Transmission window and reflection type X-ray tube
By covering the graphene film layer on the surface of the beryllium window sheet, the problems of poor airtightness and high manufacturing cost when the beryllium window thickness is reduced are solved, and higher airtightness, mechanical strength and lower production costs are achieved.
Patent Information
- Application Number
- CN202420799726.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-17
- Publication Date
- 2025-02-07
- Estimated Expiration
- 2034-04-17
AI Technical Summary
In the prior art, there are problems such as poor airtightness and high manufacturing cost when the thickness of beryllium window is reduced.
The surface of the beryllium window sheet is covered with the graphene film layer, and the high thermal conductivity, high strength, high airtightness and good radiation transmission are used, combined with the low cost characteristics of the beryllium window sheet, the airtightness of the transmission window is improved by leveraging the high airtightness of the transmission window. and mechanical strength while reducing manufacturing costs.
It effectively reduces the probability of air leakage of the transmission window when the beryllium window sheet is thin, improves the air tightness and mechanical strength of the transmission window, reduces manufacturing costs, and improves the safety of production.
Smart Images
Figure CN222440519U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of X-rays, and in particular relates to a transmission window and a reflective X-ray tube. Background Art
[0002] The X-ray tube is mainly composed of a cathode that emits electrons, an anode target that is bombarded by electrons to produce X-rays, a shell that provides a vacuum environment, and a transmission window with high X-ray transmittance. The function of the transmission window is to use its high X-ray transmittance to achieve X-ray transmission and maintain the vacuum environment inside the shell.
[0003] In the prior art, beryllium is usually used as a window material for X-ray transmission because beryllium has a small atomic number, low density, high melting point and extremely high transmittance to X-rays.
[0004] However, the preparation of beryllium windows currently requires the use of high-performance beryllium sheet processing technology that can achieve high purity, uniform density, and good air tightness. In the actual production process, the air tightness of beryllium window assemblies is poor when the thickness is thin, and the probability of air leakage during welding is high, which makes the manufacturing cost of X-ray tubes high. In the application field of X-ray transmission windows, the thinner the beryllium window assembly, the better, but the air tightness and manufacturing cost problems caused by the thinning of the thickness limit the thickness of the beryllium window assembly to continue to be thinner.
[0005] Therefore, there is an urgent need for a transmission window that can improve the airtightness of a thinner beryllium window and reduce the manufacturing cost.
[0006] It should be noted that the above introduction to the technical background is only for the convenience of providing a clear and complete description of the technical solutions of the present application and for the convenience of understanding by those skilled in the art. It cannot be considered that the above technical solutions are well known to those skilled in the art simply because these solutions are described in the background technology part of the present application. Utility Model Content
[0007] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a transmission window and a reflective X-ray tube, which are used to solve the problems of poor airtightness and high manufacturing cost when the thickness of the beryllium window is reduced in the prior art.
[0008] In order to achieve the above purpose and other related purposes, the utility model provides the following technical solutions:
[0009] In a first aspect, the utility model provides a transmission window, comprising: a beryllium window sheet and a graphene film layer, wherein the beryllium window sheet is a thin sheet comprising a relative upper surface and a lower surface, and the graphene film layer covers the upper surface and the lower surface of the beryllium window sheet.
[0010] Optionally, the graphene film layer also covers and wraps around the side surfaces of the beryllium window sheet.
[0011] Optionally, the beryllium window has a thickness of 0.05 mm to 0.35 mm.
[0012] Optionally, the thickness of the graphene film layer is 0.03 micrometers to 1 micrometer.
[0013] Optionally, a preset position on the surface of the graphene film layer is a welding position, and the surface of the welding position is covered with an adhesive layer.
[0014] Optionally, the material of the adhesion layer is titanium alloy.
[0015] Optionally, a metallization layer is provided on the surface of the adhesive layer.
[0016] Optionally, the material of the metallization layer is nickel.
[0017] Optionally, a preset component is airtightly welded onto the metallization layer.
[0018] In a second aspect, the utility model provides a reflective X-ray tube, comprising any one of the transmission windows described above, the reflective X-ray tube also comprising a ray generating structure and a shell, the ray generating structure is located in the shell, and the transmission window is airtightly welded to the shell.
