Auxiliary positioning support and semiconductor device
By using auxiliary positioning brackets in semiconductor equipment, ensuring that the cover ring and the retaining ring remain concentric during installation, the arc discharge problem caused by position deviation is solved and the process yield is improved.
Patent Information
- Application Number
- CN202421221772.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-30
- Publication Date
- 2025-02-11
- Estimated Expiration
- 2034-05-30
AI Technical Summary
In the physical vapor deposition process of semiconductor equipment, improper installation of the cover ring and the retaining ring can easily lead to position deviation, causing the cover ring and the retaining ring to come into contact, resulting in arc discharge, and reducing the yield of wafer products.
An auxiliary positioning bracket is provided, including a fixing part and a telescopic part. By engaging the target structure through the fixing part, the second telescopic mechanism of the telescopic part extends outward along the radial direction of the fixing part to engage the structure to be installed and maintain the installation to be installed. The structure coincides with the axis line of the target structure to avoid contact.
By assisting in the use of the auxiliary positioning bracket, ensure that the structure to be installed and the target structure remain concentric during the installation process, avoid the occurrence of arc discharge, and improve the process yield.
Smart Images
Figure CN222455175U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of semiconductor equipment, and in particular to an auxiliary positioning bracket and semiconductor equipment. Background Art
[0002] In the current physical vapor deposition (PVD) process, a cover ring and a shield are required to be installed outside the equipment chamber to block the metal material deposited outside the wafer and prevent the metal from being deposited on the equipment chamber wall. In the process of preventive maintenance (PM) of semiconductor equipment, the cover ring and the shield need to be regularly maintained and replaced to ensure the yield of wafer products.
[0003] During the installation of the cover ring and the retaining ring, it is necessary to strictly ensure that the cover ring and the retaining ring are concentric and keep the distance between them consistent. If the position of the cover ring is offset during the installation process, it is easy to cause the cover ring and the retaining ring to contact, resulting in arc discharge (Arcing), which will adversely affect the physical vapor deposition process (such as the coating process) and reduce the yield of the wafer product. Utility Model Content
[0004] Based on this, an embodiment of the present application provides an auxiliary positioning bracket and a semiconductor device, which effectively ensures that the structure to be installed and the target structure remain concentric during the installation process by assisting in positioning the structure to be installed, so as to avoid contact between the two, thereby facilitating ensuring the process yield.
[0005] In order to achieve the above-mentioned purpose, in the first aspect, some embodiments of the present application provide an auxiliary positioning bracket. The auxiliary positioning bracket includes a fixed portion and a telescopic portion. The fixed portion is used to engage the target structure and make the axis center line of the fixed portion coincide with the axis center line of the target structure. The telescopic portion includes a first telescopic mechanism and a second telescopic mechanism; the first telescopic mechanism is connected to the fixed portion, and can be telescoped along the axis center line direction of the fixed portion and in a parallel direction thereof; the second telescopic mechanism is located at one end of the first telescopic mechanism, and can be telescoped along the radial direction of the fixed portion, and is used to engage the structure to be installed when extending outward, and release the structure to be installed when contracting inward, so as to install the structure to be installed on the target structure.
[0006] In some embodiments, the second telescopic mechanism is detachably connected to the first telescopic mechanism.
[0007] In some embodiments, the second telescopic mechanism includes a telescopic head whose axis coincides with the axis of the fixing portion and is arranged in a ring shape.
[0008] In some embodiments, the second telescopic mechanism includes at least two telescopic heads spaced apart on the same virtual ring contour; wherein the axis of the virtual ring contour coincides with the axis of the fixed portion; and each telescopic head is used to extend outward synchronously and to retract inward synchronously.
[0009] In some embodiments, the side wall surface of the telescopic head for engaging with the structure to be installed is an inclined surface or a stepped surface.
[0010] In some embodiments, the first telescopic mechanism includes a linear guide rail and a telescopic rod. The linear guide rail extends along the axis direction of the fixed portion or in a parallel direction thereof; the telescopic rod is movably connected to the linear guide rail and can extend out of the linear guide rail in a direction close to the area to be installed in the target structure, and retract into the linear guide rail in a direction away from the area to be installed.
[0011] In some embodiments, the length ratio of the telescopic rod to the linear guide rail ranges from 1:2 to 2:1.
[0012] In some embodiments, the target structure has a positioning groove; the fixing portion includes a positioning block matched with the positioning groove.
