CVD (Chemical Vapor Deposition) coating heating plate capable of being quickly
By designing a rapidly disassembled and assembled CVD coated heating plate, using heating chambers and special-shaped heating wires, the problem of deforming traditional heating plates under high temperature conditions is solved, and uniform heating and extended service life are achieved.
Patent Information
- Application Number
- CN202420870312.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-24
- Publication Date
- 2025-02-07
- Estimated Expiration
- 2034-04-24
AI Technical Summary
The aluminum plate of the traditional CVD coated heating plate will soften and deform under high temperature conditions, resulting in poor flatness and affecting the normal operation of the production line.
A quick disassembly and assembled CVD coating heating plate is designed. By setting a heating chamber between the bottom plate and the cover plate, and using a special-shaped heating wire and adjustment plug, the heating chamber is uniform and the air flow is flowed, reducing the high temperature on the plate. damage.
It effectively reduces the deformation of the CVD-coated heating plate under high temperature conditions, ensures uniform heating between the cover plate and the bottom plate, extends service life, and facilitates the adjustment of the temperature in the heating chamber as needed.
Smart Images
Figure CN222441888U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a CVD coating heating plate, in particular to a quickly disassembled CVD coating heating plate. Background Art
[0002] CVD (Chemical vapor deposition) is a chemical technology that mainly uses one or more gas phase compounds or single substances containing thin film elements to react chemically on the substrate surface under medium or high temperature conditions to form a thin film. During the processing of traditional CVD coating heating plates, the heating wire is usually directly laid between two aluminum plates, which are sealed by welding. When the heating plate is heated to 400 degrees, the aluminum plate will soften and deform, resulting in poor flatness, which affects the normal operation of the production line. Utility Model Content
[0003] Based on this, it is necessary to provide a quick-disassembly and assembly CVD coating heating plate to address the problem that the traditional CVD coating heating plate directly lays the heating wire between two aluminum plates, and the two aluminum plates are sealed by welding. When the heating plate is heated to 400 degrees, the aluminum plate will soften and deform, resulting in poor flatness, which affects the normal operation of the production line.
[0004] The utility model provides a quick-disassembly CVD coating heating plate, comprising:
[0005] A bottom plate, having a first slot and a rib, wherein the rib has a first channel;
[0006] The cover plate has a second card slot, a third card slot and a second channel, wherein the second channel is connected to the first channel;
[0007] A heating wire, which is clamped in the first clamping slot and has a connector at its free end;
[0008] When the bottom plate and the cover plate are assembled by fasteners, a heating cavity is formed between the bottom plate and the cover plate, and the ribs are clamped in the third clamping grooves.
[0009] In one embodiment, the heating wire includes a first shaped portion and a second shaped portion, the terminal end of the first shaped portion is connected to the starting end of the second shaped portion, and the first shaped portion and the second shaped portion are respectively located on both sides of the middle of the bottom plate.
[0010] In one embodiment, the first special-shaped portion includes a first protrusion and a first recessed portion, the first recessed portion is located between adjacent first protrusions, the second special-shaped portion includes a second protrusion and a second recessed portion, the second recessed portion is located between adjacent second protrusions, the first protrusion corresponds to the second recessed portion, and the first recessed portion corresponds to the second protrusion.
[0011] In one embodiment, the rib is disposed in the first recessed portion or the second recessed portion.
[0012] In one of the embodiments, a limiting frame is fixedly connected to the surface of the bottom plate, and the height of the limiting frame is smaller than the height of the ribs.
[0013] In one embodiment, the first channel extends to the outside of the limiting frame.
[0014] In one of the embodiments, an adjusting plate is fixedly connected in the second channel, a first groove is formed on the adjusting plate, an adjusting plug is rotatably connected to the outer wall of the cover plate, a second groove is formed on the adjusting plug, the second groove and the first groove are interconnected with the first channel, and the adjusting plug is in contact with the adjusting plate.
[0015] In one embodiment, the fasteners are bolts, and threaded holes that are interference fit with the bolts are formed around the base plate and the cover plate.
[0016] When assembling the above-mentioned quick-disassembly CVD coated heating plate, it is only necessary to snap the heating wire into the first slot, then align the third slot on the cover plate with the rib, snap the cover plate onto the bottom plate, and finally fix the cover plate and the bottom plate with fasteners. Since the temperature of the CVD coated heating plate is relatively high during use, in order to reduce the deformation of the CVD coated heating plate under high temperature conditions, the second channel is interconnected with the first channel, and a heating chamber is formed between the bottom plate and the cover plate, which can ensure uniform heating between the cover plate and the bottom plate and facilitate the airflow in the heating chamber, thereby reducing the damage to the cover plate and the bottom plate caused by high temperature.
