Connection assembly and semiconductor manufacturing equipment

Abstract

The utility model provides a connecting assembly and semiconductor manufacturing equipment. The connecting assembly comprises a conveying pipe, a conveying interface, a liquid storage device and a monitoring device, the conveying interface is arranged on the side wall of the equipment body and penetrates through the inner wall of the equipment body; the liquid storage device is arranged at the connecting part of the conveying pipe and the conveying interface; the monitoring device is arranged inside and / or outside the liquid storage device and used for monitoring whether liquid exists inside and / or outside the liquid storage device or not and sending state information to the liquid supply device when the liquid exists, and the liquid supply device stops liquid supply after receiving the state information. According to the configuration, the liquid storage device and the monitoring device are additionally arranged, so that when liquid leakage occurs at the connecting part of the conveying pipe and the conveying connector, liquid overflow can be avoided; and the liquid supply device stops liquid supply after receiving the state information sent to the liquid supply device by the monitoring device, liquid leakage is detected in time, supply is cut off, waste of resources is reduced, and the safety performance of the semiconductor equipment is improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor production, in particular to a connection component and semiconductor manufacturing equipment. Background Art

[0002] There is a risk of leakage at the UPW (Ultimate Pure Water) outlet of the water heater, an auxiliary equipment of the wet process equipment. If the leakage cannot be detected and the UPW supply is cut off in the first time, a large amount of UPW may leak, posing a safety hazard. Utility Model Content

[0003] The utility model aims to provide a connection assembly and semiconductor manufacturing equipment to solve the problem that leakage cannot be detected in time and supply cannot be cut off in the process of conveying liquid in the existing conveying pipeline.

[0004] In order to achieve the above-mentioned object, the utility model provides a connection assembly, including: a delivery pipe, a delivery interface, a liquid storage device and a monitoring device;

[0005] One end of the delivery pipe is connected to the delivery interface, and the other end is connected to the liquid supply device, and the delivery pipe is used for liquid circulation; the delivery interface is arranged on the side wall of the equipment body and penetrates the inner wall of the equipment body, and is used for the liquid flowing through the delivery pipe to flow into the interior of the equipment body;

[0006] The liquid storage device is arranged at the connection part between the delivery pipe and the delivery interface, and is used to temporarily store the leaked liquid when leakage occurs at the connection part;

[0007] The monitoring device is arranged inside the liquid storage device and / or outside the liquid storage device, and is communicatively connected with the liquid supply device. The monitoring device is used to monitor whether there is liquid inside the liquid storage device and / or outside the liquid storage device, and when liquid is present, sends status information to the liquid supply device. The liquid supply device stops supplying liquid after receiving the status information.

[0008] Optionally, the liquid storage device includes a blocking member and a liquid storage chamber;

[0009] The blocking member is coated on the outside of the connection portion between the delivery tube and the delivery interface, and is used to prevent the leaked liquid from overflowing and guide the leaked liquid into the liquid storage cavity;

[0010] The liquid storage cavity is arranged to protrude from the side wall of the device body. The liquid storage cavity is closer to the bottom of the device body than the blocking member and is used for temporarily storing leaked liquid.

[0011] Optionally, the bottom of the blocking member has a drainage groove, which is arranged along the axial direction of the blocking member and is used to guide the blocked leaking liquid into the liquid storage chamber.

[0012] Optionally, the drainage groove is in the shape of an elongated strip and is disposed at the center of the bottom surface of the blocking member.

[0013] Optionally, a retaining wall is provided on the outer edge of the liquid storage cavity, and the retaining wall is used to prevent the leaked liquid flowing into the liquid storage cavity from overflowing.

[0014] Optionally, the length of the enclosure wall in the axial direction of the blocking member is matched with the length of the drainage groove in the axial direction of the blocking member.

[0015] Optionally, the monitoring device includes a first sensor, which is arranged inside the liquid storage cavity and is used to monitor whether there is liquid in the liquid storage cavity, and when liquid is present, feed back internal state information of the liquid storage cavity to the liquid supply device.

[0016] Optionally, the monitoring device includes a second sensor, which is arranged outside the liquid storage chamber and located in the extension direction of the delivery tube. The second sensor is used to monitor whether there is liquid outside the liquid storage chamber, and when liquid exists, feedback the external state information of the liquid storage chamber to the liquid supply device.

