Integrated dust sticking device for automatic exposure line connection

Abstract

The utility model discloses an integrated dust-sticking device for automatic exposure connection, which comprises a transfer machine, a mounting seat and a dust-sticking machine, a first inlet is arranged on one side of the transfer machine, the mounting seat is arranged on one side of the transfer machine, the dust-sticking machine is connected onto the mounting seat, a second inlet and a second outlet are arranged on two opposite sides of the dust-sticking machine, and the second inlet and the second outlet are communicated with the first inlet and the second outlet. The second outlet and the first inlet are oppositely arranged and are located on the same horizontal plane. Thus, the mounting base is arranged on the transfer machine, so that the mounting base can be connected with the dust sticking machine, the second outlet in the dust sticking machine and the first inlet in the transfer machine can be located in the same horizontal plane, and the dust sticking machine can directly input the substrate into the transfer machine for exposure production after dedusting the substrate; the substrate entering the transfer machine to be subjected to subsequent procedures has higher cleanliness, so that the production yield of the integrated dust sticking device of the automatic exposure connection line is improved, and the dust sticking machine and the transfer machine can be conveniently positioned and assembled.

Description

Technical Field

[0001] The utility model relates to the technical field of dust sticking, in particular to an integrated dust sticking device for automatic exposure connection. Background Art

[0002] In the prior art, a transfer machine is often used in substrate processing equipment to perform exposure processing on the substrate. Therefore, the purity of the substrate entering the transfer machine for processing is crucial to the production and use of the transfer machine. In the related art, a dust collector is often provided before the feed port of the transfer machine so that the dust collector can remove dust from the substrate. However, during long-term use, the relative position between the dust collector and the transfer machine may deviate, which will affect the performance of the substrate entering the transfer machine for production use, thereby reducing the yield rate of the subsequent production of the substrate. At the same time, the split design of the transfer machine and the dust collector will make the positioning procedure between the two relatively complicated, which will increase the assembly process and make the installation and adjustment of the overall equipment more inconvenient. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, one purpose of the utility model is to provide an integrated dust-binding device for automatic exposure connection, wherein the dust-binding machine of the integrated dust-binding device can be in the same horizontal plane as the transfer machine, so that the substrate can enter the transfer machine according to the design to complete the subsequent production, improve the yield rate, and facilitate the assembly and deployment of the integrated dust-binding device, so that the construction and use of the integrated dust-binding device are simpler and more reliable.

[0004] According to the embodiment of the utility model, the integrated dust-catching device of the automatic exposure line includes: a transfer machine, a mounting seat and a dust-catching machine, wherein a first inlet is provided on one side of the transfer machine, the mounting seat is provided on one side of the transfer machine, the dust-catching machine is connected to the mounting seat, and a second inlet and a second outlet are provided on opposite sides of the dust-catching machine, the second outlet is arranged opposite to the first inlet, and the second outlet and the first inlet are on the same horizontal plane.

[0005] According to the integrated dust-binding device of the automatic exposure line of the embodiment of the utility model, a mounting seat is provided on the transfer machine so that the mounting seat can be connected to the dust-binding machine, so that the second outlet on the dust-binding machine can be in the same horizontal plane as the first inlet on the transfer machine, so that the dust-binding machine can directly input the substrate into the transfer machine for exposure production after dust removal, so that the substrate entering the transfer machine for subsequent processes has a higher degree of cleanliness, thereby improving the production yield of the integrated dust-binding device of the automatic exposure line. At the same time, it can also facilitate the positioning and assembly between the dust-binding machine and the transfer machine, simplify the assembly process, and improve the assembly efficiency.

[0006] In some embodiments, a first mounting portion is provided on the top of the mounting seat, and a second mounting portion is provided on the bottom of the dust collecting machine, and the first mounting portion is positioned and matched with the second mounting portion.

