Vacuum coating machine capable of coating multiple articles

Abstract

The utility model belongs to the technical field of vacuum coating machines, and particularly relates to a vacuum coating machine capable of coating a plurality of articles, which comprises a base, a box body arranged above the base, a vacuum pump arranged above the box body, a sealing door arranged on the surface of the box body, an observation window arranged on the surface of the sealing door, and a connecting pipe arranged inside the box body, a partition plate is arranged below the connecting pipe, a motor is arranged above the partition plate, a shaft rod is arranged in the box body, a rotating mechanism is arranged below the partition plate, a mounting mechanism is arranged below the rotating mechanism, a fixing mechanism is arranged in the box body, and a through hole is formed in the surface of the mounting mechanism; the fixing mechanism comprises a fixing plate, a bearing seat, an ejector pin, a sliding sleeve and a locking bolt. Through the cooperation of the rotating mechanism, the mounting mechanism and the fixing mechanism, a plurality of articles can be fixed and coated by the device, and the articles can perform circumferential rotation and autorotation in the device, so that the uniformity and efficiency of coating are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating machines, in particular to a vacuum coating machine capable of coating multiple objects. Background Art

[0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a higher vacuum degree. There are many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and many other types. The substrate to be coated is called the substrate, and the material to be coated is called the target. Evaporation coating generally heats the target material to evaporate the surface components in the form of atomic groups or ions, and settle on the surface of the substrate, and form a thin film through the film forming process (scattered points-island structure-vagal structure-layered growth). For sputtering coating, it can be simply understood as bombarding the target material with electrons or high-energy lasers, and sputtering the surface components in the form of atomic groups or ions, and finally depositing on the surface of the substrate, undergoing a film forming process, and finally forming a thin film.

[0003] The prior art has the following problems:

[0004] When the existing vacuum coating machines are in use, since the objects are in a stationary state inside the vacuum coating machines, the coating of the objects is not uniform and efficient, thereby reducing the working efficiency of the vacuum coating machines. At the same time, the existing vacuum coating machines are not able to coat multiple objects at the same time, and the coating machines are not flexible enough in fixing objects of different lengths, which affects the practicality of the coating machines. Utility Model Content

[0005] In view of the shortcomings of the prior art, the utility model provides a vacuum coating machine that can coat multiple objects, solving the problems of low coating efficiency, uneven coating, inability to coat multiple objects, and lack of flexibility in fixing objects of different lengths in current vacuum coating machines.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a vacuum coating machine capable of coating multiple articles, comprising a base, a box body is arranged above the base, a vacuum pump is arranged above the box body, a sealing door is arranged on the surface of the box body, an observation window is arranged on the surface of the sealing door, a connecting pipe is arranged inside the box body, a partition is arranged below the connecting pipe, a motor is arranged above the partition, a shaft is arranged inside the box body, a rotating mechanism is arranged below the partition, a mounting mechanism is arranged below the rotating mechanism, a fixing mechanism is arranged inside the box body, and a through hole is arranged on the surface of the mounting mechanism;

[0007] The fixing mechanism includes a fixing plate, a bearing seat, an ejector pin, a sliding sleeve and a locking bolt. The bearing seat is fixedly installed on the surface of the fixing plate, the ejector pin is movably connected above the bearing seat, the sliding sleeve is fixedly installed below the fixing plate, and the locking bolt is threadedly connected to one side of the sliding sleeve.

[0008] As a preferred technical solution of the utility model, the rotating mechanism includes a connecting rod, a fixing ring and a gear ring, the connecting rod is fixedly connected to the fixing ring, and the gear ring is fixedly installed on the outer surface of the fixing ring.

[0009] As a preferred technical solution of the utility model, the mounting mechanism includes a mounting plate, a suspension rod, a gear, a connecting plate and a hook. The mounting plate is movably connected to the suspension rod inside, and gears and connecting plates are fixedly installed at both ends of the suspension rod, and a hook is fixedly installed below the connecting plate.

[0010] As a preferred technical solution of the utility model, the partition is fixedly installed inside the box, the connecting pipe is fixedly connected to the vacuum pump, and the motor is drivingly connected to the shaft rod.

[0011] As a preferred technical solution of the utility model, the fixed plate and the sliding sleeve are both slidably connected to the shaft rod, and the bearing seat and the ejector pin are arranged around the upper surface of the fixed plate.

[0012] As a preferred technical solution of the utility model, the connecting rod is fixedly installed with the partition, the fixing ring is sleeved on the outside of the shaft, and the connecting rod is arranged around the upper surface of the fixing ring.

[0013] As a preferred technical solution of the utility model, the through hole passes through the mounting plate, the suspension rod is arranged around the inside of the mounting plate, and the gear is meshed with the rotating mechanism.