[0017] Optionally, the connection component further comprises an alarm device, and the alarm device sends an alarm signal when the monitoring device sends the status information to the liquid supply device.

[0018] In order to achieve the above object, the utility model also provides a semiconductor manufacturing equipment, including: an equipment body, a liquid supply device and the connection assembly as described above;

[0019] The equipment body is connected with the liquid supply device through the delivery pipe.

[0020] Compared with the existing connection devices, the connection assembly provided by the present application has the following advantages:

[0021] (1) By adding a liquid storage device and a monitoring device, when liquid leakage occurs at the connection between the delivery pipe and the delivery interface, liquid overflow can be avoided; and the monitoring device sends status information to the liquid supply device, and the liquid supply device stops supplying liquid after receiving the status information, so that liquid leakage is detected in time and the supply is cut off, thereby reducing resource waste and improving the safety performance of semiconductor manufacturing equipment;

[0022] (2) Since the liquid flowing in the delivery pipe is usually under high pressure, when leakage occurs, the leaked liquid will be quickly ejected outward. By covering the connection part of the delivery pipe and the delivery interface with a blocking member, the leaked liquid can be effectively prevented from overflowing, thereby further reducing the waste of resources;

[0023] (3) The liquid storage chamber is coaxially arranged with the blocking member, and the liquid storage chamber is closer to the bottom of the device body than the blocking member. A drainage groove is arranged at the bottom of the blocking member, and a surrounding wall is arranged at the outer edge of the liquid storage chamber. The length of the surrounding wall in the axial direction of the blocking member is matched with the length of the drainage groove in the axial direction of the blocking member, thereby increasing the size of the liquid storage chamber and ensuring that the leaked liquid flowing out of the drainage groove can flow into the liquid storage chamber, thereby further avoiding the overflow of the leaked liquid;

[0024] (4) A second sensor is added to the outside of the liquid storage chamber and is located in the extension direction of the delivery tube. Even if there is a problem with the delivery tube itself and leakage occurs, the second sensor can monitor the liquid in time, send status information to the liquid supply device, and cut off the supply in time. This improves the monitoring accuracy of the monitoring device and further improves the practicality of the connection component. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 A structural front view of a connection assembly provided by an embodiment of the utility model;

[0026] Figure 2 A structural side view of a connection assembly provided by an embodiment of the utility model;

[0027] Figure 3 A schematic diagram of the structure of a blocking member provided in an embodiment of the utility model;

[0028] Figure 4 A schematic diagram of the structure of the liquid storage chamber provided in an embodiment of the utility model;

[0029] Figure 5 A top view of the structure of the liquid storage chamber provided in an embodiment of the utility model;

[0030] Figure 6 A structural side view of the liquid storage chamber provided in an embodiment of the utility model;

[0031] The description of each reference numeral is as follows:

[0032] 1-transport pipe; 2-transport interface;

[0033] 3-liquid storage device; 31-blocking member; 32-liquid storage chamber; 311-liquid drain groove; 312-connecting hole; 321-enclosing wall;

[0034] 4- monitoring device; 41- second sensor;

[0035] 5- Equipment body;

[0036] X-axis direction of the blocking member. DETAILED DESCRIPTION

[0037] In order to make the purpose, advantages and features of the utility model clearer, the utility model is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis of each drawing is different, and sometimes different scales are used.

[0038] As used in this specification, the singular forms "a", "an" and "the" include plural objects, the term "or" is generally used to include the meaning of "and / or", the term "several" is generally used to include the meaning of "at least one", and the term "at least two" is generally used to include the meaning of "two or more". In addition, the terms "first", "second" and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second" and "third" may explicitly or implicitly include one or at least two of the features, "one end" and "the other end" and "the proximal end" and "the distal end" generally refer to two corresponding parts, which include not only the endpoints, and the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral body; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. In addition, as used in this specification, an element disposed on another element generally only indicates that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the connection, coupling, cooperation or transmission between the two elements may be direct or indirect through an intermediate element, and it cannot be understood as indicating or implying the spatial position relationship between the two elements, that is, one element may be in any orientation such as inside, outside, above, below or on one side of another element, unless the content clearly indicates otherwise. The terms "upper", "lower", "top" and "bottom" are generally relative position relationships arranged in the direction of gravity; the terms "vertical, vertical direction" generally refer to the direction of gravity, which is generally perpendicular to the ground, and "horizontal, horizontal plane direction" generally refers to the direction parallel to the ground; for ordinary technicians in this field, the specific meanings of the above terms in this specification can be understood according to specific circumstances.

