Inlet and outlet pipeline for gasification device and gasification equipment with inlet and outlet pipeline

Abstract

The utility model provides an inlet and outlet pipeline for a gasification device and gasification equipment with the inlet and outlet pipeline. The inlet and outlet pipeline comprises a control system, a water supply pipeline and a water return pipeline, a first valve and a first detector are arranged on the water supply pipeline, a second valve and a second detector are arranged on the water return pipeline, and the first valve, the second valve, the first detector and the second detector are all connected with the control system; a communicating pipeline is connected between the water supply pipeline and the water return pipeline, the first communicating end of the communicating pipeline is connected to the water supply pipeline, the second communicating end of the communicating pipeline is connected to the water return pipeline, and a third valve is arranged on the communicating pipeline. According to the inlet and outlet pipeline for the gasification device and the gasification equipment with the inlet and outlet pipeline, the first valve and the second valve can be controlled to be closed when the first detector detects bubbles, and the bubbles are prevented from entering the gasification device; bubbles in the pipeline can be discharged under the condition that the water supply pipeline and the water return pipeline are not disassembled.

Description

Technical Field

[0001] The utility model relates to the technical field of integrated circuit manufacturing equipment, in particular to an inlet and outlet pipeline for a gasification device and a gasification device having the same. Background Art

[0002] After completing the semiconductor etching process, it is usually necessary to remove the photoresist on the surface of the wafer and some residues produced during the etching process. The photoresist removal equipment removes the photoresist by reacting oxygen atoms with the photoresist in a plasma environment.

[0003] See also Figure 1 , Figure 1 The following is a schematic diagram of the structure of the gasification device provided in the prior art connected with the water supply device and the degumming device. Figure 1 As shown, the water inlet 101 of the gasification device 10 is connected to the water supply equipment 20 through the water supply pipeline 11, and the water outlet 102 of the gasification device 10 is connected to the water supply equipment 20 through the return water pipeline 12 to form a water cycle; wherein the water supply pipeline 11 includes a first water supply pipeline 111 connected to the water inlet 101 and a second water supply pipeline 112 connected to the water supply equipment 20, and the return water pipeline 12 includes a first return water pipeline 121 connected to the water outlet 102 and a second return water pipeline 122 connected to the water supply equipment 20. When using the degumming device 30, it is necessary to firstly gasify the ultrapure water supplied by the water supply equipment 20 through the gasification device 10 to obtain water vapor, and then transport the water vapor from the gas outlet 103 of the gasification device 10 to the degumming device 30 to remove the photoresist.

[0004] However, when a power outage occurs in the plant, the water supply equipment 20 stops supplying water. When the water supply equipment 20 is restarted to resume water supply, a large number of bubbles may be generated in the water supply pipeline 11 and flow into the gasification device 10, causing a malfunction of the gasification device 10. In addition, after the malfunction of the gasification device 10 is resolved, it is often necessary to remove the water supply pipeline 11 and the return water pipeline 12 from the gasification device 10, and drain the water supply pipeline 11 and the return water pipeline 12 to remove the bubbles in the pipelines. Utility Model Content

[0005] The purpose of the utility model is to provide an inlet and outlet pipeline for a gasification device and a gasification device having the same, so as to solve one or more problems existing in the prior art, such as a large number of bubbles generated in the water supply pipeline and flowing into the gasification device due to the restart of the water supply equipment, causing the gasification device to malfunction, and the need to remove the water supply pipeline and the return pipeline to discharge the bubbles.