[0019] As described above, the transmission window and reflective X-ray tube of the present invention have the following beneficial effects:
[0020] The utility model covers a graphene film layer on the surface of the beryllium window sheet, utilizes the high thermal conductivity, high strength, high air tightness, good radiation transmittance of graphene and the low manufacturing cost of the beryllium window sheet, reduces the probability of air leakage of the transmission window when the beryllium window sheet is thin, improves the product yield of the transmission window sealing, reduces the manufacturing cost of the transmission window, and also improves the mechanical strength, heat dissipation characteristics and working reliability of the transmission window;
[0021] The utility model also achieves harmless treatment of the beryllium window piece by covering the surface of the beryllium window piece with a graphene film layer, eliminates the potential risk of human poisoning caused by leakage of highly toxic beryllium oxide on the surface of the beryllium window, and improves production safety. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] Figure 1 Shown is a schematic structural diagram of the transmission window of the present utility model.
[0023] Figure 2 It is a schematic diagram showing the structure of a transmission window in which a graphene film layer covers the side of a beryllium window sheet in an example of the present invention.
[0024] Figure 3Shown is a schematic structural diagram of a transmission window provided with a metallization layer in an example of the present invention.
[0025] Component number description
[0026] 1. Beryllium window; 2. Graphene film layer; 3. Metallization layer. DETAILED DESCRIPTION
[0027] The following is an explanation of the implementation of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementations, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.
[0028] For example, when describing the embodiments of the present invention in detail, for the sake of convenience, the schematic diagrams showing the device structure will not be partially enlarged according to the general scale, and the schematic diagrams are only examples, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.
[0029] For convenience of description, spatially relative terms such as "under", "below", "below", "below", "above", "on", etc. may be used herein to describe the relationship of one element or feature shown in the drawings to other elements or features. It will be understood that these spatially relative terms are intended to encompass other orientations of the device in use or operation in addition to the orientation depicted in the drawings.
[0030] In the context of the present application, a structure in which a first feature is described as being "above" a second feature may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features are formed between the first and second features, such that the first and second features may not be in direct contact.
[0031] It should be noted that the illustrations provided in this embodiment are only used to illustrate the basic concept of the present invention in a schematic manner, and therefore the illustrations only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed at will, and the component layout may also be more complicated.
[0032] like Figure 1 As shown, the utility model provides a transmission window, which includes: a beryllium window sheet 1 and a graphene film layer 2, wherein the beryllium window sheet 1 is a thin sheet including a relative upper surface and a lower surface, and the graphene film layer 2 covers the upper surface and the lower surface of the beryllium window sheet 1.
[0033] In the prior art, beryllium window 1 is generally used directly as a transmission window, and the transmission of X-rays is achieved by taking advantage of the characteristics of beryllium's small atomic number, low density, high melting point and extremely high transmittance to X-rays; and the X-ray transmission window generally hopes that the thickness of beryllium window 1 is as thin as possible, but when the thickness of beryllium window 1 becomes thinner, the air tightness of the processed beryllium window 1 is poor, and it is easy to leak during the welding process when the beryllium window 1 is welded to other structures, thereby increasing the manufacturing cost of the X-ray tube and placing higher requirements on the processing technology of the beryllium window 1. Graphene, as a material with high thermal conductivity, high strength, good air tightness and good X-ray transmittance, can replace beryllium window as an X-ray light transmission window to meet the requirements of air tightness, but the unit price of graphene is higher than that of beryllium window 1 of the same size, which is still not conducive to actual large-scale promotion and use in production practice.