[0039] The utility model aims to provide a connection assembly and semiconductor manufacturing equipment to solve the problem that leakage cannot be detected in time and supply cannot be cut off in the process of conveying liquid in the existing conveying pipeline.

[0040] The following description is given with reference to the accompanying drawings.

[0041] Those skilled in the art can understand that in this embodiment, the semiconductor production equipment can be a wet etching equipment, and the liquid circulating in the delivery pipe is UPW (Ultimate Pure Water). In an optional embodiment, the temperature of UPW can be 60°C, and the flow rate of UPW can be 30L / min. Therefore, the pressure of UPW in the delivery pipe is relatively large. Once the connection between the delivery pipe and the delivery interface leaks, UPW will be ejected from the leak, causing waste of resources and affecting the safety performance of the semiconductor production process. Based on this, this embodiment provides a connection component provided with a liquid storage device and a monitoring device. When the connection between the delivery pipe and the delivery interface leaks, the liquid storage device can be used to collect the leaked UPW to reduce the waste of resources; at the same time, the monitoring device collects the status information in time and sends it to the liquid supply device, and the liquid supply device technically cuts off the supply to avoid further deterioration of the leakage. This application only takes the wet etching equipment as an example. In some other embodiments, the connection component provided in this application can also be used in other scenarios where liquid leakage may occur. Those skilled in the art can configure this according to the actual situation, and this application is not limited to this.

[0042] Please refer to Figure 1 to Figure 2The utility model provides a connection component, including: a delivery pipe 1, a delivery interface 2, a liquid storage device 3 and a monitoring device 4; one end of the delivery pipe 1 is connected to the delivery interface 2, and the other end is connected to the liquid supply device (not shown in the figure), and the delivery pipe 1 is used for supplying liquid; the delivery interface 2 is arranged on the side wall of the equipment body 5 and penetrates the inner wall of the equipment body 5, and is used for supplying the liquid flowing through the delivery pipe 1 to the inside of the equipment body 5; the liquid storage device 3 is arranged at the connection part of the delivery pipe 1 and the delivery interface 2, and is used for temporarily storing the leaked liquid when leakage occurs at the connection part; the monitoring device 4 is arranged inside the liquid storage device 3 and / or outside the liquid storage device 3, and is connected to the liquid supply device for communication, and the monitoring device 4 is used to monitor whether there is liquid inside the liquid storage device 3 and / or outside the liquid storage device 3, and when there is liquid, send status information to the liquid supply device, and the liquid supply device stops supplying liquid after receiving the status information. It should be noted that the liquid supply device can be a device such as a water pump or a pneumatic valve that can drive the flow of liquid, which can be equipped with a chip or connected to a mobile terminal for communication, and is configured to stop supplying liquid after receiving status information from the monitoring device 4; stopping supplying liquid can be achieved by cutting off the power supply of the water pump or closing the valve. The configuration and working principle of the liquid supply device can be referred to the prior art, and will not be described in detail in this embodiment.

[0043] With such a configuration, by adding a liquid storage device 3 and a monitoring device 4, liquid overflow can be avoided when liquid leakage occurs at the connection between the delivery pipe 1 and the delivery interface 2; and status information is sent to the liquid supply device through the monitoring device 4, and the liquid supply device stops supplying liquid after receiving the status information, so that liquid leakage is detected in time and the supply is cut off, thereby reducing waste of resources and improving the safety performance of semiconductor manufacturing equipment.

