Drying device and drying equipment

Abstract

The utility model discloses a drying device and drying equipment, relates to the technical field of solar cells, and aims to solve the problem that water drops still exist on a bottom rod of a flower basket after a silicon wafer is dried. And at the moment, when subsequent process treatment is carried out, residual water drops can pollute the silicon wafer, so that the quality of the silicon wafer is not qualified. The drying device comprises a drying groove and an air blowing assembly. The drying groove is used for containing workpieces and drying the workpieces, and the blowing assembly is located between the groove bottom of the drying groove and the workpieces. The air blowing assembly comprises an air inlet pipe and a flow dividing pipe. One end of the flow dividing pipe is arranged between the two ends of the air inlet pipe, and the flow dividing pipe is communicated with the air inlet pipe. Through holes are formed in the flow dividing pipes, the opening directions of the through holes face the workpieces, and the through holes are used for exhausting gas to dry the workpieces.

Description

Technical Field

[0001] The utility model relates to the technical field of solar cells, in particular to a drying device and drying equipment. Background Art

[0002] In the process of making solar cells, silicon wafers need to be dried. At present, the cleaned silicon wafers are generally placed in a basket, and then the basket and silicon wafers are placed in a drying tank for drying. During the drying process, the moisture on the basket and silicon wafers will gather on the bottom rod of the basket to form water droplets.

[0003] When the silicon wafers are dried, there are still water droplets on the bottom rod of the basket. At this time, during the subsequent process, the remaining water droplets will contaminate the silicon wafers, resulting in unqualified quality of the silicon wafers. Utility Model Content

[0004] The utility model aims to provide a drying device and drying equipment, which are used to accelerate the drying speed of the bottom rod of the flower basket so that the quality of the cleaned silicon wafers meets the requirements.

[0005] In order to achieve the above-mentioned purpose, in the first aspect, the utility model provides a drying device. The drying device comprises: a drying tank and a blowing assembly. The drying tank is used to accommodate and dry the workpiece, and the blowing assembly is located between the bottom of the drying tank and the workpiece. The blowing assembly comprises: an air inlet pipe and a diverter pipe. The air inlet pipe is used to introduce gas, one end of the diverter pipe is arranged between the two ends of the air inlet pipe, and the diverter pipe is connected to the air inlet pipe. A through hole is provided on the diverter pipe, and the opening direction of the through hole is toward the workpiece, which is used to discharge gas to dry the workpiece.

[0006] The above-mentioned workpiece can be a flower basket, a carrier or a material box, etc. The following description takes the workpiece as a flower basket as an example. The flower basket includes a flower basket bottom rod. It should be understood that the following description is only for understanding and is not used for specific limitation. Compared with the prior art, in the drying device provided by the utility model, since the opening direction of the through hole provided on the shunt pipe is toward the workpiece, when the shunt pipe is provided with gas by the air inlet pipe, the gas is blown toward the workpiece through the through hole. At this time, on the basis of drying the workpiece in the drying tank, the speed of removing water droplets on the workpiece can be accelerated, thereby accelerating the drying speed of the workpiece and reducing the time difference between the drying of the silicon wafer and the bottom rod of the flower basket. Based on this, not only the drying efficiency can be improved, but also the quality of the cleaned silicon wafer can meet the requirements.

[0007] In one implementation, the blowing assembly comprises: a plurality of flow dividers and two air inlet pipes that are opposite and spaced apart. The plurality of flow dividers are spaced apart between the two air inlet pipes, and the flow dividers are in communication with the two air inlet pipes.

[0008] When the above technical solution is adopted, the air blowing volume to the workpiece can be increased, and the speed of removing water droplets on the workpiece can be further accelerated, thereby further accelerating the drying speed of the workpiece and further reducing the time difference between the silicon wafer and the bottom rod of the flower basket.

[0009] In one implementation, along the length direction of the shunt tube, a plurality of through holes are opened on the same side wall of the shunt tube, and the opening directions of at least two of the through holes are the same.