[0007] In some embodiments, the first mounting portion is a mounting protrusion, the second mounting portion is a mounting groove, and the mounting protrusion is positioned and fitted in the mounting groove.

[0008] In some embodiments, a third mounting portion is provided on one side of the mounting seat, and a fourth mounting portion is further provided on one side of the transfer machine, and the third mounting portion and the fourth mounting portion are positioned and matched.

[0009] In some embodiments, the third mounting portion is a mounting buckle, the fourth mounting portion is a mounting slot, and the mounting buckle is snap-fitted into the mounting slot.

[0010] In some embodiments, the mounting base includes: a first rod body, a second rod body and a third rod body, the first rod body is arranged in a horizontal direction, and the first mounting portion is arranged on the first rod body; the second rod body is connected to one end of the first rod body, and the third mounting portion is arranged on the second rod body, the second rod body is arranged in a vertical direction, the third rod body is connected to the free ends of the first rod body and the second rod body, and the third rod body is arranged at an angle.

[0011] In some embodiments, there are multiple mounting seats and at least two of the mounting seats are arranged in parallel.

[0012] In some embodiments, it further includes: a dust cover, wherein there are multiple dust covers, and at least two of the dust covers are respectively and correspondingly arranged on the outside of the second inlet and the second outlet.

[0013] In some embodiments, it also includes: an electrostatic rod, the dust cover is provided with an electrostatic rod mounting hole, the electrostatic rod is arranged in the electrostatic rod mounting hole, and the electrostatic rod mounting holes are correspondingly arranged on both sides of the second inlet and the second outlet in the up and down directions.

[0014] In some embodiments, the transfer machine is provided with a first communication interface, and the dust collecting machine is provided with a second communication interface, and the first communication interface and the second communication interface are communicatively connected.

[0015] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0017] Figure 1 It is a structural schematic diagram of an integrated dust-binding device according to an embodiment of the utility model;

[0018] Figure 2 It is a structural schematic diagram of an integrated dust-binding device according to an embodiment of the utility model;

[0019] Figure 3 yes Figure 2 Schematic diagram of the structure of part A;

[0020] Figure 4 It is a structural schematic diagram of an integrated dust-binding device according to an embodiment of the utility model;

[0021] Figure 5 It is a structural schematic diagram of an integrated dust-binding device according to an embodiment of the utility model;

[0022] Figure 6 It is a structural schematic diagram of an integrated dust-binding device according to an embodiment of the utility model;

[0023] Figure 7 yes Figure 6 A schematic diagram of the structure of part B in FIG.

[0024] Reference numerals:

[0025] Integrated dust sticking device 10,

[0026] Transfer machine 100, first inlet 110, fourth mounting portion 120,

[0027] The mounting seat 200, the first mounting portion 210, the third mounting portion 220, the first rod 230, the second rod 240, the third rod 250,

[0028] Dust collector 300, second inlet 310,

[0029] Dust cover 400. DETAILED DESCRIPTION

[0030] The embodiments of the present utility model are described in detail below. The embodiments described with reference to the accompanying drawings are exemplary. The embodiments of the present utility model are described in detail below.

[0031] Reference below Figure 1-Figure 7 An integrated dust-binding device 10 for an automatic exposure line according to an embodiment of the present invention is described, comprising: a transfer machine 100 , a mounting base 200 and a dust-binding machine 300 .

[0032] Specifically, a first inlet 110 is provided on one side of the transfer machine 100, a mounting base 200 is provided on one side of the transfer machine 100, a dust collecting machine 300 is connected to the mounting base 200, and a second inlet 310 and a second outlet are provided on opposite sides of the dust collecting machine 300. The second outlet is arranged opposite to the first inlet 110, and the second outlet and the first inlet 110 are on the same horizontal plane.