[0044] As an alternative embodiment, please refer to Figures 1 to 4 The liquid storage device 3 includes a blocking member 3 and a liquid storage chamber 32; the blocking member 3 is coated on the outside of the connection between the delivery pipe 1 and the delivery interface 2, and is used to prevent the leaked liquid from overflowing and guide the leaked liquid into the liquid storage chamber 32; the liquid storage chamber 32 is protruding from the side wall of the device body 5, and the liquid storage chamber 32 is closer to the bottom of the device body 5 than the blocking member 3, and is used to temporarily store the leaked liquid. It should be noted that in 1 to Figure 4In the illustrated example, the blocking member 3 is a transparent plastic member, which is a rectangular member; the liquid storage chamber 32 is a metal member or a plastic member, which is also a rectangular member; when leakage occurs at the connection between the delivery tube 1 and the delivery interface 2, the ejected liquid is blocked by the blocking member 3, stays inside the blocking member 3, and is finally introduced into the liquid storage chamber 32, and the operator can clean the liquid in the liquid storage chamber 32 after leakage occurs. Of course, in other embodiments, the blocking member 3 can also be a cylindrical member, a prismatic member, a pyramidal member, or other irregularly shaped members, and those skilled in the art can configure the shape of the blocking member 3 according to actual conditions.

[0045] For further information, please refer to Figure 3 , the bottom of the blocking member 3 has a drainage groove 311, and the drainage groove 311 is arranged along the axial direction X of the blocking member, and is used to guide the blocked leaked liquid into the liquid storage chamber 32. In an alternative embodiment, the drainage groove 311 can be a through hole or a trough-shaped component, but considering that the flow rate and pressure of UPW are both large, the size of the drainage groove 311 should be increased to guide the leaked liquid into the liquid storage chamber 32 in time, so as to avoid the leaked liquid from accumulating in the blocking member 3 and being unable to be discharged in time, thereby further reducing the waste of resources. Therefore, in this embodiment, the drainage groove 311 is in the shape of a long strip and is arranged at the center of the bottom surface of the blocking member 3; at the same time, a connecting hole 312 is also arranged on the side wall of the blocking member 3 for the delivery pipe 1 to pass through, so as to achieve the covering of the connection part between the delivery pipe 1 and the delivery interface 2 by the blocking member 3. It should be noted that the drainage groove 311 can be a rectangle or a rounded rectangle, and its center line can be coaxial with the center of the bottom surface of the blocking member 3, or it can be offset from the center of the bottom surface of the blocking member 3. Those skilled in the art can configure the shape and size of the drainage groove 311 according to actual conditions, and this embodiment is not limited to this.

[0046] As an alternative embodiment, please refer to Figures 4 to 6The outer edge of the liquid storage cavity 32 is provided with a retaining wall 321, which is used to prevent the leaked liquid flowing into the liquid storage cavity 32 from overflowing. Furthermore, the length of the retaining wall 321 in the axial direction X of the blocking member is matched with the length of the drainage groove 311 in the axial direction X of the blocking member. In this configuration, the length of the retaining wall 321 in the axial direction X of the blocking member is matched with the length of the drainage groove 311 in the axial direction X of the blocking member, which increases the size of the liquid storage cavity 32 and ensures that the leaked liquid flowing out of the drainage groove 311 can flow into the liquid storage cavity 32, thereby further avoiding the overflow of the leaked liquid. In an optional embodiment, the blocking member 3 and the liquid storage chamber 32 are both rectangular components, and the length of the enclosing wall 321 in the axial direction X of the blocking member (i.e., the length direction, arranged parallel to the axis A) is adapted to the length of the drainage groove 311. Accordingly, the enclosing wall 321 is also arranged in a direction perpendicular to the axial direction X of the blocking member (i.e., the width direction, arranged parallel to the axis B), and the length of the enclosing wall 321 in the direction perpendicular to the axial direction X of the blocking member is adapted to the width of the blocking member 3; in other embodiments, the blocking member 3 and the liquid storage chamber 32 may also be components of other shapes, but it should be noted that the cross-sectional area of ​​the liquid storage chamber 32 should be greater than or equal to the cross-sectional area of ​​the blocking member 3 to ensure that the leaked liquid will not overflow to the outside of the liquid storage chamber 32, thereby improving the cleaning efficiency of the operator.

[0047] In an optional embodiment, the monitoring device 4 includes a first sensor (not shown in the figure), which is arranged inside the liquid storage chamber 32, and is used to monitor whether there is liquid in the liquid storage chamber 32, and when there is liquid, it feeds back the internal state information of the liquid storage chamber 32 to the liquid supply device. It should be noted that the first sensor can be a leakage sensor, which can use the conductive property of liquid and use electrodes to monitor whether there is liquid. The specific structure and use principle of the leakage sensor can refer to the prior art, and this application will not repeat them. In this embodiment, the first sensor is connected to the liquid supply device for communication. When the first sensor detects the presence of liquid in the liquid storage chamber 32, it feeds back the internal state information of the leaking liquid to the liquid supply device. After receiving the state information, the liquid supply device will cut off the supply in time to avoid further deterioration of the leakage situation.

