body, so as to enclose an installation space together with the furnace shell, wherein the installation space is used for accommodating a furnace tail of a furnace tube in the furnace body, and the heat insulation cover is used to be spaced apart from the furnace tail;

[0006] The heat insulation cover is provided with a through hole, and the through hole is used for a waste discharge pipe connected to the furnace tail to pass through, so that the waste discharge pipe passes out of the installation space.

[0007] In a possible implementation manner of the first aspect, the heat insulation cover is used to be detachably connected to the furnace shell.

[0008] In a possible implementation manner of the first aspect, the heat insulation cover is provided with an ear plate, and the ear plate is provided with bolt through holes for bolts to pass through, so that the heat insulation cover is detachably connected to the furnace shell through the bolts.

[0009] In a possible implementation of the first aspect, the heat shield includes:

[0010] A cylindrical shell, wherein the cylindrical shell has a first end and a second end respectively located at two axial ends thereof, and the ear plate is arranged at the first end;

[0011] An end plate is provided at the second end portion, and the end plate is connected to the second end portion along the circumference of the second end portion, and the through hole is provided at the end plate.

[0012] In a possible implementation manner of the first aspect, an avoidance gap is provided on the first end portion.

[0013] In a possible implementation manner of the first aspect, a plurality of ear plates are provided, and the ear plates are spaced apart along the circumference of the first end portion.

[0014] In a possible implementation manner of the first aspect, the avoidance gap is provided between at least one pair of adjacent two ear plates.

[0015] In a possible implementation manner of the first aspect, the heat insulation cover is a heat insulation cover made of steel.

[0016] In a second aspect, the present application further provides a furnace body, which comprises:

[0017] Furnace shell;

[0018] A furnace tube, the furnace tube comprising a furnace tail, and the furnace tube is arranged in the furnace shell;

[0019] The heat shield according to any one of the first aspects.

[0020] In a third aspect, the present application further provides a battery production device, the battery production device comprising:

[0021] The furnace body according to any one of the second aspects.

[0022] Compared with the related art, this application has at least the following beneficial effects:

[0023] In the present application, since the heat insulation cover arranged on the furnace shell can enclose an installation space together with the furnace shell, and since the installation space is used for accommodating the tail of the furnace tube, and the heat insulation cover is used to be spaced apart from the tail, therefore, compared with the related art, the heat insulation cover in the present application can not only separate the tail of the furnace tube from the environment outside the installation space, but also can play a certain heat insulation role by being spaced apart from the tail, which is beneficial to reduce the heat dissipation from the tail to the environment outside the installation space when the temperature of the tail is high, and further helps to reduce the temperature of the environment outside the installation space, that is, it is beneficial to reduce the temperature of the environment around the tail outside the installation space.

[0024] When the temperature of the environment around the furnace tail outside the installation space decreases, on the one hand, it is helpful to make the temperature of the environment around the furnace tail lower than the limit temperature of the frequency converter in the vacuum pump, which is helpful to avoid the frequency converter short circuit and burnout, that is, it is helpful to ensure the normal operation of the vacuum pump, which is helpful to ensure the normal progress of the process in the furnace tube, and the silicon wafers in the furnace tube can also be processed without rework, which is not only helpful to improve the production efficiency of silicon wafers, which is helpful to increase production capacity, but also helpful to reduce the processing cost of silicon wafers to a certain extent. On the other hand, it is also helpful to avoid the various air pipes and wiring spare parts set in the environment around the furnace tail from being burned, which is helpful to reduce the loss of spare parts, which is also helpful to reduce costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 A cross-sectional view of a furnace body provided in an embodiment of the present application;

[0027] Figure 2 A schematic diagram of the structure of the heat shield provided in an embodiment of the present application;

[0028] Figure 3 for Figure 2 AA section view of the middle heat shield;

[0029] Figure 4 for Figure 2 BB section view of the middle heat insulation cover;

[0030] Figure 5 for Figure 2 CC section view of the middle heat insulation cover;

[0031] Figure 6 A schematic diagram of a battery production device provided in an embodiment of the present application.