[0013] In a second aspect, the present application also provides a semiconductor device according to some embodiments; the semiconductor device comprises an auxiliary positioning bracket as described in any one of the embodiments of the first aspect of the present application. Wherein, the positioning groove is an annular groove; and the positioning block comprises an annular positioning block.
[0014] In some embodiments, the target structure includes a retaining ring; and the structure to be mounted includes a cover ring or a retaining plate.
[0015] The embodiments of the present application may or at least have the following advantages:
[0016] In the embodiment of the present application, the fixed part engages with the target structure, and the second telescopic mechanism of the telescopic part extends outward along the radial direction of the fixed part to engage with the structure to be installed, and keeps the axis of the structure to be installed coincident with the axis of the target structure; after the installation is completed, the second telescopic mechanism of the telescopic part contracts inward along the radial direction of the fixed part to loosen the structure to be installed, so as to install the structure to be installed on the target structure. In this way, the fixed part and the telescopic part, which are concentrically arranged, cooperate with each other to ensure that the axis of the structure to be installed and the target structure remain coincident during the installation process, so as to complete the installation process without contacting the structure to be installed and the target structure, thereby effectively avoiding the adverse effects caused by contact between the two (such as arc discharge), thereby improving the process yield.
[0017] The details of one or more embodiments of the present application are set forth in the following drawings and description. Other features, objects, and advantages of the present application will become apparent from the description, drawings, and claims. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the conventional technology, the drawings required for use in the embodiments or the conventional technology descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.
[0019] Figure 1 is a cross-sectional schematic diagram of an auxiliary positioning bracket provided in some embodiments;
[0020] Figure 2 A schematic diagram of the positional relationship between a target structure, a structure to be installed and a telescopic head provided in some embodiments;
[0021] Figure 3 is a top view of a second telescopic mechanism provided in some embodiments;
[0022] Figure 4 is a top view of another second telescopic mechanism provided in some embodiments;
[0023] Figure 5 A cross-sectional schematic diagram of another auxiliary positioning bracket provided in some embodiments.
[0024] Description of reference numerals:
[0025] 1-fixed part, 11-positioning block, 2-telescopic part, 21-first telescopic mechanism, 211-linear guide rail, 212-telescopic rod, 22-second telescopic mechanism, 221-telescopic head, a-target structure, b-structure to be installed, g-positioning groove. DETAILED DESCRIPTION
[0026] In order to facilitate understanding of the present application, the present application will be described more fully below with reference to the relevant drawings. The preferred embodiments of the present application are given in the drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.
[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.
[0028] It should be understood that when an element or layer is referred to as being "on," "adjacent to," or "connected to" other elements or layers, it may be directly on, adjacent to, connected to, or coupled to other elements or layers, or there may be intervening elements or layers. It should be understood that, although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers, doping types, and / or portions, these elements, components, regions, layers, doping types, and / or portions should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer, doping type, or portion from another element, component, region, layer, doping type, or portion. Therefore, without departing from the teachings of the present application, the first element, component, region, layer, doping type, or portion discussed below may be represented as a second element, component, region, layer, or portion.
[0029] When used herein, the singular forms "a", "an", and "said / the" may also include plural forms, unless the context clearly indicates otherwise. It should also be understood that when the terms "consisting of" and / or "comprising" are used in this specification, the presence of the features, integers, steps, operations, elements and / or parts can be determined, but the presence or addition of one or more other features, integers, steps, operations, elements, parts and / or groups is not excluded. At the same time, when used herein, the term "and / or" includes any and all combinations of the relevant listed items.
[0030] Embodiments of the utility model are described herein with reference to cross-sectional views which are schematic diagrams of ideal embodiments (and intermediate structures) of the present application, so that variations in the shapes shown due to, for example, manufacturing techniques and / or tolerances can be expected. Embodiments of the present application should not be limited to the specific shapes of the regions shown herein, but include shape deviations due to, for example, manufacturing techniques. Therefore, the regions shown in the figures are schematic in nature, their shapes do not represent the actual shapes of the regions of the device, and do not limit the scope of the present application.
[0031] The embodiments of the present application provide an auxiliary positioning bracket and a semiconductor device, which can effectively ensure that the structure to be installed and the target structure remain concentric during the installation process by assisting the positioning of the structure to be installed, so as to avoid contact between the two, thereby ensuring the process yield.