[0006] To achieve the above-mentioned purpose, the utility model is implemented through the following technical solutions: an inlet and outlet pipeline for a gasification device, the inlet and outlet pipeline comprising a control system, a water supply pipeline and a return water pipeline; the water supply pipeline is configured to be connected to the water inlet of the gasification device; the return water pipeline is configured to be connected to the water outlet of the gasification device; a first valve and a first detector are arranged on the water supply pipeline, and the first valve is located between the water inlet and the first detector; a second valve and a second detector are arranged on the return water pipeline, and the second valve is located between the water outlet and the second detector; the first valve, the second valve, the first detector and the second detector are all connected to the control system; a connecting pipeline is connected between the water supply pipeline and the return water pipeline, and the first valve of the connecting pipeline is connected to the return water pipeline. The connecting end is connected to the water supply pipeline, the second connecting end of the connecting pipeline is connected to the return pipeline, and the first connecting end is located between the first valve and the first detector, and the second connecting end is located between the second valve and the second detector; a third valve is arranged on the connecting pipeline; when the first detector detects bubbles, the control system is configured to control the first valve and the second valve to be closed; after the control system controls the first valve and the second valve to be closed, the third valve is configured to be in an open state; when the second detector does not detect bubbles within a preset time, the third valve is configured to be in a closed state; the control system is configured to control the first valve and the second valve to be opened after the third valve is closed.

[0007] Optionally, the third valve is connected to the control system, and when the first detector detects bubbles, the control system controls the first valve and the second valve to be closed, and controls the third valve to be opened; when the second detector fails to detect bubbles within a preset time, the control system controls the third valve to be closed, and controls the first valve and the second valve to be opened.

[0008] Optionally, when the second detector does not detect bubbles within a preset time, the control system gives a valve reset prompt, and after confirming the valve reset prompt, the control system controls both the first valve and the second valve to open.

[0009] Optionally, the water supply pipeline includes a first water supply pipeline and a second water supply pipeline, one end of the first water supply pipeline is connected to the water inlet, the other end of the first water supply pipeline is connected to one end of the second water supply pipeline, the first valve and the first detector are both arranged on the first water supply pipeline, and the diameter of the second water supply pipeline is larger than the diameter of the first water supply pipeline; the other end of the second water supply pipeline is configured to be connected to a water supply device; the return water pipeline includes a first return water pipeline and a second return water pipeline, one end of the first return water pipeline is connected to the water outlet, the other end of the first return water pipeline is connected to one end of the second return water pipeline, the second valve and the second detector are both arranged on the first return water pipeline, and the diameter of the second return water pipeline is larger than the diameter of the first return water pipeline; the other end of the second return water pipeline is configured to be connected to the water supply equipment.

[0010] Optionally, both the first detector and the second detector include photoelectric sensors.

[0011] Optionally, the first valve and the second valve both include solenoid valves.

[0012] Optionally, the third valve comprises a manual valve.

[0013] Optionally, the third valve includes an electric valve.

[0014] Optionally, the water supply pipeline, the water return pipeline and the connecting pipeline are all made of polyphenylene ether.

[0015] In order to achieve the above-mentioned purpose, the utility model also provides a gasification equipment, including a gasification device and the inlet and outlet pipelines for the gasification device as described in any of the above items, the water inlet of the gasification device is connected to the water supply pipeline of the inlet and outlet pipelines, and one end of the first valve is provided, and the water outlet of the gasification device is connected to the return water pipeline of the inlet and outlet pipelines, and one end of the second valve is provided.

[0016] Compared with the prior art, the inlet and outlet pipelines for the gasification device and the gasification equipment having the same provided by the utility model have the following beneficial effects:

[0017] The utility model provides an inlet and outlet pipeline for a gasification device, wherein the inlet and outlet pipeline comprises a control system, a water supply pipeline and a return water pipeline; the water supply pipeline is configured to be connected to a water inlet of the gasification device; the return water pipeline is configured to be connected to a water outlet of the gasification device; a first valve and a first detector are arranged on the water supply pipeline, and the first valve is located between the water inlet and the first detector; a second valve and a second detector are arranged on the return water pipeline, and the second valve is located between the water outlet and the second detector; the first valve, the second valve, the first detector and the second detector are all connected to the control system; a connecting pipeline is connected between the water supply pipeline and the return water pipeline, and the first connecting end of the connecting pipeline is connected to the supply pipeline. On the water pipeline, the second connecting end of the connecting pipeline is connected to the return pipeline, and the first connecting end is located between the first valve and the first detector, and the second connecting end is located between the second valve and the second detector; a third valve is arranged on the connecting pipeline; when the first detector detects bubbles, the control system is configured to control the first valve and the second valve to be closed; after the control system controls the first valve and the second valve to be closed, the third valve is configured to be in an open state; after the second detector fails to detect bubbles within a preset time, the third valve is configured to be in a closed state; the control system is configured to control the first valve and the second valve to be opened after the third valve is closed. Therefore, the inlet and outlet pipelines for the gasification device provided by the utility model can detect whether there are bubbles flowing through the water supply pipeline by arranging the first detector on the water supply pipeline; and can detect whether there are bubbles flowing through the return pipeline by arranging the second detector on the return pipeline. Furthermore, by arranging a first valve on the water supply pipeline and a second valve on the return pipeline, and the first valve is located between the water inlet and the first detector, and the second valve is located between the water outlet and the second detector, a foundation is laid for closing the first valve and the second valve when the first detector detects bubbles flowing through to prevent bubbles from entering the gasification device, and for opening the first valve and the second valve after the second detector fails to detect bubbles within a preset time to restore the water supply to the gasification device; and by connecting the first valve, the second valve, the first detector and the second detector to the control system, the control system can control the first valve and the second valve to close when the first detector detects bubbles, thereby preventing bubbles from entering the gasification device and protecting the gasification device, and the control system can control the first valve and the second valve to open after the second detector fails to detect bubbles within a preset time, thereby laying a foundation for restoring the water supply to the gasification device.Furthermore, a connecting pipeline is provided to connect the water supply pipeline and the return pipeline, and a third valve is provided on the connecting pipeline. When the first detector detects bubbles, the third valve is opened after the control system controls the first valve and the second valve to be closed, so that the bubbles in the pipeline can be discharged without dismantling the water supply pipeline and the return pipeline; when the second detector fails to detect bubbles within a preset time, the water supply to the gasification device can be restored by closing the third valve and controlling the first valve and the second valve to be opened through the control system.

[0018] Furthermore, the third valve is connected to the control system, and when the first detector detects bubbles, the control system controls the first valve and the second valve to be closed, and controls the third valve to be opened; when the second detector fails to detect bubbles within a preset time, the control system controls the third valve to be closed, and controls the first valve and the second valve to be opened. Therefore, the inlet and outlet pipelines for the gasification device provided by the utility model connect the third valve to the control system, so that the process of discharging bubbles in the water supply pipeline and restoring water supply to the gasification device is more automated, thereby improving work efficiency.

[0019] Since the gasification equipment provided by the utility model includes the inlet and outlet pipelines for the gasification device as described in any of the above items, the gasification equipment provided by the utility model at least has all the advantages of the inlet and outlet pipelines for the gasification device provided by the utility model, which will not be elaborated here. For more details, please refer to the above description of the beneficial effects of the inlet and outlet pipelines for the gasification device. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a structural schematic diagram of the connection between the gasification device provided in the prior art and the water supply equipment and the degumming equipment;

[0021] Figure 2 This is an example diagram of an inlet and outlet pipeline for a gasification device provided in Embodiment 1 of the utility model being installed on the gasification device;

[0022] The following are the descriptions of the reference numerals:

[0023] 10-gasification device, 101-water inlet, 102-water outlet, 103-air outlet, 11-water supply pipeline, 111-first water supply pipeline, 1111-first valve, 1112-first detector, 112-second water supply pipeline, 12-return water pipeline, 121-first return water pipeline, 1211-second valve, 1212-second detector, 122-second return water pipeline, 13-connecting pipeline, 131-first connecting end, 132-second connecting end, 133-third valve, 20-water supply equipment, 30-degumming equipment. DETAILED DESCRIPTION