[0014] Compared with the prior art, the utility model provides a vacuum coating machine capable of coating multiple objects, which has the following beneficial effects:

[0015] 1. The utility model provides a vacuum coating machine which can coat multiple objects. The vacuum coating machine has a partition installed inside a box body, and a connecting rod is fixedly connected to the bottom of the partition. A gear ring is fixedly installed on the surface of a fixed ring fixedly installed below the connecting rod. A mounting plate is fixedly installed on the surface of an axle rod, and a suspension rod is movably connected inside the mounting plate. A gear is fixedly installed above the suspension rod, and the gear is meshed with the gear ring of a rotating mechanism. Therefore, the axle rod drives the mounting plate to rotate under the action of a motor, so that the object under the hook can rotate in a circle. At the same time, under the action of the gear and the meshing, the object can still rotate on its own while rotating in a circle. Therefore, when the device is in use, the object can rotate in a circle and on its own inside the vacuum coating machine, so that the coating of the object is more uniform and efficient, thereby improving the use effect of the vacuum coating machine.

[0016] 2. The utility model provides a vacuum coating machine that can coat multiple objects. A fixing mechanism is installed on the surface of a shaft, and a fixing plate and a sliding sleeve of the fixing mechanism are both sleeved with the shaft. Therefore, the vertical position of the fixing plate can be adjusted by the sliding sleeve, and then the object can be clamped and fixed from the bottom of the object in cooperation with the installation mechanism under the action of the ejector pin. At the same time, the sliding sleeve and the fixing plate can be connected to the shaft through a locking bolt. Therefore, when the installation mechanism rotates, the fixing mechanism can rotate synchronously, and the ejector pin can rotate through the setting of the bearing seat, so that the self-rotation of the object will not be hindered. Therefore, the device can coat multiple objects at the same time by providing multiple groups of suspension rods, connecting plates and hooks and a corresponding number of ejectors. Moreover, since the fixing mechanism can be adjusted, the device can fix objects of different lengths, thereby effectively improving the practicality of the vacuum coating machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is the main view of the overall structure of the utility model;

[0018] Figure 2 This is a schematic diagram of the internal structure of the box of the utility model;

[0019] Figure 3 This is a schematic diagram of the structure of the rotating mechanism of the utility model;

[0020] Figure 4 This is a schematic diagram of the installation mechanism structure of the utility model.

[0021] In the figure: 1. base; 2. box body; 3. vacuum pump; 4. sealing door; 5. observation window; 6. connecting pipe; 7. partition; 8. motor; 9. rotating mechanism; 91. connecting rod; 92. fixing ring; 93. gear ring; 10. mounting mechanism; 101. mounting plate; 102. suspension rod; 103. gear; 104. connecting plate; 105. hook; 11. fixing mechanism; 111. fixing plate; 112. bearing seat; 113. ejector pin; 114. sliding sleeve; 115. locking bolt; 12. through hole; 13. shaft. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] See also Figure 1-4 In this embodiment: a vacuum coating machine capable of coating multiple articles comprises a base 1, a box 2 is arranged above the base 1, a vacuum pump 3 is arranged above the box 2, the interior of the box 2 is evacuated by the vacuum pump 3, a sealing door 4 is arranged on the surface of the box 2, an observation window 5 is arranged on the surface of the sealing door 4, a connecting pipe 6 is arranged inside the box 2, a partition 7 is arranged below the connecting pipe 6, a motor 8 is arranged above the partition 7, the motor 8 is installed through the partition 7, a shaft 13 is arranged inside the box 2, a rotating mechanism 9 is arranged below the partition 7, a mounting mechanism 10 is arranged below the rotating mechanism 9, a fixing mechanism 11 is arranged inside the box 2, and a through hole 12 is arranged on the surface of the mounting mechanism 10;

[0024] The fixing mechanism 11 includes a fixing plate 111, a bearing seat 112, a ejector pin 113, a sleeve 114 and a locking bolt 115. The bearing seat 112 is fixedly installed on the surface of the fixing plate 111, the ejector pin 113 is movably connected above the bearing seat 112, the sleeve 114 is fixedly installed below the fixing plate 111, and the locking bolt 115 is threadedly connected to one side of the sleeve 114. The locking bolt 115 allows the position of the fixing plate 111 to be vertically adjusted and fixed.

[0025] In this embodiment, the rotating mechanism 9 includes a connecting rod 91, a fixing ring 92 and a gear ring 93. The connecting rod 91 is fixedly connected to the fixing ring 92, and the gear ring 93 is fixedly installed on the outer surface of the fixing ring 92. The rotating mechanism 9 and the partition 7 are installed through the connecting rod 91; the mounting mechanism 10 includes a mounting plate 101, a suspension rod 102, a gear 103, a connecting plate 104 and a hook 105. The interior of the mounting plate 101 is movably connected with the suspension rod 102, and the gears 103 and the connecting plate 104 are fixedly installed at both ends of the suspension rod 102. The hook 105 is fixedly installed below the connecting plate 104, and the objects are installed through the connecting plate 104 and the hook 105; the partition 7 is fixedly installed inside the box body 2 The connecting pipe 6 is fixedly connected to the vacuum pump 3, and the motor 8 is transmission-connected to the shaft 13, so that the shaft 13 can be driven to rotate by the motor 8; the fixed plate 111 and the sliding sleeve 114 are both slidingly connected to the shaft 13, and the bearing seat 112 and the ejector pin 113 are arranged around the upper surface of the fixed plate 111, and the ejector pin 113 can be rotated through the bearing seat 112; the connecting rod 91 is fixedly installed with the partition 7, the fixing ring 92 is sleeved on the outside of the shaft 13, the connecting rod 91 is arranged around the upper surface of the fixing ring 92, and the gear ring 93 is installed through the fixing ring 92; the through hole 12 passes through the mounting plate 101, the suspension rod 102 is arranged around the inside of the mounting plate 101, and the gear 103 is engaged with the rotating mechanism 9.