[0017] When the temperature in the heating chamber is too high, the relative position between the second groove and the first groove can be adjusted by rotating the adjusting plug. When the second groove is aligned with the first groove, the heating chamber is connected to the outside world, which can quickly reduce the temperature in the heating chamber. When the second groove is staggered with the first groove, the heating chamber is a closed space, which is convenient for quickly increasing the temperature in the heating chamber, thereby facilitating the adjustment of the temperature in the heating chamber as needed. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0019] Figure 1 A schematic diagram of the explosion structure of a CVD coating heating plate for quick disassembly and assembly in one embodiment;
[0020] Figure 2 is a schematic diagram of a cover plate structure in an embodiment;
[0021] Figure 3 is a schematic diagram of the heating wire structure in one embodiment;
[0022] Figure 4 It is a schematic diagram of the cross-sectional structure of the regulating plug in one embodiment.
[0023] Reference numerals:
[0024] 100, bottom plate; 110, first slot; 120, limit frame; 130, rib; 140, threaded hole; 150, first channel; 160, adjustment sheet; 170, first groove; 180, fastener; 200, cover plate; 210, second slot; 220, third slot; 230, heating chamber; 240, second channel; 250, adjustment plug; 260, second groove; 300, heating wire; 310, connector; 320, first special-shaped portion; 321, first protruding portion; 322, first recessed portion; 330, second special-shaped portion; 331, second protruding portion; 332, second recessed portion. DETAILED DESCRIPTION
[0025] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0026] It should be noted that when a component is referred to as being "fixed to" or "disposed on" another component, it may be directly on the other component or there may also be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be a central component at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the specification of the utility model are for illustrative purposes only and do not represent the only implementation method.
[0027] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.
[0028] In the present utility model, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first feature is directly in contact with the second feature, or the first feature and the second feature are indirectly in contact through an intermediate medium. Moreover, a first feature being “above”, “above” or “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below” or “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.
[0029] Unless otherwise defined, all technical and scientific terms used in the specification of the present utility model have the same meaning as those commonly understood by technicians in the technical field of the present utility model. The terms used in the specification of the present utility model are only for the purpose of describing specific embodiments and are not intended to limit the present utility model. The term "and / or" used in the specification of the present utility model includes any and all combinations of one or more related listed items.
[0030] Combine the following Figure 1-Figure 4 The utility model describes a CVD coating heating plate which can be quickly disassembled and assembled.
[0031] like Figure 1 and Figure 2 As shown, in one embodiment, a quick-disassembly CVD coating heating plate includes a base plate 100 , a cover plate 200 and a heating wire 300 .
[0032] The bottom plate 100 has a first slot 110 and a rib 130 , and the rib 130 has a first channel 150 .
[0033] The cover plate 200 has a second slot 210 , a third slot 220 and a second channel 240 , and the second channel 240 is connected to the first channel 150 .
[0034] The heating wire 300 is clamped in the first clamping slot 110 , and a free end of the heating wire 300 has a connector 310 .
[0035] When the bottom plate 100 and the cover plate 200 are assembled by the fastener 180, a heating chamber 230 is formed between the bottom plate 100 and the cover plate 200, and the rib 130 is clamped in the third clamping groove 220. The fastener 180 is a bolt, and threaded holes 140 are provided around the bottom plate 100 and the cover plate 200 to be interference-fitted with the bolt.
[0036] When assembling the CVD coated heating plate, it is only necessary to snap the heating wire 300 into the first slot 110, and then align the third slot 220 on the cover plate 200 with the rib 130 to snap the cover plate 200 onto the base plate 100, and finally use the fastener 180 to fix the cover plate 200 and the base plate 100 together. Since the temperature of the CVD coated heating plate is relatively high during use, in order to reduce the deformation of the CVD coated heating plate under high temperature conditions, the second channel 240 is interconnected with the first channel 150, and a heating chamber 230 is formed between the base plate 100 and the cover plate 200, which can ensure uniform heating between the cover plate 200 and the base plate 100, and at the same time, facilitate the airflow in the heating chamber 230, thereby reducing the damage of the cover plate 200 and the base plate 100 to the high temperature.
[0037] like Figure 3 As shown, in one embodiment, the heating wire 300 includes a first special-shaped portion 320 and a second special-shaped portion 330, the terminal end of the first special-shaped portion 320 is connected to the starting end of the second special-shaped portion 330, and the first special-shaped portion 320 and the second special-shaped portion 330 are respectively located on both sides of the middle of the bottom plate 100.