[0024] The following is a further detailed description of the inlet and outlet pipelines for the gasification device and the gasification equipment with the same proposed by the utility model in combination with the drawings and specific embodiments. According to the following description, the advantages and features of the utility model will be clearer. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model. In order to make the purpose, features and advantages of the utility model more obvious and easy to understand, please refer to the drawings. It should be noted that the structure, proportion, size, etc. illustrated in the drawings of this specification are only used to match the content disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the utility model. Any modification of the structure, change of the proportional relationship or adjustment of the size, in the case of the same or similar effects and purposes that can be achieved by the utility model, should still fall within the scope of the technical content disclosed by the utility model. The specific design features of the utility model disclosed herein include, for example, specific dimensions, directions, positions and shapes, which will be determined in part by the specific environment to be applied and used. Furthermore, in the embodiments described below, the same reference numerals may be used in common among different drawings to indicate the same parts or parts having the same functions, and their repeated descriptions may be omitted.

[0025] In the description of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] Embodiment 1

[0027] This embodiment provides an inlet and outlet pipeline for a gasification device. Figure 2 , Figure 2 This is an example diagram of an inlet and outlet pipeline for a gasification device provided in this embodiment installed on the gasification device. Figure 2It can be seen that the inlet and outlet pipelines include a control system (not shown in the figure), a water supply pipeline 11 and a return pipeline 12; the water supply pipeline 11 is configured to be connected to the water inlet 101 of the gasification device 10; the return pipeline 12 is configured to be connected to the water outlet 102 of the gasification device 10; the water supply pipeline 11 is provided with a first valve 1111 and a first detector 1112, and the first valve 1111 is located between the water inlet 101 and the first detector 1112; the return pipeline 12 is provided with a second valve 1211 and a second detector 1212, and the second valve 1211 is located between the water outlet 102 and the second detector 1212; the first valve 1111, the second valve 1211, the first detector 1112 and the second detector 1212 are all connected to the control system; a connecting pipeline 13 is connected between the water supply pipeline 11 and the return pipeline 12, and the first connecting end 131 of the connecting pipeline 13 is connected to the supply pipeline 11 and the return pipeline 12. On the water pipeline 11, the second connecting end 132 of the connecting pipeline 13 is connected to the return pipeline 12, and the first connecting end 131 is located between the first valve 1111 and the first detector 1112, and the second connecting end 132 is located between the second valve 1211 and the second detector 1212; a third valve 133 is arranged on the connecting pipeline 13; when the first detector 1112 detects bubbles, the control system is configured to control the first valve 1111 and the second valve 1211 to be closed; after the control system controls the first valve 1111 and the second valve 1211 to be closed, the third valve 133 is configured to be in an open state; when the second detector 1212 does not detect bubbles within a preset time, the third valve 133 is configured to be in a closed state; the control system is configured to control the first valve 1111 and the second valve 1211 to be opened after the third valve 133 is closed.

