Turnover mechanism based on pneumatic control

Abstract

The utility model discloses a turnover mechanism based on pneumatic control, which comprises a base device, a bearing device is arranged at the top of the base device, and a power device is arranged below the bearing device; the bearing device comprises a placing plate, two guide rails are symmetrically and fixedly arranged at the top of the placing plate, sliding rods are arranged on the guide rails in a sliding mode, and a plurality of clamping jaws are evenly and fixedly arranged on the sliding rods; according to the turnover mechanism based on pneumatic control, the manufacturing cost is reduced through the design that the air cylinder stretches out and draws back to drive a wafer to turn over, meanwhile, the third gear is meshed with the second gear so that the stroke can be enlarged, 180-degree turnover can be achieved by stretching out and drawing back the air cylinder by a small distance, and therefore the air cylinder type selection condition is looser; the cost can be further saved; and through the design that the first gear is engaged with the two racks at the same time to move, the wafers can be conveniently clamped and fixed in batches at the same time, the operation speed is increased, meanwhile, the wafers of different sizes can be fixed, and the universality of the device is higher.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor wafers, and particularly relates to a turnover mechanism based on pneumatic control. Background Art

[0002] During the batch manufacturing process of the assembly line, wafers often need to be turned over to facilitate different types of processing. Existing wafer turning devices are mostly directly driven by motors, which requires high manufacturing costs. At the same time, the turning structure lacks the design of fast batch fixing of wafers, and the operation speed is slow. Utility Model Content

[0003] The purpose of the utility model is to provide a turnover mechanism based on pneumatic control to solve the problems existing in the above-mentioned background technology.

[0004] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0005] A flipping mechanism based on pneumatic control comprises a base device, a bearing device is arranged on the top of the base device, and a power device is arranged below the bearing device; the bearing device comprises a placement plate, two guide rails are symmetrically fixedly arranged on the top of the placement plate, slide bars are slidably arranged on the guide rails, and a plurality of clamps are evenly fixedly arranged on the slide bars, a rack is fixedly arranged at the front end of the guide rails, a first gear is arranged between the racks, a motor is installed at the bottom of the first gear, a first rotating shaft is fixedly arranged on one side of the placement plate, and a second gear is arranged at the rear end of the first rotating shaft; the power device comprises a rotating seat, a cylinder is installed on the top of the rotating seat, a moving seat is arranged on the cylinder, a rocker arm is rotatably arranged on the top of the moving seat, a second rotating shaft is fixedly arranged on the top of the rocker arm, and a third gear is arranged at the rear end of the second rotating shaft.

[0006] Furthermore: the base device includes a load-bearing seat, and a support seat is fixedly arranged on the bottom of the load-bearing seat.

[0007] Furthermore: the guide rail has a T-shaped cross section, and the guide rail is welded to the placement plate.

[0008] Furthermore: the clamping jaw is arc-shaped.

[0009] Furthermore: the first gear is connected to the placement plate bearing, and the motor is connected to the placement plate bolts.

[0010] Furthermore: the third gear is key-connected to the second rotating shaft.

[0011] Furthermore: the rotating seat is connected to the supporting seat bearing.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] 1. After the wafer is fixed, the rotating seat supporting cylinder extends, and the rotating seat at the bottom of the cylinder rotates around the supporting seat, while the moving seat at the top moves obliquely upward. During this process, the rocker arm rotates counterclockwise under the traction of the moving seat, driving the second rotating shaft and the third gear to rotate synchronously. The third gear engages with the second gear, driving the first rotating shaft to rotate clockwise under the support of the load-bearing seat. Finally, the placement plate drives the wafer to flip 180 degrees to complete the flipping process. The design of driving the wafer flipping by the extension and contraction of the cylinder reduces the manufacturing cost. At the same time, the engagement of the third gear with the second gear can enlarge the stroke. The cylinder can achieve a 180-degree flip by a small extension and contraction distance. Therefore, the cylinder selection conditions are more relaxed, which is convenient for further cost saving.