[0033] That is to say, during the use of the integrated dust collecting device 10 of the automatic exposure line, a dust collecting machine 300 is provided on one side of the transfer machine 100, so that the dust adhering to the substrate before entering the transfer machine 100 can be removed by the dust collecting machine 300, so that the substrate entering the transfer machine 100 has higher performance to meet the use, so that the transfer machine 100 has higher performance during use to meet the production needs.

[0034] Specifically, a mounting base 200 is provided on one side of the transfer machine 100, and the dust collecting machine 300 is connected to the transfer machine 100, so that the second outlet provided on the dust collecting machine 300 is suitable for being arranged opposite to the first inlet 110 provided on the transfer machine 100 and being on the same horizontal plane, so that after the substrate enters the dust collecting machine 300 for dust removal, it can be directly transferred to the transfer machine 100 for subsequent processing, thereby avoiding the impact on the production of the substrate when the transfer machine 100 and the dust collecting machine 300 are at different horizontal planes.

[0035] According to the integrated dust-binding device 10 of the automatic exposure line of the utility model embodiment, by providing a mounting seat 200 on the transfer machine 100, the mounting seat 200 can be connected to the dust-binding machine 300, so that the second outlet on the dust-binding machine 300 can be in the same horizontal plane as the first inlet 110 on the transfer machine 100, so that the dust-binding machine 300 can directly input the substrate into the transfer machine 100 for exposure production after dust removal, so that the substrate entering the transfer machine 100 for subsequent processes has a higher cleanliness, thereby improving the production yield of the integrated dust-binding device 10 of the automatic exposure line. At the same time, it can also facilitate the positioning and assembly between the dust-binding machine 300 and the transfer machine 100, simplify the assembly process, and improve the assembly efficiency.

[0036] In some embodiments, a first mounting portion 210 is provided on the top of the mounting seat 200, and a second mounting portion is provided on the bottom of the dust sticking machine 300, and the first mounting portion 210 is positioned and matched with the second mounting portion. In this way, by providing the first mounting portion 210 on the mounting seat 200, the second mounting portion on the dust sticking machine 300 is suitable for positioning and matching with the first mounting portion 210, so that the dust sticking machine 300 can be assembled to a designated position on the transfer machine 100 according to the design, so as to achieve the design requirement that the second outlet on the dust sticking machine 300 and the first outlet on the transfer machine 100 are on the same horizontal plane.

[0037] In some embodiments, the first mounting portion 210 is a mounting protrusion, and the second mounting portion is a mounting groove, and the mounting protrusion is positioned and matched in the mounting groove. In this way, by setting the first mounting portion 210 as a mounting protrusion and the second mounting portion as a mounting groove, the connection between the first mounting portion 210 and the second mounting portion during the assembly and connection process is made simpler and more reliable, so that the dust collector 300 can be assembled at a designated position on the transfer machine 100 to meet the use requirements. In addition, the design of the mounting protrusion and the mounting groove can also improve the structural performance of the first mounting portion 210 and the second mounting portion, thereby improving the connection reliability of the first mounting portion 210 and the second mounting portion.

[0038] In some embodiments, a third mounting portion 220 is provided on one side of the mounting seat 200, and a fourth mounting portion 120 is further provided on one side of the transfer machine 100, and the third mounting portion 220 and the fourth mounting portion 120 are positioned and matched. That is, during the assembly process of the transfer machine 100 and the mounting seat 200, it is suitable to position and connect the fourth mounting portion 120 on the transfer machine 100 with the third mounting portion 220 on the mounting seat 200, so that the position of the mounting seat 200 on the transfer machine 100 is limited, so that the dust collector 300 subsequently installed on the mounting seat 200 can be assembled to the designated position on the transfer machine 100 to realize dust removal processing of the substrate before entering the transfer machine 100, so that the transfer machine 100 can produce substrates with higher performance in the subsequent use process.