[0028] Therefore, the inlet and outlet pipelines for the gasification device 10 provided in this embodiment can detect whether there are bubbles flowing through the water supply pipeline 11 by setting a first detector 1112 on the water supply pipeline 11; and can detect whether there are bubbles flowing through the return pipeline 12 by setting a second detector 1212 on the return pipeline 12. Furthermore, by setting a first valve 1111 on the water supply pipeline 11 and a second valve 1211 on the return pipeline 12, and the first valve 1111 is located between the water inlet 101 and the first detector 1112, and the second valve 1211 is located between the water outlet 102 and the second detector 1212, the first valve 1111 and the second valve 1211 can be closed to prevent bubbles from entering the gasification device 10 when the first detector 1112 detects bubbles flowing through, and the first valve 1111 and the second valve 1211 can be opened to restore the gasification device 10 after the second detector 1212 fails to detect bubbles within a preset time. 0; and by connecting the first valve 1111, the second valve 1211, the first detector 1112 and the second detector 1212 to the control system, the control system can control the first valve 1111 and the second valve 1211 to close when the first detector 1112 detects bubbles, thereby preventing bubbles from entering the gasification device 10 and further protecting the gasification device 10, and the control system can control the first valve 1111 and the second valve 1211 to open after the second detector 1212 fails to detect bubbles within a preset time, thereby laying a foundation for restoring the water supply to the gasification device 10. Furthermore, a connecting pipe 13 is provided to connect the water supply pipe 11 and the return pipe 12, and a third valve 133 is provided on the connecting pipe 13. When the first detector 1112 detects bubbles, the third valve 133 is opened after the control system controls the first valve 1111 and the second valve 1211 to be closed, so that the bubbles in the pipes can be discharged without dismantling the water supply pipe 11 and the return pipe 12; when the second detector 1212 fails to detect bubbles within a preset time, the water supply to the gasification device 10 can be restored by closing the third valve 133 and controlling the first valve 1111 and the second valve 1211 to be opened through the control system.

[0029] Exemplarily, the control system may be, but is not limited to, a PLC control system (Programmable Logic Controller), and a preset time (e.g., 1 hour) is set in the control system. The control system is connected to the first detector 1112, the second detector 1212, the first valve 1111, and the second valve 1211. When the first detector 1112 detects bubbles, the control system controls the first valve 1111 and the second valve 1211 to close to prevent bubbles from entering the gasification device 10; then, the bubbles in the water supply pipeline 11 can be discharged by opening the third valve 133. When the second detector 1212 does not detect bubbles within the preset time, the third valve 133 can be closed first, and then the first valve 1111 and the second valve 1211 can be opened by the control system to restore the water supply to the gasification device 10. In addition, when the second detector 1212 does not detect bubbles within the preset time and the third valve 133 is closed, in order to avoid damage to the gasification device 10 and the valve due to excessive water pressure, the control system can first control the first valve 1111 to open and then control the second valve 1211 to open.

[0030] It should be noted that the present invention does not impose too many limitations on the preset time. For example, in some other embodiments, the preset time may also be 30 minutes.

[0031] Preferably, the third valve 133 is connected to the control system, and when the first detector 1112 detects bubbles, the control system controls the first valve 1111 and the second valve 1211 to be closed, and controls the third valve 133 to be opened; when the second detector 1212 does not detect bubbles within a preset time, the control system controls the third valve 133 to be closed, and controls the first valve 1111 and the second valve 1211 to be opened. Thus, by connecting the third valve 133 to the control system, the process of discharging bubbles in the water supply pipeline 11 and restoring water supply to the gasification device 10 is more automated, thereby improving work efficiency.

[0032] It should be noted that, in another embodiment, when the second detector 1212 fails to detect bubbles within a preset time, the control system gives a valve reset prompt. At this time, the operator can first close the third valve 133, and then confirm the valve reset prompt, and control the first valve 1111 and the second valve 1211 to open through the control system to restore the water supply to the gasification device 10.

