Corrosion-resistant semiconductor etching and cleaning device

Abstract

The corrosion-resistant semiconductor etching and cleaning device comprises an etching box, a circular etching groove is formed in the etching box, an opening is formed in the top of the etching box, an etching filter frame is inserted in the opening in a sliding mode, a transverse plate is arranged above the etching box, the two ends of the transverse plate are fixedly connected with the etching box through vertical plates, and the vertical plates are fixedly connected with the etching box. A motor is fixedly connected to the transverse plate, a shaft rod is fixedly connected to the output end of the motor, the bottom end of the shaft rod penetrates through the transverse plate and is fixedly connected with a swing plate, a mounting rod is fixedly connected to the bottom of one end of the swing plate, an annular groove is formed in the top of the etching box, and the mounting rod is slidably inserted into the annular groove; according to the device for cleaning the inner side wall of the etching box, the inner side wall of the etching box can be cleaned in an all-around mode through the scraping assembly, and material residues are reduced.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor-related products, in particular to a corrosion-resistant semiconductor etching and cleaning device. Background Art

[0002] Semiconductors refer to materials with electrical conductivity between conductors and insulators at room temperature. Semiconductors are widely used in consumer electronics, communication systems, medical equipment and other fields. For example, diodes are devices made of semiconductors. Whether from the perspective of science and technology or economic development, the importance of semiconductors is enormous. Most of today's electronic products, such as computers, mobile phones or digital recorders, are closely related to semiconductors in their core units. Common semiconductor materials include silicon, germanium, gallium arsenide, etc., and silicon is the most influential semiconductor material in commercial applications.

[0003] In the existing semiconductor manufacturing process, impurities are generated after etching. The accumulation of impurities makes it inconvenient to clean the etching groove, which brings inconvenience to subsequent etching operations. Utility Model Content

[0004] The purpose of the utility model is to provide a corrosion-resistant semiconductor etching cleaning device to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a corrosion-resistant semiconductor etching cleaning device, comprising an etching box, a circular etching groove is arranged in the etching box, an opening is arranged on the top of the etching box, an etching filter frame is slidably inserted in the opening, a horizontal plate is arranged above the etching box, both ends of the horizontal plate are fixedly connected to the etching box through a vertical plate, a motor is fixedly connected to the horizontal plate, an output end of the motor is fixedly connected to a shaft rod, the bottom end of the shaft rod passes through the horizontal plate and is fixedly connected to a swing plate, one end of the swing plate is fixedly connected to a mounting rod at the bottom, an annular groove is arranged on the top of the etching box, the mounting rod is slidably inserted in the annular groove, a groove is arranged on the mounting rod, a threaded rod is rotatably connected in the groove, and the The threads on both sides of the vertical center point of the axial cross-section of the threaded rod are arranged in opposite directions, and both ends of the threaded rod are threadedly sleeved with moving blocks, and a pressure plate is provided on one side of the mounting rod, and a scraper is fixedly connected to one side of the pressure plate, and a traction rod is rotatably connected to the moving block, and one end of the traction rod is rotatably connected to the pressure plate. An opening is provided at the top of the mounting rod, and a rotating rod is rotatably connected in the opening, and the bottom end of the rotating rod passes through the opening and extends into the rotating groove, and one end of the extending rotating rod is fixedly connected to the threaded rod, and a first gear is fixedly connected to the side wall of the rotating rod located in the opening, and a second gear meshing with it is provided on one side of the first gear, and a rotating rod is fixedly connected on one side of the second gear, and one end of the rotating rod passes through the opening and extends outward.

[0006] Preferably, one end of the rotating rod extending outward is fixedly connected to a rotating block, and an outer side wall of the rotating block is provided with anti-slip grooves.

[0007] Preferably, a limit ring is fixedly sleeved on the top of the filter frame.

[0008] Preferably, the motor is a servo motor.

[0009] Preferably, the first gear and the second gear are both bevel gears.