[0014] 2. The wafer is placed between the circular structure formed by the claws on different sliding bars on the placement plate. The placement plate support motor drives the first gear to rotate and engages the two racks at the same time, driving the two sliding bars to slide in different directions along the guide rails. During this process, the claws on the front and back sides of the wafer close inward to clamp the wafer, completing the wafer fixing process. The design of the first gear engaging the two racks to move at the same time facilitates the simultaneous clamping and fixing of wafers in batches, thereby increasing the operating speed. At the same time, it can fix wafers of different sizes, making the device more versatile. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0016] Figure 1 It is a structural schematic diagram of a pneumatically controlled flipping mechanism described in the utility model;

[0017] Figure 2 It is a structural schematic diagram of a base device of a flipping mechanism based on pneumatic control according to the utility model;

[0018] Figure 3 It is a structural schematic diagram of a load-bearing device of a turnover mechanism based on pneumatic control according to the utility model;

[0019] Figure 4 It is a structural schematic diagram of a power device of a turnover mechanism based on pneumatic control described in the utility model.

[0020] In the accompanying drawings: 1. base device; 101. load-bearing seat; 102. supporting seat; 2. bearing device; 201. placement plate; 202. guide rail; 203. slide rod; 204. clamp; 205. rack; 206. first gear; 207. motor; 208. first rotating shaft; 209. second gear; 3. power device; 301. rotating seat; 302. cylinder; 303. moving seat; 304. rocker arm; 305. second rotating shaft; 306. third gear. DETAILED DESCRIPTION

[0021] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0022] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] See also Figure 1-Figure 4 A pneumatically controlled flipping mechanism comprises a base device 1, a carrying device 2 is arranged on the top of the base device 1, and a power device 3 is arranged below the carrying device 2.

[0025] In this embodiment: the base device 1 includes a load-bearing seat 101, a support seat 102 is fixedly arranged at the bottom of the load-bearing seat 101, a rotating seat 301 is bearing-connected with the support seat 102, and the load-bearing seat 101 supports the first rotating shaft 208 and the second rotating shaft 305 to rotate;

[0026] In this embodiment, the carrying device 2 includes a placement plate 201, two guide rails 202 are symmetrically fixedly arranged on the top of the placement plate 201, a slide bar 203 is slidably arranged on the guide rail 202, and a plurality of clamps 204 are evenly fixedly arranged on the slide bar 203. A rack 205 is fixedly arranged at the front end of the guide rail 202, a first gear 206 is arranged between the racks 205, and a motor 207 is installed at the bottom of the first gear 206. A first rotating shaft 208 is fixedly arranged on one side of the placement plate 201, and a second gear 209 is arranged at the rear end of the first rotating shaft 208. The cross section of the guide rail 202 is T-shaped, and the guide rail 202 is welded to the placement plate 201. The clamp 204 is arc-shaped, and the first gear 206 is fixed to the placement plate 201. The motor 207 is connected with the placement plate 201 by bolts, and the wafer is placed between the circular structures formed by the clamping claws 204 on the different slide bars 203 on the placement plate 201. The placement plate 201 supports the motor 207 to drive the first gear 206 to rotate, and at the same time, the two racks 205 are engaged, driving the two slide bars 203 to slide in different directions along the guide rail 202. During this process, the clamping claws 204 on the front and rear sides of the wafer are closed inward to clamp the wafer, completing the wafer fixing process. The design of the first gear 206 engaging the two racks 205 to move at the same time facilitates the simultaneous batch clamping and fixing of wafers, improves the operation speed, and can fix wafers of different sizes at the same time, making the device more versatile.

[0027] In this embodiment, the power device 3 includes a rotating seat 301, a cylinder 302 is installed on the top of the rotating seat 301, a moving seat 303 is arranged on the cylinder 302, a rocker arm 304 is rotatably arranged on the top of the moving seat 303, a second rotating shaft 305 is fixedly arranged on the top of the rocker arm 304, a third gear 306 is arranged at the rear end of the second rotating shaft 305, and the third gear 306 is connected to the second rotating shaft 305 with a flat key. After the wafer is fixed, the rotating seat 301 supports the cylinder 302 to extend, and the rotating seat 301 at the bottom of the cylinder 302 rotates around the supporting seat 102, and the moving seat 303 on the top moves obliquely upward. During this process, the rocker arm 304 is The movable seat 303 rotates counterclockwise under the traction, driving the second rotating shaft 305 and the third gear 306 to rotate synchronously. The third gear 306 engages with the second gear 209, driving the first rotating shaft 208 to rotate clockwise under the support of the load-bearing seat 101. Finally, the placement plate 201 drives the wafer to flip 180 degrees to complete the flipping process. The design of driving the wafer to flip by the extension and contraction of the cylinder 302 reduces the manufacturing cost. At the same time, the engagement of the third gear 306 with the second gear 209 can enlarge the stroke. The cylinder 302 can achieve a 180-degree flip by a small extension and contraction distance. Therefore, the selection conditions of the cylinder 302 are more relaxed, which is convenient for further cost savings.