[0039] In some embodiments, the third mounting portion 220 is a mounting buckle, and the fourth mounting portion 120 is a mounting slot, and the mounting buckle is mounted in the mounting slot. In this way, the mounting buckle and the mounting slot are connected, which not only simplifies the assembly process between the third mounting portion 220 and the fourth mounting portion 120 and improves the assembly efficiency, but also allows the dust collecting machine 300 to be assembled to a designated position on the transfer machine 100 according to the use requirements for subsequent production, so that the use performance of the integrated dust collecting device 10 is improved.

[0040] In some embodiments, the mounting base 200 includes: a first rod body 230, a second rod body 240 and a third rod body 250, the first rod body 230 is arranged in a horizontal direction, and the first mounting portion 210 is arranged on the first rod body 230; the second rod body 240 is connected to one end of the first rod body 230, and the third mounting portion 220 is arranged on the second rod body 240, the second rod body 240 is arranged in a vertical direction, the third rod body 250 is connected to the free ends of the first rod body 230 and the second rod body 240, and the third rod body 250 is arranged at an angle.

[0041] It can be understood that the first rod 230 is suitable for providing a position for the first mounting portion 210, so that the first mounting portion 210 can be built on the first rod 230 for subsequent connection with the dust sticking machine 300, and the second rod 240 is suitable for providing a position for the third mounting portion 220, so that the third mounting portion 220 can be built on the second rod 240 for connection with the transfer machine 100. At the same time, since the third rod 250 is connected to the free ends of the first rod 230 and the second rod 240, the first rod 230, the second rod 240 and the third rod 250 can be jointly constructed into a triangular structure with high stability to meet the use, so that the use performance of the mounting seat 200 is improved, so that the dust sticking machine 300 can be better assembled to the designated position of the transfer machine 100, so as to achieve that the integrated dust sticking device 10 has higher use performance in the subsequent production process to meet the use requirements.

[0042] In some embodiments, the mounting seat 200 is multiple and at least two mounting seats 200 are arranged in parallel. In this way, the mounting seats 200 are arranged in multiple and are respectively connected to the transfer machine 100 and the dust collecting machine 300, so that the dust collecting machine 300 can be more reliably arranged on the transfer machine 100 through the mounting seats 200, so as to improve the performance and service life of the integrated dust collecting device 10.

[0043] In some embodiments, the integrated dust sticking device 10 further includes: a dust cover 400, and there are multiple dust covers 400, and at least two dust covers 400 are respectively correspondingly arranged on the outside of the second inlet 310 and the second outlet. That is to say, the dust covers 400 are arranged on both sides of the dust sticking machine 300, so that the dust covers 400 can be correspondingly arranged on the outside of the second inlet 310 and the second outlet, so that the dust covers 400 can prevent dust from entering the dust sticking machine 300 from the second inlet 310 and the second outlet, so that the dust sticking machine 300 can better stick to remove the dust attached to the substrate, so that the dust sticking machine 300 has higher performance and improves the service life, so that the performance of the integrated dust sticking device 10 is improved.

[0044] In some embodiments, the integrated dust sticking device 10 further includes: an electrostatic rod, an electrostatic rod mounting hole is provided on the dust cover 400, the electrostatic rod is arranged in the electrostatic rod mounting hole, and the electrostatic rod mounting hole is correspondingly arranged on both sides of the second inlet 310 and the second outlet in the up and down direction. It can be understood that the electrostatic rod is suitable for providing an electrostatic dust removal effect, and the electrostatic rod is connected to the dust cover 400 through the electrostatic rod mounting hole provided on the dust cover 400, so that the electrostatic rod can not only prevent dust and the like from entering the dust sticking machine 300 from the dust cover 400, but also allow the electrostatic rod to perform preliminary dust removal on the substrate entering the dust sticking machine 300, so that the dust attached to the substrate entering the dust sticking machine and the transfer machine 100 is reduced, so that the performance of the dust sticking machine during use is improved, and the substrate entering the transfer machine 100 has higher performance to meet production needs, so that the performance of the integrated dust sticking device 10 is improved.