[0010] When the above technical solution is adopted, the amount of gas reaching the workpiece can be ensured, the gas utilization rate can be improved, and resources can be saved.

[0011] In one implementation, the diameter of the through hole is greater than or equal to 1.25 mm and less than or equal to 5 mm.

[0012] In the case of adopting the above technical solution, since the diameter of the through hole is greater than or equal to 1.25 mm, it is possible to avoid too small a gas flow rate due to too small a diameter of the through hole, so as to ensure that the actual work needs are met. Furthermore, since the diameter of the through hole is less than or equal to 5 mm, it is possible to avoid too large a gas flow rate, reduce gas consumption, and reduce drying costs while meeting the actual work needs.

[0013] In one implementation, the diameter of the shunt tube is greater than or equal to 15 mm and less than or equal to 20 mm.

[0014] In the case of adopting the above technical solution, since the diameter of the shunt pipe is greater than or equal to 15 mm, it can be avoided that the gas flow rate is too small due to the small diameter of the shunt pipe, so as to ensure that the actual work needs are met. Furthermore, since the diameter of the shunt pipe is less than or equal to 20 mm, the number of shunt pipes provided in the drying tank can be increased to increase the air volume blown to the workpiece, thereby further accelerating the drying speed of the workpiece while meeting the actual work needs.

[0015] In one implementation, the material of the drying tank is the same as the material of the blowing component.

[0016] When the above technical solution is adopted, it is possible to avoid the mutual influence of the two different materials, which may lead to the unqualified quality of the drying tank and the blowing component, and also avoid the pollution of the two different materials. Furthermore, the drying device can meet the process requirements and ensure its yield.

[0017] In one implementation, the drying tank is a polyvinylidene fluoride drying tank, and the blowing component is a polyvinylidene fluoride blowing component.

[0018] When the above technical solution is adopted, since polyvinylidene fluoride has the characteristics of acid and alkali resistance and high temperature resistance, the drying tank and blowing assembly made of polyvinylidene fluoride also have the above characteristics. At this time, not only can the drying tank and blowing assembly be prevented from deformation during actual use to ensure their quality and extend their service life, but also contamination of the workpiece can be avoided. Furthermore, the drying tank and blowing assembly can also be adapted to different application scenarios to expand their scope of application.

[0019] In one implementation, the shunt tube is one or more of a linear shunt tube, a serpentine shunt tube, a spiral shunt tube, and a U-shaped shunt tube.

[0020] When the above technical solution is adopted, the shape of the shunt pipe can be set according to the shape of the workpiece or other influencing factors, and no specific limitation is made here. In this case, the blowing component can be adapted to different application scenarios and its application scope can be expanded.

[0021] In one implementation, the drying device further includes: a flow equalizer. The flow equalizer is disposed in the drying tank, between the bottom of the drying tank and the air blowing assembly, and the flow equalizer is parallel to the bottom of the drying tank. A plurality of flow equalizer holes are provided on the flow equalizer, and the flow equalizer holes penetrate the flow equalizer along the thickness direction of the flow equalizer.

[0022] When the above technical solution is adopted, in actual use, the air supply component is not only connected to the blowing component, but also provides gas to the drying tank. When the gas passes through the flow plate, the gas is dispersed under the shielding effect of the flow plate and the guiding effect of the flow hole, so as to avoid the gas being concentrated in one place. At this time, the workpiece can be evenly exposed to the wind to speed up the drying speed of the workpiece.

[0023] In one implementation, along the depth direction of the drying tank, the flow-uniform holes are correspondingly connected to the through holes.

[0024] When the above technical solution is adopted, the gas diffused upward through the uniform flow holes is rapidly passed through the through holes on the diverter pipe to reach the workpiece, so as to accelerate the drying speed of the workpiece.

[0025] In a second aspect, the utility model also provides a drying device. The drying device includes an air supply component and the drying device described in the above technical solution, the air supply component is connected to the air inlet pipe of the drying device, and is used to provide gas for the blowing component. The workpiece is a flower basket, and the flower basket is used to carry silicon wafers.