[0026] The working principle and use process of the utility model are as follows: after the operator opens the sealing door 4, connects the lifting ring of the article with the lifting hook 105 of the installation mechanism 10, and installs the remaining articles to be coated in turn, reverses the locking bolt 115, pushes the sliding sleeve 114 to move upward, so that the fixing plate 111 drives the ejector pin 113 to move synchronously, and the ejector pin 113 contacts the bottom of the article to fix the article, and then fixes the position of the fixing plate 111 and the sliding sleeve 114 by rotating the locking bolt 115, closes the sealing door 4, starts the vacuum pump 3 to evacuate the inside of the box body 2, and then passes through the box body. 2 The coating medium is sent into the box body 2 through the pipe on the back, and the shaft 13 is driven to rotate by starting the motor 8, so that the mounting plate 101 drives the suspension rod 102 to rotate in a circle, and further drives the object to rotate in a circle through the connecting plate 104 and the hook 105. Since the gear 103 installed above the suspension rod 102 is meshed with the gear ring 93, the suspension rod 102 can rotate by itself under the action of the gear 103 and the gear ring 93 while the suspension rod 102 rotates in a circle, and then the object rotates by itself between the hook 105 and the ejector pin 113, so that multiple objects can be efficiently and evenly coated by the circular rotation and self-rotation of the objects.

[0027] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A vacuum coating machine capable of coating multiple objects, comprising a base (1), a box (2) disposed above the base (1), a vacuum pump (3) disposed above the box (2), a sealing door (4) disposed on the surface of the box (2), an observation window (5) disposed on the surface of the sealing door (4), a connecting pipe (6) disposed inside the box (2), a partition (7) disposed below the connecting pipe (6), a motor (8) disposed above the partition (7), and a shaft (13) disposed inside the box (2), characterized in that: A rotating mechanism (9) is provided below the partition (7), a mounting mechanism (10) is provided below the rotating mechanism (9), a fixing mechanism (11) is provided inside the box (2), and a through hole (12) is provided on the surface of the mounting mechanism (10); The fixing mechanism (11) comprises a fixing plate (111), a bearing seat (112), a ejector pin (113), a sliding sleeve (114) and a locking bolt (115); the bearing seat (112) is fixedly mounted on the surface of the fixing plate (111); the ejector pin (113) is movably connected to the upper part of the bearing seat (112); the sliding sleeve (114) is fixedly mounted on the lower part of the fixing plate (111); and the locking bolt (115) is threadedly connected to one side of the sliding sleeve (114).

2. The vacuum coating machine capable of coating multiple objects according to claim 1, characterized in that: The rotating mechanism (9) comprises a connecting rod (91), a fixing ring (92) and a gear ring (93); the connecting rod (91) is fixedly connected to the fixing ring (92); and the gear ring (93) is fixedly mounted on the outer surface of the fixing ring (92).

3. The vacuum coating machine capable of coating multiple objects according to claim 1, characterized in that: The mounting mechanism (10) comprises a mounting plate (101), a suspension rod (102), a gear (103), a connecting plate (104) and a hook (105); the mounting plate (101) is movably connected to the suspension rod (102); the two ends of the suspension rod (102) are respectively fixedly mounted with a gear (103) and a connecting plate (104); and the bottom of the connecting plate (104) is fixedly mounted with a hook (105).

4. The vacuum coating machine capable of coating multiple objects according to claim 1, characterized in that: The partition plate (7) is fixedly installed inside the box body (2), the connecting pipe (6) is fixedly connected to the vacuum pump (3), and the motor (8) is drivingly connected to the shaft rod (13).

5. The vacuum coating machine capable of coating multiple objects according to claim 1, characterized in that: The fixing plate (111) and the sliding sleeve (114) are both slidably connected to the shaft (13), and the bearing seat (112) and the ejector pin (113) are arranged around the upper surface of the fixing plate (111).

6. The vacuum coating machine capable of coating multiple objects according to claim 2, characterized in that: The connecting rod (91) is fixedly mounted on the partition (7), the fixing ring (92) is sleeved on the outside of the shaft rod (13), and the connecting rod (91) is arranged around the upper surface of the fixing ring (92).

7. The vacuum coating machine capable of coating multiple objects according to claim 3, characterized in that: The through hole (12) passes through the mounting plate (101), the suspension rod (102) is arranged around the inside of the mounting plate (101), and the gear (103) is meshed with the rotating mechanism (9).

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