[0032] Description of reference numerals:

[0033] 1- heat shield; 11- through hole; 12- ear plate; 121- bolt through hole; 13- cylindrical shell; 131- avoidance notch; 14- end plate;

[0034] 2-furnace shell;

[0035] 3- Installation space;

[0036] 4-furnace tube; 41-furnace tail;

[0037] 6- Waste pipe;

[0038] 7-graphite ring;

[0039] 8-Fixed structure;

[0040] 100-furnace body. DETAILED DESCRIPTION

[0041] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0042] In the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0043] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to specific circumstances.

[0044] In addition, the terms "installed", "set", "provided with", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0045] In addition, the terms "first", "second", etc. are mainly used to distinguish different devices, elements or components (the specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise specified, "plurality" means two or more.

[0046] As described in the background technology of this application, the production process of single-crystal solar cell wafers is mainly divided into four parts: cleaning, high temperature, coating and screen. Among them, the high temperature part is divided into three processes: diffusion, oxidation and annealing, and the three processes are all carried out in the furnace body. Specifically, the furnace body usually includes a furnace shell, a furnace tube arranged in the furnace shell, the furnace tail of the furnace tube is arranged outside the furnace shell, and a waste discharge pipe connected to the furnace tube is arranged on the furnace tail of the furnace tube. The three processes of diffusion, oxidation and annealing are all carried out in the furnace tube, and the furnace tube must meet a process temperature of more than 1000 degrees Celsius and certain vacuum conditions.

[0047] Since the process temperature in the furnace tube is above 1000 degrees Celsius, the temperature at the furnace tail must be high. The furnace tail set outside the furnace shell will cause the temperature of its surrounding environment to rise. When the temperature of the surrounding environment of the furnace tail is high, on the one hand, since the vacuum pump for evacuating the furnace tube is set in the surrounding environment of the furnace tail, when the ambient temperature is higher than the limit temperature of the inverter in the vacuum pump, it will cause the inverter to short-circuit and burn out, and then cause the vacuum pump to stop working. After the vacuum pump stops working, the process in the furnace tube ends halfway, and the silicon wafers that have not been processed in the furnace tube need to be reworked, which leads to reduced production capacity; on the other hand, since various spare parts such as air pipes and wiring are also set in the surrounding environment of the furnace tail, when the ambient temperature is high, the above spare parts are also easily burned out, resulting in spare parts loss.

[0048] Embodiment 1

[0049] In view of the above-mentioned problems, the present application provides a heat insulation cover to solve the problems of reduced production capacity and spare parts loss in the related art.

[0050] The technical solution of the present application will be further described below in conjunction with specific embodiments and drawings:

[0051] like Figure 1As shown, the heat insulation cover 1 is used to be arranged in the furnace shell 2 in the furnace body 100 to enclose an installation space 3 together with the furnace shell 2. The installation space 3 is used for accommodating the furnace tail 41 of the furnace tube 4 in the furnace body 100, and the heat insulation cover 1 is used to be spaced apart from the furnace tail 41.

[0052] like Figure 1 , Figure 2 , Figure 3 , Figure 4 as well as Figure 5 As shown, a through hole 11 is provided on the heat insulation cover 1 , and the through hole 11 is used for the exhaust pipe 6 connected to the furnace tail 41 to pass through, so that the exhaust pipe 6 passes through the installation space 3 .

[0053] In the present application, since the heat insulation cover 1 arranged on the furnace shell 2 can enclose the installation space 3 together with the furnace shell 2, and since the installation space 3 is used for accommodating the furnace tail 41 of the furnace tube 4, and the heat insulation cover 1 is used to be spaced apart from the furnace tail 41, therefore, compared with the related art, the heat insulation cover 1 in the present application can not only separate the furnace tail 41 of the furnace tube 4 from the environment outside the installation space 3, but also can play a certain heat insulation role by being spaced apart from the furnace tail 41, which is beneficial to reduce the heat dissipation of the furnace tail 41 to the environment outside the installation space 3 when the temperature of the furnace tail 41 is high, and then it is beneficial to reduce the temperature of the environment outside the installation space 3, that is, it is beneficial to reduce the temperature of the environment around the furnace tail 41 outside the installation space 3.