[0045] In some embodiments, the transfer machine 100 is provided with a first communication interface, and the dust collecting machine 300 is provided with a second communication interface, and the first communication interface and the second communication interface are communicatively connected. It can be understood that a first communication interface is provided on the transfer machine 100, and the first communication interface is connected to the second communication interface on the dust collecting machine 300, so that the transfer machine 100 and the dust collecting machine 300 can be connected and communicated through the above connection, so that the control and use process of the integrated dust collecting device 10 during use is simpler and more convenient. In addition, the first communication interface and the second communication interface can also be integrated with a power supply line and a gas circuit interface during the setting process, so that the first communication interface and the second communication interface can synchronously control the use of the transfer machine 100 and the dust collecting machine 300 during the connection process, so that the integrated dust collecting device 10 has higher synchronization during production and use to meet production needs.

[0046] Other structures and operations of the integrated dust-binding device 10 according to the embodiment of the utility model are known to those skilled in the art and will not be described in detail here.

[0047] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, mechanisms, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example.

[0048] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. An integrated dust-binding device for automatic exposure connection, characterized in that: include: A transfer machine, wherein a first inlet is provided on one side of the transfer machine; A mounting seat, the mounting seat being arranged on one side of the transfer machine; A dust collecting machine is connected to the mounting base, and a second inlet and a second outlet are provided on opposite sides of the dust collecting machine. The second outlet is arranged opposite to the first inlet, and the second outlet and the first inlet are on the same horizontal plane.

2. The integrated dust-binding device for automatic exposure line according to claim 1, characterized in that: A first mounting portion is provided on the top of the mounting seat, and a second mounting portion is provided on the bottom of the dust collecting machine, and the first mounting portion is positioned and matched with the second mounting portion.

3. The integrated dust-binding device for automatic exposure line according to claim 2, characterized in that: The first mounting portion is a mounting protrusion, the second mounting portion is a mounting groove, and the mounting protrusion is positioned and fitted in the mounting groove.

4. The integrated dust-binding device for automatic exposure line according to claim 2, characterized in that: A third mounting portion is provided on one side of the mounting seat, and a fourth mounting portion is further provided on one side of the transfer machine. The third mounting portion and the fourth mounting portion are positioned and matched.

5. The integrated dust-binding device for automatic exposure line according to claim 4, characterized in that: The third mounting portion is a mounting buckle, the fourth mounting portion is a mounting slot, and the mounting buckle is mounted in the mounting slot.

6. The integrated dust-binding device for automatic exposure line according to claim 4, characterized in that: The mounting seat comprises: A first rod body, wherein the first rod body is arranged in a horizontal direction, and the first mounting portion is arranged on the first rod body; A second rod body, the second rod body is connected to one end of the first rod body, the third mounting portion is disposed on the second rod body, and the second rod body is disposed in a vertical direction; A third rod body is connected to the free ends of the first rod body and the second rod body, and the third rod body is tilted.

7. The integrated dust-binding device for automatic exposure line according to claim 1, characterized in that: There are multiple mounting seats and at least two of them are arranged in parallel.

8. The integrated dust-binding device for automatic exposure line according to claim 1, characterized in that: Also includes: Dust covers, there are multiple dust covers, and at least two of the dust covers are respectively and correspondingly arranged on the outside of the second inlet and the second outlet.

9. The integrated dust-binding device for automatic exposure line according to claim 8, characterized in that: Also includes: An electrostatic rod, wherein the dust cover is provided with an electrostatic rod mounting hole, the electrostatic rod is arranged in the electrostatic rod mounting hole, and the electrostatic rod mounting holes are correspondingly arranged on both sides of the second inlet and the second outlet in the up and down directions.

10. The integrated dust-binding device for automatic exposure line according to claim 1, characterized in that: The transfer machine is provided with a first communication interface, and the dust collecting machine is provided with a second communication interface, and the first communication interface is communicatively connected with the second communication interface.

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