[0048] In another optional embodiment, please refer to Figure 1 to Figure 2The monitoring device 4 includes a second sensor 41, which is arranged outside the liquid storage chamber 32 and is located in the extension direction of the delivery tube 1. The second sensor 41 is used to monitor whether there is liquid outside the liquid storage chamber 32, and when there is liquid, the second sensor 41 feeds back the external state information of the liquid storage chamber 32 to the liquid supply device. It should be noted that the second sensor 41 and the first sensor can be leakage sensors of the same model, and the second sensor 41 is also connected to the liquid supply device for communication. When the second sensor 41 detects that there is liquid outside the liquid storage chamber 32, it feeds back the external state information of the leaking liquid to the liquid supply device. After receiving the state information, the liquid supply device will cut off the supply in time to avoid further deterioration of the leakage. With such a configuration, even if there is a problem with the delivery tube 1 itself and leakage occurs, the second sensor 41 can monitor the liquid in time, send the state information to the liquid supply device, and cut off the supply in time, which improves the monitoring accuracy of the monitoring device 4 and further improves the practicality of the connection component.

[0049] As a preferred embodiment, the connection component also includes an alarm device (not shown in the figure), which sends an alarm signal when the monitoring device 4 sends status information to the liquid supply device. It should be noted that the alarm device can be a buzzer or an APP built into the mobile terminal, and the alarm signal can be one or more of an acoustic signal, a light signal, and a pop-up window reminder. With such a configuration, the alarm device can promptly notify the operator to arrive at the scene when the monitoring device 4 finds that there is leakage of liquid, so as to facilitate the subsequent analysis and treatment of the leakage situation and the cause of the leakage.

[0050] In another embodiment, the utility model further provides a semiconductor manufacturing equipment, including: an equipment body 5, a liquid supply device (not shown in the figure) and the connection assembly as described above; the equipment body 5 is connected to the liquid supply device through a delivery pipe 1. It should be noted that in this embodiment, the semiconductor manufacturing equipment can be a wet etching equipment, and the equipment body 5 can be a water heater of an auxiliary equipment of the wet etching equipment. In other embodiments, the semiconductor manufacturing equipment and the equipment body 5 can also be some other equipment. As long as there is a risk of liquid leakage, the connection assembly and semiconductor manufacturing equipment proposed in this application can be used, and those skilled in the art can configure them according to actual conditions.

[0051] In summary, in the connection component and semiconductor manufacturing equipment provided by the embodiments of the utility model, the connection component includes: a delivery pipe, a delivery interface, a liquid storage device and a monitoring device; one end of the delivery pipe is connected to the delivery interface, and the other end is connected to the liquid supply device, and the delivery pipe is used to supply liquid circulation; the delivery interface is arranged on the side wall of the equipment body and passes through the inner wall of the equipment body, and is used to supply the liquid flowing through the delivery pipe to the interior of the equipment body; the liquid storage device is arranged at the connection part of the delivery pipe and the delivery interface, and is used to temporarily store the leaked liquid when leakage occurs at the connection part; the monitoring device is arranged inside the liquid storage device and / or outside the liquid storage device, and is communicatively connected with the liquid supply device, the monitoring device is used to monitor whether there is liquid inside the liquid storage device and / or outside the liquid storage device, and when there is liquid, sends status information to the liquid supply device, and the liquid supply device stops supplying liquid after receiving the status information.

[0052] With such configuration, by adding a liquid storage device and a monitoring device, when liquid leakage occurs at the connection part between the delivery pipe and the delivery interface, liquid overflow can be avoided; and the monitoring device sends status information to the liquid supply device, and the liquid supply device stops supplying liquid after receiving the status information, so that liquid leakage is detected in time and the supply is cut off, thereby reducing the waste of resources and improving the safety performance of semiconductor manufacturing equipment;

[0053] Furthermore, since the liquid flowing in the delivery pipe is usually under high pressure, when leakage occurs, the leaked liquid will be quickly ejected outwards. By covering the connection part of the delivery pipe and the delivery interface with a blocking member, the leaked liquid can be effectively prevented from overflowing, thereby further reducing the waste of resources.