[0054] When the temperature of the environment around the furnace tail 41 outside the installation space 3 decreases, on the one hand, it is beneficial to make the temperature of the environment around the furnace tail 41 lower than the limit temperature of the frequency converter in the vacuum pump, which is beneficial to avoid the frequency converter from short-circuiting and burning, that is, it is beneficial to ensure the normal operation of the vacuum pump, which is beneficial to ensure the normal progress of the process in the furnace tube 4, and the silicon wafers in the furnace tube 4 can also be processed without rework, which is not only beneficial to improve the production efficiency of silicon wafers, which is beneficial to increase production capacity, but also beneficial to reduce the processing cost of silicon wafers to a certain extent. On the other hand, it is also beneficial to avoid the various air pipes and wiring spare parts set in the environment around the furnace tail 41 from being burned, which is beneficial to reduce the loss of spare parts, which is also beneficial to reduce costs.

[0055] Furthermore, in a preferred embodiment, the heat insulation cover 1 is used to be detachably connected to the furnace shell 2.

[0056] The detachable connection between the heat insulation cover 1 and the furnace shell 2 not only facilitates the installation of the heat insulation cover 1 on the furnace shell 2, but also facilitates the removal of the heat insulation cover 1 when the heat insulation cover 1 does not meet the use requirements. In addition, when it is necessary to remove the heat insulation cover 1 to repair and maintain the components in the installation space 3, it also facilitates the repair and maintenance of the components in the installation space 3 to a certain extent.

[0057] In other embodiments, the heat insulation cover 1 can be integrally arranged with the furnace shell 2. Such an arrangement is conducive to enhancing the installation strength of the heat insulation cover 1 on the furnace shell 2, and further conducive to enhancing the stability of the heat insulation cover 1 on the furnace shell 2.

[0058] Further, in a preferred embodiment, Figure 2 , Figure 4 as well as Figure 5 As shown, the heat shield 1 is provided with an ear plate 12. Figure 2 and Figure 4 As shown, the ear plate 12 is provided with bolt through holes 121 for bolts to pass through, so that the heat insulation cover 1 and the furnace shell 2 can be detachably connected by bolts.

[0059] Such an arrangement not only facilitates the detachable connection between the heat shield 1 and the furnace shell 2 , but also the arrangement of the ear plates 12 and the bolt through holes 121 can simplify the detachable connection structure to a certain extent, thereby facilitating the processing and manufacturing of the heat shield 1 .

[0060] In other embodiments, the heat insulation cover 1 and the furnace shell 2 can also be detachably connected by snapping. Specifically, the heat insulation cover 1 is provided with a claw, and the furnace shell 2 is provided with a slot for the claw to be inserted and snapped with the claw. The detachable connection between the heat insulation cover 1 and the furnace shell 2 is achieved by the slot and the claw, which can not only ensure the connection strength between the heat insulation cover 1 and the furnace shell 2, but also facilitate the arrangement of the heat insulation cover 1 on the furnace shell 2 to a certain extent.

[0061] Further, in a preferred embodiment, Figure 2 , Figure 3 , Figure 4 as well as Figure 5 As shown, the heat shield 1 includes a cylindrical shell 13 and an end plate 14, wherein the cylindrical shell 13 has a first end and a second end respectively located at two axial ends thereof, the ear plate 12 is arranged at the first end, the end plate 14 is arranged at the second end, and the end plate 14 is connected to the second end along the circumference of the second end, and the through hole 11 is arranged on the end plate 14.

[0062] The heat shield 1 is configured to include a cylindrical shell 13 and an end plate 14, which can simplify the structure of the heat shield 1 to a certain extent, and is conducive to the processing of the heat shield 1. At the same time, since the furnace door at the furnace opening position will push the furnace tube 4 to move toward the furnace tail 41, in order to prevent the furnace tube 4 from moving too much, the heat shield 1 will be used to prevent the furnace tube 4 from continuing to move, and since the furnace tail 41 is usually cylindrical, the heat shield 1 composed of the cylindrical shell 13 and the end plate 14 can be adapted to the furnace tail 41 in shape, which is conducive to facilitating the furnace tail 41 to enter the heat shield 1, and further facilitates the use of the end plate 14 to prevent the furnace tube 4 from continuing to move.