[0038] Specifically, the first special-shaped portion 320 includes a first protruding portion 321 and a first recessed portion 322, and the first recessed portion 322 is located between adjacent first protruding portions 321. The second special-shaped portion 330 includes a second protruding portion 331 and a second recessed portion 332, and the second recessed portion 332 is located between adjacent second protruding portions 331. The first protruding portion 321 corresponds to the second recessed portion 332, and the first recessed portion 322 corresponds to the second protruding portion 331.
[0039] It should be supplemented that the rib 130 is disposed in the first recessed portion 322 or the second recessed portion 332 .
[0040] The special-shaped design of the heating wire 300 facilitates uniform heating between the cover plate 200 and the bottom plate 100 . At the same time, a compensation space is reserved for the thermal deformation of the heating wire 300 , thereby increasing the service life of the cover plate 200 and the bottom plate 100 .
[0041] like Figure 1 As shown, in one embodiment, the surface of the bottom plate 100 is fixedly connected to a limiting frame 120, and the height of the limiting frame 120 is less than the height of the ribs 130, thereby facilitating the definition of the heating cavity 230 and improving the heat preservation effect of the CVD coating heating plate.
[0042] In this embodiment, the first channel 150 extends to the outside of the limiting frame 120 .
[0043] In this embodiment, the second channel 240 is fixedly connected with an adjusting piece 160, and the adjusting piece 160 is provided with a first groove 170. The outer wall of the cover plate 200 is rotatably connected with an adjusting plug 250, and the adjusting plug 250 is provided with a second groove 260. The second groove 260 and the first groove 170 are both connected to the first channel 150. The adjusting plug 250 is fitted with the adjusting piece 160. Figure 4 .
[0044] When the temperature in the heating chamber 230 is too high, the relative position between the second groove 260 and the first groove 170 can be adjusted by rotating the adjusting plug 250. When the second groove 260 is aligned with the first groove 170, the heating chamber 230 is connected to the outside world, and the temperature in the heating chamber 230 can be quickly reduced. When the second groove 260 is offset from the first groove 170, the heating chamber 230 is a closed space, which is convenient for quickly increasing the temperature in the heating chamber 230, thereby facilitating the temperature in the heating chamber 230 to be adjusted as needed.
[0045] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0046] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model shall be based on the attached claims.
Claims
1. A quick-disassembly CVD coating heating plate, characterized in that: include: A bottom plate, having a first slot and a rib, wherein the rib has a first channel; The cover plate has a second card slot, a third card slot and a second channel, wherein the second channel is connected to the first channel; A heating wire, which is clamped in the first clamping slot and has a connector at its free end; When the bottom plate and the cover plate are assembled by fasteners, a heating cavity is formed between the bottom plate and the cover plate, and the ribs are clamped in the third clamping grooves.
2. The quick-disassembly CVD coating heating plate according to claim 1, characterized in that: The heating wire comprises a first special-shaped portion and a second special-shaped portion, the terminal end of the first special-shaped portion is connected to the starting end of the second special-shaped portion, and the first special-shaped portion and the second special-shaped portion are respectively located on both sides of the middle of the bottom plate.
3. The quick-disassembly CVD coating heating plate according to claim 2, characterized in that: The first special-shaped portion includes a first protrusion and a first recessed portion, the first recessed portion is located between adjacent first protrusions, the second special-shaped portion includes a second protrusion and a second recessed portion, the second recessed portion is located between adjacent second protrusions, the first protrusion corresponds to the second recessed portion, and the first recessed portion corresponds to the second protrusion.
4. The quick-disassembly CVD coating heating plate according to claim 3, characterized in that: The rib is disposed in the first recessed portion or the second recessed portion.
5. The quick-disassembly CVD coating heating plate according to any one of claims 1 to 4, characterized in that: The surface of the bottom plate is fixedly connected to a limiting frame, and the height of the limiting frame is smaller than the height of the ribs.
6. The quick-disassembly CVD coating heating plate according to claim 5, characterized in that: The first channel extends to the outside of the limiting frame.
7. The quick-disassembly CVD coating heating plate according to claim 6, characterized in that: An adjusting plate is fixedly connected in the second channel, and a first groove is formed on the adjusting plate. An adjusting plug is rotatably connected to the outer wall of the cover plate, and a second groove is formed on the adjusting plug. The second groove and the first groove are both interconnected with the first channel, and the adjusting plug is fitted with the adjusting plate.
8. The quick-disassembly CVD coating heating plate according to claim 7, characterized in that: The fasteners are bolts, and threaded holes which are interference-fitted with the bolts are provided around the base plate and the cover plate.