[0033] Preferably, the water supply pipeline 11 includes a first water supply pipeline 111 and a second water supply pipeline 112, one end of the first water supply pipeline 111 is connected to the water inlet 101, the other end of the first water supply pipeline 111 is connected to one end of the second water supply pipeline 112, the first valve 1111 and the first detector 1112 are both arranged on the first water supply pipeline 111, and the diameter of the second water supply pipeline 112 is larger than the diameter of the first water supply pipeline 111; the other end of the second water supply pipeline 112 is configured to connect to the water supply device 20 The return water pipeline 12 includes a first return water pipeline 121 and a second return water pipeline 122, one end of the first return water pipeline 121 is connected to the water outlet 102, and the other end of the first return water pipeline 121 is connected to one end of the second return water pipeline 122, the second valve 1211 and the second detector 1212 are both arranged on the first return water pipeline 121, and the diameter of the second return water pipeline 122 is larger than the diameter of the first return water pipeline 121; the other end of the second return water pipeline 122 is configured to be connected to the water supply equipment 20. Therefore, by dividing the water supply pipeline 11 into a first water supply pipeline 111 and a second water supply pipeline 112, wherein the first water supply pipeline 111 with a smaller diameter is connected to the water inlet 101 of the gasification device 10, and the second water supply pipeline 112 with a larger diameter is connected to the water supply equipment 20, and the first valve 1111 is arranged on the first water supply pipeline 111, it is possible to reduce damage to the first valve 1111 and the gasification device 10 when the water flow rate is large or the water pressure is high; by arranging the first detector 1112 on the first water supply pipeline 111 with a smaller diameter, it is possible to more accurately detect whether there are bubbles in the water supply pipeline 11. By dividing the return water pipeline 12 into a first return water pipeline 121 and a second return water pipeline 122, wherein the first return water pipeline 121 with a smaller diameter is connected to the water outlet 102 of the gasification device 10, and the second return water pipeline 122 with a larger diameter is connected to the water supply equipment 20, and the second valve 1211 is arranged on the first return water pipeline 121, it is possible to reduce damage to the second valve 1211 and the gasification device 10 when the water flow rate is large or the water pressure is high; by arranging the second detector 1212 on the first return water pipeline 121 with a smaller diameter, it is possible to more accurately detect whether there are bubbles in the return water pipeline 12.

[0034] Preferably, the first detector 1112 and the second detector 1212 both include photoelectric sensors. Thus, the photoelectric sensors are used to detect whether there are bubbles in the pipeline without contacting the detected object, and the photoelectric sensors will not be damaged.

[0035] Specifically, the first detector 1112 is installed on the outer wall of the first water supply pipeline 111 , and the second detector 1212 is installed on the outer wall of the first water return pipeline 121 .

[0036] Furthermore, the first valve 1111 and the second valve 1211 both include solenoid valves, thereby enabling the control system to more accurately control the opening and closing of the first valve 1111 and the second valve 1211 .

[0037] It should be noted that the present invention does not impose too many restrictions on the types of the first valve 1111 and the second valve 1211. For example, in some other embodiments, the first valve 1111 and the second valve 1211 may also be pneumatic valves.

[0038] Preferably, the third valve 133 comprises a manual valve, thereby making the operation simpler, and facilitating maintenance and reducing costs.

[0039] It should be noted that the present invention does not impose too many restrictions on the type of the third valve 133. For example, in some other embodiments, the third valve 133 can also be an electric valve, so that automatic control can be achieved by cooperating with a control system.

[0040] Furthermore, the water supply pipeline 11, the water return pipeline 12 and the connecting pipeline 13 are all made of polyphenylene ether, so that the water supply pipeline 11, the water return pipeline 12 and the connecting pipeline 13 have good heat resistance, pressure resistance, corrosion resistance, weldability and sealing performance.

[0041] Embodiment 2

[0042] This embodiment provides a gasification device, including a gasification device 10 and the inlet and outlet pipelines for the gasification device described in any of the above embodiments, wherein the water inlet 101 of the gasification device 10 is connected to one end of the water supply pipeline 11 of the inlet and outlet pipelines provided with the first valve 1111, and the water outlet 102 of the gasification device 10 is connected to one end of the return water pipeline 12 of the inlet and outlet pipelines provided with the second valve 1211. Since the gasification device provided in this embodiment includes the inlet and outlet pipelines for the gasification device described in any of the above embodiments, the gasification device provided in this embodiment has at least all the advantages of the inlet and outlet pipelines for the gasification device provided in any of the above embodiments, which will not be described in detail here, and for more details, please refer to the above description of the beneficial effects of the inlet and outlet pipelines for the gasification device.