[0034] The utility model provides a graphene film layer 2 to wrap the surface of the beryllium window sheet 1, utilizes the characteristics of good radiation transmittance, combines the characteristics of good air tightness and mechanical strength of graphene, cooperates with the characteristic of low cost of the beryllium window sheet 1 itself, and can adopt a beryllium window sheet 1 with a thinner thickness, utilizes the air tightness of the graphene film layer 2 to compensate for the air tightness of the transmission window formed as a whole, thereby improving the air tightness and mechanical strength of the transmission window formed as a whole when the thickness of the beryllium window sheet 1 is reduced, while ensuring the actual low production cost and improving the heat dissipation performance of the transmission window; in addition, by covering the surface of the beryllium window sheet 1 with the graphene film layer 2, it can also effectively prevent the beryllium oxide generated after the surface of the beryllium window sheet 1 is oxidized from being scattered due to external force to form highly toxic beryllium oxide dust, which is equivalent to performing harmless protection treatment on the beryllium window sheet 1, thereby improving the safety of the transmission window.
[0035] In one embodiment, the projection of the beryllium window 1 on the upper surface is circular. Specifically, the projection of the beryllium window 1 on the upper surface can also be set to other suitable shapes as required to meet the specific application requirements of the obtained transmission window in the product.
[0036] In one embodiment, Figure 2 As shown, the graphene film layer 2 also covers and wraps around the side surface of the beryllium window 1 .
[0037] The utility model also covers the graphene film layer 2 on the side of the beryllium window 1, so that the graphene film layer 2 completely covers and wraps all surfaces of the beryllium window 1, completely avoiding the risk of forming highly toxic beryllium oxide, improving production safety, and avoiding the risk of personnel poisoning due to beryllium oxide leakage.
[0038] In one embodiment, the beryllium window 1 has a thickness of 0.05 mm to 0.35 mm.
[0039] Specifically, the leakage rate of beryllium sheets used in X-ray tubes is generally required to be no greater than 1×10 -8 Pa·L / s, while the description of the surface quality of beryllium sheets in my country's non-ferrous metal beryllium sheet industry standard YS / T 41-2005 is "beryllium sheets with a thickness of less than 0.1 mm should not leak light; beryllium sheets with a thickness of 0.1 mm to less than 0.5 mm should have a gas leakage rate of no more than 3×10 -5 Pa·L / s; for beryllium sheets with a thickness of not less than 0.5 mm, the leakage rate should be no greater than 3×10 -6 Pa·L / s". However, the current industry standard for the leakage rate of beryllium sheet materials cannot meet the requirements of the product in actual products. It is necessary to customize or import high-quality beryllium sheets to be applied to actual products, resulting in high actual production costs.
[0040] The transmission window in the utility model can be applied to the structure of transmission windows in any thickness range. However, the good airtightness advantage brought by this solution can only be reflected when the thickness of the beryllium window sheet 1 is less than or equal to 0.5 mm. The airtightness performance of the actual transmission window that cannot be achieved by the single beryllium window sheet 1 and the low-cost advantage of directly replacing it with graphene as the transmission window can only be reflected when the thickness of the beryllium window sheet 1 is less than or equal to 0.1 mm. On the basis of meeting industry standards, the requirements for the leakage rate of the transmission window in actual product applications are further met.
[0041] In one embodiment, the thickness of the beryllium window 1 is less than or equal to 0.5 mm.
[0042] In one embodiment, the beryllium window 1 has a thickness of 0.2 mm.
[0043] In one embodiment, the thickness of the graphene film layer 2 is 0.03 micrometers to 1 micrometer.
[0044] Specifically, in the present invention, the thickness of the graphene film layer 2 is set in accordance with the required thickness of the beryllium window sheet 1 to meet the overall mechanical strength of the transmission window while achieving the lowest manufacturing cost, so as to be suitable for promotion and use in actual production.
[0045] In one embodiment, the graphene film layer 2 includes 5-100 graphene layers. Specifically, the number of graphene layers can be adjusted according to the required thickness of the graphene film layer 2.
[0046] In one embodiment, a preset position on the surface of the graphene film layer 2 is a welding position, and the surface of the welding position is covered with an adhesive layer.
[0047] In one embodiment, the material of the adhesion layer is titanium alloy.
[0048] The utility model arranges the titanium alloy as the adhesion layer, utilizes the good adhesion of the titanium alloy on the graphene surface, improves the adhesion of the metallization layer 3 to be arranged subsequently and the graphene film layer 2, ensures the reliability of the subsequent airtight welding of the transmission window, and further improves the structural airtightness that can be achieved by the transmission window.