[0026] Since the drying equipment includes the drying device described in the above technical solution, and since the opening direction of the through hole on the shunt pipe is toward the workpiece, when the air inlet pipe is used to provide gas to the shunt pipe, the gas is blown toward the workpiece through the through hole. At this time, on the basis of drying the workpiece in the drying tank, the speed of removing water droplets on the workpiece can be accelerated, thereby accelerating the drying speed of the workpiece and reducing the time difference between the silicon wafer and the bottom rod of the flower basket. Based on this, not only the drying efficiency can be improved, but also the quality of the cleaned silicon wafer can meet the requirements.

[0027] In one implementation, the flower basket includes a flower basket bottom bar, the orthographic projection of which on the shunt tube is completely located on the shunt tube; or, the orthographic projection of which on the shunt tube occupies 30% to 50% of the side area of ​​the shunt tube, and the side of the shunt tube faces the flower basket bottom bar.

[0028] When the above technical solution is adopted, it is ensured that the gas can be blown onto the bottom rod of the flower basket through the through hole. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0030] Figure 1 This is a structural block diagram of a blowing component in an embodiment of the utility model;

[0031] Figure 2 It is a structural block diagram of two blowing components in an embodiment of the utility model;

[0032] Figure 3 This is a schematic diagram of the positional relationship between the bottom rod of the flower basket and the two blowing components in the embodiment of the utility model;

[0033] Figure 4 This is a comparison chart of the drying time in the prior art and the drying time when the drying device provided by the embodiment of the utility model is used.

[0034] Reference numerals:

[0035] 1-blowing assembly, 2-inlet pipe, 3-diverter pipe, 30-through hole, 4-flower basket, 40-flower basket bottom rod, 5-pipeline. DETAILED DESCRIPTION

[0036] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0037] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0038] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined. The meaning of "several" is one or more, unless otherwise clearly and specifically defined.

[0039] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0040] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0041] In order to solve the above technical problems, in the first aspect, the utility model provides a drying device. The drying device comprises: a drying tank and a blowing assembly. The drying tank is used to accommodate and dry the workpieces. The specific structure of the drying tank can be referred to the prior art and is not specifically limited here.

[0042] The air blowing assembly is located between the drying tank bottom and the workpiece. Figures 1 to 3The above-mentioned blowing assembly 1 includes: an air inlet pipe 2 and a diverter pipe 3. The air inlet pipe 2 is used to introduce gas. One end of the diverter pipe 3 is arranged between the two ends of the air inlet pipe 2. The diverter pipe 3 is connected to the air inlet pipe 2. The length direction L1 of the diverter pipe 3 may be consistent with or inconsistent with the length direction L2 of the air inlet pipe 2. In the embodiment of the utility model, the length direction L1 of the above-mentioned diverter pipe 3 is inconsistent with the length direction L2 of the air inlet pipe 2. A through hole 30 is provided on the diverter pipe 3. The opening direction of the through hole 30 faces the workpiece, which is used to exhaust gas to dry the workpiece. It should be noted that the above-mentioned gas can be selected according to the workpiece, and no specific limitation is made here. Furthermore, the other end of the above-mentioned diverter pipe 3 can be closed or open, as long as it meets the actual working needs.

[0043] See also Figures 1 to 3 , the workpiece can be a flower basket, a carrier or a material box, etc. The following description takes the workpiece as a flower basket as an example. The flower basket 4 includes a flower basket bottom rod 40. It should be understood that the following description is only for understanding and is not used for specific limitation. In the drying device provided by the embodiment of the utility model, since the opening direction of the through hole 30 provided on the shunt pipe 3 is toward the workpiece, when the air inlet pipe 2 is used to provide gas to the shunt pipe 3, the gas is blown toward the workpiece through the through hole 30. At this time, on the basis of drying the workpiece in the drying tank, the speed of removing water droplets on the workpiece can be accelerated, thereby accelerating the drying speed of the workpiece and reducing the time difference between the drying of the silicon wafer and the flower basket bottom rod 40. Based on this, not only the drying efficiency can be improved, but also the quality of the cleaned silicon wafer can meet the requirements. For details, see Figure 4 In the seven processing equipment, the drying time of silicon wafers and flower baskets by using the drying device provided by the embodiment of the utility model is reduced from 640 seconds in the prior art to 600 seconds, thereby improving the drying efficiency and thus improving the production efficiency of solar cells. It should be understood that the above-mentioned solar cells can be HPBC cells or other types of cells.