[0054] Furthermore, the liquid storage chamber is coaxially arranged with the blocking member, and the liquid storage chamber is closer to the bottom of the device body than the blocking member, a drainage groove is arranged at the bottom of the blocking member, and a surrounding wall is arranged at the outer edge of the liquid storage chamber, and the length of the surrounding wall in the axial direction of the blocking member is adapted to the length of the drainage groove in the axial direction of the blocking member, thereby increasing the size of the liquid storage chamber and ensuring that the leaked liquid flowing out of the drainage groove can flow into the liquid storage chamber, thereby further avoiding the overflow of the leaked liquid;

[0055] Furthermore, a second sensor is added to the outside of the liquid storage chamber and is located in the extension direction of the delivery tube. Even if there is a problem with the delivery tube itself and leakage occurs, the second sensor can monitor the liquid in time, send status information to the liquid supply device, and cut off the supply in time, which improves the monitoring accuracy of the monitoring device and further improves the practicality of the connecting component.

[0056] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation on the scope of the utility model. Any changes and modifications made by ordinary technicians in the field of the utility model based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A connection assembly, characterized in that: include: Delivery pipe, delivery interface, liquid storage device and monitoring device; One end of the delivery pipe is connected to the delivery interface, and the other end is connected to the liquid supply device, and the delivery pipe is used for liquid circulation; the delivery interface is arranged on the side wall of the equipment body and penetrates the inner wall of the equipment body, and is used for the liquid flowing through the delivery pipe to flow into the interior of the equipment body; The liquid storage device is arranged at the connection part between the delivery pipe and the delivery interface, and is used to temporarily store the leaked liquid when leakage occurs at the connection part; The monitoring device is arranged inside the liquid storage device and / or outside the liquid storage device, and is communicatively connected with the liquid supply device. The monitoring device is used to monitor whether there is liquid inside the liquid storage device and / or outside the liquid storage device, and when liquid is present, sends status information to the liquid supply device. The liquid supply device stops supplying liquid after receiving the status information.

2. The connection assembly according to claim 1, characterized in that The liquid storage device comprises a blocking member and a liquid storage chamber; The blocking member is coated on the outside of the connection portion between the delivery tube and the delivery interface, and is used to prevent the leaked liquid from overflowing and guide the leaked liquid into the liquid storage cavity; The liquid storage cavity is arranged to protrude from the side wall of the device body. The liquid storage cavity is closer to the bottom of the device body than the blocking member and is used for temporarily storing leaked liquid.

3. The connection assembly according to claim 2, characterized in that The bottom of the blocking member is provided with a drainage groove, which is arranged along the axial direction of the blocking member and is used for guiding the blocked leaking liquid into the liquid storage chamber.

4. The connection assembly according to claim 3, characterized in that The drainage groove is in the shape of an elongated strip and is arranged at the center of the bottom surface of the blocking member.

5. The connection assembly according to claim 3, characterized in that: The outer edge of the liquid storage cavity is provided with a retaining wall, and the retaining wall is used to prevent the leaked liquid flowing into the liquid storage cavity from overflowing.

6. The connection assembly according to claim 5, characterized in that The length of the enclosure wall in the axial direction of the blocking member is matched with the length of the drainage groove in the axial direction of the blocking member.

7. The connection assembly according to claim 2, characterized in that: The monitoring device includes a first sensor, which is arranged inside the liquid storage cavity and is used to monitor whether there is liquid in the liquid storage cavity, and when liquid is present, feed back the internal state information of the liquid storage cavity to the liquid supply device.

8. The connection assembly according to claim 2, characterized in that: The monitoring device includes a second sensor, which is arranged outside the liquid storage chamber and located in the extension direction of the delivery tube. The second sensor is used to monitor whether there is liquid outside the liquid storage chamber, and when liquid exists, the second sensor feeds back the external state information of the liquid storage chamber to the liquid supply device.

9. The connection assembly according to claim 7 or 8, characterized in that: The connection assembly further comprises an alarm device, which sends an alarm signal when the monitoring device sends the status information to the liquid supply device.

10. A semiconductor manufacturing equipment, characterized in that: include: An equipment body, a liquid supply device and a connecting assembly as claimed in any one of claims 1 to 9; The equipment body is connected to the liquid supply device through the delivery pipe.

Images