[0032] In order to achieve the above objectives, in a first aspect, some embodiments of the present application provide an auxiliary positioning bracket.
[0033] In some embodiments, see Figure 1The auxiliary positioning bracket includes a fixed part 1 and a telescopic part 2. The fixed part 1 is used to engage with the target structure a, and to make the axis center line of the fixed part 1 coincide with the axis center line of the target structure a. The telescopic part 2 includes a first telescopic mechanism 21 and a second telescopic mechanism 22; the first telescopic mechanism 21 is connected to the fixed part 1, and can be telescopic along the axis center line direction of the fixed part 1 and the parallel direction thereof; the second telescopic mechanism 22 is located at one end of the first telescopic mechanism 21, and can be telescopic along the radial direction of the fixed part 1, and is used to engage with the structure to be installed b when extending outward, and release the structure to be installed b when contracting inward, so as to install the structure to be installed b on the target structure a.
[0034] For example, the shape of the fixing portion 1 includes but is not limited to a ring shape or a disc shape.
[0035] For example, the shape of the first telescopic mechanism 21 includes but is not limited to a rod shape or a circular ring shape.
[0036] By way of example, the second telescopic mechanism 22 is located at an end of the first telescopic mechanism 21 away from the fixing portion 1 .
[0037] For example, the shape of the second telescopic mechanism 22 includes but is not limited to a ring shape or a disc shape.
[0038] For example, the engagement manner between the second telescopic mechanism 22 and the structure b to be installed includes but is not limited to abutment or insertion.
[0039] For example, the connection method between the structure b to be installed and the target structure a includes but is not limited to abutment or plugging.
[0040] In the embodiment of the present application, the fixing part 1 engages with the target structure a, and the second telescopic mechanism 22 of the telescopic part 2 extends outward along the radial direction of the fixing part 1 to engage with the structure to be installed b, and keeps the axis of the structure to be installed b coincident with the axis of the target structure a; after the installation is completed, the second telescopic mechanism 22 of the telescopic part 2 contracts inward along the radial direction of the fixing part 1 to release the structure to be installed b, so as to install the structure to be installed b on the target structure a. In this way, the fixing part 1 and the telescopic part 2, which are concentrically arranged, cooperate with each other to ensure that the axis of the structure to be installed b and the target structure a remain coincident during the installation process, so as to complete the installation process under the premise that the structure to be installed b and the target structure a do not contact each other, thereby effectively avoiding the adverse effects caused by the contact between the two (such as arc discharge phenomenon), thereby improving the process yield.
[0041] In some embodiments, the second telescopic mechanism 22 is detachably connected to the first telescopic mechanism 21 .
[0042] It should be noted that the second telescopic mechanism 22 in the embodiment of the present application can be disassembled and replaced with a variety of different structures to be suitable for engagement with different structures b to be installed.
[0043] For example, the connection method between the second telescopic mechanism 22 and the first telescopic mechanism 21 includes, but is not limited to, rivet connection, plug-in connection, and screw connection.
[0044] In some embodiments, please refer to Figure 1 The second telescopic mechanism 22 includes a telescopic head 221 .
[0045] For example, the material of the telescopic head 221 includes but is not limited to ceramic, metal or hard rubber.
[0046] In some embodiments, see Figure 2 The shape of the telescopic head 221 is adapted to the structure b to be installed.
[0047] For some examples, see Figure 2 The telescopic head 221 is used to engage with the side wall surface of the structure b to be installed, including but not limited to a slope or a step surface.
[0048] In the embodiment of the present application, the side wall surface of the telescopic head 221 used to engage the structure b to be installed is set as an inclined surface or a step surface, so that the structure b to be installed can be stably placed on the telescopic head 221, and when the telescopic head 221 contracts inward, the structure b to be installed remains in a fixed position when separated from the telescopic head 221, so as to improve the accuracy of installation positioning.
[0049] For some examples, see Figure 3 The second telescopic mechanism 22 includes a telescopic head 221 whose axis coincides with the axis of the fixing part 1 and is arranged in a ring shape.
[0050] For other examples, see Figure 4 The second telescopic mechanism 22 includes at least two telescopic heads 221 spaced apart on the same virtual ring contour; wherein the axis of the virtual ring contour coincides with the axis of the fixing portion 1; each telescopic head 221 is used to extend outward synchronously and to retract inward synchronously.