[0044] The number of the above-mentioned intake pipes and diverter pipes can be set according to actual needs. As a possible implementation method, see Figure 1 The above-mentioned blowing assembly 1 includes: a plurality of shunt pipes 3 and two air inlet pipes 2 that are opposite and spaced apart. The plurality of shunt pipes 3 are spaced apart between the two air inlet pipes 2, and the two ends of the shunt pipes 3 are respectively connected to the two air inlet pipes 2. At this time, the blowing amount to the workpiece can be increased, and the speed of removing water droplets on the workpiece can be further accelerated, thereby further accelerating the drying speed of the workpiece, and further reducing the time difference between the drying of the silicon wafer and the bottom rod 40 of the flower basket.

[0045] The number of through holes provided on the above-mentioned shunt pipe can be set according to actual needs, for example, it can be one, two or more. As a possible implementation method, see Figure 1, along the length direction L1 of the shunt tube 3, a plurality of through holes 30 are opened on the same side wall of the shunt tube 3, and at least two through holes 30 have the same opening direction. In this case, the amount of gas reaching the workpiece can be ensured, the gas utilization rate can be improved, and resources can be saved. Exemplarily, the opening directions of all the through holes are the same.

[0046] As a possible implementation, the diameter of the through hole is greater than or equal to 1.25 mm and less than or equal to 5 mm. For example, the diameter of the through hole can be 1.25 mm, 2 mm, 2.5 mm, 3 mm, 3.5 mm, 4 mm or 5 mm.

[0047] In the case of adopting the above technical solution, since the diameter of the through hole is greater than or equal to 1.25 mm, it is possible to avoid too small a gas flow rate due to too small a diameter of the through hole, so as to ensure that the actual work needs are met. Furthermore, since the diameter of the through hole is less than or equal to 5 mm, it is possible to avoid too large a gas flow rate, reduce gas consumption, and reduce drying costs while meeting the actual work needs.

[0048] As a possible implementation, the diameter of the shunt tube is greater than or equal to 15 mm and less than or equal to 20 mm. For example, the diameter of the shunt tube can be 15 mm, 17 mm, 18 mm, 19 mm or 20 mm.

[0049] In the case of adopting the above technical solution, since the diameter of the shunt pipe is greater than or equal to 15 mm, it can be avoided that the gas flow rate is too small due to the small diameter of the shunt pipe, so as to ensure that the actual work needs are met. Furthermore, since the diameter of the shunt pipe is less than or equal to 20 mm, the number of shunt pipes provided in the drying tank can be increased to increase the air volume blown to the workpiece, thereby further accelerating the drying speed of the workpiece while meeting the actual work needs.

[0050] As a possible implementation, the material of the drying tank is the same as that of the blowing assembly. In this case, it is possible to avoid the two different materials from influencing each other, which may result in substandard quality of the drying tank and the blowing assembly, and also to avoid contamination by the two different materials. Furthermore, the drying device can meet the process requirements and ensure its yield.

[0051] As a possible implementation, the drying tank is a polyvinylidene difluoride (PVDF) drying tank, and the blowing component is a polyvinylidene difluoride blowing component.

[0052] When the above technical solution is adopted, since polyvinylidene fluoride has the characteristics of acid and alkali resistance and high temperature resistance, the drying tank and blowing assembly made of polyvinylidene fluoride also have the above characteristics. At this time, not only can the drying tank and blowing assembly be prevented from deformation during actual use to ensure their quality and extend their service life, but also contamination of the workpiece can be avoided. Furthermore, the drying tank and blowing assembly can also be adapted to different application scenarios to expand their scope of application.