[0043] In summary, the inlet and outlet pipelines for a gasification device and the gasification equipment having the same provided by the utility model have the following advantages: the inlet and outlet pipelines for a gasification device provided by the utility model, the inlet and outlet pipelines include a control system, a water supply pipeline and a return water pipeline; the water supply pipeline is configured to be connected to the water inlet of the gasification device; the return water pipeline is configured to be connected to the water outlet of the gasification device; a first valve and a first detector are provided on the water supply pipeline, and the first valve is located between the water inlet and the first detector; a second valve and a second detector are provided on the return water pipeline, and the second valve is located between the water outlet and the second detector; the first valve, the second valve, the first detector and the second detector are all connected to the control system; the water supply pipeline and the return water pipeline are connected with a connecting The first connecting end of the connecting pipeline is connected to the water supply pipeline, the second connecting end of the connecting pipeline is connected to the water return pipeline, and the first connecting end is located between the first valve and the first detector, and the second connecting end is located between the second valve and the second detector; a third valve is arranged on the connecting pipeline; when the first detector detects bubbles, the control system is configured to control the first valve and the second valve to be closed; after the control system controls the first valve and the second valve to be closed, the third valve is configured to be in an open state; after the second detector fails to detect bubbles within a preset time, the third valve is configured to be in a closed state; the control system is configured to control the first valve and the second valve to be opened after the third valve is closed. Therefore, the inlet and outlet pipelines for the gasification device provided by the utility model can detect whether there are bubbles flowing through the water supply pipeline by arranging the first detector on the water supply pipeline; and can detect whether there are bubbles flowing through the water return pipeline by arranging the second detector on the water return pipeline. Furthermore, by arranging a first valve on the water supply pipeline and a second valve on the return pipeline, and the first valve is located between the water inlet and the first detector, and the second valve is located between the water outlet and the second detector, a foundation is laid for closing the first valve and the second valve when the first detector detects bubbles flowing through to prevent bubbles from entering the gasification device, and for opening the first valve and the second valve after the second detector fails to detect bubbles within a preset time to restore the water supply to the gasification device; and by connecting the first valve, the second valve, the first detector and the second detector to the control system, the control system can control the first valve and the second valve to close when the first detector detects bubbles, thereby preventing bubbles from entering the gasification device and protecting the gasification device, and the control system can control the first valve and the second valve to open after the second detector fails to detect bubbles within a preset time, thereby laying a foundation for restoring the water supply to the gasification device.Furthermore, a connecting pipeline is provided to connect the water supply pipeline and the return pipeline, and a third valve is provided on the connecting pipeline. When the first detector detects bubbles, the third valve is opened after the control system controls the first valve and the second valve to be closed, so that the bubbles in the pipeline can be discharged without dismantling the water supply pipeline and the return pipeline; when the second detector fails to detect bubbles within a preset time, the water supply to the gasification device can be restored by closing the third valve and controlling the first valve and the second valve to be opened through the control system.

[0044] Furthermore, the third valve is connected to the control system, and when the first detector detects bubbles, the control system controls the first valve and the second valve to be closed, and controls the third valve to be opened; when the second detector fails to detect bubbles within a preset time, the control system controls the third valve to be closed, and controls the first valve and the second valve to be opened. Therefore, the inlet and outlet pipelines for the gasification device provided by the utility model connect the third valve to the control system, so that the process of discharging bubbles in the water supply pipeline and restoring water supply to the gasification device is more automated, thereby improving work efficiency.

[0045] Since the gasification equipment provided by the utility model includes the inlet and outlet pipelines for the gasification device as described in any of the above items, the gasification equipment provided by the utility model at least has all the advantages of the inlet and outlet pipelines for the gasification device provided by the utility model, which will not be elaborated here. For more details, please refer to the above description of the beneficial effects of the inlet and outlet pipelines for the gasification device.

[0046] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model rather than to limit it. Although the utility model has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solution of the utility model can be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the utility model.