[0010] Preferably, four supporting legs arranged in a rectangular shape are fixedly connected to the bottom of the etching box.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] The corrosion-resistant semiconductor etching cleaning device adds etching liquid into the etching box, puts the semiconductor device to be etched into the etching filter frame, inserts the etching filter frame into the etching box for etching operation, releases the etching liquid when cleaning is needed, then rotates the rotary rod to drive the second gear to mesh with the first gear to rotate, thereby realizing the rotation of the rotary rod, at this time the rotary rod will drive the threaded rod to rotate, when the threaded rod rotates, the two moving blocks threadedly sleeved thereon will move relatively, thereby driving the traction rod to move, the traction rod will push the pressure plate at this time to make the scraper plate against the inner wall of the etching box, then starts the motor to drive the swing plate on the output shaft to rotate, the swing plate will drive the mounting rod to rotate in the annular groove at this time to scrape off the residual adhered stains on the inner wall of the etching box, the utility model adopts the scraper assembly to clean the inner wall of the etching box in all directions and reduce the residual material. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a structural schematic diagram of a corrosion-resistant semiconductor etching and cleaning device of the utility model;

[0014] Figure 2 This is an enlarged view of point A of a corrosion-resistant semiconductor etching and cleaning device of the utility model;

[0015] Figure 3 This is a schematic diagram of the annular groove of a corrosion-resistant semiconductor etching and cleaning device of the utility model.

[0016] In the figure: 1, etching box; 2, filter frame; 3, horizontal plate; 4, vertical plate; 5, motor; 6, swing plate; 7, mounting rod; 8, annular groove; 9, threaded rod; 10, moving block; 11, pressure plate; 12, scraper; 13, traction rod; 14, rotating rod; 15, first gear; 16, second gear; 17, rotating rod; 18, rotating block; 19, limit ring. DETAILED DESCRIPTION

[0017] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0018] See also Figure 1-3 The utility model provides an embodiment: a corrosion-resistant semiconductor etching cleaning device, comprising an etching box 1, a circular etching groove is arranged in the etching box 1, an opening is arranged on the top of the etching box 1, an etching filter frame 2 is slidably inserted in the opening, a horizontal plate 3 is arranged above the etching box 1, both ends of the horizontal plate 3 are fixedly connected to the etching box 1 through a vertical plate 4, a motor 5 is fixedly connected to the horizontal plate 3, an output end of the motor 5 is fixedly connected to a shaft rod, the bottom end of the shaft rod passes through the horizontal plate 3 and is fixedly connected to a swing plate 6, and the bottom end of one end of the swing plate 6 A mounting rod 7 is fixedly connected, an annular groove 8 is provided on the top of the etching box 1, the mounting rod 7 is slidably inserted in the annular groove 8, a groove is provided on the mounting rod 7, a threaded rod 9 is rotatably connected in the groove, the threads on both sides of the vertical center point of the axial section of the threaded rod 9 are oppositely set, and both ends of the threaded rod 9 are threadedly sleeved with a moving block 10, a pressure plate 11 is provided on one side of the mounting rod 7, a scraper 12 is fixedly connected to one side of the pressure plate 11, a traction rod 13 is rotatably connected to the moving block 10, and one end of the traction rod 13 is connected to the pressure plate 11 Rotational connection, the top of the mounting rod 7 is provided with an open cavity, a rotating rod 14 is rotatably connected in the open cavity, the bottom end of the rotating rod 14 passes through the open cavity and extends into the rotating groove, one end of the rotating rod 14 is fixedly connected to the threaded rod 9, and the rotating rod 14 is fixedly connected to the side wall of the open cavity with a first gear 15, one side of the first gear 15 is provided with a meshing second gear 16, and one side of the second gear 16 is fixedly connected with a rotating rod 17, one end of the rotating rod 17 passes through the open cavity and extends outward, specifically, the rotating rod 17 drives the second gear 16 to mesh The first gear 15 rotates to realize the rotation of the rotating rod 14. At this time, the rotating rod 14 will drive the threaded rod 9 to rotate. When the threaded rod 9 rotates, the two moving blocks 10 threadedly sleeved thereon will move relatively to drive the traction rod 13 to move. The traction rod 13 will push the pressure plate 11 to press the scraper 12 against the inner wall of the etching box 1. Then the motor 5 is started to drive the swing plate 6 on the output shaft to rotate. The swing plate 6 will drive the mounting rod 7 to rotate in the annular groove 8 to scrape off the residual adhered stains on the inner wall of the etching box 1.