[0053] As a possible implementation, the above-mentioned shunt pipe is one or more of a straight shunt pipe, a serpentine shunt pipe, a spiral shunt pipe, and a U-shaped shunt pipe.

[0054] When the above technical solution is adopted, the shape of the shunt pipe can be set according to the shape of the workpiece or other influencing factors, and no specific limitation is made here. In this case, the blowing component can be adapted to different application scenarios and its application scope can be expanded.

[0055] The following description uses two possible situations as examples. It should be understood that the following description is only for understanding and is not intended to be a specific limitation.

[0056] Example 1: See Figure 1 When the blowing assembly 1 includes: a plurality of diverter pipes 3 and two opposite and spaced-apart air inlet pipes 2, the plurality of diverter pipes 3 are spaced-apart between the two air inlet pipes 2, and the diverter pipes 3 are connected to the two air inlet pipes 2, the diverter pipes are linear diverter pipes and / or serpentine diverter pipes.

[0057] Example 2: When the air blowing assembly includes only one diverter pipe, the diverter pipe is a spiral diverter pipe or a U-shaped diverter pipe.

[0058] As a possible implementation, the drying device further includes: a flow equalizer. The flow equalizer is arranged in the drying tank, between the bottom of the drying tank and the air blowing assembly, and the flow equalizer is parallel to the bottom of the drying tank. A plurality of flow equalizer holes are provided on the flow equalizer, and the flow equalizer holes penetrate the flow equalizer along the thickness direction of the flow equalizer.

[0059] When the above technical solution is adopted, in actual use, the air supply component is not only connected to the blowing component, but also provides gas to the drying tank. When the gas passes through the flow plate, the gas is dispersed under the shielding effect of the flow plate and the guiding effect of the flow hole, so as to avoid the gas being concentrated in one place. At this time, the workpiece can be evenly exposed to the wind to speed up the drying speed of the workpiece.

[0060] In an optional manner, along the depth direction of the drying tank, the flow-uniform holes are correspondingly connected to the through holes.

[0061] When the above technical solution is adopted, the gas diffused upward through the uniform flow holes is rapidly passed through the through holes on the diverter pipe to reach the workpiece, so as to accelerate the drying speed of the workpiece.

[0062] The multiple flow-uniform holes can be distributed in various ways, for example, in a triangular shape, in a U-shaped shape, in a matrix shape, etc. In an optional manner, the multiple flow-uniform holes are distributed in a matrix shape.

[0063] In a second aspect, the present invention also provides a drying device. Figure 3 The drying equipment includes an air supply component and the drying device described in the above technical solution, the air supply component is connected to the air inlet pipe 2 of the drying device, and is used to provide gas for the blowing component 1. The workpiece is a flower basket 4, and the flower basket 4 is used to carry silicon wafers.

[0064] See also Figure 3 In the embodiment of the utility model, two blowing components 1 and six flower baskets 4 are arranged in a drying tank.

[0065] See also Figure 3 Since the drying equipment includes the drying device described in the above technical solution, and since the opening direction of the through hole 30 provided on the shunt pipe 3 is toward the workpiece, when the gas is provided to the shunt pipe 3 by the air inlet pipe 2, the gas is blown toward the workpiece through the through hole 30. At this time, on the basis of drying the workpiece in the drying tank, the speed of removing water droplets on the workpiece can be accelerated, thereby accelerating the drying speed of the workpiece and reducing the time difference between the drying of the silicon wafer and the bottom rod 40 of the basket. Based on this, not only the drying efficiency can be improved, but also the quality of the cleaned silicon wafer can meet the requirements.

[0066] As a possible implementation, the flower basket 4 has a flower basket bottom rod 40. As for the specific structure of the flower basket, reference may be made to the prior art and no specific limitation is made herein.