[0051] For example, the telescopic heads 221 are distributed at equal intervals on the same virtual ring contour.
[0052] It should be noted that Figure 4 In the example, the number of the telescopic heads 221 is four, but it can be understood that the number of the telescopic heads 221 can be one or more, and the present application does not limit this.
[0053] For example, the number of telescopic heads 221 includes but is not limited to 2, 4, 6 or 8, etc.
[0054] For example, when the retractable heads 221 are synchronously extended outward, they are synchronously in contact with the structure b to be installed; when the retractable heads 221 are synchronously retracted inward, they are synchronously separated from the structure b to be installed.
[0055] In some embodiments, see Figure 5 , each telescopic head 221 can be fixed to the same disc base 23.
[0056] In some embodiments, see Figure 1 The first telescopic mechanism 21 includes a linear guide rail 211 and a telescopic rod 212. The linear guide rail 211 extends along the axis direction of the fixing part 1 or in a parallel direction thereof; the telescopic rod 212 is movably connected to the linear guide rail 211, and can extend out of the linear guide rail 211 in a direction close to the area to be installed in the target structure a, and retract into the linear guide rail 211 in a direction away from the area to be installed.
[0057] It should be noted that Figure 1 In the example, two linear guide rails 211 are used, but it can be understood that the number of the linear guide rails 211 can also be one or more, and the present application does not limit this.
[0058] For example, the number of the first telescopic mechanisms 21 includes but is not limited to 2, 4, 6 or 8.
[0059] By way of example, the first telescopic mechanisms 21 are distributed at intervals on the same virtual ring contour.
[0060] In some embodiments, the length ratio of the telescopic rod 212 to the linear guide rail 211 ranges from 1:2 to 2:1.
[0061] For example, the length ratio of the telescopic rod 212 to the linear guide rail 211 includes, but is not limited to, 1:2, 1:1, or 2:1.
[0062] In some embodiments, the target structure a has a positioning groove g; the fixing portion 1 includes a positioning block 11 matched with the positioning groove g.
[0063] It should be noted that, in some embodiments, the positioning groove g can also be reused as a receiving groove for placing packaging structures such as O-rings or ceramic rings.
[0064] In some examples, the positioning groove g is matched with the positioning block 11. It should be noted that the engagement between the fixing portion 1 and the target structure a is achieved by the engagement between the positioning block 11 and the positioning groove g.
[0065] For example, please continue to see Figure 1 The positioning groove g has a depression on one side close to the fixing part 1, and the positioning block 11 has a protrusion at a position corresponding to the depression; and the shapes of the depression and the protrusion are adapted. In this way, the engagement between the depression and the protrusion can ensure the engagement stability between the fixing part 1 and the target structure a, and the axis of the fixing part 1 coincides with the axis of the target structure a.
[0066] In some examples, the positioning groove g includes but is not limited to an annular positioning groove g; the positioning block 11 includes but is not limited to an annular positioning block 11.
[0067] In other examples, the number of the positioning grooves g and the number of the positioning blocks 11 can be multiple, and each positioning groove g and each positioning block 11 is set in one-to-one correspondence and distributed at intervals on the same virtual ring contour.
[0068] It should be noted that the auxiliary positioning bracket provided in the embodiment of the present application can be used as follows to install the structure b to be installed on the target structure a: extend the second telescopic mechanism 22 outward and engage it with the structure b to be installed; engage the auxiliary positioning bracket with the target structure a through the fixing part 1, and keep the axis line of the fixing part 1 coincident with the axis line of the target structure a; adjust the first telescopic mechanism 21 (for example, extend the telescopic rod 212 out of the linear guide rail 211 in a direction close to the area to be installed in the target structure a), so that the structure b to be installed is engaged with the target structure a, and the axis line of the structure b to be installed coincides with the axis line of the target structure a; adjust the second telescopic mechanism 22, so that the second telescopic mechanism 22 shrinks inward and separates from the structure b to be installed, so as to remove the auxiliary positioning bracket.
[0069] It is worth mentioning that in the physical vapor deposition (PVD) process, a cover ring and a shield are required to be arranged outside the equipment chamber to block the metal material deposited outside the wafer, so as to avoid the adverse effect of metal deposition on the chamber wall on the process yield. In some embodiments, the auxiliary positioning bracket provided in the embodiments of the present application can be used for the installation of the cover ring and the shield in the physical vapor deposition equipment.