[0019] In this embodiment, one end of the rotating rod 17 extending outward is fixedly connected to a rotating block 18, and the outer wall of the rotating block 18 is provided with anti-slip grooves to facilitate the rotation of the rotating rod 17; the top of the erosion filter frame 2 is fixedly sleeved with a limiting ring 19 to provide limiting support for the top of the erosion filter frame 2; the motor 5 is a servo motor; the first gear 15 and the second gear 16 are both bevel gears; the bottom of the etching box 1 is fixedly connected to four supporting feet arranged in a rectangular shape to support the etching box 1.

[0020] Working principle: first, rotate the rotary rod 17 to drive the second gear 16 to engage the first gear 15 to rotate and then realize the rotation of the rotating rod 14. At this time, the rotating rod 14 will drive the threaded rod 9 to rotate. When the threaded rod 9 rotates, the two moving blocks 10 threadedly sleeved thereon will move relatively, thereby driving the traction rod 13 to move. At this time, the traction rod 13 will push the pressure plate 11 to press the scraper 12 against the inner wall of the etching box 1. Then start the motor 5 to drive the swing plate 6 on the output shaft to rotate. At this time, the swing plate 6 will drive the mounting rod 7 to rotate in the annular groove 8 to scrape off the residual adhering stains on the inner wall of the etching box 1.

[0021] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. A corrosion-resistant semiconductor etching and cleaning device, comprising an etching box (1), characterized in that: The etching box (1) is provided with a circular etching groove, the top of the etching box (1) is provided with an opening, and an etching filter frame (2) is slidably inserted in the opening, a horizontal plate (3) is provided above the etching box (1), both ends of the horizontal plate (3) are fixedly connected to the etching box (1) through a vertical plate (4), a motor (5) is fixedly connected to the horizontal plate (3), an output end of the motor (5) is fixedly connected to a shaft rod, the bottom end of the shaft rod passes through the horizontal plate (3) and is fixedly connected to a swing plate (6), one end of the swing plate (6) is fixedly connected to a mounting rod (7), an annular groove (8) is provided on the top of the etching box (1), the mounting rod (7) is slidably inserted in the annular groove (8), the mounting rod (7) is provided with a groove, a threaded rod (9) is rotatably connected in the groove, the threaded directions of the two sides of the vertical center point of the axial section of the threaded rod (9) are opposite, and the threaded rod ( The two ends of the mounting rod (7) are both threadedly sleeved with moving blocks (10), one side of the mounting rod (7) is provided with a pressure plate (11), one side of the pressure plate (11) is fixedly connected with a scraper (12), the moving block (10) is rotatably connected with a traction rod (13), one end of the traction rod (13) is rotatably connected with the pressure plate (11), the top end of the mounting rod (7) is provided with an opening, a rotating rod (14) is rotatably connected in the opening, the bottom end of the rotating rod (14) passes through the opening and extends into the rotating groove, one end of the rotating rod (14) is fixedly connected to the threaded rod (9), the rotating rod (14) is fixedly connected with a first gear (15) on the side wall of the opening, one side of the first gear (15) is provided with a meshing second gear (16), one side of the second gear (16) is fixedly connected with a rotating rod (17), one end of the rotating rod (17) passes through the opening and extends outward.

2. The corrosion-resistant semiconductor etching cleaning device according to claim 1, characterized in that: One end of the rotating rod (17) extending outward is fixedly connected to a rotating block (18), and an outer side wall of the rotating block (18) is provided with anti-slip grooves.

3. The corrosion-resistant semiconductor etching cleaning device according to claim 1, characterized in that: The top end of the filter frame (2) is fixedly sleeved with a limiting ring (19).

4. The corrosion-resistant semiconductor etching cleaning device according to claim 1, characterized in that: The motor (5) is a servo motor.

5. The corrosion-resistant semiconductor etching cleaning device according to claim 1, characterized in that: The first gear (15) and the second gear (16) are both bevel gears.

6. The corrosion-resistant semiconductor etching cleaning device according to claim 1, characterized in that: Four supporting legs arranged in a rectangular shape are fixedly connected to the bottom of the etching box (1).

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