[0049] In one embodiment, a metallization layer 3 is disposed on the surface of the adhesive layer.
[0050] In one embodiment, Figure 3 As shown, the metallization layer 3 can also be directly arranged on the surface of the graphene film layer 2 .
[0051] In one embodiment, the material of the metallization layer 3 is nickel.
[0052] In one embodiment, the thickness of the metallization layer 3 is 2 micrometers to 4 micrometers. Specifically, the thickness of the metallization layer 3 is generally not more than 15 micrometers.
[0053] Specifically, the good wettability between nickel and solder can be used to improve the welding air tightness between the transmission window and the welding structure.
[0054] In one embodiment, a preset component is hermetically welded onto the metallization layer 3 .
[0055] In one embodiment, the preset component is a bracket whose material is one of copper, pure iron or Kovar alloy.
[0056] In one embodiment, the support is a housing of a reflection X-ray tube.
[0057] In another specific embodiment, the utility model provides a reflective X-ray tube, which includes any one of the transmission windows described above, and also includes a ray generating structure and a shell, the ray generating structure is located in the shell, and the transmission window is airtightly welded to the shell.
[0058] The utility model uses the transmission window as the transmission window of the reflection type X-ray tube, which can improve the air tightness and mechanical strength of the overall structure of the reflection type X-ray tube while ensuring a lower production cost, which is beneficial to improving the reliability and use safety of the reflection type X-ray tube.
[0059] In one embodiment, the reflection X-ray tube is a microfocus X-ray tube or an open X-ray tube.
[0060] Specifically, the reflective X-ray tube in the present invention may also be other types of reflective X-ray tubes.
[0061] In summary, the transmission window and reflective X-ray tube of the utility model can reduce the probability of air leakage of the transmission window when the beryllium window is thin, improve the product yield of the transmission window sealing, reduce the manufacturing cost of the transmission window, and improve the mechanical strength, heat dissipation characteristics and working reliability of the transmission window by covering the surface of the beryllium window with a graphene film layer, utilizing the high thermal conductivity, high strength, high air tightness, good radiation transmittance of graphene and the low manufacturing cost of the beryllium window, by reducing the manufacturing cost of the transmission window, and improving the mechanical strength, heat dissipation characteristics and working reliability of the transmission window; in addition, by covering the surface of the beryllium window with a graphene film layer, the beryllium window is harmlessly treated, eliminating the potential risk of personnel poisoning caused by leakage of highly toxic beryllium oxide on the surface of the beryllium window, and improving production safety.
[0062] Therefore, the utility model effectively overcomes various shortcomings in the prior art and has high industrial utilization value.
[0063] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.
Claims
1. A transmission window, characterized in that: The transmission window comprises: a beryllium window sheet and a graphene film layer, the beryllium window sheet is a thin sheet comprising an upper surface and a lower surface opposite to each other, and the graphene film layer covers the upper surface and the lower surface of the beryllium window sheet.
2. The transmission window according to claim 1, characterized in that: The graphene film layer also covers and wraps around the side surface of the beryllium window sheet.
3. The transmission window according to claim 1, characterized in that: The thickness of the beryllium window is between 0.05 mm and 0.35 mm.
4. The transmission window according to claim 1, characterized in that: The thickness of the graphene film layer is 0.03 micrometers to 1 micrometer.
5. The transmission window according to claim 1, characterized in that: A preset position on the surface of the graphene film layer is a welding position, and the surface of the welding position is covered with an adhesive layer.
6. The transmission window according to claim 5, characterized in that: The material of the adhesion layer is titanium alloy.
7. The transmission window according to claim 5, characterized in that: A metallization layer is arranged on the surface of the adhesive layer.
8. The transmission window according to claim 7, characterized in that: The material of the metallization layer is nickel.
9. The transmission window according to claim 7, characterized in that: The metallized layer is welded with preset components in a hermetic manner.
10. A reflection X-ray tube, characterized in that: The reflective X-ray tube comprises the transmission window according to any one of claims 1 to 9, and further comprises a ray generating structure and a shell, wherein the ray generating structure is located inside the shell, and the reflective X-ray tube is hermetically welded to the shell.