[0070] By way of example, the target structure a includes, but is not limited to, a retaining ring and the like.
[0071] For example, the structure b to be installed includes but is not limited to a cover ring or a baffle.
[0072] By way of example, the baffle may be, for example, a shutter disk.
[0073] It should be noted that when using the auxiliary positioning bracket provided in the embodiment of the present application to install the cover ring and the retaining ring in the physical vapor deposition equipment, the auxiliary positioning bracket can engage the retaining ring through the fixed part 1 and the cover ring through the telescopic part 2 to ensure that the axis line of the retaining ring, the axis line of the cover ring and the axis line of the equipment chamber are all coincident after installation, and the spacing between the retaining ring and the cover ring is equal, so as to avoid the arc discharge (Arcing) phenomenon caused by the contact between the cover ring and the retaining ring; in addition, there is no obvious friction between the auxiliary positioning bracket and the various structures during the installation process, which reduces the impact on the particles in the wafer chip clean room. In this way, the auxiliary positioning bracket provided in the embodiment of the present application can effectively improve the process yield of the physical vapor deposition process (such as the coating process).
[0074] In the second aspect, the present application also provides a semiconductor device according to some embodiments, the semiconductor device includes an auxiliary positioning bracket as described in any one of the embodiments of the first aspect of the present application. The semiconductor device also has the technical advantages of the aforementioned auxiliary positioning bracket. It should be noted that the parts that are the same or corresponding to the above embodiments can refer to the corresponding description of the above embodiments, and will not be described in detail below.
[0075] By way of example, semiconductor equipment includes, but is not limited to, physical vapor deposition (PVD) equipment.
[0076] In some embodiments, the target structure a includes but is not limited to a shield; the structure to be installed b includes but is not limited to a cover ring or a baffle.
[0077] The technical features of the above embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0078] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the utility model patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application.
Claims
1. An auxiliary positioning bracket, characterized in that: include: A fixing portion, used for engaging with a target structure and making the axis of the fixing portion coincide with the axis of the target structure; The telescopic part comprises: A first telescopic mechanism, connected to the fixing portion, capable of telescoping along the axis direction of the fixing portion and in a direction parallel to the axis direction of the fixing portion; The second telescopic mechanism is located at one end of the first telescopic mechanism, can be extended and retracted along the radial direction of the fixing portion, and is used to engage the structure to be installed when extending outward, and release the structure to be installed when contracting inward, so as to install the structure to be installed on the target structure.
2. The auxiliary positioning bracket according to claim 1, characterized in that: The second telescopic mechanism is detachably connected to the first telescopic mechanism.
3. The auxiliary positioning bracket according to claim 1, characterized in that: The second telescopic mechanism comprises a telescopic head whose axis coincides with the axis of the fixing portion and is arranged in a ring shape.
4. The auxiliary positioning bracket according to claim 1, characterized in that: The second telescopic mechanism comprises: at least two telescopic heads spaced apart on the same virtual ring contour; wherein the axis of the virtual ring contour coincides with the axis of the fixing portion; and each of the telescopic heads is used to extend outwards synchronously and to retract inwards synchronously.
5. The auxiliary positioning bracket according to claim 3 or 4, characterized in that: The telescopic head is used to engage with the side wall surface of the structure to be installed, which is an inclined surface or a stepped surface.
6. The auxiliary positioning bracket according to claim 1, characterized in that: The first telescopic mechanism comprises: A linear guide rail extending along the axis direction of the fixing portion or in a direction parallel to the axis direction of the fixing portion; The telescopic rod is movably connected to the linear guide rail and can be extended out of the linear guide rail in a direction close to the area to be installed in the target structure, and retracted into the linear guide rail in a direction away from the area to be installed.
7. The auxiliary positioning bracket according to claim 6, characterized in that: The length ratio of the telescopic rod to the linear guide rail ranges from 1:2 to 2:
1.
8. The auxiliary positioning bracket according to claim 1, characterized in that: The target structure has a positioning groove; the fixing portion includes a positioning block matched with the positioning groove.
9. A semiconductor device, characterized in that: include: The auxiliary positioning bracket according to any one of claims 1 to 8; The positioning groove is an annular groove; the positioning block includes an annular positioning block.
10. The semiconductor device according to claim 9, characterized in that The target structure includes a retaining ring; the structure to be installed includes a cover ring or a baffle.