Claims

1. An inlet and outlet pipeline for a gasification device, characterized in that: The inlet and outlet pipelines include a control system, a water supply pipeline and a water return pipeline; the water supply pipeline is configured to be connected to the water inlet of the gasification device; the water return pipeline is configured to be connected to the water outlet of the gasification device; The water supply pipeline is provided with a first valve and a first detector, wherein the first valve is located between the water inlet and the first detector; The return water pipeline is provided with a second valve and a second detector, and the second valve is located between the water outlet and the second detector; The first valve, the second valve, the first detector and the second detector are all connected to the control system; A connecting pipe is connected between the water supply pipe and the water return pipe, a first connecting end of the connecting pipe is connected to the water supply pipe, a second connecting end of the connecting pipe is connected to the water return pipe, and the first connecting end is located between the first valve and the first detector, and the second connecting end is located between the second valve and the second detector; a third valve is provided on the connecting pipe; When the first detector detects bubbles, the control system is configured to control the first valve and the second valve to be closed; after the control system controls the first valve and the second valve to be closed, the third valve is configured to be in an open state; When the second detector does not detect bubbles within a preset time, the third valve is configured to be in a closed state; and the control system is configured to control the first valve and the second valve to be opened after the third valve is closed.

2. The inlet and outlet pipeline for a gasification device according to claim 1, characterized in that: The third valve is connected to the control system. When the first detector detects bubbles, the control system controls the first valve and the second valve to be closed, and controls the third valve to be opened. When the second detector fails to detect bubbles within a preset time, the control system controls the third valve to be closed, and controls the first valve and the second valve to be opened.

3. The inlet and outlet pipeline for a gasification device according to claim 1, characterized in that: When the second detector does not detect bubbles within a preset time, the control system gives a valve reset prompt, and after confirming the valve reset prompt, the control system controls both the first valve and the second valve to open.

4. The inlet and outlet pipeline for a gasification device according to claim 1, characterized in that: The water supply pipeline includes a first water supply pipeline and a second water supply pipeline, one end of the first water supply pipeline is connected to the water inlet, the other end of the first water supply pipeline is connected to one end of the second water supply pipeline, the first valve and the first detector are both arranged on the first water supply pipeline, and the diameter of the second water supply pipeline is larger than the diameter of the first water supply pipeline; the other end of the second water supply pipeline is configured to be connected to a water supply device; The return water pipeline includes a first return water pipeline and a second return water pipeline, one end of the first return water pipeline is connected to the water outlet, and the other end of the first return water pipeline is connected to one end of the second return water pipeline, the second valve and the second detector are both arranged on the first return water pipeline, and the diameter of the second return water pipeline is larger than the diameter of the first return water pipeline; the other end of the second return water pipeline is configured to be connected to the water supply equipment.

5. The inlet and outlet pipeline for a gasification device according to claim 1, characterized in that: The first detector and the second detector each include a photoelectric sensor.

6. The inlet and outlet pipeline for a gasification device according to claim 1, characterized in that: The first valve and the second valve each include a solenoid valve.

7. The inlet and outlet pipeline for a gasification device according to claim 1, characterized in that: The third valve includes a manual valve.

8. The inlet and outlet pipeline for a gasification device according to claim 1, characterized in that: The third valve includes an electric valve.

9. The inlet and outlet pipeline for a gasification device according to claim 1, characterized in that: The water supply pipeline, the water return pipeline and the connecting pipeline are all made of polyphenylene ether.

10. A gasification device, characterized in that: It comprises a gasification device and an inlet and outlet pipeline for the gasification device as described in any one of claims 1 to 9, wherein a water inlet of the gasification device is connected to a water supply pipeline of the inlet and outlet pipelines and is provided with one end of the first valve, and a water outlet of the gasification device is connected to a return water pipeline of the inlet and outlet pipelines and is provided with one end of the second valve.

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