[0063] In other embodiments, the heat shield 1 may further include a hemispherical shell, and the hemispherical shell is disposed on the furnace shell 2. The hemispherical shell can not only ensure the structural strength of the heat shield 1, but also reduce the occupied space of the heat shield 1 to a certain extent, which is conducive to facilitating the installation of the heat shield 1.

[0064] In the preferred embodiment, in order to ensure the heat insulation effect of the heat insulation cover 1, it is necessary to avoid direct contact between the heat insulation cover 1 and the furnace tail 41. In order to use the heat insulation cover 1 to prevent the furnace tube 4 from moving, a graphite ring 7 ( Figure 1 As shown in the figure, the heat shield 1 and the furnace tail 41 can achieve indirect contact with each other through direct contact with the graphite ring 7, and then the heat shield 1 can prevent the furnace tube 4 from moving through the graphite ring 7. It can be seen that by providing the graphite ring 7, not only can the heat shield 1 be prevented from directly contacting the furnace tail 41 to ensure the heat insulation effect, but also the heat shield 1 can be conveniently prevented from moving the furnace tube 4.

[0065] In a preferred embodiment, the outer diameter of the cylindrical shell 13 is 340 mm, that is, the radius of the cylindrical shell 13 is 170 mm, the diameter of the through hole 11 is 70 mm, and the axial length of the cylindrical shell 13 is 60 mm, that is, the depth of the heat shield 1 is 60 mm. Such a configuration not only enables the size of the heat shield 1 to better fit the furnace tail 41, but also enables the size of the heat shield 1 to better fit the shape and size of the location where the heat shield 1 is set on the furnace shell 2, which is conducive to facilitating the installation of the heat shield 1 on the furnace shell 2. In addition, setting the diameter of the through hole 11 to 70 mm also enables the through hole 11 to better fit the size of the exhaust pipe 6.

[0066] It should be noted that the size of the heat shield 1 is not limited to the above size. In other embodiments of the present application, the specific size of the heat shield 1 can also be specifically designed according to actual usage requirements, which will not be elaborated in detail in the embodiments of the present application.

[0067] Further, in a preferred embodiment, Figure 2 , Figure 3 , Figure 4 as well as Figure 5 As shown, an escape notch 131 is provided on the first end.

[0068] Since a flange is fixed to the furnace shell 2 near the furnace tail 41 by a fixing structure 8 such as bolts, as shown in FIG. Figure 1 As shown, since the fixing structure 8 is arranged at the installation position of the heat insulation cover 1 outside the furnace shell 2, the avoidance notch 131 is arranged on the heat insulation cover 1 to effectively avoid the fixing structure 8, thereby facilitating the installation of the heat insulation cover 1 on the furnace shell 2.

[0069] Of course, in other embodiments of the present application, if there is no fixing structure 8 at the installation location of the heat insulation cover 1 on the furnace shell 2, the avoidance notch 131 may not be provided on the heat insulation cover 1, thereby correspondingly simplifying the structure of the heat insulation cover 1 and facilitating the processing and manufacturing of the heat insulation cover 1.

[0070] Furthermore, a plurality of ear plates 12 are provided, and the ear plates 12 are arranged at intervals along the circumferential direction of the first end portion.

[0071] Such arrangement, through the multiple ear plates 12, can not only ensure the stability of the heat insulation cover 1 on the furnace shell 2, but also help to reduce the weight of the heat insulation cover 1 to a certain extent compared with the annular flange structure, thereby facilitating the transportation and installation of the heat insulation cover 1.

[0072] In a preferred embodiment, Figure 2 As shown, there are four ear plates 12. Such an arrangement not only ensures the stability of the heat shield 1 on the furnace shell 2 through the four ear plates 12, but also reduces the number of ear plates 12 to a certain extent, which is conducive to the processing and manufacturing of the heat shield 1.

[0073] In other embodiments, the number of ear plates 12 may be two, three, five or more. The number of ear plates 12 is flexible. Specifically, the number may be set according to actual usage requirements, and the embodiments of the present application will not elaborate on this.