[0067] See also Figure 2 and Figure 3 , the orthographic projection of the flower basket bottom rod 40 on the shunt tube 3 is completely located on the shunt tube 3, and because the opening direction of the through hole 30 is toward the workpiece. At this time, the through hole 30 can be used to guide the gas to the bottom of the flower basket 40 directly below, and blow the air at the position where the flower basket bottom rod 40 frequently carries liquid to speed up the drying speed. Or, the orthographic projection of the flower basket bottom rod 40 on the shunt tube 3 accounts for 30% to 50% of the side area of ​​the shunt tube 3, and the side of the shunt tube 3 faces the flower basket bottom rod 40. At this time, ensure that the gas can be blown onto the flower basket bottom rod 40 through the through hole 30. For example, the orthographic projection of the flower basket bottom rod 40 on the shunt tube 3 accounts for 30%, 35%, 40%, 45% or 50% of the side area of ​​the shunt tube 3, etc.

[0068] As a possible implementation, the diameter of the shunt pipe is greater than or equal to the diameter of the bottom rod of the flower basket.

[0069] As a possible implementation, see Figure 2 The air inlet pipe 2 of the drying device can be directly connected to the air supply member, or can be connected through a pipe 5 in the drying tank that is connected to the air supply member.

[0070] In the description of the above embodiments, specific features, structures, materials or characteristics may be combined in a suitable manner in any one or more embodiments or examples.

[0071] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A drying device, characterized in that: include: A drying tank, used for accommodating workpieces and drying the workpieces; An air blowing assembly is located between the bottom of the drying tank and the workpiece; The blowing assembly comprises: An air inlet pipe, used for introducing gas; A shunt pipe, one end of which is disposed between the two ends of the air inlet pipe, and the shunt pipe is in communication with the air inlet pipe; a through hole is provided on the shunt pipe; the opening direction of the through hole is toward the workpiece, and is used to discharge the gas to dry the workpiece; The drying device also includes: A flow equalizer plate is arranged in the drying tank and is located between the bottom of the drying tank and the blowing assembly; the flow equalizer plate is parallel to the bottom of the drying tank; a plurality of flow equalizer holes are opened on the flow equalizer plate, and the flow equalizer holes penetrate the flow equalizer plate along the thickness direction of the flow equalizer plate.

2. The drying device according to claim 1, characterized in that: The blowing assembly comprises: Two intake pipes arranged opposite to each other and spaced apart; The plurality of diverter pipes are arranged at intervals between the two air inlet pipes; the diverter pipes are communicated with the two air inlet pipes.

3. The drying device according to claim 1 or 2, characterized in that: Along the length direction of the shunt tube, a plurality of through holes are opened on the same side wall of the shunt tube, and the opening directions of at least two of the through holes are the same.

4. The drying device according to claim 1 or 2, characterized in that: The diameter of the through hole is greater than or equal to 1.25 mm and less than or equal to 5 mm; The diameter of the shunt pipe is greater than or equal to 15 mm and less than or equal to 20 mm.

5. The drying device according to claim 1, characterized in that: The material of the drying tank is the same as that of the blowing component.

6. The drying device according to claim 1, characterized in that: The shunt pipe is one or more of a linear shunt pipe, a serpentine shunt pipe, a spiral shunt pipe, and a U-shaped shunt pipe.

7. The drying device according to claim 1, characterized in that: Along the depth direction of the drying tank, the flow-uniform holes are correspondingly communicated with the through holes.

8. A drying device, characterized in that: It comprises an air supply member and a drying device according to any one of claims 1 to 7; The air supply member is in communication with the air inlet pipe of the drying device and is used to provide gas to the blowing assembly; The workpiece is a flower basket, and the flower basket is used to carry silicon wafers.

9. The drying device according to claim 8, characterized in that: The flower basket comprises a flower basket bottom rod; The orthographic projection of the flower basket bottom bar on the shunt tube is completely located on the shunt tube; or, the orthographic projection of the flower basket bottom bar on the shunt tube occupies 30% to 50% of the side area of ​​the shunt tube, and the side of the shunt tube faces the flower basket bottom bar.

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