[0028] Working principle: When in use, the wafer is placed between the circular structure formed by the clamping claws 204 on the different slide bars 203 on the placement plate 201. The placement plate 201 supports the motor 207 to drive the first gear 206 to rotate and engage the two racks 205 at the same time, driving the two slide bars 203 to slide in different directions along the guide rail 202 respectively. During this process, the clamping claws 204 on the front and back sides of the wafer are closed inward to clamp the wafer to complete the wafer fixing process. The design of the first gear 206 engaging the two racks 205 to move at the same time facilitates the simultaneous clamping and fixing of wafers in batches, improves the operating speed, and can fix wafers of different sizes at the same time. The device is more versatile. After the wafer is fixed, the rotating seat 301 supports the cylinder 302 to extend, and the rotating cylinder 302 at the bottom of the cylinder 302 is rotated. The rotating seat 301 rotates around the supporting seat 102, and the moving seat 303 on the top moves obliquely upward. During this process, the rocker arm 304 rotates counterclockwise under the traction of the moving seat 303, driving the second rotating shaft 305 and the third gear 306 to rotate synchronously. The third gear 306 engages with the second gear 209, driving the first rotating shaft 208 to rotate clockwise under the support of the load-bearing seat 101. Finally, the placement plate 201 drives the wafer to flip 180 degrees to complete the flipping process. The design of driving the wafer to flip by extending and retracting the cylinder 302 reduces the manufacturing cost. At the same time, the third gear 306 engages with the second gear 209 to enlarge the stroke. The cylinder 302 can achieve a 180-degree flip by extending and retracting a small distance. Therefore, the selection conditions of the cylinder 302 are more relaxed, which is convenient for further cost savings.

[0029] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A pneumatically controlled turning mechanism, comprising a base device (1), characterized in that: A bearing device (2) is arranged on the top of the base device (1), and a power device (3) is arranged below the bearing device (2); The bearing device (2) comprises a placement plate (201), two guide rails (202) are symmetrically fixedly arranged on the top of the placement plate (201), a slide bar (203) is slidably arranged on the guide rail (202), a plurality of clamping claws (204) are evenly fixedly arranged on the slide bar (203), a rack (205) is fixedly arranged at the front end of the guide rail (202), a first gear (206) is arranged between the racks (205), a motor (207) is installed at the bottom of the first gear (206), a first rotating shaft (208) is fixedly arranged on one side of the placement plate (201), and a second gear (209) is arranged at the rear end of the first rotating shaft (208); The power device (3) comprises a rotating seat (301), a cylinder (302) is installed on the top of the rotating seat (301), a movable seat (303) is arranged on the cylinder (302), a rocker arm (304) is rotatably arranged on the top of the movable seat (303), a second rotating shaft (305) is fixedly arranged on the top of the rocker arm (304), and a third gear (306) is arranged at the rear end of the second rotating shaft (305).

2. The pneumatically controlled flipping mechanism according to claim 1, characterized in that: The base device (1) comprises a load-bearing seat (101), and a support seat (102) is fixedly arranged at the bottom of the load-bearing seat (101).

3. The pneumatically controlled flipping mechanism according to claim 1, characterized in that: The guide rail (202) has a T-shaped cross section, and the guide rail (202) and the placement plate (201) are welded together.

4. The pneumatically controlled flipping mechanism according to claim 1, characterized in that: The clamping jaw (204) is in an arc shape.

5. The pneumatically controlled flipping mechanism according to claim 1, characterized in that: The first gear (206) is connected to the placement plate (201) by a bearing, and the motor (207) is connected to the placement plate (201) by bolts.

6. The pneumatically controlled flipping mechanism according to claim 1, characterized in that: The third gear (306) is connected to the second rotating shaft (305) via a parallel key.

7. The pneumatically controlled flipping mechanism according to claim 2, characterized in that: The rotating seat (301) is bearing-connected to the supporting seat (102).

Images