[0074] As for the number of ear plates 12, in another embodiment, only one ear plate 12 is provided, and the ear plate 12 is in an arc shape, and a plurality of bolt through holes arranged at intervals along the circumference of the ear plate 12 are provided on the ear plate 12. Such an arrangement can not only ensure the stability of the heat insulation cover 1 on the furnace shell 2 through the ear plate 12, but also enhance the structural strength of the ear plate 12 to a certain extent.

[0075] Furthermore, an avoidance gap 131 is provided between at least one pair of adjacent ear plates 12 .

[0076] With such arrangement, both sides of the avoidance notch 131 can be provided with ear plates 12 in the circumferential direction of the cylindrical shell 13, thereby not only optimizing the arrangement relationship between the avoidance notch 131 and the ear plates 12, but also enabling both sides of the avoidance notch 131 to be fixed to the furnace shell 2, thereby ensuring the coordination effect between the heat insulation cover 1 and the furnace shell 2 at the avoidance notch 131.

[0077] In a preferred embodiment, Figure 1 As shown, avoidance notches 131 are provided between three pairs of adjacent ear plates 12. Such a configuration can not only ensure the matching effect between the heat shield 1 and the furnace shell 2 at each avoidance notch 131, but also further optimize the arrangement relationship between the avoidance notches 131 and the ear plates 12.

[0078] In other embodiments, an avoidance gap 131 is provided between one pair, two pairs, four teams or more pairs of adjacent ear plates 12, and the arrangement relationship between the avoidance gap 131 and the ear plate 12 is relatively flexible. Specifically, it can be designed according to actual needs, and the embodiments of the present application will not be elaborated on this.

[0079] In a preferred embodiment, the heat shield 1 is a heat shield made of steel.

[0080] Since the heat insulation cover 1 not only limits the movement of the furnace tube 4, but also plays a certain role in heat insulation, the heat insulation cover 1 needs to have a certain strength and also needs to have a relatively low thermal conductivity. The steel material has a high strength, which can not only meet the strength requirements of the heat insulation cover 1, but also has a relatively low thermal conductivity on the basis of meeting the strength requirements, and thus can also play a certain role in heat insulation.

[0081] In other embodiments, the heat shield 1 may also be made of other metal materials, such as iron, alloy, etc. The material selection of the heat shield 1 is relatively flexible, and can be specifically determined according to actual usage requirements, which will not be elaborated in detail in the embodiments of the present application.

[0082] Embodiment 2

[0083] The present application also provides a furnace body 100, such as Figure 1 As shown, the furnace body 100 includes a furnace shell 2, a furnace tube 4, and a heat insulation cover 1, wherein the furnace tube 4 includes a furnace tail 41, and the furnace tube 4 is arranged on the furnace shell 2, and the heat insulation cover 1 has the same structure as any of the heat insulation covers 1 in the above embodiments, and can bring the same or similar beneficial effects. For details, please refer to the description in the above embodiments, and this embodiment will not be repeated here.

[0084] Compared with the related art, the heat insulation cover 1 in the present application can not only separate the furnace tail 41 of the furnace tube 4 from the environment outside the installation space 3, but also play a certain heat insulation role by being set at a distance from the furnace tail 41, which is beneficial to reduce the heat dissipation from the furnace tail 41 to the environment outside the installation space 3 when the temperature of the furnace tail 41 is high, and then it is beneficial to reduce the temperature of the environment outside the installation space 3, that is, it is beneficial to reduce the temperature of the environment around the furnace tail 41 outside the installation space 3.

[0085] When the temperature of the environment around the furnace tail 41 outside the installation space 3 decreases, on the one hand, it is beneficial to make the temperature of the environment around the furnace tail 41 lower than the limit temperature of the frequency converter in the vacuum pump, which is beneficial to avoid the frequency converter from short-circuiting and burning, that is, it is beneficial to ensure the normal operation of the vacuum pump, which is beneficial to ensure the normal progress of the process in the furnace tube 4, and the silicon wafers in the furnace tube 4 can also be processed without rework, which is not only beneficial to improve the production efficiency of silicon wafers, which is beneficial to increase production capacity, but also beneficial to reduce the processing cost of silicon wafers to a certain extent. On the other hand, it is also beneficial to avoid the various air pipes and wiring spare parts set in the environment around the furnace tail 41 from being burned, which is beneficial to reduce the loss of spare parts, which is also beneficial to reduce costs.

[0086] Embodiment 3

[0087] The present application also provides a battery production device, such as Figure 6 As shown, the battery production equipment includes a furnace body 100. The furnace body 100 has the same structure as any of the furnace bodies 100 in the above embodiments and can bring the same or similar beneficial effects. For details, please refer to the description in the above embodiments, which will not be repeated in this embodiment.

[0088] Compared with the related art, the heat insulation cover 1 in the present application can not only separate the furnace tail 41 of the furnace tube 4 from the environment outside the installation space 3, but also play a certain heat insulation role by being set at a distance from the furnace tail 41, which is beneficial to reduce the heat dissipation from the furnace tail 41 to the environment outside the installation space 3 when the temperature of the furnace tail 41 is high, and then it is beneficial to reduce the temperature of the environment outside the installation space 3, that is, it is beneficial to reduce the temperature of the environment around the furnace tail 41 outside the installation space 3.

[0089] When the temperature of the environment around the furnace tail 41 outside the installation space 3 decreases, on the one hand, it is beneficial to make the temperature of the environment around the furnace tail 41 lower than the limit temperature of the frequency converter in the vacuum pump, which is beneficial to avoid the frequency converter from short-circuiting and burning, that is, it is beneficial to ensure the normal operation of the vacuum pump, which is beneficial to ensure the normal progress of the process in the furnace tube 4, and the silicon wafers in the furnace tube 4 can also be processed without rework, which is not only beneficial to improve the production efficiency of silicon wafers, which is beneficial to increase production capacity, but also beneficial to reduce the processing cost of silicon wafers to a certain extent. On the other hand, it is also beneficial to avoid the various air pipes and wiring spare parts set in the environment around the furnace tail 41 from being burned, which is beneficial to reduce the loss of spare parts, which is also beneficial to reduce costs.

[0090] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A heat shield, characterized in that: The heat insulation cover is used to be arranged in the furnace shell in the furnace body, so as to enclose an installation space together with the furnace shell, wherein the installation space is used for accommodating the furnace tail of the furnace tube in the furnace body, and the heat insulation cover is used to be spaced apart from the furnace tail; The heat insulation cover is provided with a through hole, and the through hole is used for a waste discharge pipe connected to the furnace tail to pass through, so that the waste discharge pipe passes out of the installation space.

2. The heat shield according to claim 1, characterized in that: The heat insulation cover is used to be detachably connected to the furnace shell.

3. The heat shield according to claim 2, characterized in that: The heat insulation cover is provided with ear plates, and the ear plates are provided with bolt through holes for bolts to pass through, so that the heat insulation cover and the furnace shell are detachably connected through the bolts.

4. The heat shield according to claim 3, characterized in that: The heat shield comprises: A cylindrical shell, wherein the cylindrical shell has a first end and a second end respectively located at two axial ends thereof, and the ear plate is arranged at the first end; An end plate is provided at the second end portion, and the end plate is connected to the second end portion along the circumference of the second end portion, and the through hole is provided at the end plate.

5. The heat shield according to claim 4, characterized in that: The first end portion is provided with an avoidance notch.

6. The heat shield according to claim 5, characterized in that A plurality of ear plates are provided, and the ear plates are arranged at intervals along the circumference of the first end portion.

7. The heat shield according to claim 6, characterized in that The avoidance gap is arranged between at least one pair of adjacent two ear plates.

8. The heat shield according to any one of claims 1 to 7, characterized in that: The heat insulation cover is made of steel.

9. A furnace body, characterized in that: include: Furnace shell; A furnace tube, the furnace tube comprising a furnace tail, and the furnace tube is arranged in the furnace shell; The heat shield according to any one of claims 1 to 7.

10. A battery production device, characterized in that: include: The furnace body as claimed in claim 9.

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